DE102015209827B4

DE102015209827B4 - Imaging optics for imaging an object field in an image field, optical system and projection exposure apparatus with such an imaging optics

Info

Publication number: DE102015209827B4
Application number: DE102015209827.3A
Authority: DE
Inventors: Markus Schwab
Original assignee: Carl Zeiss SMT GmbH
Current assignee: Carl Zeiss SMT GmbH
Priority date: 2015-05-28
Filing date: 2015-05-28
Publication date: 2019-06-06
Anticipated expiration: 2035-05-29
Also published as: DE102015209827A1

Abstract

Abbildende Optik (7; 20; 25; 26) für die Projektionslithographie
- mit einer Mehrzahl von Spiegeln (M1 bis M10) zur Abbildung eines Objektfeldes (4) in einer Objektebene (5) in ein Bildfeld (8) in einer Bildebene (9) mit längs eines Abbildungs-Strahlengangs zwischen dem Objektfeld (4) und dem Bildfeld (8) geführtem Abbildungslicht (3),
- mit einem im Strahlengang vorletzten Spiegel (M9) ohne Durchtrittsöffnung zum Durchtritt des Abbildungslichts (3),
- mit genau einer Blende (AS) zur Vorgabe zumindest eines Abschnitts (18) einer äußeren Randkontur (19; 24) einer Pupille der abbildenden Optik (7; 20; 25; 26),
- wobei die Blende (AS) räumlich zwischen dem im Strahlengang vorletzten Spiegel (M9) und einem im Strahlengang letzten Spiegel (M10) angeordnet ist.

Imaging optics (7; 20; 25; 26) for projection lithography
- With a plurality of mirrors (M1 to M10) for imaging an object field (4) in an object plane (5) in an image field (8) in an image plane (9) along an imaging beam path between the object field (4) and the Image field (8) guided imaging light (3),
with a penultimate in the beam path mirror (M9) without passage opening for the passage of the imaging light (3),
- With exactly one aperture (AS) for specifying at least a portion (18) of an outer edge contour (19; 24) of a pupil of the imaging optics (7; 20; 25; 26),
- Wherein the diaphragm (AS) is arranged spatially between the penultimate in the beam path mirror (M9) and one in the beam path last mirror (M10).

Description

Die Erfindung betrifft eine abbildende Optik zur Abbildung eines Objektfeldes in ein Bildfeld. Ferner betrifft die Erfindung ein optisches System mit einer derartigen abbildenden Optik, eine Projektionsbelichtungsanlage mit einem derartigen optischen System, ein Verfahren zur Herstellung eines mikro- beziehungsweise nanostrukturierten Bauteils mit einer derartigen Projektionsbelichtungsanlage sowie ein mit diesem Verfahren hergestelltes mikro- beziehungsweise nanostrukturiertes Bauelement.The invention relates to an imaging optics for imaging an object field in an image field. Furthermore, the invention relates to an optical system having such an imaging optical system, a projection exposure apparatus with such an optical system, a method for producing a microstructured or nanostructured component with such a projection exposure apparatus, and a microstructured or nanostructured component produced by this method.

Projektionsoptiken der eingangs genannten Art sind bekannt aus der DE 10 2012 212 753 A 1, aus der US 2010/0149509 A 1 und aus der US 4,964,706 A sowie aus der US 2011 / 0090 559 A1 .Projection optics of the type mentioned are known from the DE 10 2012 212 753 A 1, from the US 2010/0149509 A 1 and from the US 4,964,706 A as well as from the US 2011/0090 559 A1 ,

Es ist eine Aufgabe der vorliegenden Erfindung, eine abbildende Optik der eingangs genannten Art derart weiterzubilden, dass eine hinsichtlich ihrer Pupille gut definierte und für die Projektionslithographie optimierte abbildende Optik resultiert.It is an object of the present invention to further develop an imaging optics of the type mentioned at the beginning in such a way that an imaging optics which is well-defined with regard to its pupil and optimized for projection lithography results.

Diese Aufgabe ist erfindungsgemäß gelöst nach einem ersten Aspekt durch eine abbildende Optik mit den im Anspruch 1 angegebenen Merkmalen und nach einem zweiten Aspekt durch eine abbildende Optik mit den im Anspruch 8 angegebenen Merkmalen.This object is achieved according to a first aspect by an imaging optics having the features specified in claim 1 and according to a second aspect by an imaging optics with the features specified in claim 8.

Erfindungsgemäß wurde erkannt, dass ein Bauraum zwischen dem im Strahlengang vorletzten Spiegel und dem im Strahlengang letzten Spiegel trotz der Tatsache, dass sich dort mehrere Abbildungslicht-Teilbündel durchdringen, zur Anordnung einer pupillendefinierenden Blende geeignet ist. Dabei wird der Umstand ausgenutzt, dass eines der sich im Bauraum zwischen dem vorletzten und dem letzten Spiegel durchdringenden Abbildungslicht-Teilbündel hinsichtlich seines Durchmessers in der Regel deutlich größer ist, als die anderen Abbildungslicht-Teilbündel, sodass dort eine randseitige Begrenzung jedenfalls eines äußeren Randkontur-Abschnitts der Pupille der abbildenden Optik möglich ist. Die abbildende Optik kann genau ein Objektfeld und kann genau ein Bildfeld aufweisen. Die abbildende Optik kann eine Eintrittspupille aufweisen, die im Strahlengang von Beleuchtungs- und Abbildungslicht vor dem Objektfeld angeordnet ist. Die abbildende Optik kann entsprechend eine negative Eingangsschnittweite beziehungsweise eine negative Eingangspupillenlage haben. Bei derartigen abbildenden Optiken hat sich die Anordnung einer Blende räumlich zwischen den beiden im Strahlengang letzten Spiegeln als besonders geeignet herausgestellt. Es lässt sich dann eine gut korrigierte abbildende Optik mit hoher bildseitiger numerischer Apertur realisieren. Die Blende kann einen abgeknickten Verlauf haben. Die abbildende Optik kann mindestens einen GI-Spiegel aufweisen, also einen Spiegel für streifenden Einfall mit einem Einfallswinkel, der größer ist als 45°. Der Einfallswinkel auf dem GI-Spiegel kann größer sein als 50°, kann größer sein als 55°, kann größer sein als 60°, kann größer sein als 65°, kann größer sein als 70°, kann größer sein als 75° und kann größer sein als 80°.According to the invention, it has been recognized that an installation space between the last-to-last mirror in the beam path and the last mirror in the beam path is suitable for arranging a pupil-defining diaphragm despite the fact that several imaging light sub-beams penetrate there. The fact is exploited that one of the in the space between the penultimate and the last mirror penetrating imaging light sub-beam is usually much larger in diameter than the other imaging light sub-beams, so there is an edge boundary in any case an outer edge contour. Section of the pupil of the imaging optics is possible. The imaging optics can be exactly one object field and can have exactly one image field. The imaging optics can have an entrance pupil, which is arranged in front of the object field in the beam path of illuminating and imaging light. The imaging optics can accordingly have a negative input slice width and a negative input pupil slice, respectively. In such imaging optics, the arrangement of a diaphragm spatially between the two last in the beam path has been found to be particularly suitable. It can then realize a well-corrected imaging optics with high image-side numerical aperture. The aperture may have a bent course. The imaging optics can have at least one GI mirror, that is to say a grazing incidence mirror with an angle of incidence which is greater than 45 °. The angle of incidence on the GI mirror can be greater than 50 °, greater than 55 °, greater than 60 °, greater than 65 °, greater than 70 °, greater than 75 °, and greater than 80 °.

Bei einer abbildenden Optik nach Anspruch 2 kommt die erfindungsgemäße Blendenanordnung ebenfalls besonders gut zum Tragen. Die Blende kann dann zusätzlich als Obskurationsblende dienen, also eine Obskuration der Pupille vorgeben.In an imaging optical system according to claim 2, the diaphragm arrangement according to the invention also comes particularly well to bear. In addition, the diaphragm can then serve as an obscuration diaphragm, ie pretend obscuration of the pupil.

Eine azimutale Abdeckung nach Anspruch 3 führt dazu, dass, falls überhaupt, nur ein kleiner, nicht durch die Blende vorgegebener Pupillen-Azimutbereich verbleibt. Der durch die Blende vorgegebene Azimutbereich kann 200°, 220°, 240° betragen oder noch größer sein. Im Extremfall beträgt der Azimutbereich 360°. In diesem Fall begrenzt die Blende die Pupillenrandkontur vollumfänglich.An azimuthal cover according to claim 3 results in that, if at all, only a small pupil-azimuth range, not given by the diaphragm, remains. The azimuth range given by the diaphragm can be 200 °, 220 °, 240 ° or even greater. In extreme cases, the azimuth range is 360 °. In this case, the aperture limits the pupil edge contour completely.

Genau eine Blende nach Anspruch 4 führt zu einem kompakten Aufbau. Die genau eine Blende kann plan, also in genau einer Ebene liegend, ausgeführt sein.Exactly one panel according to claim 4 leads to a compact construction. The exactly one aperture can be flat, ie lying in exactly one plane.

Eine zumindest abschnittsweise plan ausgeführte Blende nach Anspruch 5 ist konstruktiv wenig aufwändig. Die Blende kann insgesamt plan ausgeführt sein. Eine Anordnungsebene der Blende, die durch den zumindest abschnittsweisen planen Blendenverlauf vorgegeben ist, kann gegenüber der Objektebene und/oder gegenüber der Bildebene verkippt sein.An at least partially planar designed aperture according to claim 5 is structurally less expensive. The aperture can be made overall plan. An arrangement plane of the diaphragm, which is predetermined by the at least partially planar diaphragm course, can be tilted with respect to the object plane and / or with respect to the image plane.

Ein 3D-Randkontur der Blende nach Anspruch 6 erlaubt eine besonders präzise Pupillenvorgabe. Beim Design der abbildenden Optik muss dann nicht so sehr auf die Blende geachtet werden.A 3D edge contour of the diaphragm according to claim 6 allows a particularly precise pupil specification. The design of the imaging optics does not have to pay much attention to the aperture.

Eine Randkontur-Begrenzung nach Anspruch 7 erhöht die Freiheitsgrade beim Blendendesign. Die Blende kann einen abgeknickten Verlauf haben und hierüber beispielsweise zwei, drei oder noch mehr Begrenzungsebenen definieren.An edge contour boundary according to claim 7 increases the degrees of freedom in the diaphragm design. The aperture can have a bent course and define, for example, two, three or even more limiting levels.

Die Vorteile der abbildenden Optik gemäß dem zweiten Aspekt nach Anspruch 8 entsprechen denen, die vorstehend unter Bezugnahme auf die abbildende Optik gemäß dem ersten Aspekt mit zusätzlich negativer Eingangsschnittweite bereits erläutert wurden. Ein gegebenenfalls vorliegender, nicht durch die räumlich zwischen den im Strahlengang vorletzten Spiegel und dem im Strahlengang letzten Spiegel angeordnete Blende vorgegebener Pupillen-Azimut-Bereich kann mit Hilfe weiterer Blenden korrigiert werden. Soweit mindestens eine weitere Blende vorgesehen ist, kann diese beispielsweise auf dem im Strahlengang letzten Spiegel oder auf dem im Strahlengang vorletzten Spiegel angeordnet sein. Auch eine Anordnung der mindestens einen weiteren Blende an einem anderen Ort, beispielsweise im Strahlengang vor dem vorletzten Spiegel ist möglich, zum Beispiel auf einem anderen der Spiegel oder im Bereich anderer Abbildungslicht-Teilbündel. The advantages of the imaging optics according to the second aspect of claim 8 correspond to those which have already been explained above with reference to the imaging optics according to the first aspect with additional negative input incision. An optionally present, not by the spatially between the in the beam path penultimate mirror and arranged in the beam path last mirror aperture predetermined pupil-azimuth range can be corrected with the help of other apertures. Insofar as at least one further diaphragm is provided, it can be arranged, for example, on the last mirror in the beam path or on the mirror which is the penultimate in the beam path. An arrangement of the at least one further diaphragm at another location, for example in the beam path in front of the penultimate mirror, is also possible, for example on another of the mirrors or in the region of other imaging light partial beams.

Die Merkmale der abbildenden Optik gemäß den beiden Aspekten können miteinander kombiniert werden.The features of the imaging optics according to the two aspects can be combined with each other.

Die Vorteile eines optischen Systems nach Anspruch 9 entsprechen denen, die vorstehend unter Bezugnahme auf die erfindungsgemäße abbildende Optik bereits erläutert wurden. Die Vorteile eines optischen Systems nach Anspruch 10 entsprechen insbesondere denjenigen, die vorstehend unter Bezugnahme auf die abbildende Optik nach Anspruch 3 bereits erläutert wurden.The advantages of an optical system according to claim 9 correspond to those which have already been explained above with reference to the imaging optics according to the invention. The advantages of an optical system according to claim 10 correspond in particular to those which have already been explained above with reference to the imaging optical system according to claim 3.

Die Vorteile einer Projektionsbelichtungsanlage nach Anspruch 11, eines Herstellungsverfahrens nach Anspruch 12 sowie eines mikro- beziehungsweise nanostrukturierten Bauteils nach Anspruch 13 entsprechen denen, die vorstehend unter Bezugnahme auf die Projektionsoptik und das optische System und die Projektionsbelichtungsanlage bereits erläutert wurden.The advantages of a projection exposure apparatus according to claim 11, a production method according to claim 12 and a micro- or nanostructured component according to claim 13 correspond to those which have already been explained above with reference to the projection optics and the optical system and the projection exposure apparatus.

Hergestellt werden kann mit der Projektionsbelichtungsanlage insbesondere ein Halbleiter-Bauteil, beispielsweise ein Speicherchip.In particular, a semiconductor component, for example a memory chip, can be produced with the projection exposure apparatus.

Ausführungsbeispiele der Erfindung werden nachfolgend anhand der Zeichnung näher erläutert. In dieser zeigen:

1 schematisch eine Projektionsbelichtungsanlage für die EUV-Mikrolithographie;
2 in einem Meridionalschnitt eine Ausführung einer abbildenden Optik, die als Projektionsobjektiv in der Projektionsbelichtungsanlage nach 1 einsetzbar ist, wobei ein Abbildungsstrahlengang für Hauptstrahlen und für einen oberen und einen unteren Komastrahl mehrerer ausgewählter Feldpunkte dargestellt ist;
3 perspektivisch einen Ausschnitt der abbildenden Optik nach 2, wobei der Abbildungsstrahlengang mit zusätzlichen Einzelstrahlen des Abbildungslichts verdeutlicht ist, im Bereich eines im Abbildungsstrahlengang vor einem Bildfeld vorletzten und eines letzten Spiegels;
4 einen Schnitt gemäß Ebene IV in 3, wobei Einhüllende von Abbildungslicht-Teilbündeln im Strahlengang einerseits zwischen dem vorletzten Spiegel und andererseits zwischen dem letzten Spiegel und dem Bildfeld dargestellt sind;
5 eine Ansicht der abbildenden Optik nach 2, gesehen aus Blickrichtung V in 2;
5A in einer Aufsicht Randkonturen von auf den Spiegeln der abbildenden Optik nach 2 jeweils mit dem Abbildungslicht beaufschlagten Reflexionsflächen;
6 bis 9 zu den 2 bis 5 ähnliche Darstellungen einer weiteren Ausführung einer abbildenden Optik, einsetzbar als Projektionsobjektiv in der Projektionsbelichtungsanlage nach 1;
10 bis 12 zu den 2, 3 und 5 ähnliche Darstellungen einer weiteren Ausführung einer abbildenden Optik, einsetzbar als Projektionsobjektiv in der Projektionsbelichtungsanlage nach 1; und
13 bis 15 zu den 2, 3 und 5 ähnliche Darstellungen einer weiteren Ausführung einer abbildenden Optik, einsetzbar als Projektionsobjektiv in der Projektionsbelichtungsanlage nach 1.

Embodiments of the invention will be explained in more detail with reference to the drawing. In this show:

1 schematically a projection exposure system for EUV microlithography;
2 in a meridional section, an embodiment of an imaging optic, which follows as a projection objective in the projection exposure apparatus 1 can be used, wherein an imaging beam path for main beams and for an upper and a lower Komastrahl several selected field points is shown;
3 in perspective, a section of the imaging optics 2 , wherein the imaging beam path is illustrated with additional individual beams of the imaging light, in the region of a penultimate in the imaging beam path in front of an image field and a last mirror;
4 a section according to level IV in 3 wherein envelopes of imaging light sub-beams are shown in the beam path on the one hand between the penultimate mirror and on the other hand between the last mirror and the field of view;
5 a view of the imaging optics behind 2 , seen from view V in 2 ;
5A in a planter contours of on the mirrors of the imaging optics 2 each with the imaging light acted upon reflection surfaces;
6 to 9 to the 2 to 5 Similar representations of another embodiment of an imaging optics, can be used as a projection lens in the projection exposure system according to 1 ;
10 to 12 to the 2 . 3 and 5 Similar representations of another embodiment of an imaging optics, can be used as a projection lens in the projection exposure system according to 1 ; and
13 to 15 to the 2 . 3 and 5 Similar representations of another embodiment of an imaging optics, can be used as a projection lens in the projection exposure system according to 1 ,

Eine Projektionsbelichtungsanlage 1 für die Mikrolithographie hat eine Lichtquelle 2 für Beleuchtungslicht beziehungsweise Abbildungslicht 3. Bei der Lichtquelle 2 handelt es sich um eine EUV-Lichtquelle, die Licht in einem Wellenlängenbereich beispielsweise zwischen 5 nm und 30 nm, insbesondere zwischen 5 nm und 15 nm, erzeugt. Bei der Lichtquelle 2 kann es sich insbesondere um eine Lichtquelle mit einer Wellenlänge von 13,5 nm oder um eine Lichtquelle mit einer Wellenlänge von 6,9 nm handeln. Auch andere EUV-Wellenlängen sind möglich. Generell sind sogar beliebige Wellenlängen, zum Beispiel sichtbare Wellenlängen oder auch andere Wellenlängen, die in der Mikrolithographie Verwendung finden können (zum Beispiel DUV, tiefes Ultraviolett) und für die geeigneten Laserlichtquellen und/oder LED-Lichtquellen zur Verfügung stehen (beispielsweise 365 nm, 248 nm, 193 nm, 157 nm, 129 nm, 109 nm), für das in der Projektionsbelichtungsanlage 1 geführte Beleuchtungslicht 3 möglich. Ein Strahlengang des Beleuchtungslichts 3 ist in der 1 äußerst schematisch dargestellt.A projection exposure machine 1 for microlithography has a light source 2 for illumination light or imaging light 3 , At the light source 2 it is an EUV light source that generates light in a wavelength range, for example between 5 nm and 30 nm, in particular between 5 nm and 15 nm. At the light source 2 it may in particular be a light source with a wavelength of 13.5 nm or a light source with a wavelength of 6.9 nm. Other EUV wavelengths are possible. In general, even arbitrary wavelengths, for example visible wavelengths or also other wavelengths which can be used in microlithography (for example DUV, deep ultraviolet) and available for the appropriate laser light sources and / or LED light sources (for example 365 nm, 248 nm, 193 nm, 157 nm, 129 nm, 109 nm) for the in the projection exposure apparatus 1 led lighting light 3 possible. A beam path of the illumination light 3 is in the 1 shown very schematically.

Zur Führung des Beleuchtungslichts 3 von der Lichtquelle 2 hin zu einem Objektfeld 4 in einer Objektebene 5 dient eine Beleuchtungsoptik 6. Mit einer Projektionsoptik beziehungsweise abbildenden Optik 7 wird das Objektfeld 4 in ein Bildfeld 8 in einer Bildebene 9 mit einem vorgegebenen Verkleinerungsmaßstab abgebildet. Die Projektionsoptik 7 hat genau ein Objektfeld 4. Die Projektionsoptik 7 hat genau ein Bildfeld 8.For guiding the illumination light 3 from the light source 2 towards an object field 4 in an object plane 5 serves a lighting optics 6 , With a projection optics or imaging optics 7 becomes the object field 4 in a picture field 8th in an image plane 9 mapped with a given reduction scale. The projection optics 7 has exactly one object field 4 , The projection optics 7 has exactly one image field 8th ,

Zur Erleichterung der Beschreibung der Projektionsbelichtungsanlage 1 sowie der verschiedenen Ausführungen der Projektionsoptik 7 ist in der Zeichnung ein kartesisches x y z-Koordinatensystem angegeben, aus dem sich die jeweilige Lagebeziehung der in den Figuren dargestellten Komponenten ergibt. In der 1 verläuft die x-Richtung senkrecht zur Zeichenebene in diese hinein. Die y-Richtung verläuft nach links und die z-Richtung nach oben.To facilitate the description of the projection exposure apparatus 1 as well as the different versions of the projection optics 7 is a Cartesian in the drawing x y z Coordinate system indicated, from which the respective positional relationship of the components shown in the figures results. In the 1 runs the x Direction perpendicular to the plane of the drawing. The y Direction runs to the left and the z direction to the top.

Das Objektfeld 4 und das Bildfeld 8 sind rechteckförmig. Alternativ ist es auch möglich, das Objektfeld 4 und Bildfeld 8 gebogen beziehungsweise gekrümmt, also insbesondere teilringförmig auszuführen. Das Objektfeld 4 und das Bildfeld 8 haben ein x y-Aspektverhältnis größer als 1. Das Objektfeld 4 hat also eine längere Objektfelddimension in der x-Richtung und eine kürzere Objektfelddimension in der y-Richtung. Diese Objektfelddimensionen verlaufen längs der Feldkoordinaten x und y.The object field 4 and the picture box 8th are rectangular. Alternatively, it is also possible to use the object field 4 and picture box 8th curved or curved, so in particular perform part-ring. The object field 4 and the picture box 8th have a x y Aspect ratio greater than 1. The object field 4 So has a longer object field dimension in the x Direction and a shorter object field dimension in the y -Direction. These object field dimensions run along the field coordinates x and y ,

Für die Projektionsoptik 7 kann eines der in den Figuren 2ff. dargestellten Ausführungsbeispiele eingesetzt werden. Die Projektionsoptik 7 ist anamorphotisch, hat also in der x-Richtung (Verkleinerungsmaßstab in der x z-Ebene) einen anderen Verkleinerungsmaßstab als in der y-Richtung (Verkleinerungsmaßstab in der y z-Ebene). In der x-Richtung hat die Projektionsoptik 7 einen Verkleinerungsmaßstab von 4. In der y-Richtung hat die Projektionsoptik 7 einen Verkleinerungsmaßstab von 8. Auch andere Verkleinerungsmaßstäbe für die Verkleinerung in der x-Richtung beziehungsweise für die Verkleinerung in der y-Richtung sind möglich, zum Beispiel 4x, 5x oder auch Verkleinerungsmaßstäbe, die größer sind als 8x. Auch eine Ausführung der Projektionsoptik 7 mit gleichen derartigen Verkleinerungsmaßstäben einerseits in der x z-Ebene und andererseits in der y z-Ebene ist möglich.For the projection optics 7 can one of the in Figs. 2ff. illustrated embodiments are used. The projection optics 7 is anamorphic, so has in the x Direction (reduction scale in the x z Level) a different reduction scale than in the y Direction (reduction scale in the y z -Level). In the x Direction has the projection optics 7 a reduction scale of 4 , In the y-direction has the projection optics 7 A reduction scale of 8. Also other reduction criteria for the reduction in the x-direction or for the reduction in the y Direction are possible, for example, 4x, 5x or even reduction scales that are larger than 8x. Also a version of the projection optics 7 with same such reduction scales on the one hand in the x z Level and on the other hand in the y z Level is possible.

Die Bildebene 9 ist bei der Projektionsoptik 7 parallel zur Objektebene 5 angeordnet. Abgebildet wird hierbei ein mit dem Objektfeld 4 zusammenfallender Ausschnitt einer Reflexionsmaske 10, die auch als Retikel bezeichnet wird. Das Retikel 10 wird von einem Retikelhalter 10a getragen. Der Retikelhalter 10a wird von einem Retikelverlagerungsantrieb 10b verlagert.The picture plane 9 is in the projection optics 7 parallel to the object plane 5 arranged. Here, one is shown with the object field 4 coincident section of a reflection mask 10 , which is also called reticle. The reticle 10 is from a reticle holder 10a carried. The reticle holder 10a is powered by a reticle displacement drive 10b relocated.

Die Abbildung durch die Projektionsoptik 7 erfolgt auf die Oberfläche eines Substrats 11 in Form eines Wafers, der von einem Substrathalter 12 getragen wird. Der Substrathalter 12 wird von einem Wafer- beziehungsweise Substratverlagerungsantrieb 12a verlagert.The picture through the projection optics 7 takes place on the surface of a substrate 11 in the form of a wafer made by a substrate holder 12 will be carried. The substrate holder 12 is from a wafer or substrate displacement drive 12a relocated.

In der 1 ist schematisch zwischen dem Retikel 10 und der Projektionsoptik 7 ein in diese einlaufendes Strahlenbündel 13 des Beleuchtungslichts 3 und zwischen der Projektionsoptik 7 und dem Substrat 11 ein aus der Projektionsoptik 7 auslaufendes Strahlenbündel 14 des Beleuchtungslichts 3 dargestellt. Eine bildfeldseitige numerische Apertur (NA) der Projektionsoptik 7 ist in der 1 nicht maßstäblich wiedergegeben.In the 1 is schematically between the reticle 10 and the projection optics 7 an incoming into this bundle of rays 13 of the illumination light 3 and between the projection optics 7 and the substrate 11 one from the projection optics 7 leaking radiation beam 14 of the illumination light 3 shown. An image field-side numerical aperture (NA) of the projection optics 7 is in the 1 not reproduced to scale.

Die Projektionsbelichtungsanlage 1 ist vom Scannertyp. Sowohl das Retikel 10 als auch das Substrat 11 werden beim Betrieb der Projektionsbelichtungsanlage 1 in der y-Richtung gescannt. Auch ein Steppertyp der Projektionsbelichtungsanlage 1, bei dem zwischen einzelnen Belichtungen des Substrats 11 eine schrittweise Verlagerung des Retikels 10 und des Substrats 11 in der y-Richtung erfolgt, ist möglich. Diese Verlagerungen erfolgen synchronisiert zueinander durch entsprechende Ansteuerung der Verlagerungsantriebe 10b und 12a.The projection exposure machine 1 is the scanner type. Both the reticle 10 as well as the substrate 11 be during operation of the projection exposure system 1 in the y Direction scanned. Also a stepper type of the projection exposure system 1 in which between individual exposures of the substrate 11 a gradual shift of the reticle 10 and the substrate 11 in the y Direction is possible. These displacements are synchronized with each other by appropriate control of the displacement drives 10b and 12a ,

2 zeigt das optische Design einer ersten Ausführung der Projektionsoptik 7. Dargestellt ist in der 2 der Strahlengang jeweils dreier Einzelstrahlen 15, die von mehreren in der 2 zueinander in der y-Richtung beabstandeten Objektfeldpunkten ausgehen. Dargestellt sind Hauptstrahlen 16, also Einzelstrahlen 15, die durch das Zentrum einer Pupille in einer Pupillenebene der Projektionsoptik 7 verlaufen, sowie jeweils ein oberer und ein unterer Komastrahl dieser beiden Objektfeldpunkte. Ausgehend vom Objektfeld 4 schließt der Hauptstrahl 16 eines zentralen Objektfeldpunktes mit einer Normalen auf die Objektebene 5 einen Winkel CRAO von 5,5° ein. 2 shows the optical design of a first embodiment of the projection optics 7 , Shown in the 2 the beam path in each case three individual beams 15 by several in the 2 to each other in the y Direction of spaced object field points. Shown are main rays 16 , so individual rays 15 passing through the center of a pupil in a pupil plane of the projection optics 7 run, and in each case an upper and a lower coma beam of these two object field points. Starting from the object field 4 closes the main beam 16 a central object field point with a normal to the object plane 5 an angle CRAO of 5.5 °.

Die Projektionsoptik 7 hat eine bildseitige numerische Apertur von 0,55. The projection optics 7 has a picture-side numerical aperture of 0.55.

Eine Eintrittspupille EP ist im Strahlengang des Abbildungslichts 3 vor dem Objektfeld 4 angeordnet. Mögliche Positionen der Eintrittspupille EP bei Verwendung eines das Abbildungslicht 3 durchlassenden Retikels 10 oberhalb der Objektebene 5 und bei Verwendung eines reflektierenden Retikels 10 unterhalb der Objektebene 5 sind in der 2 jeweils angedeutet. Es resultiert ein divergenter Verlauf der Hauptstrahlen 16 zwischen dem Objektfeld 4 und dem Spiegel M1.An entrance pupil EP is in the beam path of the imaging light 3 in front of the object field 4 arranged. Possible positions of the entrance pupil EP using a picture light 3 passing reticle 10 above the object plane 5 and when using a reflective reticle 10 below the object plane 5 are in the 2 respectively indicated. This results in a divergent course of the main rays 16 between the object field 4 and the mirror M1 ,

Die Projektionsoptik 7 nach 2 hat insgesamt zehn Spiegel, die in der Reihenfolge des Strahlengangs der Einzelstrahlen 15, ausgehend vom Objektfeld 4, mit M1 bis M10 durchnummeriert sind. Die Projektionsoptik 7 ist eine rein katoptrische Optik. Die abbildende Optik 7 kann auch eine andere Spiegelanzahl haben, beispielsweise vier Spiegel, sechs Spiegel oder acht Spiegel. Auch eine ungeradzahlige Spiegelanzahl ist bei der Projektionsoptik 7 möglich.The projection optics 7 to 2 has a total of ten mirrors, in the order of the beam path of the individual beams 15 , starting from the object field 4 , With M1 to M10 are numbered. The projection optics 7 is a purely catoptric look. The imaging optics 7 can also have a different number of mirrors, for example four mirrors, six mirrors or eight mirrors. Even an odd number of mirrors is in the projection optics 7 possible.

Dargestellt sind in der 2 die berechneten Reflexionsflächen der Spiegel M1 bis M10. Genutzt wird, wie in der Darstellung nach 2 ersichtlich ist, nur ein Teilbereich dieser berechneten Reflexionsflächen. Lediglich dieser tatsächlich genutzte Bereich der Reflexionsflächen ist bei den realen Spiegeln M1 bis M10 tatsächlich vorhanden. Diese Nutz-Reflexionsflächen werden in bekannter Weise von nicht dargestellten Spiegelkörpern getragen.Shown in the 2 the calculated reflection surfaces of the mirrors M1 to M10 , Is used, as shown in the illustration 2 it can be seen, only a portion of these calculated reflection surfaces. Only this actually used area of the reflection surfaces is at the real mirrors M1 to M10 actually present. This useful reflection surfaces are supported in a known manner by mirror bodies, not shown.

Bei der Projektionsoptik 7 nach 2 sind die Spiegel M1, M9 und M10 als Spiegel für normalen Einfall ausgeführt, also als Spiegel, auf die das Abbildungslicht 3 mit einem Einfallswinkel trifft, der kleiner ist als 45°. Insgesamt hat die Projektionsoptik 7 nach 2 also drei Spiegel M1, M9 und M10 für normalen Einfall. Diese Spiegel werden nachfolgend auch als NI-Spiegel bezeichnet.In the projection optics 7 to 2 are the mirrors M1 . M9 and M10 designed as a mirror for normal incidence, so as a mirror to which the imaging light 3 with an angle of incidence less than 45 °. Overall, the projection optics 7 to 2 So three mirrors M1 . M9 and M10 for normal idea. These mirrors are also referred to below as NI mirrors.

Die Spiegel M2 bis M8 sind Spiegel für streifenden Einfall des Beleuchtungslichts 3, also Spiegel, auf die das Beleuchtungslicht 3 mit Einfallswinkeln auftritt, die größer sind als 60°. Ein typischer Einfallswinkel der Einzelstrahlen 15 des Abbildungslichts 3 auf den Spiegeln M2 bis M8 für streifenden Einfall liegt im Bereich von 80°. Insgesamt hat die Projektionsoptik 7 nach 2 genau sieben Spiegel M2 bis M8 für streifenden Einfall. Diese Spiegel werden nachfolgend auch als GI-Spiegel bezeichnet.The mirror M2 to M8 are mirrors for grazing incidence of the illumination light 3 , ie mirrors, on which the illumination light 3 with angles of incidence greater than 60 °. A typical angle of incidence of individual rays 15 of picture light 3 on the mirrors M2 to M8 for grazing incidence is in the range of 80 °. Overall, the projection optics 7 to 2 exactly seven mirrors M2 to M8 for grazing incidence. These mirrors are also referred to below as GI mirrors.

Die Spiegel M2 bis M8 reflektieren das Abbildungslicht 3 so, dass sich die Ausfallswinkel der Einzelstrahlen 15 auf den jeweiligen Spiegeln M2 bis M8 addieren.The mirror M2 to M8 reflect the picture light 3 so that the angles of failure of the individual rays 15 on the respective mirrors M2 to M8 add.

Die Spiegel M1 bis M10 tragen eine die Reflektivität der Spiegel M1 bis M10 für das Abbildungslicht 3 optimierende Beschichtung. Hierbei kann es sich, insbesondere für die GI-Spiegel, um eine Ruthenium-Beschichtung, um eine Molybdän-Beschichtung oder um eine Molybdän-Beschichtung mit einer obersten Schicht aus Ruthenium handeln. Auch andere Beschichtungsmaterialien können zum Einsatz kommen. Bei den Spiegeln M2 bis M8 für streifenden Einfall kann eine Beschichtung mit beispielsweise einer Lage aus Molybdän oder Ruthenium zum Einsatz kommen. Die hoch reflektierenden Schichten insbesondere der Spiegel M1, M9 und M10 für normalen Einfall können als Mehrlagen-Schichten ausgeführt sein, wobei aufeinanderfolgende Schichten aus unterschiedlichen Materialien gefertigt sein können. Auch alternierende Materialschichten können zum Einsatz kommen. Eine typische Mehrlagenschicht kann fünfzig Bilagen aus jeweils einer Schicht Molybdän und einer Schicht Silizium aufweisen.The mirror M1 to M10 carry the reflectivity of the mirror M1 to M10 for the picture light 3 optimizing coating. These may be, in particular for the GI mirrors, a ruthenium coating, a molybdenum coating or a molybdenum coating with a topmost layer of ruthenium. Other coating materials can also be used. At the mirrors M2 to M8 for grazing incidence, a coating with, for example, a layer of molybdenum or ruthenium can be used. The highly reflective layers, in particular the mirrors M1 . M9 and M10 for normal incidence may be designed as multi-layer layers, wherein successive layers may be made of different materials. Alternate layers of material can also be used. A typical multi-layer layer may comprise fifty bilayers each of one layer of molybdenum and one layer of silicon.

Informationen zur Reflexion an einem GI-Spiegel (Spiegel für streifenden Einfall) finden sich in der WO 2012/126867 A . Weitere Informationen zur Reflektivität von NI-Spiegeln (Normal Incidence Spiegeln) finden sich in der DE 101 55 711 A .Information on reflection at a GI mirror (grazing incidence mirror) can be found in the WO 2012/126867 A , Further information on the reflectivity of NI mirrors (normal incidence mirrors) can be found in the DE 101 55 711 A ,

Eine Gesamt-Reflektivität beziehungsweise Systemtransmission der Projektionsoptik 7, die sich als Produkt der Reflektivitäten aller Spiegel M1 bis M10 der Projektionsoptik 7 ergibt, beträgt R = 8,49 %.An overall reflectivity or system transmission of the projection optics 7 , which is a product of the reflectivities of all mirrors M1 to M10 the projection optics 7 R = 8.49%.

Der Spiegel M10, also der im Abbildungsstrahlengang letzte Spiegel vor dem Bildfeld 8, hat eine Durchtrittsöffnung 17 zum Durchtritt des Abbildungslichts 3, das vom drittletzten Spiegel M8 hin zum vorletzten Spiegel M9 reflektiert wird. Der Spiegel M10 wird um die Durchtrittsöffnung 17 herum reflektiv genutzt. Alle anderen Spiegel M1 bis M9 haben keine Durchtrittsöffnung und werden in einem lückenlos zusammenhängenden Bereich reflektiv genutzt.The mirror M10 , So the last in the imaging beam path mirror in front of the image field 8th , has a passage opening 17 to the passage of the imaging light 3 , the third last mirror M8 to the penultimate mirror M9 is reflected. The mirror M10 becomes the passage opening 17 around used reflectively. All other mirrors M1 to M9 have no passage opening and are used in a coherently coherent area reflective.

Die Spiegel M1 bis M10 sind als nicht durch eine rotationssymmetrische Funktion beschreibbare Freiformflächen ausgeführt. Es sind auch andere Ausführungen der Projektionsoptik 7 möglich, bei denen mindestens einer der Spiegel M1 bis M10 als rotationssymmetrische Asphäre ausgeführt ist. Auch alle Spiegel M1 bis M10 können als derartige Asphären ausgeführt sein.The mirror M1 to M10 are designed as freeform surfaces that can not be described by a rotationally symmetric function. There are also other versions of the projection optics 7 possible in which at least one of the mirrors M1 to M10 is designed as a rotationally symmetric asphere. Also all mirrors M1 to M10 may be embodied as such aspheres.

Eine Freiformfläche kann durch folgende Freiformflächengleichung (Gleichung 1) beschrieben werden: $\begin{array}{l} Z = \frac{c_{x} x^{2} + c_{y} y^{2}}{1 + \sqrt{1 - (1 + k_{x}) {(c_{x} x)}^{2} - (1 + k_{y}) {(c_{y} y)}^{2}}} \\ + C_{1} x + C_{2} y \\ + C_{3} x^{2} + C_{4} xy + C_{5} y^{2} \\ + C_{6} x^{3} + \dots + C_{9} y^{3} \\ + C_{10} x^{4} + \dots + C_{12} x^{2} y^{2} + \dots + C_{14} y^{4} \\ + C_{15} x^{5} + \dots + C_{20} y^{5} \\ + C_{21} x^{6} + \dots + C_{24} x^{3} y^{3} + \dots + C_{27} y^{6} \\ + \dots \end{array}$

A free-form surface can be described by the following free-form surface equation (Equation 1):

\begin{array}{l} Z = \frac{c_{x} x^{2} + c_{y} y^{2}}{1 + \sqrt{1 - (1 + k_{x}) {(c_{x} x)}^{2} - (1 + k_{y}) {(c_{y} y)}^{2}}} \\ + C_{1} x + C_{2} y \\ + C_{3} x^{2} + C_{4} xy + C_{5} y^{2} \\ + C_{6} x^{3} + ... + C_{9} y^{3} \\ + C_{10} x^{4} + ... + C_{12} x^{2} y^{2} + ... + C_{14} y^{4} \\ + C_{15} x^{5} + ... + C_{20} y^{5} \\ + C_{21} x^{6} + ... + C_{24} x^{3} y^{3} + ... + C_{27} y^{6} \\ + ... \end{array}

Für die Parameter dieser Gleichung (1) gilt:

Z ist die Pfeilhöhe der Freiformfläche am Punkt x, y, wobei x² + y² = r². r ist hierbei der Abstand zur Referenzachse der Freiformflächengleichung
im Strahlengang v

For the parameters of this equation (1):

Z is the arrow height of the freeform surface at the point x . y where x ² + y ² = r ² . Here r is the distance to the reference axis of the free-form surface equation
in the beam path v

In der Freiformflächengleichung (1) bezeichnen C₁, C₂, C₃... die Koeffizienten der Freiformflächen-Reihenentwicklung in den Potenzen von x und y.In the free-form surface equation (1), C ₁ , C ₂ , C ₃ ... denote the coefficients of free-form surface series expansion in the powers of x and y ,

Im Falle einer konischen Grundfläche ist c_x, c_y eine Konstante, die der Scheitelpunktkrümmung einer entsprechenden Asphäre entspricht. Es gilt also c_x = 1/R_x und c_y = 1/R_y. k_x und k_y entsprechen jeweils einer konischen Konstante einer entsprechenden Asphäre. Die Gleichung (1) beschreibt also eine bikonische Freiformfläche.In the case of a conical base, c _x , c _{y is} a constant that corresponds to the vertex curvature of a corresponding asphere. So c _x = 1 / R _x and c _y = 1 / R _y . k _x and k _y each correspond to a conical constant of a corresponding asphere. The equation (1) thus describes a biconical freeform surface.

Eine alternativ mögliche Freiformfläche kann aus einer rotationssymmetrischen Referenzfläche erzeugt werden. Derartige Freiformflächen für Reflexionsflächen der Spiegel von Projektionsoptiken von Projektionsbelichtungsanlagen für die Mikrolithographie sind bekannt aus der US 2007 0 058 269 A1 .An alternatively possible free-form surface can be generated from a rotationally symmetrical reference surface. Such free-form surfaces for reflecting surfaces of the mirrors of projection optics of projection exposure apparatuses for microlithography are known from US Pat US 2007 0 058 269 A1 ,

Alternativ können Freiformflächen auch mit Hilfe zweidimensionaler Spline-Oberflächen beschrieben werden. Beispiele hierfür sind Bezier-Kurven oder nicht-uniforme rationale Basis-Splines (non-uniform rational basis splines, NURBS). Zweidimensionale Spline-Oberflächen können beispielsweise durch ein Netz von Punkten in einer xy-Ebene und zugehörige z-Werte oder durch diese Punkte und ihnen zugehörige Steigungen beschrieben werden. Abhängig vom jeweiligen Typ der Spline-Oberfläche wird die vollständige Oberfläche durch Interpolation zwischen den Netzpunkten unter Verwendung zum Beispiel von Polynomen oder Funktionen, die bestimmte Eigenschaften hinsichtlich ihrer Kontinuität und Differenzierbarkeit haben, gewonnen. Beispiele hierfür sind analytische Funktionen.Alternatively, freeform surfaces can also be described using two-dimensional spline surfaces. Examples include Bezier curves or non-uniform rational base splines (NURBS). For example, two-dimensional spline surfaces may be described by a network of points in an xy plane and associated z-values or by these points and their associated slopes. Depending on the particular type of spline surface, the complete surface is obtained by interpolation between the mesh points using, for example, polynomials or functions that have certain continuity and differentiability properties. Examples of this are analytical functions.

Die 5A zeigt Randkonturen der auf den Spiegeln M1 bis M10 der Projektionsoptik 7 jeweils mit dem Abbildungslicht 3 beaufschlagten Reflexionsflächen, also die sogenannten Footprints der Spiegel M1 bis M10. Dargestellt sind diese Randkonturen jeweils in einem x/y-Diagramm, welches den lokalen x- und y-Koordinaten des jeweiligen Spiegels M1 bis M10 entspricht. Die Darstellung sind maßstäblich in Millimetern. Bei der Darstellung zum Spiegeln M10 ist zudem die Form der Durchtrittsöffnung 17 dargestellt.The 5A shows edge contours of the mirrors M1 to M10 the projection optics 7 each with the imaging light 3 acted upon reflection surfaces, so the so-called footprints of the mirror M1 to M10 , These edge contours are each represented in an x / y diagram, which is the local x and y coordinates of the respective mirror M1 to M10 equivalent. The representation are to scale in millimeters. In the illustration for mirroring M10 is also the shape of the passage opening 17 shown.

Die nachfolgenden beiden Tabelle fassen die Parameter „maximaler Einfallswinkel“, „Reflexionsflächenerstreckung in y-Richtung“, „Reflexionsflächenerstreckung in y-Richtung“ und „maximaler Spiegeldurchmesser“ für die Spiegel M1 bis M10 zusammen. M1 M2 M3 M4 M5 maximaler Einfallswinkel [°] 12.0 83.3 78.4 81.9 81.0 Reflexionsflächenerstreckung in x-Richtung [mm] 684.0 419.4 360.4 310.9 369.2 Reflexionsflächenerstreckung in y-Richtung [mm] 278.6 353.5 256.2 289.9 340.8 maximaler Spiegeldurchmesser [mm] 684.3 437.3 364.4 359.4 398.8 M6 M7 M8 M9 M10 maximaler 81.7 80.8 78.8 21.2 8.1 Einfallswinkel [°] Reflexionsflächenerstreckung in x-Richtung [mm] 387.2 372.1 322.2 350.8 924.0 Reflexionsflächenerstreckung in y-Richtung [mm] 195.6 107.2 208.7 170.7 897.6 maximaler Spiegeldurchmesser [mm] 388.2 372.1 322.3 350.9 924.2 The following two tables summarize the parameters "maximum angle of incidence", "reflection surface extent in y-direction", "reflection surface extent in y-direction" and "maximum mirror diameter" for the mirrors M1 to M10 together. M1 M2 M3 M4 M5 maximum angle of incidence [°] 12.0 83.3 78.4 81.9 81.0 Reflection surface extension in x-direction [mm] 684.0 419.4 360.4 310.9 369.2 Reflection surface extension in the y-direction [mm] 278.6 353.5 256.2 289.9 340.8 maximum mirror diameter [mm] 684.3 437.3 364.4 359.4 398.8 M6 M7 M8 M9 M10 maximum 81.7 80.8 78.8 21.2 8.1 Incident angle [°] Reflective surface extension in x-direction [mm] 387.2 372.1 322.2 350.8 924.0 Reflection surface extension in the y-direction [mm] 195.6 107.2 208.7 170.7 897.6 maximum mirror diameter [mm] 388.2 372.1 322.3 350.9 924.2

Den größten maximalen Spiegeldurchmesser hat der die bildseitige numerische Apertur vorgebende Spiegeln M10 mit einem Durchmesser von 924,2 mm. Keiner der anderen Spiegeln M1 bis M9 hat einen maximalen Durchmesser, der größer ist als 700 mm. Acht der zehn Spiegel, nämlich die Spiegeln M2 bis M9, haben einen maximalen Spiegeldurchmesser, der kleiner ist als 450 mm. Sieben der zehn Spiegel, nämlich die Spiegeln M3 bis M9, haben einen maximalen Spiegeldurchmesser, der kleiner ist als 400 mm. The largest maximum mirror diameter has the image numerical aperture predetermining mirrors M10 with a diameter of 924.2 mm. None of the other mirrors M1 to M9 has a maximum diameter that is greater than 700 mm. Eight of the ten mirrors, namely the mirrors M2 to M9 , have a maximum mirror diameter smaller than 450 mm. Seven of the ten mirrors, namely the mirrors M3 to M9 , have a maximum mirror diameter smaller than 400 mm.

Die optischen Designdaten der Reflexionsflächen der Spiegel M1 bis M10 der Projektionsoptik 7 können den nachfolgenden Tabellen entnommen werden. Diese optischen Designdaten gehen jeweils von der Bildebene 9 aus, beschreiben die jeweilige Projektionsoptik also in umgekehrter Laufrichtung des Abbildungslichts 3 zwischen der Bildebene 9 und der Objektebene 5.The optical design data of the reflection surfaces of the mirrors M1 to M10 the projection optics 7 can be found in the following tables. Each of these optical design data goes from the image plane 9 from, describe the respective projection optics so in the reverse direction of the imaging light 3 between the picture plane 9 and the object plane 5 ,

Die erste dieser Tabellen gibt einen Überblick über die Designdaten der Projektionsoptik 7 und fasst zusammen die numerische Apertur NA, die gerechnete Designwellenlänge für das Abbildungslicht, die Größen des Bildfeldes in x- und y-Richtung, eine Bildfeldkrümmung sowie Blendenorte. Diese Krümmung ist definiert als der inverse Krümmungsradius des Feldes.The first of these tables gives an overview of the design data of the projection optics 7 and together summarizes the numerical aperture NA, the calculated design wavelength for the imaging light, the sizes of the image field x - and y-direction, a field curvature and aperture type. This curvature is defined as the inverse radius of curvature of the field.

Das Bildfeld 8 hat eine x-Erstreckung von zweimal 13 mm und eine y-Erstreckung von 1 mm. Die Projektionsoptik 7 ist optimiert für eine Betriebswellenlänge des Beleuchtungslichts 3 von 13,5 nm.The image field 8th has a x -Extraction of two times 13 mm and one y Extension of 1 mm. The projection optics 7 is optimized for an operating wavelength of the illumination light 3 of 13.5 nm.

Die zweite dieser Tabellen gibt zu den optischen Oberflächen der optischen Komponenten Scheitelpunktsradien (Radius_x = R_x, Radius_y = R_y) und Brechkraftwerte (Power_x, Power_y) an. Negative Radienwerte bedeuten zum einfallenden Beleuchtungslicht 3 hin konkave Kurven im Schnitt der jeweiligen Oberfläche mit der betrachteten Ebene (xz, yz), die von einer Flächennormalen im Scheitelpunkt mit der jeweiligen Krümmungsrichtung (x, y) aufgespannt wird. Die beiden Radien Radius_x, Radius_y können explizit verschiedene Vorzeichen haben.The second of these tables are the optical surfaces of the optical components vertex radii at (Radius_x = R _x, R _y = Radius_y) and power values (Power_x, Power_y). Negative radii mean the incident illuminating light 3 concave curves in the section of the respective surface with the considered plane (xz, yz), which is spanned by a surface normal at the apex with the respective direction of curvature (x, y). The two radii Radius_x, Radius_y can explicitly have different signs.

Die Scheitelpunkte an jeder optischen Fläche sind definiert als Auftreffpunkte eines Führungsstrahls, der von einer Objektfeldmitte entlang einer Symmetrieebene x=0, also der Zeichenebene der 2 (Meridionalebene) hin zum Bildfeld 8 geht.The vertices on each optical surface are defined as points of impingement of a guide beam, which originate from an object field center along a plane of symmetry x = 0, that is to say the plane of the drawing 2 (Meridional plane) towards the image field 8th goes.

Die Brechkräfte Power_x (P_x), Power_y (P_y) an den Scheitelpunkten sind definiert als: $P_{x} = - \frac{2 cos AOI}{R_{x}}$

P_{y} = - \frac{2}{R_{y} cos AOI}

AOI bezeichnet hierbei einen Einfallswinkel des Führungsstrahls zur Oberflächennormalen.The powers Power_x (P _x ), Power_y (P _y ) at the vertices are defined as:

P_{x} = - \frac{2 cos AOI}{R_{x}}

P_{y} = - \frac{2}{R_{y} cos AOI}

AOI here denotes an angle of incidence of the guide beam to the surface normal.

Die dritte Tabelle gibt für die Spiegel M1 bis M10 in mm die konischen Konstanten k_x und k_y, den Scheitelpunktradius R_x (= Radius_x) und die Freiformflächen-Koeffizienten C_n an. Koeffizienten C_n, die nicht tabelliert sind, haben jeweils den Wert 0.The third table gives for the mirrors M1 to M10 in mm the conical constants k _x and k _y , the vertex radius R _x (= radius_x) and the free-form surface coefficients C _n . Coefficients C _n , which are not tabulated, each have the value 0 ,

In der vierten Tabelle ist noch der Betrag angegeben, längs dem der jeweilige Spiegel, ausgehend von einer Bezugsfläche in der y-Richtung dezentriert (DCY), in der z-Richtung verschoben (DCZ) und verkippt (TLA, TLB, TLC) wurde. Dies entspricht einer Parallelverschiebung und einer Verkippung beim Freiformflächen-Designverfahren. Verschoben wird dabei in y- und in z-Richtung in mm und verkippt um die x-Achse, um die y-Achse und um die z-Achse. Der Verdrehwinkel ist dabei in Grad angegeben. Es wird zunächst dezentriert, dann verkippt. Die Bezugsfläche bei der Dezentrierung ist jeweils die erste Fläche der angegebenen optischen Designdaten. Auch für das Objektfeld 4 ist eine Dezentrierung in y- und in z-Richtung in der Objektebene 5 angegeben. Neben den den einzelnen Spiegeln zugeordneten Flächen sind in der vierten Tabelle auch die Bildebene als erste Fläche, die Objektebene als letzte Fläche sowie mehrere Blendenflächen (mit der Blendenbezeichnung „AS“) tabelliert.The fourth table also indicates the amount along which the respective mirror decentred (DCY), moved in the z-direction (DCZ) and tilted (TLA, TLB, TLC), starting from a reference surface in the y-direction. This corresponds to a parallel shift and a tilt in the freeform surface design process. Moved into is y - and in z Direction in mm and tilted around the x -Axis to the y -Axis and around the z -Axis. The twist angle is given in degrees. It is decentered first, then tilted. The reference surface at decentering is the first surface of the specified optical design data. Also for the object field 4 is a decentering in y - and in z Direction in the object plane 5 specified. In addition to the surfaces assigned to the individual mirrors, the fourth table also includes the image plane as the first surface, the object plane as the last surface and several diaphragm surfaces (with the diaphragm designation "AS").

Eine erste Blende AS2 ist in einer Ebene E_AS2 im Abbildungslichtstrahlengang zwischen den Spiegeln M4 und M5 angeordnet. Eine weitere Blende AS (vergleiche 3) ist im Abbildungslichtstrahlengang zwischen den Spiegeln M9 und M10 in einer Ebene E_AS angeordnet. Weitere Blenden AS3 und AS4 sind auf den Spiegeln M9 und M10 angeordnet. Alternativ können die Blenden AS3 und AS4 auch benachbart und mit Abstand zu diesen Spiegeln angeordnet sein.A first aperture AS2 is in a plane E _AS2 in the imaging _{light beam path} between the mirrors M4 and M5 arranged. Another aperture AS (see 3 ) is in the imaging light beam path between the mirrors M9 and M10 in a plane E _AS arranged. More apertures AS3 and AS4 are on the mirrors M9 and M10 arranged. Alternatively, the apertures AS3 and AS4 be also adjacent and spaced from these mirrors.

Die fünfte Tabelle gibt die Transmissionsdaten der Spiegel M10 bis M1 an, nämlich deren Reflektivität für den Einfallswinkel eines zentral auf den jeweiligen Spiegel treffenden Beleuchtungslichtstrahls. Die Gesamttransmission wird als Anteilsfaktor angegeben, der von einer einfallenden Intensität nach Reflexion an allen Spiegeln der Projektionsoptik verbleibt.The fifth table gives the transmission data of the mirrors M10 to M1 namely, their reflectivity for the angle of incidence of a centrally incident on the respective mirror illuminating light beam. The total transmission is given as a proportion factor remaining from an incident intensity after reflection at all mirrors of the projection optics.

Die sechste Tabelle gibt eine Berandung der Blende AS4 (Fläche M10) als Polygonzug in lokalen Koordinaten x y z an. Diese Blende ist am Ort des Spiegels M10 angeordnet. Die Blende wird noch wie oben beschrieben dezentriert und verkippt. In der letzten Spalte der Tabelle 6 ist noch der jeweilige Blendentyp des angegebenen Polygonzugs genannt. „CLA“ bedeutet dabei eine Blendenberandung, die nach innen, also zu einem Blendenzentrum hin, transparent und nach außen hin blockend ist (Typ Aperturblende). Der Blendentyp „OBS“ gibt eine Blendenberandung an, die nach innen, also zu einem Blendenzentrum hin, blockierend und nach außen hin transparent ist (Typ Obskurationsblende). Eine Aperturblendenberandung dient zur Definition einer äußeren Begrenzung einer Pupille der Projektionsoptik 7. Eine Obskurationsblende dient zur Definition eines im Inneren der Pupille befindlichen obskurierten Bereichs. Die Blenden AS bis AS4 dienen gemeinsam zur Vorgabe sowohl der äußeren Berandung der Systempupille als auch zur Vorgabe der inneren Berandung des Obskurationsbereichs der Systempupille. Bei der Ausführung der Projektionsoptik 7 nach den 2 bis 5 sind alle Blenden AS, AS2, AS3 und AS4 vom Typ Aperturblende. Die Blende AS4 ist zusätzlich vom Typ Obskurationsblende. Auch eine andere Verteilung der Typen „Aperturblende“ und „Obskurationsblende“ auf die Blenden der Projektionsoptik ist möglich.The sixth table gives a border of the aperture AS4 (Surface M10 ) as a polygon in local coordinates x y z on. This aperture is at the place of the mirror M10 arranged. The aperture is still decentered and tilted as described above. In the last column of Table 6 is still the respective aperture type of the specified traverse called. In this case, "CLA" means a diaphragm boundary that is transparent toward the inside, that is to say towards a diaphragm center, and is blocking toward the outside (type aperture diaphragm). The aperture type "OBS" indicates a diaphragm boundary which is inward, ie towards a diaphragm center, blocking and transparent to the outside (type obscuration diaphragm). An aperture stop serves to define an outer boundary of a pupil of the projection optics 7 , An obscuration diaphragm is used to define an obscured area inside the pupil. The irises AS to AS4 together serve to specify both the outer boundary of the system pupil and to specify the inner boundary of the obscuration of the system pupil. In the execution of the projection optics 7 after the 2 to 5 are all apertures AS . AS2 . AS3 and AS4 of the type aperture diaphragm. The aperture AS4 is additionally of the obscuration type. Another distribution of the types "aperture diaphragm" and "obscuration diaphragm" on the screens of the projection optics is possible.

Die siebte Tabelle gibt entsprechend die Berandung der Blende AS3 (Fläche M9) als Polygonzug-Daten entsprechend der Tabelle 6 an.The seventh table gives the edge of the aperture accordingly AS3 (Surface M9 ) as polygonal train data according to Table 6.

Die achte Tabelle gibt entsprechend die Berandung der Blende AS2 im Abbildungslichtstrahlengang zwischen den Spiegeln M4 und M5 als Polygonzug-Daten entsprechend der Tabelle 6 an.The eighth table gives the edge of the aperture accordingly AS2 in the picture light beam path between the mirrors M4 and M5 as traverse data according to Table 6.

Die neunte Tabelle gibt entsprechend die Berandung der Blende AS im Abbildungslichtstrahlengang zwischen den Spiegeln M9 und M10 als Polygonzug-Daten entsprechend der Tabelle 6 an.The ninth table accordingly indicates the boundary of the aperture AS in the imaging light beam path between the mirrors M9 and M10 as traverse data according to Table 6.

Eine Berandung einer Blendenfläche der Blenden AS bis AS4 (vgl. auch die Tabelle 6 ff. zur 2) ergibt sich durch Durchstoßpunkte an der Blendenfläche aller Strahlen des Beleuchtungslichts 3, die bildseitig an ausgewählten Feldpunkten mit einer vollen bildseitigen telezentrischen Apertur in Richtung der Blendenfläche propagieren. Zur Vorgabe der Berandung der Blendenfläche der Blende AS werden die Durchstoßpunkte an der Blendenfläche aller Strahlen des Beleuchtungslichts 3 verwendet, die bildseitig vom Feldmittelpunkt aus mit einer vollen bildseitigen telezentrischen Apertur in Richtung der Blendenfläche propagieren. Bei den anderen Blenden AS2, AS3 und AS4 ergeben sich die Durchstoßpunkte durch Verwendung aller Strahlen des Beleuchtungslichts 3, die bildseitig von allen Feldpunkten des Bildfeldes 8 aus mit einer vollen bildseitigen telezentrischen Apertur in Richtung der Blendenfläche propagieren. Grundsätzlich kann bei der Blendendefinition auch eine andere Auswahl der verwendeten bildseitigen Feldpunkte erfolgen. Die vorstehend genannten Auswahlen „Feldmittelpunkt“ und „gesamtes Feld“ sind dabei die möglichen Extremsituationen.A boundary of an aperture of the aperture AS to AS4 (See also Table 6 et seq 2 ) results from puncture points at the diaphragm surface of all rays of the illumination light 3 , which propagate on the image side at selected field points with a full image-side telecentric aperture in the direction of the diaphragm surface. To specify the boundary of the aperture of the aperture AS become the puncture points on the diaphragm surface of all the rays of the illumination light 3 used, the image side propagate from the field center point with a full image-side telecentric aperture in the direction of the diaphragm surface. For the other panels AS2 . AS3 and AS4 the puncture points result from the use of all the rays of the illumination light 3 , the image side of all field points of the image field 8th from propagate with a full image-side telecentric aperture in the direction of the diaphragm surface. In principle, a different selection of the image-side field points used can also be carried out in the case of the aperture definition. The above selections "field center" and "entire field" are the possible extreme situations.

Bei der Ausführung der Blende als Aperturblende handelt es sich bei der Berandung um eine innere Berandung. Bei der Ausführung als Obskurationsblende handelt es sich bei der Berandung um eine äußere Berandung.When the aperture is designed as an aperture diaphragm, the boundary is an inner boundary. When executed as Obskurationsbrende it is at the boundary to an outer boundary.

Die jeweilige Blende AS bis AS4 kann in einer Ebene liegen oder auch dreidimensional ausgeführt sein. Die Ausdehnung der Blende 18 kann in Scanrichtung (y) kleiner sein als in cross-Scanrichtung (x).The respective aperture AS to AS4 can be in one plane or three-dimensional. The extension of the aperture 18 can in the scanning direction ( y ) be smaller than in the cross-scan direction ( x ).

Der nicht beleuchtete Obskurationsbereich in der Systempupille kann rund, elliptisch, quadratisch oder rechteckig sein. Diese nicht beleuchtbare Fläche in der Systempupille kann zudem in Bezug auf ein Zentrum der Systempupille in der x-Richtung und/oder in der y-Richtung dezentriert sein. Tabelle 1 zu Fig. 2 Ausführungsbeispiel 2 NA 0.55 Wellenlänge 13.5 nm Feldgröße_x 26.0 mm Feldgröße_y 1.0 mm Feldkrümmung -0.012345 1/mm Blenden AS, AS2, AS3 (auf M9), AS4 (auf M10) Tabelle 2 zu Fig. 2 Oberfläche Radius_x[mm] Power_x[1/mm] Radius_y[mm] Power_y[1/mm] Betriebsmodus M10 -924.4981198 0.0021492 -841.5674623 0.0023921 REFL M9 1845.8313982 -0.0010835 356.4114777 -0.0056115 REFL M8 -807.7853011 0.0006289 -16794.6817783 0.0004689 REFL M7 -633.7019549 0.0007380 20332.8433550 -0.0004206 REFL M6 -1159.7877847 0.0003528 -7078.0588424 0.0013813 REFL M5 -7911.6202298 0.0000533 -2197.1749958 0.0043148 REFL M4 6252.7176733 -0.0000660 -2753.7274849 0.0035212 REFL M3 1718.6984546 -0.0002678 -10060.7554809 0.0008638 REFL M2 1592.6268445 -0.0002500 2592.5626309 -0.0038746 REFL M1 -2135.9876330 0.0009216 -1377.1202039 0.0014756 REFL Tabelle 3a zu Fig. 2 Koeffizient M10 M9 M8 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX -924.49811980 1845.83139800 -807.78530110 C7 5.32161644e-09 -7.17957299e-07 3.61958396e-07 C9 1.2051462e-08 1.48021766e-06 4.61852728e-08 C10 -4.28738318e-12 3.94779844e-10 1.36275822e-10 C12 -3.49709402e-11 2.67402017e-09 4.92199166e-11 C14 -9.81786584e-12 6.31481582e-09 -4.23949539e-10 C16 -3.40219667e-15 -2.74047503e-12 1.12548598e-12 C18 1.60335869e-14 2.04228406e-14 3.71761249e-13 C20 1.30399612e-14 3.2725238e-11 -2.05971586e-12 C21 -1.15274335e-17 2.35879877e-15 1.09054091e-15 C23 -6.9260806e-17 1.00239611e-14 1.70911423e-15 C25 -7.13524377e-17 5.05529889e-14 -3.62622238e-15 C27 -1.67322747e-17 1.78538542e-13 -7.36849912e-15 C29 -7.92528578e-21 -4.11347975e-18 -2.59696939e-18 C31 1.27834004e-20 -5.83032641e-17 1.25679501e-17 C33 3.27119661e-20 1.71591989e-16 -1.04543394e-17 C35 1.71377495e-20 1.22876874e-15 -3.91086555e-17 C36 -1.89551894e-23 -4.14843428e-22 5.26679107e-21 C38 -1.11996388e-22 1.06656248e-19 2.8502374e-20 C40 -1.96750203e-22 2.08419251e-19 6.3260457e-20 C42 -1.2392523e-22 8.95301505e-19 4.7233819e-21 C44 -2.47458966e-23 8.36809183e-18 -2.27707911e-19 C46 -9.77909864e-27 -1.02394711e-22 1.39450428e-23 C48 5.19824336e-27 -7.95041789e-23 1.68839235e-22 C50 5.59498452e-26 8.75666056e-22 2.79254271e-22 C52 6.43656264e-26 4.60087068e-21 -9.11661464e-23 C54 1.96031627e-26 4.50459082e-20 1.98458883e-22 C55 -1.9734083e-29 2.61667221e-26 -4.54521391e-26 C57 -1.39192995e-28 -1.48955085e-25 1.23387971e-24 C59 -3.49342237e-28 2.18616238e-24 4.57708029e-24 C61 -3.79015472e-28 8.50729665e-24 6.06052772e-24 C63 -1.77868817e-28 2.63725246e-23 -9.61661588e-26 C65 -2.61320106e-29 1.37431086e-22 9.18355997e-24 C67 -1.75320584e-32 1.91491617e-28 -2.00093096e-27 C69 -1.49695509e-32 -5.27938029e-27 2.16982668e-27 C71 6.84912486e-32 -5.29216183e-27 -7.30096104e-27 C73 1.54586906e-31 4.04146338e-26 -4.93769708e-27 C75 1.15783975e-31 2.37812676e-25 -4.16594376e-26 C77 4.14587364e-32 1.20314674e-24 -1.62235584e-25 C78 -5.34426777e-35 4.49836368e-31 6.13330316e-30 C80 -4.27488688e-34 1.29694668e-29 -1.62333428e-29 C82 -1.25436413e-33 3.24280489e-29 -1.68167617e-28 C84 -1.71502766e-33 3.00254831e-29 -4.89454528e-28 C86 -1.25734127e-33 7.46446045e-28 -6.5895393e-28 C88 -5.19929261e-34 5.84363659e-27 -1.5416679e-27 C90 -9.42013117e-35 2.61240017e-26 -3.38007496e-27 C92 1.00872668e-38 -4.95175891e-33 1.78435553e-32 C94 -1.45968234e-39 2.0913161e-33 1.10022934e-32 C96 2.49294655e-38 9.54156933e-32 1.00044858e-30 C98 1.25738947e-37 -7.47916509e-33 1.98972461e-30 C100 1.6844889e-37 7.35199153e-30 -3.47483305e-30 C102 7.66863005e-38 5.82871085e-29 -1.47027148e-29 C104 -1.4887687e-38 2.15570834e-28 -2.0886266e-29 C105 3.84331333e-41 -2.72151554e-36 -1.09100622e-34 C107 4.50330303e-40 -6.8970507e-35 3.91399908e-34 C109 1.60900752e-39 -2.41557224e-34 4.01031765e-33 C111 2.46751199e-39 1.07560857e-33 1.8289791e-32 C113 1.94052198e-39 8.96263507e-33 2.87152163e-32 C115 9.9606188e-40 4.77961552e-32 -4.19223781e-33 C117 4.55475999e-40 2.14647641e-31 -4.42634085e-32 C119 9.96424428e-41 6.08163641e-31 -4.46533131e-32 C121 -6.67748909e-44 0 0 C123 -1.35652075e-43 0 0 C125 1.98636308e-43 0 0 C127 1.25607622e-42 0 0 C129 2.10051386e-42 0 0 C131 1.77289428e-42 0 0 C133 7.94693346e-43 0 0 C135 1.74862061e-43 0 0 C136 -1.77390976e-46 0 0 C138 -2.00142247e-45 0 0 C140 -8.6258998e-45 0 0 C142 -1.91465627e-44 0 0 C144 -2.50271596e-44 0 0 C146 -2.03958823e-44 0 0 C148 -1.04613962e-44 0 0 C150 -3.18867421e-45 0 0 C152 -4.17582475e-46 0 0 Tabelle 3 b zu Fig. 2 Koeffizient M7 M6 M5 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX -633.70195490 -1159.78778500 -7911.62023000 C7 -3.6838108e-08 8.9762673e-08 1.29208819e-08 C9 1.66051547e-07 5.4606184e-08 -4.52621083e-08 C10 2.70786958e-11 -4.84436976e-10 -5.84676904e-10 C12 -4.05365907e-10 4.4034394e-11 3.29353371e-11 C14 1.17570885e-09 -8.49494866e-10 3.27657845e-11 C16 5.32058235e-13 -1.22366579e-12 -4.06185258e-13 C18 -2.33907349e-12 3.31495258e-12 -3.05655881e-13 C20 1.03622586e-11 4.74017946e-12 -9.90515078e-14 C21 1.84951658e-17 4.70815441e-16 6.8177486e-16 C23 1.97362743e-16 -5.63918759e-15 1.78311332e-16 C25 -4.50645748e-14 -2.04438614e-14 1.92769745e-15 C27 1.22197136e-13 -4.46320586e-14 1.11134948e-15 C29 -8.3397015e-19 3.12037967e-18 1.20925734e-18 C31 5.73336291e-17 2.52930984e-17 -2.68755339e-18 C33 -4.26965471e-16 2.57659349e-16 -5.94759876e-18 C35 1.12309508e-15 3.62043368e-16 -4.78247891e-18 C36 -2.54002154e-21 -2.33285817e-21 8.64176325e-21 C38 6.58698589e-22 6.78093367e-21 2.69603122e-21 C40 9.19834216e-19 -6.09316184e-19 1.90190625e-20 C42 -5.20603364e-18 -2.48560476e-18 2.06136053e-20 C44 1.95177251e-17 -3.71987432e-18 1.52178482e-20 C46 5.11031274e-23 -2.36475219e-24 1.40723013e-23 C48 -5.22351362e-22 1.08955249e-21 -1.74886691e-23 C50 1.29955621e-20 6.28062297e-21 -1.31280422e-22 C52 -7.19352591e-20 2.83502526e-20 -1.33189978e-22 C54 3.01583882e-19 4.05968238e-20 -5.11578136e-23 C55 -3.2378259e-26 5.04920803e-26 -9.74226056e-26 C57 2.56114803e-26 -1.66126857e-24 1.25073538e-25 C59 -2.15568526e-23 -1.21962666e-23 3.61644254e-25 C61 7.54597503e-23 -7.85294647e-23 6.17670028e-25 C63 -1.37768633e-21 -2.60819335e-22 3.1972004e-25 C65 -9.91159698e-22 -3.82043453e-22 5.14604952e-26 C67 8.86143266e-29 1.38719494e-27 -4.85096213e-29 C69 2.95926995e-28 1.1409927e-26 -1.52883817e-29 C71 -4.08946521e-25 1.70193798e-25 -2.99192047e-28 C73 1.1764e-24 5.79647838e-25 1.27326956e-27 C75 -1.82271068e-23 1.8185183e-24 2.14215183e-27 C77 -6.0476105e-23 2.47496013e-24 -2.43586456e-28 C78 -1.46974123e-31 -2.48880617e-30 2.2910216e-30 C80 -1.62035317e-29 -3.63910799e-30 -2.10355105e-30 C82 2.64119709e-28 -1.39124488e-28 -3.56165247e-30 C84 -2.75435112e-27 -9.92371827e-28 -1.25073816e-29 C86 6.06493358e-26 -2.9562807e-27 -1.02346615e-29 C88 -1.82794269e-25 -7.99387324e-27 1.25693216e-30 C90 8.10897778e-25 -1.01333935e-26 6.64972771e-30 C92 -5.94852836e-33 -2.20554773e-33 1.22259104e-33 C94 7.23973112e-32 1.10525284e-31 -1.24849687e-32 C96 7.40539289e-30 -4.613537e-32 -3.29652704e-32 C98 4.88216265e-30 4.80483016e-30 -8.41705133e-32 C100 9.65449531e-28 6.23756899e-30 -1.57134898e-31 C102 -1.70876067e-27 2.1445453e-29 -1.2032548e-31 C104 2.67082934e-26 2.28654521e-29 -3.36577402e-32 C105 2.35094421e-36 2.08468354e-35 -1.08251776e-35 C107 3.37747137e-34 -1.04397603e-34 3.142163e-35 C109 7.70896596e-34 2.85346997e-34 8.01180965e-35 C111 6.84579774e-32 -8.80664689e-35 3.89769754e-34 C113 -9.31004972e-32 -9.19882787e-33 7.80016296e-34 C115 5.48180337e-30 -1.39857273e-33 7.27970094e-34 C117 -9.40923091e-30 -2.85191959e-32 3.44660803e-34 C119 1.58250782e-28 -2.04899764e-32 5.28320959e-35 Tabelle 3c zu Fig. 2 Koeffizient M4 M3 M2 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 6252.71767300 1718.69845500 1592.62684400 C7 2.02039657e-07 -7.72442186e-08 -2.81200257e-07 C9 6.26194854e-08 -6.39011454e-08 -4.33420894e-07 C10 -1.17096485e-10 5.38504965e-10 2.16914992e-10 C12 1.65918593e-10 1.54474735e-10 -2.43233271e-10 C14 2.6047855e-11 -5.67012949e-11 1.0908048e-09 C16 1.53352973e-13 -1.28128634e-12 -1.3249687e-12 C18 6.85280998e-14 3.29016521e-13 2.3245033e-12 C20 1.33134745e-14 -7.9135182e-14 -2.74288101e-12 C21 9.63392843e-16 -2.23006179e-16 -3.54173468e-16 C23 -2.56356327e-16 8.08610012e-16 5.15456653e-15 C25 -4.93143601e-16 -1.64061139e-16 -1.06774698e-14 C27 -3.50827102e-17 -8.3638218e-18 5.96789915e-15 C29 -1.32470314e-18 2.06883208e-18 1.70541615e-18 C31 -1.08456401e-18 -3.75046097e-18 -2.42446489e-17 C33 -3.23480928e-19 1.52741866e-18 4.43191025e-17 C35 -3.72075346e-19 1.62584985e-18 -1.05861269e-17 C36 -3.85707039e-21 -2.85425871e-21 1.53834046e-21 C38 7.16357253e-21 4.79674043e-21 -1.1251108e-20 C40 -1.76766744e-21 6.62315222e-22 1.18315789e-19 C42 -5.70159933e-21 -2.6546097e-21 -1.77703731e-19 C44 -3.65158025e-21 1.5355861e-20 1.37862764e-20 C46 -2.99726604e-23 -7.26058549e-23 -2.55922076e-23 C48 -4.17503344e-23 -9.21476496e-23 1.00193833e-22 C50 -4.7884568e-23 -2.35567601e-22 -5.31735424e-22 C52 -6.91516977e-24 -1.35526865e-22 6.79507546e-22 C54 1.98546253e-23 9.61975988e-23 4.01660209e-23 C55 -1.94031018e-26 1.56888015e-25 -1.38213528e-26 C57 -3.42382432e-25 2.2750218e-25 1.79376182e-25 C59 -2.2756817e-25 -1.23549695e-25 -5.94897934e-25 C61 2.01539859e-25 2.29974662e-25 2.27901415e-24 C63 4.95631548e-25 8.59833428e-25 -2.22922414e-24 C65 1.12176727e-25 1.26876311e-24 -7.70058057e-25 C67 9.06942404e-28 9.3079309e-28 3.74223228e-28 C69 1.9957938e-27 4.99157193e-27 -9.62902214e-28 C71 3.12476201e-27 1.58761398e-26 2.15189986e-27 C73 4.54981924e-27 1.53821757e-26 -8.59545995e-27 C75 6.59335485e-28 3.62238546e-27 5.36715829e-27 C77 -1.58015986e-27 -1.19949042e-27 5.14863336e-27 C78 4.37655985e-30 -2.15256015e-30 -6.68041182e-32 C80 8.62343063e-30 -8.27474872e-30 -2.88698633e-30 C82 1.3965552e-29 -1.85964202e-29 2.97808799e-30 C84 1.2610299e-29 -5.63075807e-29 -9.25513518e-30 C86 -4.82567841e-30 -7.58802797e-29 2.1567675e-29 C88 -1.35566233e-29 -6.2816052e-29 -8.2378632e-30 C90 8.35698293e-31 -2.48292667e-29 -1.8363031e-29 C92 -6.20912191e-33 -1.53848466e-33 -2.72722676e-33 C94 -3.03339233e-32 -5.56751434e-32 9.35668771e-33 C96 -4.15846221e-32 -2.81174802e-31 1.01318148e-32 C98 -1.20240425e-31 -5.69729421e-31 4.31201041e-32 C100 -1.23999978e-31 -3.40400557e-31 -2.58821352e-32 C102 1.77507014e-33 -9.97858945e-32 6.91936623e-33 C104 3.83557979e-32 1.09580074e-31 3.45333625e-32 C105 -1.52261212e-35 5.38313447e-37 2.4018539e-36 C107 -7.96360046e-35 8.5583118e-35 1.94949839e-35 C109 -2.50162343e-34 3.84351739e-34 -2.7269109e-35 C111 -2.81541874e-34 1.85492006e-33 -5.57867255e-35 C113 -6.28531061e-34 2.60940268e-33 -8.0628501e-35 C115 2.25293161e-35 2.55655776e-33 6.48059264e-36 C117 7.79107372e-35 1.01920129e-33 -2.46632816e-36 C119 -1.12500845e-34 7.43677377e-34 -2.70846382e-35 Tabelle 3d zu Fig. 2 Koeffizient M1 KY 0.00000000 KX 0.00000000 RX -2135.98763300 C7 -3.62667214e-08 C9 -8.77001096e-09 C10 -7.9878408e-12 C12 3.57622422e-11 C14 5.67666306e-11 C16 -1.00670933e-14 C18 -6.43363507e-14 C20 3.49263438e-14 C21 -1.83622059e-18 C23 1.63146414e-17 C25 2.33281554e-16 C27 -2.13403252e-16 C29 -7.17734463e-22 C31 -7.76916167e-20 C33 -2.45391831e-19 C35 9.06895125e-19 C36 -2.87240432e-24 C38 -5.67479156e-24 C40 2.53075334e-22 C42 2.33441297e-22 C44 -4.90816027e-21 C46 -1.82993123e-26 C48 1.40735408e-25 C50 -1.62994831e-25 C52 4.12295522e-24 C54 2.26175423e-23 C55 6.84620783e-30 C57 -8.9211373e-29 C59 3.99552919e-28 C61 2.87701829e-26 C63 7.90515964e-26 C65 4.93963599e-26 C67 8.37008672e-32 C69 -9.8548077e-31 C71 -7.50758997e-30 C73 -6.72582496e-30 C75 2.5702957e-28 C77 -1.08487883e-27 C78 4.88158898e-36 C80 1.55182242e-33 C82 1.52095525e-32 C84 -1.27781492e-31 C86 -1.81913568e-30 C88 -5.89459163e-30 C90 2.69055495e-30 C92 -4.03243187e-38 C94 3.64827588e-36 C96 3.2629352e-35 C98 1.58289449e-34 C100 -1.41502554e-34 C102 -7.52721979e-33 C104 1.42550505e-32 C105 -9.85463233e-41 C107 -4.7133732e-39 C109 -9.62905307e-38 C111 -4.88592887e-38 C113 5.89605443e-36 C115 4.37586765e-35 C117 1.2944388e-34 C119 -5.79847892e-35 Tabelle 4a zu Fig. 2 Oberfläche DCX DCY DCZ Bildebene 0.00000000 0.00000000 0.00000000 M10 (AS4) 0.00000000 0.00000000 805.12545493 AS 0.00000000 121.91685762 283.85220626 M9 (AS3) -0.00000000 161.70815863 113.71871405 M8 0.00000000 -95.26534725 1237.21684296 M7 -0.00000000 -33.77425023 1447.75579022 M6 0.00000000 65.18321239 1551.64751609 M5 0.00000000 416.29245364 1699.16961083 AS2 -0.00000000 446.29210651 1699.02529226 M4 -0.00000000 1004.20719186 1696.34134424 M3 -0.00000000 1452.13094016 1490.08513977 M2 0.00000000 1660.63260708 1219.01552868 M1 -0.00000000 1898.51696847 380.25896967 Objektebene -0.00000000 2052.66210418 2142.14593325 Tabelle 4b zu Fig. 2 Oberfläche TLA[deg] TLB[deg] TLC[deg] Bildebene -0.00000000 0.00000000 -0.00000000 M10 (AS4) 6.58193819 0.00000000 -0.00000000 AS -11.93243779 180.00000000 0.00000000 M9 (AS3) 193.02365372 -0.00000000 0.00000000 M8 88.30109261 -0.00000000 0.00000000 M7 60.05609350 0.00000000 0.00000000 M6 34.59181790 -0.00000000 -0.00000000 M5 11.25728686 -0.00000000 -0.00000000 AS2 269.72437077 0.00000000 0.00000000 M4 -12.50018064 0.00000000 -0.00000000 M3 -38.57896098 0.00000000 0.00000000 M2 -63.29951574 -0.00000000 0.00000000 M1 185.41707922 0.00000000 -0.00000000 Objektebene 0.00000000 0.00000000 0.00000000 Tabelle 5 zu Fig. 2 Oberfläche Einfallswinkel [deg] Reflektivität M10 6.54595976 0.66117442 M9 0.00927824 0.66565898 M8 75.28640231 0.80872358 M7 76.47602867 0.82797480 M6 78.19600462 0.85363243 M5 77.82112299 0.84823720 M4 78.09659958 0.85221174 M3 76.69475350 0.83137235 M2 78.51548223 0.85815147 M1 10.19566395 0.65421760 Gesamttransmission 0.0849 Tabelle 6 zu Fig. 2: Blenden-Polygon AS4 auf MIO X[mm] Y[mm] Z[mm] Typ -461.17630000 -10.30450000 -123.68161700 CLA -461.14370000 -10.80690000 -123.67061100 CLA -461.11090000 -11.30930000 -123.65984400 CLA -458.94680000 -34.79650000 -123.19019500 CLA -455.54960000 -58.06020000 -122.77715600 CLA -450.94270000 -81.03510000 -122.42063900 CLA -445.15300000 -103.65790000 -122.11947100 CLA -438.21120000 -125.86830000 -121.87186800 CLA -430.15080000 -147.60870000 -121.67507300 CLA -421.00830000 -168.82430000 -121.52571100 CLA -410.82240000 -189.46380000 -121.41976700 CLA -399.63390000 -209.47900000 -121.35274200 CLA -387.48550000 -228.82490000 -121.31983600 CLA -374.42100000 -247.45960000 -121.31578700 CLA -360.48530000 -265.34480000 -121.33532100 CLA -345.72420000 -282.44490000 -121.37301600 CLA -330.18380000 -298.72750000 -121.42343900 CLA -313.91070000 -314.16310000 -121.48136900 CLA -296.95130000 -328.72480000 -121.54158300 CLA -279.35240000 -342.38840000 -121.59932900 CLA -261.16010000 -355.13180000 -121.64979700 CLA -242.42050000 -366.93550000 -121.68877800 CLA -223.17950000 -377.78180000 -121.71231900 CLA -203.48240000 -387.65510000 -121.71685900 CLA -183.37420000 -396.54150000 -121.69922000 CLA -162.89950000 -404.42860000 -121.65654300 CLA -142.10260000 -411.30570000 -121.58649000 CLA -121.02740000 -417.16350000 -121.48711600 CLA -99.71750000 -421.99390000 -121.35681900 CLA -78.21660000 -425.79020000 -121.19454200 CLA -56.56780000 -428.54670000 -120.99947300 CLA -34.81460000 -430.25900000 -120.77135000 CLA -13.00000000 -430.92370000 -120.51021500 CLA 13.00000000 -430.92370000 -120.51021500 CLA 34.81460000 -430.25900000 -120.77135000 CLA 56.56780000 -428.54670000 -120.99947300 CLA 78.21660000 -425.79020000 -121.19454200 CLA 99.71750000 -421.99390000 -121.35681900 CLA 121.02740000 -417.16350000 -121.48711600 CLA 142.10260000 -411.30570000 -121.58649000 CLA 162.89950000 -404.42860000 -121.65654300 CLA 183.37420000 -396.54150000 -121.69922000 CLA 203.48240000 -387.65510000 -121.71685900 CLA 223.17950000 -377.78180000 -121.71231900 CLA 242.42050000 -366.93550000 -121.68877800 CLA 261.16010000 -355.13180000 -121.64979700 CLA 279.35240000 -342.38840000 -121.59932900 CLA 296.95130000 -328.72480000 -121.54158300 CLA 313.91070000 -314.16310000 -121.48136900 CLA 330.18380000 -298.72750000 -121.42343900 CLA 345.72420000 -282.44490000 -121.37301600 CLA 360.48530000 -265.34480000 -121.33532100 CLA 374.42100000 -247.45960000 -121.31578700 CLA 387.48550000 -228.82490000 -121.31983600 CLA 399.63390000 -209.47900000 -121.35274200 CLA 410.82240000 -189.46380000 -121.41976700 CLA 421.00830000 -168.82430000 -121.52571100 CLA 430.15080000 -147.60870000 -121.67507300 CLA 438.21120000 -125.86830000 -121.87186800 CLA 445.15300000 -103.65790000 -122.11947100 CLA 450.94270000 -81.03510000 -122.42063900 CLA 455.54960000 -58.06020000 -122.77715600 CLA 458.94680000 -34.79650000 -123.19019500 CLA 461.11090000 -11.30930000 -123.65984400 CLA 461.14370000 -10.80690000 -123.67061100 CLA 461.17630000 -10.30450000 -123.68161700 CLA 462.07200000 13.33840000 -124.23127700 CLA 461.70020000 37.06640000 -124.83493200 CLA 460.05040000 60.80860000 -125.48977700 CLA 457.11670000 84.49360000 -126.19215400 CLA 452.89790000 108.04900000 -126.93756000 CLA 447.39740000 131.40220000 -127.72066800 CLA 440.62340000 154.48080000 -128.53554800 CLA 432.58870000 177.21270000 -129.37563400 CLA 423.31070000 199.52670000 -130.23393200 CLA 412.81130000 221.35250000 -131.10306200 CLA 401.11660000 242.62130000 -131.97536300 CLA 388.25720000 263.26580000 -132.84316100 CLA 374.26750000 283.22060000 -133.69864500 CLA 359.18570000 302.42230000 -134.53401400 CLA 343.05410000 320.81000000 -135.34191300 CLA 325.91810000 338.32500000 -136.11492000 CLA 307.82680000 354.91130000 -136.84610300 CLA 288.83230000 370.51600000 -137.52897300 CLA 268.98990000 385.08880000 -138.15736000 CLA 248.35740000 398.58260000 -138.72547500 CLA 226.99570000 410.95380000 -139.22831200 CLA 204.96780000 422.16200000 -139.66114600 CLA 182.33920000 432.17040000 -140.01989100 CLA 159.17740000 440.94580000 -140.30093200 CLA 135.55190000 448.45910000 -140.50142200 CLA 111.53350000 454.68480000 -140.61880600 CLA 87.19500000 459.60160000 -140.65130300 CLA 85.03370000 459.95990000 -140.64206700 CLA 82.87420000 460.27350000 -140.61012400 CLA 60.44340000 463.51260000 -140.63406900 CLA 58.27810000 463.78840000 -140.64763800 CLA 56.11400000 464.01970000 -140.63824200 CLA 31.35000000 466.15680000 -140.63405600 CLA 29.18360000 466.30570000 -140.64689700 CLA 27.01770000 466.41010000 -140.63648800 CLA 2.16670000 467.12350000 -140.63527200 CLA 0.00000000 467.14560000 -140.64684300 CLA -2.16670000 467.12350000 -140.63527200 CLA -27.01770000 466.41010000 -140.63648800 CLA -29.18360000 466.30570000 -140.64689700 CLA -31.35000000 466.15680000 -140.63405600 CLA -56.11400000 464.01970000 -140.63824200 CLA -58.27810000 463.78840000 -140.64763800 CLA -60.44340000 463.51260000 -140.63406900 CLA -82.87420000 460.27350000 -140.61012400 CLA -85.03370000 459.95990000 -140.64206700 CLA -87.19500000 459.60160000 -140.65130300 CLA -111.53350000 454.68480000 -140.61880600 CLA -135.55190000 448.45910000 -140.50142200 CLA -159.17740000 440.94580000 -140.30093200 CLA -182.33920000 432.17040000 -140.01989100 CLA -204.96780000 422.16200000 -139.66114600 CLA -226.99570000 410.95380000 -139.22831200 CLA -248.35740000 398.58260000 -138.72547500 CLA -268.98990000 385.08880000 -138.15736000 CLA -288.83230000 370.51600000 -137.52897300 CLA -307.82680000 354.91130000 -136.84610300 CLA -325.91810000 338.32500000 -136.11492000 CLA -343.05410000 320.81000000 -135.34191300 CLA -359.18570000 302.42230000 -134.53401400 CLA -374.26750000 283.22060000 -133.69864500 CLA -388.25720000 263.26580000 -132.84316100 CLA -401.11660000 242.62130000 -131.97536300 CLA -412.81130000 221.35250000 -131.10306200 CLA -423.31070000 199.52670000 -130.23393200 CLA -432.58870000 177.21270000 -129.37563400 CLA -440.62340000 154.48080000 -128.53554800 CLA -447.39740000 131.40220000 -127.72066800 CLA -452.89790000 108.04900000 -126.93756000 CLA -457.11670000 84.49360000 -126.19215400 CLA -460.05040000 60.80860000 -125.48977700 CLA -461.70020000 37.06640000 -124.83493200 CLA -462.07200000 13.33840000 -124.23127700 CLA -80.22010000 -4.03830000 -3.49703600 OBS -79.85040000 -8.24600000 -3.49589700 OBS -79.26240000 -12.42650000 -3.49682100 OBS -78.45800000 -16.56850000 -3.49976000 OBS -77.43970000 -20.66080000 -3.50464600 OBS -76.21070000 -24.69220000 -3.51139700 OBS -74.77460000 -28.65180000 -3.51989700 OBS -73.13550000 -32.52900000 -3.53001100 OBS -71.29830000 -36.31350000 -3.54161400 OBS -69.26820000 -39.99490000 -3.55452900 OBS -67.05090000 -43.56360000 -3.56858700 OBS -64.65270000 -47.01010000 -3.58360900 OBS -62.08040000 -50.32510000 -3.59939800 OBS -59.34100000 -53.49990000 -3.61574600 OBS -56.44210000 -56.52620000 -3.63245400 OBS -53.39170000 -59.39590000 -3.64930800 OBS -50.19820000 -62.10160000 -3.66610900 OBS -46.87020000 -64.63610000 -3.68263800 OBS -43.41690000 -66.99280000 -3.69870200 OBS -39.84750000 -69.16560000 -3.71410300 OBS -36.17180000 -71.14880000 -3.72865900 OBS -32.39950000 -72.93730000 -3.74219000 OBS -28.54080000 -74.52650000 -3.75454100 OBS -24.60620000 -75.91210000 -3.76555400 OBS -20.60600000 -77.09070000 -3.77510700 OBS -16.55090000 -78.05910000 -3.78307400 OBS -12.45190000 -78.81500000 -3.78938100 OBS -8.31970000 -79.35630000 -3.79393700 OBS -4.16540000 -79.68160000 -3.79668900 OBS 0.00000000 -79.79010000 -3.79760700 OBS 4.16540000 -79.68160000 -3.79668900 OBS 8.31970000 -79.35630000 -3.79393700 OBS 12.45190000 -78.81500000 -3.78938100 OBS 16.55090000 -78.05910000 -3.78307400 OBS 20.60600000 -77.09070000 -3.77510700 OBS 24.60620000 -75.91210000 -3.76555400 OBS 28.54080000 -74.52650000 -3.75454100 OBS 32.39950000 -72.93730000 -3.74219000 OBS 36.17180000 -71.14880000 -3.72865900 OBS 39.84750000 -69.16560000 -3.71410300 OBS 43.41690000 -66.99280000 -3.69870200 OBS 46.87020000 -64.63610000 -3.68263800 OBS 50.19820000 -62.10160000 -3.66610900 OBS 53.39170000 -59.39590000 -3.64930800 OBS 56.44210000 -56.52620000 -3.63245400 OBS 59.34100000 -53.49990000 -3.61574600 OBS 62.08040000 -50.32510000 -3.59939800 OBS 64.65270000 -47.01010000 -3.58360900 OBS 67.05090000 -43.56360000 -3.56858700 OBS 69.26820000 -39.99490000 -3.55452900 OBS 71.29830000 -36.31350000 -3.54161400 OBS 73.13550000 -32.52900000 -3.53001100 OBS 74.77460000 -28.65180000 -3.51989700 OBS 76.21070000 -24.69220000 -3.51139700 OBS 77.43970000 -20.66080000 -3.50464600 OBS 78.45800000 -16.56850000 -3.49976000 OBS 79.26240000 -12.42650000 -3.49682100 OBS 79.85040000 -8.24600000 -3.49589700 OBS 80.22010000 -4.03830000 -3.49703600 OBS 80.37020000 0.18500000 -3.50026800 OBS 80.29980000 4.41230000 -3.50557800 OBS 80.00890000 8.63210000 -3.51295600 OBS 79.49790000 12.83260000 -3.52234900 OBS 78.76800000 17.00240000 -3.53370200 OBS 77.82080000 21.12970000 -3.54691100 OBS 76.65870000 25.20320000 -3.56187600 OBS 75.28450000 29.21160000 -3.57845900 OBS 73.70190000 33.14350000 -3.59652000 OBS 71.91490000 36.98800000 -3.61588400 OBS 69.92820000 40.73430000 -3.63637100 OBS 67.74710000 44.37190000 -3.65778900 OBS 65.37750000 47.89050000 -3.67993500 OBS 62.82570000 51.28020000 -3.70259000 OBS 60.09880000 54.53140000 -3.72554400 OBS 57.20400000 57.63490000 -3.74855800 OBS 54.14950000 60.58180000 -3.77141500 OBS 50.94340000 63.36380000 -3.79387700 OBS 47.59480000 65.97300000 -3.81573800 OBS 44.11290000 68.40190000 -3.83677000 OBS 40.50730000 70.64350000 -3.85675400 OBS 36.78810000 72.69160000 -3.87551000 OBS 32.96560000 74.54010000 -3.89282800 OBS 29.05060000 76.18390000 -3.90855500 OBS 25.05390000 77.61810000 -3.92250900 OBS 20.98680000 78.83880000 -3.93457400 OBS 16.86070000 79.84230000 -3.94461000 OBS 12.68720000 80.62590000 -3.95253200 OBS 8.47800000 81.18720000 -3.95824500 OBS 4.24500000 81.52460000 -3.96169400 OBS 0.00000000 81.63720000 -3.96285000 OBS -4.24500000 81.52460000 -3.96169400 OBS -8.47800000 81.18720000 -3.95824500 OBS -12.68720000 80.62590000 -3.95253200 OBS -16.86070000 79.84230000 -3.94461000 OBS -20.98680000 78.83880000 -3.93457400 OBS -25.05390000 77.61810000 -3.92250900 OBS -29.05060000 76.18390000 -3.90855500 OBS -32.96560000 74.54010000 -3.89282800 OBS -36.78810000 72.69160000 -3.87551000 OBS -40.50730000 70.64350000 -3.85675400 OBS -44.11290000 68.40190000 -3.83677000 OBS -47.59480000 65.97300000 -3.81573800 OBS -50.94340000 63.36380000 -3.79387700 OBS -54.14950000 60.58180000 -3.77141500 OBS -57.20400000 57.63490000 -3.74855800 OBS -60.09880000 54.53140000 -3.72554400 OBS -62.82570000 51.28020000 -3.70259000 OBS -65.37750000 47.89050000 -3.67993500 OBS -67.74710000 44.37190000 -3.65778900 OBS -69.92820000 40.73430000 -3.63637100 OBS -71.91490000 36.98800000 -3.61588400 OBS -73.70190000 33.14350000 -3.59652000 OBS -75.28450000 29.21160000 -3.57845900 OBS -76.65870000 25.20320000 -3.56187600 OBS -77.82080000 21.12970000 -3.54691100 OBS -78.76800000 17.00240000 -3.53370200 OBS -79.49790000 12.83260000 -3.52234900 OBS -80.00890000 8.63210000 -3.51295600 OBS -80.29980000 4.41230000 -3.50557800 OBS -80.37020000 0.18500000 -3.50026800 OBS Tabelle 7 zu Fig. 2: Blenden-Polygon AS3 auf M9 X[mm] Y[mm] Z[mm] Typ 4.84286400 -99.11799200 13.02505600 CLA 7.85158500 -99.08636500 13.03128500 CLA 10.85934400 -99.01479100 13.03396300 CLA 13.86529000 -98.90330900 13.03309700 CLA 16.86857600 -98.75198300 13.02870000 CLA 19.86835400 -98.56090100 13.02079000 CLA 22.86377600 -98.33017600 13.00939400 CLA 25.85399400 -98.05994200 12.99454200 CLA 28.83816300 -97.75035900 12.97627200 CLA 31.81543500 -97.40160900 12.95462800 CLA 34.78496400 -97.01390100 12.92965900 CLA 37.74590400 -96.58746300 12.90142000 CLA 40.69741000 -96.12254800 12.86997200 CLA 43.63863800 -95.61943400 12.83538200 CLA 46.56874100 -95.07841700 12.79772100 CLA 49.48687600 -94.49982100 12.75706600 CLA 52.39220000 -93.88398800 12.71349900 CLA 55.28386700 -93.23128500 12.66710800 CLA 58.16103600 -92.54210000 12.61798300 CLA 61.02286300 -91.81684200 12.56622100 CLA 63.86850500 -91.05594200 12.51192300 CLA 66.69712100 -90.25985100 12.45519300 CLA 69.50786800 -89.42904300 12.39613800 CLA 72.29990300 -88.56401000 12.33487100 CLA 75.07238700 -87.66526400 12.27150700 CLA 77.82447700 -86.73333900 12.20616400 CLA 80.55533200 -85.76878700 12.13896300 CLA 83.26411300 -84.77217700 12.07002700 CLA 85.94997800 -83.74410000 11.99948200 CLA 88.61208700 -82.68516400 11.92745500 CLA 91.24960200 -81.59599200 11.85407600 CLA 93.86168200 -80.47722800 11.77947400 CLA 96.44749000 -79.32953100 11.70378200 CLA 99.00618600 -78.15357600 11.62713100 CLA 101.53693500 -76.95005500 11.54965500 CLA 104.03889900 -75.71967300 11.47148400 CLA 106.51124400 -74.46315300 11.39275200 CLA 108.95313400 -73.18123000 11.31359000 CLA 111.36373800 -71.87465300 11.23412900 CLA 113.74222400 -70.54418400 11.15449900 CLA 116.08776400 -69.19059800 11.07482700 CLA 118.39952900 -67.81468200 10.99523900 CLA 120.67669700 -66.41723400 10.91585800 CLA 122.91844500 -64.99906200 10.83680800 CLA 125.12395600 -63.56098300 10.75820500 CLA 127.29241500 -62.10382700 10.68016600 CLA 129.42301300 -60.62842900 10.60280200 CLA 131.51494400 -59.13563200 10.52622100 CLA 133.56740800 -57.62628900 10.45052900 CLA 135.57961200 -56.10125500 10.37582600 CLA 137.55076900 -54.56139500 10.30220800 CLA 139.48009800 -53.00757600 10.22976600 CLA 141.36682700 -51.44067000 10.15858700 CLA 143.21019400 -49.86155100 10.08875200 CLA 145.00944500 -48.27109700 10.02033800 CLA 146.76383500 -46.67018700 9.95341600 CLA 148.47263400 -45.05970100 9.88805200 CLA 150.13511900 -43.44051700 9.82430600 CLA 151.75058600 -41.81351600 9.76223200 CLA 153.31833900 -40.17957300 9.70188000 CLA 154.83770000 -38.53956200 9.64329100 CLA 156.30800600 -36.89435500 9.58650400 CLA 157.72861100 -35.24481700 9.53154900 CLA 159.09888600 -33.59180900 9.47845200 CLA 160.41822100 -31.93618600 9.42723300 CLA 161.68602700 -30.27879600 9.37790600 CLA 162.90173400 -28.62047800 9.33047800 CLA 164.06479400 -26.96206400 9.28495300 CLA 165.17468100 -25.30437400 9.24132800 CLA 166.23089600 -23.64822000 9.19959500 CLA 167.23296000 -21.99440100 9.15974000 CLA 168.18042200 -20.34370400 9.12174400 CLA 169.07285800 -18.69690500 9.08558600 CLA 169.90987000 -17.05476300 9.05123700 CLA 170.69108900 -15.41802500 9.01866400 CLA 171.41617600 -13.78742200 8.98783100 CLA 172.08482000 -12.16366800 8.95869900 CLA 172.69674200 -10.54746200 8.93122200 CLA 173.25169300 -8.93948200 8.90535300 CLA 173.74945900 -7.34039300 8.88104200 CLA 174.18985600 -5.75083700 8.85823500 CLA 174.57273400 -4.17143900 8.83687700 CLA 174.89797700 -2.60280200 8.81690800 CLA 175.16550300 -1.04551200 8.79826900 CLA 175.37526600 0.49987000 8.78089700 CLA 175.52725300 2.03280000 8.76473000 CLA 175.62148800 3.55276000 8.74970400 CLA 175.65802900 5.05924900 8.73575300 CLA 175.63697200 6.55179200 8.72281100 CLA 175.55844600 8.02993500 8.71081500 CLA 175.42261700 9.49324500 8.69969700 CLA 175.38539800 9.80003000 8.69732700 CLA 175.34809200 10.10667300 8.69525000 CLA 175.15412300 11.55752300 8.68773500 CLA 174.90330200 12.99272200 8.68099300 CLA 174.59590200 14.41190500 8.67496000 CLA 174.23223100 15.81472800 8.66957100 CLA 173.81263200 17.20086900 8.66476500 CLA 173.33748100 18.57003000 8.66048000 CLA 172.80718800 19.92193100 8.65665800 CLA 172.22219700 21.25631700 8.65324100 CLA 171.58298300 22.57295200 8.65017400 CLA 170.89005200 23.87162200 8.64740500 CLA 170.14394200 25.15213000 8.64488200 CLA 169.34522100 26.41430400 8.64255700 CLA 168.49448300 27.65798500 8.64038500 CLA 167.59235100 28.88303600 8.63832200 CLA 166.63947600 30.08933900 8.63632700 CLA 165.63653300 31.27679100 8.63436300 CLA 164.58422100 32.44530500 8.63239300 CLA 163.48326100 33.59481300 8.63038500 CLA 162.33439800 34.72526000 8.62830800 CLA 161.13839400 35.83660600 8.62613300 CLA 159.89603300 36.92882800 8.62383600 CLA 158.60811400 38.00191100 8.62139200 CLA 157.27545200 39.05585700 8.61878100 CLA 155.89887800 40.09067900 8.61598400 CLA 154.47923500 41.10640100 8.61298400 CLA 153.01737700 42.10305600 8.60976600 CLA 151.51416800 43.08069100 8.60631800 CLA 149.97048100 44.03935900 8.60262700 CLA 148.38719700 44.97912400 8.59868500 CLA 146.76520100 45.90005600 8.59448400 CLA 145.10538200 46.80223400 8.59001600 CLA 143.40863300 47.68574500 8.58527800 CLA 141.67584700 48.55068000 8.58026500 CLA 139.90791900 49.39713900 8.57497400 CLA 138.10574000 50.22522400 8.56940300 CLA 136.27020000 51.03504600 8.56355300 CLA 134.40218600 51.82671600 8.55742300 CLA 132.50257900 52.60035400 8.55101300 CLA 130.57225300 53.35607900 8.54432600 CLA 128.61207800 54.09401600 8.53736300 CLA 126.62291300 54.81429200 8.53012900 CLA 124.60561000 55.51703600 8.52262400 CLA 122.56100900 56.20238000 8.51485500 CLA 120.48994200 56.87045700 8.50682400 CLA 118.39322700 57.52140200 8.49853600 CLA 116.27167300 58.15535000 8.48999600 CLA 114.12607300 58.77243800 8.48121000 CLA 111.95721000 59.37280200 8.47218200 CLA 109.76585200 59.95657900 8.46291800 CLA 107.55275100 60.52390700 8.45342400 CLA 105.31864900 61.07492200 8.44370700 CLA 103.06426900 61.60976000 8.43377100 CLA 100.79032200 62.12855600 8.42362400 CLA 98.49750200 62.63144500 8.41327300 CLA 96.18649100 63.11855800 8.40272300 CLA 93.85795200 63.59002800 8.39198300 CLA 91.51253500 64.04598500 8.38105800 CLA 89.15087400 64.48655600 8.36995600 CLA 86.77358900 64.91186800 8.35868400 CLA 84.38128500 65.32204300 8.34725000 CLA 81.97455100 65.71720500 8.33566100 CLA 78.45385800 66.27039900 8.31981800 CLA 76.01539200 66.63736900 8.30974800 CLA 73.56432400 66.98967000 8.29955700 CLA 71.10119300 67.32741100 8.28925400 CLA 67.51185900 67.79723300 8.27551900 CLA 65.02213500 68.10760200 8.26679900 CLA 62.52204800 68.40372000 8.25799800 CLA 60.01208900 68.68568400 8.24912300 CLA 57.49274100 68.95358600 8.24018000 CLA 56.36541400 69.07342900 8.23728900 CLA 53.83371600 69.32874400 8.23006100 CLA 51.29372900 69.57017000 8.22278900 CLA 48.74590700 69.79778900 8.21547800 CLA 46.19069200 70.01168000 8.20813500 CLA 45.05275500 70.10458800 8.20539400 CLA 42.48779600 70.30617100 8.19979100 CLA 39.91648700 70.49416600 8.19417400 CLA 37.33924700 70.66863900 8.18855000 CLA 34.75648600 70.82965300 8.18292200 CLA 31.02012900 71.04435900 8.17624900 CLA 28.42562400 71.17993400 8.17239700 CLA 25.82698800 71.30220600 8.16856000 CLA 23.22460800 71.41121700 8.16474300 CLA 20.61886600 71.50700800 8.16094900 CLA 19.46491600 71.54680900 8.15967700 CLA 16.85499600 71.63071000 8.15767300 CLA 14.24266800 71.70145500 8.15570100 CLA 11.62830600 71.75906800 8.15376400 CLA 9.01227700 71.80357000 8.15186200 CLA 6.39495000 71.83497800 8.14999800 CLA 5.23741300 71.84868600 8.15017200 CLA 2.61888900 71.86829900 8.15011200 CLA 0.00000000 71.87483500 8.15009100 CLA -2.61888900 71.86829900 8.15011200 CLA -5.23741300 71.84868600 8.15017200 CLA -6.39495000 71.83497800 8.14999800 CLA -9.01227700 71.80357000 8.15186200 CLA -11.62830600 71.75906800 8.15376400 CLA -14.24266800 71.70145500 8.15570100 CLA -16.85499600 71.63071000 8.15767300 CLA -19.46491600 71.54680900 8.15967700 CLA -20.61886600 71.50700800 8.16094900 CLA -23.22460800 71.41121700 8.16474300 CLA -25.82698800 71.30220600 8.16856000 CLA -28.42562400 71.17993400 8.17239700 CLA -31.02012900 71.04435900 8.17624900 CLA -34.75648600 70.82965300 8.18292200 CLA -37.33924700 70.66863900 8.18855000 CLA -39.91648700 70.49416600 8.19417400 CLA -42.48779600 70.30617100 8.19979100 CLA -45.05275500 70.10458800 8.20539400 CLA -46.19069200 70.01168000 8.20813500 CLA -48.74590700 69.79778900 8.21547800 CLA -51.29372900 69.57017000 8.22278900 CLA -53.83371600 69.32874400 8.23006100 CLA -56.36541400 69.07342900 8.23728900 CLA -57.49274100 68.95358600 8.24018000 CLA -60.01208900 68.68568400 8.24912300 CLA -62.52204800 68.40372000 8.25799800 CLA -65.02213500 68.10760200 8.26679900 CLA -67.51185900 67.79723300 8.27551900 CLA -71.10119300 67.32741100 8.28925400 CLA -73.56432400 66.98967000 8.29955700 CLA -76.01539200 66.63736900 8.30974800 CLA -78.45385800 66.27039900 8.31981800 CLA -81.97455100 65.71720500 8.33566100 CLA -84.38128500 65.32204300 8.34725000 CLA -86.77358900 64.91186800 8.35868400 CLA -89.15087400 64.48655600 8.36995600 CLA -91.51253500 64.04598500 8.38105800 CLA -93.85795200 63.59002800 8.39198300 CLA -96.18649100 63.11855800 8.40272300 CLA -98.49750200 62.63144500 8.41327300 CLA -100.79032200 62.12855600 8.42362400 CLA -103.06426900 61.60976000 8.43377100 CLA -105.31864900 61.07492200 8.44370700 CLA -107.55275100 60.52390700 8.45342400 CLA -109.76585200 59.95657900 8.46291800 CLA -111.95721000 59.37280200 8.47218200 CLA -114.12607300 58.77243800 8.48121000 CLA -116.27167300 58.15535000 8.48999600 CLA -118.39322700 57.52140200 8.49853600 CLA -120.48994200 56.87045700 8.50682400 CLA -122.56100900 56.20238000 8.51485500 CLA -124.60561000 55.51703600 8.52262400 CLA -126.62291300 54.81429200 8.53012900 CLA -128.61207800 54.09401600 8.53736300 CLA -130.57225300 53.35607900 8.54432600 CLA -132.50257900 52.60035400 8.55101300 CLA -134.40218600 51.82671600 8.55742300 CLA -136.27020000 51.03504600 8.56355300 CLA -138.10574000 50.22522400 8.56940300 CLA -139.90791900 49.39713900 8.57497400 CLA -141.67584700 48.55068000 8.58026500 CLA -143.40863300 47.68574500 8.58527800 CLA -145.10538200 46.80223400 8.59001600 CLA -146.76520100 45.90005600 8.59448400 CLA -148.38719700 44.97912400 8.59868500 CLA -149.97048100 44.03935900 8.60262700 CLA -151.51416800 43.08069100 8.60631800 CLA -153.01737700 42.10305600 8.60976600 CLA -154.47923500 41.10640100 8.61298400 CLA -155.89887800 40.09067900 8.61598400 CLA -157.27545200 39.05585700 8.61878100 CLA -158.60811400 38.00191100 8.62139200 CLA -159.89603300 36.92882800 8.62383600 CLA -161.13839400 35.83660600 8.62613300 CLA -162.33439800 34.72526000 8.62830800 CLA -163.48326100 33.59481300 8.63038500 CLA -164.58422100 32.44530500 8.63239300 CLA -165.63653300 31.27679100 8.63436300 CLA -166.63947600 30.08933900 8.63632700 CLA -167.59235100 28.88303600 8.63832200 CLA -168.49448300 27.65798500 8.64038500 CLA -169.34522100 26.41430400 8.64255700 CLA -170.14394200 25.15213000 8.64488200 CLA -170.89005200 23.87162200 8.64740500 CLA -171.58298300 22.57295200 8.65017400 CLA -172.22219700 21.25631700 8.65324100 CLA -172.80718800 19.92193100 8.65665800 CLA -173.33748100 18.57003000 8.66048000 CLA -173.81263200 17.20086900 8.66476500 CLA -174.23223100 15.81472800 8.66957100 CLA -174.59590200 14.41190500 8.67496000 CLA -174.90330200 12.99272200 8.68099300 CLA -175.15412300 11.55752300 8.68773500 CLA -175.34809200 10.10667300 8.69525000 CLA -175.38539800 9.80003000 8.69732700 CLA -175.42261700 9.49324500 8.69969700 CLA -175.55844600 8.02993500 8.71081500 CLA -175.63697200 6.55179200 8.72281100 CLA -175.65802900 5.05924900 8.73575300 CLA -175.62148800 3.55276000 8.74970400 CLA -175.52725300 2.03280000 8.76473000 CLA -175.37526600 0.49987000 8.78089700 CLA -175.16550300 -1.04551200 8.79826900 CLA -174.89797700 -2.60280200 8.81690800 CLA -174.57273400 -4.17143900 8.83687700 CLA -174.18985600 -5.75083700 8.85823500 CLA -173.74945900 -7.34039300 8.88104200 CLA -173.25169300 -8.93948200 8.90535300 CLA -172.69674200 -10.54746200 8.93122200 CLA -172.08482000 -12.16366800 8.95869900 CLA -171.41617600 -13.78742200 8.98783100 CLA -170.69108900 -15.41802500 9.01866400 CLA -169.90987000 -17.05476300 9.05123700 CLA -169.07285800 -18.69690500 9.08558600 CLA -168.18042200 -20.34370400 9.12174400 CLA -167.23296000 -21.99440100 9.15974000 CLA -166.23089600 -23.64822000 9.19959500 CLA -165.17468100 -25.30437400 9.24132800 CLA -164.06479400 -26.96206400 9.28495300 CLA -162.90173400 -28.62047800 9.33047800 CLA -161.68602700 -30.27879600 9.37790600 CLA -160.41822100 -31.93618600 9.42723300 CLA -159.09888600 -33.59180900 9.47845200 CLA -157.72861100 -35.24481700 9.53154900 CLA -156.30800600 -36.89435500 9.58650400 CLA -154.83770000 -38.53956200 9.64329100 CLA -153.31833900 -40.17957300 9.70188000 CLA -151.75058600 -41.81351600 9.76223200 CLA -150.13511900 -43.44051700 9.82430600 CLA -148.47263400 -45.05970100 9.88805200 CLA -146.76383500 -46.67018700 9.95341600 CLA -145.00944500 -48.27109700 10.02033800 CLA -143.21019400 -49.86155100 10.08875200 CLA -141.36682700 -51.44067000 10.15858700 CLA -139.48009800 -53.00757600 10.22976600 CLA -137.55076900 -54.56139500 10.30220800 CLA -135.57961200 -56.10125500 10.37582600 CLA -133.56740800 -57.62628900 10.45052900 CLA -131.51494400 -59.13563200 10.52622100 CLA -129.42301300 -60.62842900 10.60280200 CLA -127.29241500 -62.10382700 10.68016600 CLA -125.12395600 -63.56098300 10.75820500 CLA -122.91844500 -64.99906200 10.83680800 CLA -120.67669700 -66.41723400 10.91585800 CLA -118.39952900 -67.81468200 10.99523900 CLA -116.08776400 -69.19059800 11.07482700 CLA -113.74222400 -70.54418400 11.15449900 CLA -111.36373800 -71.87465300 11.23412900 CLA -108.95313400 -73.18123000 11.31359000 CLA -106.51124400 -74.46315300 11.39275200 CLA -104.03889900 -75.71967300 11.47148400 CLA -101.53693500 -76.95005500 11.54965500 CLA -99.00618600 -78.15357600 11.62713100 CLA -96.44749000 -79.32953100 11.70378200 CLA -93.86168200 -80.47722800 11.77947400 CLA -91.24960200 -81.59599200 11.85407600 CLA -88.61208700 -82.68516400 11.92745500 CLA -85.94997800 -83.74410000 11.99948200 CLA -83.26411300 -84.77217700 12.07002700 CLA -80.55533200 -85.76878700 12.13896300 CLA -77.82447700 -86.73333900 12.20616400 CLA -75.07238700 -87.66526400 12.27150700 CLA -72.29990300 -88.56401000 12.33487100 CLA -69.50786800 -89.42904300 12.39613800 CLA -66.69712100 -90.25985100 12.45519300 CLA -63.86850500 -91.05594200 12.51192300 CLA -61.02286300 -91.81684200 12.56622100 CLA -58.16103600 -92.54210000 12.61798300 CLA -55.28386700 -93.23128500 12.66710800 CLA -52.39220000 -93.88398800 12.71349900 CLA -49.48687600 -94.49982100 12.75706600 CLA -46.56874100 -95.07841700 12.79772100 CLA -43.63863800 -95.61943400 12.83538200 CLA -40.69741000 -96.12254800 12.86997200 CLA -37.74590400 -96.58746300 12.90142000 CLA -34.78496400 -97.01390100 12.92965900 CLA -31.81543500 -97.40160900 12.95462800 CLA -28.83816300 -97.75035900 12.97627200 CLA -25.85399400 -98.05994200 12.99454200 CLA -22.86377600 -98.33017600 13.00939400 CLA -19.86835400 -98.56090100 13.02079000 CLA -16.86857600 -98.75198300 13.02870000 CLA -13.86529000 -98.90330900 13.03309700 CLA -10.85934400 -99.01479100 13.03396300 CLA -7.85158500 -99.08636500 13.03128500 CLA -4.84286400 -99.11799200 13.02505600 CLA Tabelle 8 zu Fig. 2: Blenden-Polygon AS2 X[mm] Y[mm] Z[mm] Typ 0.00000000 -51.07217300 0.00000000 CLA 2.66162300 -51.05712900 0.00000000 CLA 5.32262300 -51.01202200 0.00000000 CLA 7.98237900 -50.93692400 0.00000000 CLA 10.64026700 -50.83195500 0.00000000 CLA 13.29566300 -50.69728600 0.00000000 CLA 16.66141500 -50.51366500 0.00000000 CLA 19.31292800 -50.34884700 0.00000000 CLA 21.96055600 -50.15484900 0.00000000 CLA 24.60366900 -49.93198400 0.00000000 CLA 27.24163700 -49.68060900 0.00000000 CLA 29.87382300 -49.40112300 0.00000000 CLA 32.49958900 -49.09397300 0.00000000 CLA 35.11829400 -48.75964300 0.00000000 CLA 37.72929300 -48.39866000 0.00000000 CLA 40.33193500 -48.01158900 0.00000000 CLA 42.92556700 -47.59903300 0.00000000 CLA 46.28092200 -47.05364500 0.00000000 CLA 48.86277100 -46.61658100 0.00000000 CLA 51.43416400 -46.15546400 0.00000000 CLA 53.99443400 -45.67100300 0.00000000 CLA 56.54291400 -45.16393500 0.00000000 CLA 59.07892900 -44.63502300 0.00000000 CLA 61.60180100 -44.08505900 0.00000000 CLA 64.11084700 -43.51485800 0.00000000 CLA 66.60538000 -42.92525600 0.00000000 CLA 69.08470900 -42.31710800 0.00000000 CLA 71.54813700 -41.69128700 0.00000000 CLA 73.99496400 -41.04868100 0.00000000 CLA 77.32711100 -40.16178300 0.00000000 CLA 79.75318800 -39.50583000 0.00000000 CLA 82.16115000 -38.83509200 0.00000000 CLA 84.55029100 -38.15048500 0.00000000 CLA 86.91990000 -37.45293200 0.00000000 CLA 89.26926400 -36.74335900 0.00000000 CLA 91.59766700 -36.02268900 0.00000000 CLA 93.90439200 -35.29184800 0.00000000 CLA 96.18871900 -34.55175500 0.00000000 CLA 98.44992800 -33.80332300 0.00000000 CLA 100.68729600 -33.04745700 0.00000000 CLA 102.90010300 -32.28505400 0.00000000 CLA 105.08762600 -31.51699400 0.00000000 CLA 107.24914300 -30.74414800 0.00000000 CLA 110.53967800 -29.56667400 0.00000000 CLA 112.66988600 -28.79613300 0.00000000 CLA 114.77260000 -28.02271900 0.00000000 CLA 116.84710900 -27.24724600 0.00000000 CLA 118.89270500 -26.47050500 0.00000000 CLA 120.90868100 -25.69326600 0.00000000 CLA 122.89433700 -24.91627500 0.00000000 CLA 124.84897500 -24.14025500 0.00000000 CLA 126.77190300 -23.36590300 0.00000000 CLA 128.66243200 -22.59388900 0.00000000 CLA 130.51988200 -21.82485700 0.00000000 CLA 132.34357700 -21.05942300 0.00000000 CLA 134.13284800 -20.29817500 0.00000000 CLA 139.12975100 -18.15044400 0.00000000 CLA 140.84325800 -17.41013300 0.00000000 CLA 142.52041200 -16.67583600 0.00000000 CLA 144.16058200 -15.94802200 0.00000000 CLA 145.76315200 -15.22712800 0.00000000 CLA 147.32751100 -14.51356500 0.00000000 CLA 148.85306200 -13.80771400 0.00000000 CLA 150.33921700 -13.10992800 0.00000000 CLA 151.78540100 -12.42053200 0.00000000 CLA 153.19104900 -11.73982500 0.00000000 CLA 157.77094000 -9.51969600 0.00000000 CLA 159.08933500 -8.87263300 0.00000000 CLA 160.36567200 -8.23521200 0.00000000 CLA 161.59944400 -7.60762000 0.00000000 CLA 162.79016200 -6.99001600 0.00000000 CLA 168.25884800 -4.10019400 0.00000000 CLA 169.31360100 -3.53291500 0.00000000 CLA 170.32361200 -2.97624700 0.00000000 CLA 171.28847200 -2.43022900 0.00000000 CLA 172.20778900 -1.89488100 0.00000000 CLA 173.08118800 -1.37020400 0.00000000 CLA 173.90830900 -0.85618200 0.00000000 CLA 174.68881100 -0.35278100 0.00000000 CLA 175.42236900 0.14004600 0.00000000 CLA 176.10867700 0.62236100 0.00000000 CLA 176.74744700 1.09424200 0.00000000 CLA 177.33840900 1.55577700 0.00000000 CLA 177.88131100 2.00706600 0.00000000 CLA 178.37592300 2.44822100 0.00000000 CLA 178.82203000 2.87936300 0.00000000 CLA 179.21943900 3.30062300 0.00000000 CLA 179.56797700 3.71213700 0.00000000 CLA 179.86749000 4.11405300 0.00000000 CLA 180.11784600 4.50652200 0.00000000 CLA 180.31893000 4.88970200 0.00000000 CLA 180.47065100 5.26375500 0.00000000 CLA 180.57293600 5.62884900 0.00000000 CLA 180.62573500 5.98515500 0.00000000 CLA 180.62901800 6.33284500 0.00000000 CLA 180.33196700 9.56040600 0.00000000 CLA 180.27786300 9.81759200 0.00000000 CLA 180.17435700 10.06691200 0.00000000 CLA 180.02149000 10.30860600 0.00000000 CLA 179.81932900 10.54291500 0.00000000 CLA 179.56796000 10.77007600 0.00000000 CLA 179.26749000 10.99032400 0.00000000 CLA 178.91804700 11.20389000 0.00000000 CLA 178.51978200 11.41100300 0.00000000 CLA 178.07286600 11.61188400 0.00000000 CLA 177.57749000 11.80675200 0.00000000 CLA 177.03386800 11.99581700 0.00000000 CLA 176.44223200 12.17928800 0.00000000 CLA 175.80283600 12.35736300 0.00000000 CLA 175.11595400 12.53023600 0.00000000 CLA 174.38187900 12.69809300 0.00000000 CLA 173.60092400 12.86111400 0.00000000 CLA 172.77342100 13.01947100 0.00000000 CLA 171.89972000 13.17333000 0.00000000 CLA 170.98019200 13.32284900 0.00000000 CLA 170.01522300 13.46817800 0.00000000 CLA 169.00522000 13.60946100 0.00000000 CLA 167.95060400 13.74683400 0.00000000 CLA 166.85181400 13.88042800 0.00000000 CLA 165.70930800 14.01036400 0.00000000 CLA 164.52355600 14.13675900 0.00000000 CLA 163.29504700 14.25972400 0.00000000 CLA 162.02428100 14.37936100 0.00000000 CLA 160.71177700 14.49576800 0.00000000 CLA 159.35806500 14.60903800 0.00000000 CLA 157.96368900 14.71925700 0.00000000 CLA 156.52920600 14.82650700 0.00000000 CLA 155.05518600 14.93086500 0.00000000 CLA 153.54220900 15.03240400 0.00000000 CLA 151.99086900 15.13119100 0.00000000 CLA 150.40176700 15.22729100 0.00000000 CLA 148.77551600 15.32076500 0.00000000 CLA 140.28917500 15.78795200 0.00000000 CLA 138.45153000 15.88904100 0.00000000 CLA 136.58103900 15.98734800 0.00000000 CLA 134.67837300 16.08292400 0.00000000 CLA 132.74420600 16.17581600 0.00000000 CLA 130.77921500 16.26607100 0.00000000 CLA 128.78408300 16.35373200 0.00000000 CLA 126.75949200 16.43884200 0.00000000 CLA 124.70613000 16.52144200 0.00000000 CLA 122.62468400 16.60157100 0.00000000 CLA 120.51584300 16.67926800 0.00000000 CLA 118.38029500 16.75456800 0.00000000 CLA 116.21873100 16.82751000 0.00000000 CLA 114.03183800 16.89812500 0.00000000 CLA 111.82030400 16.96645000 0.00000000 CLA 109.58481400 17.03251500 0.00000000 CLA 107.32605400 17.09635200 0.00000000 CLA 105.04470300 17.15799200 0.00000000 CLA 102.74144100 17.21746500 0.00000000 CLA 100.41694300 17.27479900 0.00000000 CLA 98.07188300 17.33002300 0.00000000 CLA 95.70692900 17.38316200 0.00000000 CLA 93.32274600 17.43424400 0.00000000 CLA 90.91999500 17.48329300 0.00000000 CLA 88.49933400 17.53033300 0.00000000 CLA 86.06141500 17.57538800 0.00000000 CLA 83.60688700 17.61847900 0.00000000 CLA 81.13639500 17.65962900 0.00000000 CLA 78.65057900 17.69885600 0.00000000 CLA 76.15007600 17.73618100 0.00000000 CLA 73.63551600 17.77162000 0.00000000 CLA 71.10752900 17.80519100 0.00000000 CLA 68.56673900 17.83690900 0.00000000 CLA 66.01376800 17.86678700 0.00000000 CLA 63.44923300 17.89484000 0.00000000 CLA 60.87374900 17.92107700 0.00000000 CLA 58.28792900 17.94551000 0.00000000 CLA 55.69238400 17.96814600 0.00000000 CLA 53.08772000 17.98899400 0.00000000 CLA 50.47454600 18.00805700 0.00000000 CLA 47.85346800 18.02534000 0.00000000 CLA 45.22509000 18.04084600 0.00000000 CLA 42.59001700 18.05457500 0.00000000 CLA 39.94885600 18.06652700 0.00000000 CLA 37.30221200 18.07669900 0.00000000 CLA 34.65069400 18.08508600 0.00000000 CLA 31.99491000 18.09168300 0.00000000 CLA 29.33547200 18.09648300 0.00000000 CLA 26.67299600 18.09947600 0.00000000 CLA 24.00809900 18.10065300 0.00000000 CLA -24.00809900 18.10065300 0.00000000 CLA -26.67299600 18.09947600 0.00000000 CLA -29.33547200 18.09648300 0.00000000 CLA -31.99491000 18.09168300 0.00000000 CLA -34.65069400 18.08508600 0.00000000 CLA -37.30221200 18.07669900 0.00000000 CLA -39.94885600 18.06652700 0.00000000 CLA -42.59001700 18.05457500 0.00000000 CLA -45.22509000 18.04084600 0.00000000 CLA -47.85346800 18.02534000 0.00000000 CLA -50.47454600 18.00805700 0.00000000 CLA -53.08772000 17.98899400 0.00000000 CLA -55.69238400 17.96814600 0.00000000 CLA -58.28792900 17.94551000 0.00000000 CLA -60.87374900 17.92107700 0.00000000 CLA -63.44923300 17.89484000 0.00000000 CLA -66.01376800 17.86678700 0.00000000 CLA -68.56673900 17.83690900 0.00000000 CLA -71.10752900 17.80519100 0.00000000 CLA -73.63551600 17.77162000 0.00000000 CLA -76.15007600 17.73618100 0.00000000 CLA -78.65057900 17.69885600 0.00000000 CLA -81.13639500 17.65962900 0.00000000 CLA -83.60688700 17.61847900 0.00000000 CLA -86.06141500 17.57538800 0.00000000 CLA -88.49933400 17.53033300 0.00000000 CLA -90.91999500 17.48329300 0.00000000 CLA -93.32274600 17.43424400 0.00000000 CLA -95.70692900 17.38316200 0.00000000 CLA -98.07188300 17.33002300 0.00000000 CLA -100.41694300 17.27479900 0.00000000 CLA -102.74144100 17.21746500 0.00000000 CLA -105.04470300 17.15799200 0.00000000 CLA -107.32605400 17.09635200 0.00000000 CLA -109.58481400 17.03251500 0.00000000 CLA -111.82030400 16.96645000 0.00000000 CLA -114.03183800 16.89812500 0.00000000 CLA -116.21873100 16.82751000 0.00000000 CLA -118.38029500 16.75456800 0.00000000 CLA -120.51584300 16.67926800 0.00000000 CLA -122.62468400 16.60157100 0.00000000 CLA -124.70613000 16.52144200 0.00000000 CLA -126.75949200 16.43884200 0.00000000 CLA -128.78408300 16.35373200 0.00000000 CLA -130.77921500 16.26607100 0.00000000 CLA -132.74420600 16.17581600 0.00000000 CLA -134.67837300 16.08292400 0.00000000 CLA -136.58103900 15.98734800 0.00000000 CLA -138.45153000 15.88904100 0.00000000 CLA -140.28917500 15.78795200 0.00000000 CLA -148.77551600 15.32076500 0.00000000 CLA -150.40176700 15.22729100 0.00000000 CLA -151.99086900 15.13119100 0.00000000 CLA -153.54220900 15.03240400 0.00000000 CLA -155.05518600 14.93086500 0.00000000 CLA -156.52920600 14.82650700 0.00000000 CLA -157.96368900 14.71925700 0.00000000 CLA -159.35806500 14.60903800 0.00000000 CLA -160.71177700 14.49576800 0.00000000 CLA -162.02428100 14.37936100 0.00000000 CLA -163.29504700 14.25972400 0.00000000 CLA -164.52355600 14.13675900 0.00000000 CLA -165.70930800 14.01036400 0.00000000 CLA -166.85181400 13.88042800 0.00000000 CLA -167.95060400 13.74683400 0.00000000 CLA -169.00522000 13.60946100 0.00000000 CLA -170.01522300 13.46817800 0.00000000 CLA -170.98019200 13.32284900 0.00000000 CLA -171.89972000 13.17333000 0.00000000 CLA -172.77342100 13.01947100 0.00000000 CLA -173.60092400 12.86111400 0.00000000 CLA -174.38187900 12.69809300 0.00000000 CLA -175.11595400 12.53023600 0.00000000 CLA -175.80283600 12.35736300 0.00000000 CLA -176.44223200 12.17928800 0.00000000 CLA -177.03386800 11.99581700 0.00000000 CLA -177.57749000 11.80675200 0.00000000 CLA -178.07286600 11.61188400 0.00000000 CLA -178.51978200 11.41100300 0.00000000 CLA -178.91804700 11.20389000 0.00000000 CLA -179.26749000 10.99032400 0.00000000 CLA -179.56796000 10.77007600 0.00000000 CLA -179.81932900 10.54291500 0.00000000 CLA -180.02149000 10.30860600 0.00000000 CLA -180.17435700 10.06691200 0.00000000 CLA -180.27786300 9.81759200 0.00000000 CLA -180.33196700 9.56040600 0.00000000 CLA -180.62901800 6.33284500 0.00000000 CLA -180.62573500 5.98515500 0.00000000 CLA -180.57293600 5.62884900 0.00000000 CLA -180.47065100 5.26375500 0.00000000 CLA -180.31893000 4.88970200 0.00000000 CLA -180.11784600 4.50652200 0.00000000 CLA -179.86749000 4.11405300 0.00000000 CLA -179.56797700 3.71213700 0.00000000 CLA -179.21943900 3.30062300 0.00000000 CLA -178.82203000 2.87936300 0.00000000 CLA -178.37592300 2.44822100 0.00000000 CLA -177.88131100 2.00706600 0.00000000 CLA -177.33840900 1.55577700 0.00000000 CLA -176.74744700 1.09424200 0.00000000 CLA -176.10867700 0.62236100 0.00000000 CLA -175.42236900 0.14004600 0.00000000 CLA -174.68881100 -0.35278100 0.00000000 CLA -173.90830900 -0.85618200 0.00000000 CLA -173.08118800 -1.37020400 0.00000000 CLA -172.20778900 -1.89488100 0.00000000 CLA -171.28847200 -2.43022900 0.00000000 CLA -170.32361200 -2.97624700 0.00000000 CLA -169.31360100 -3.53291500 0.00000000 CLA -168.25884800 -4.10019400 0.00000000 CLA -162.79016200 -6.99001600 0.00000000 CLA -161.59944400 -7.60762000 0.00000000 CLA -160.36567200 -8.23521200 0.00000000 CLA -159.08933500 -8.87263300 0.00000000 CLA -157.77094000 -9.51969600 0.00000000 CLA -153.19104900 -11.73982500 0.00000000 CLA -151.78540100 -12.42053200 0.00000000 CLA -150.33921700 -13.10992800 0.00000000 CLA -148.85306200 -13.80771400 0.00000000 CLA -147.32751100 -14.51356500 0.00000000 CLA -145.76315200 -15.22712800 0.00000000 CLA -144.16058200 -15.94802200 0.00000000 CLA -142.52041200 -16.67583600 0.00000000 CLA -140.84325800 -17.41013300 0.00000000 CLA -139.12975100 -18.15044400 0.00000000 CLA -134.13284800 -20.29817500 0.00000000 CLA -132.34357700 -21.05942300 0.00000000 CLA -130.51988200 -21.82485700 0.00000000 CLA -128.66243200 -22.59388900 0.00000000 CLA -126.77190300 -23.36590300 0.00000000 CLA -124.84897500 -24.14025500 0.00000000 CLA -122.89433700 -24.91627500 0.00000000 CLA -120.90868100 -25.69326600 0.00000000 CLA -118.89270500 -26.47050500 0.00000000 CLA -116.84710900 -27.24724600 0.00000000 CLA -114.77260000 -28.02271900 0.00000000 CLA -112.66988600 -28.79613300 0.00000000 CLA -110.53967800 -29.56667400 0.00000000 CLA -107.24914300 -30.74414800 0.00000000 CLA -105.08762600 -31.51699400 0.00000000 CLA -102.90010300 -32.28505400 0.00000000 CLA -100.68729600 -33.04745700 0.00000000 CLA -98.44992800 -33.80332300 0.00000000 CLA -96.18871900 -34.55175500 0.00000000 CLA -93.90439200 -35.29184800 0.00000000 CLA -91.59766700 -36.02268900 0.00000000 CLA -89.26926400 -36.74335900 0.00000000 CLA -86.91990000 -37.45293200 0.00000000 CLA -84.55029100 -38.15048500 0.00000000 CLA -82.16115000 -38.83509200 0.00000000 CLA -79.75318800 -39.50583000 0.00000000 CLA -77.32711100 -40.16178300 0.00000000 CLA -73.99496400 -41.04868100 0.00000000 CLA -71.54813700 -41.69128700 0.00000000 CLA -69.08470900 -42.31710800 0.00000000 CLA -66.60538000 -42.92525600 0.00000000 CLA -64.11084700 -43.51485800 0.00000000 CLA -61.60180100 -44.08505900 0.00000000 CLA -59.07892900 -44.63502300 0.00000000 CLA -56.54291400 -45.16393500 0.00000000 CLA -53.99443400 -45.67100300 0.00000000 CLA -51.43416400 -46.15546400 0.00000000 CLA -48.86277100 -46.61658100 0.00000000 CLA -46.28092200 -47.05364500 0.00000000 CLA -42.92556700 -47.59903300 0.00000000 CLA -40.33193500 -48.01158900 0.00000000 CLA -37.72929300 -48.39866000 0.00000000 CLA -35.11829400 -48.75964300 0.00000000 CLA -32.49958900 -49.09397300 0.00000000 CLA -29.87382300 -49.40112300 0.00000000 CLA -27.24163700 -49.68060900 0.00000000 CLA -24.60366900 -49.93198400 0.00000000 CLA -21.96055600 -50.15484900 0.00000000 CLA -19.31292800 -50.34884700 0.00000000 CLA -16.66141500 -50.51366500 0.00000000 CLA -13.29566300 -50.69728600 0.00000000 CLA -10.64026700 -50.83195500 0.00000000 CLA -7.98237900 -50.93692400 0.00000000 CLA -5.32262300 -51.01202200 0.00000000 CLA -2.66162300 -51.05712900 0.00000000 CLA Tabelle 9 zu Fig. 2: Blenden-Polygon AS X[mm] Y[mm] Z[mm] Typ -227.91573000 -165.46964900 0.00000000 CLA -227.20570600 -177.07028400 0.00000000 CLA -225.89504300 -188.70208500 0.00000000 CLA -223.97406700 -200.33118800 0.00000000 CLA -221.43499800 -211.92240400 0.00000000 CLA -218.27195900 -223.43912600 0.00000000 CLA -214.48127800 -234.84332200 0.00000000 CLA -210.06189400 -246.09584400 0.00000000 CLA -205.01484800 -257.15653500 0.00000000 CLA -199.34429100 -267.98472500 0.00000000 CLA -193.05688700 -278.53883600 0.00000000 CLA -186.16251100 -288.77708100 0.00000000 CLA -178.67405200 -298.65757200 0.00000000 CLA -170.60750600 -308.13892000 0.00000000 CLA -161.98229300 -317.17983100 0.00000000 CLA -152.82083500 -325.74011900 0.00000000 CLA -143.14897400 -333.78069700 0.00000000 CLA -132.99576300 -341.26408800 0.00000000 CLA -122.39337200 -348.15452000 0.00000000 CLA -111.37687400 -354.41853100 0.00000000 CLA -99.98426300 -360.02496900 0.00000000 CLA -88.25634100 -364.94569400 0.00000000 CLA -76.23601500 -369.15568000 0.00000000 CLA -63.96850500 -372.63301500 0.00000000 CLA -51.50093800 -375.35980200 0.00000000 CLA -38.88184600 -377.32165800 0.00000000 CLA -26.16076100 -378.50812100 0.00000000 CLA -13.38842900 -378.91304000 0.00000000 CLA 13.38842900 -378.91304000 0.00000000 CLA 26.16076100 -378.50812100 0.00000000 CLA 38.88184600 -377.32165800 0.00000000 CLA 51.50093800 -375.35980200 0.00000000 CLA 63.96850500 -372.63301500 0.00000000 CLA 76.23601500 -369.15568000 0.00000000 CLA 88.25634100 -364.94569400 0.00000000 CLA 99.98426300 -360.02496900 0.00000000 CLA 111.37687400 -354.41853100 0.00000000 CLA 122.39337200 -348.15452000 0.00000000 CLA 132.99576300 -341.26408800 0.00000000 CLA 143.14897400 -333.78069700 0.00000000 CLA 152.82083500 -325.74011900 0.00000000 CLA 161.98229300 -317.17983100 0.00000000 CLA 170.60750600 -308.13892000 0.00000000 CLA 178.67405200 -298.65757200 0.00000000 CLA 186.16251100 -288.77708100 0.00000000 CLA 193.05688700 -278.53883600 0.00000000 CLA 199.34429100 -267.98472500 0.00000000 CLA 205.01484800 -257.15653500 0.00000000 CLA 210.06189400 -246.09584400 0.00000000 CLA 214.48127800 -234.84332200 0.00000000 CLA 218.27195900 -223.43912600 0.00000000 CLA 221.43499800 -211.92240400 0.00000000 CLA 223.97406700 -200.33118800 0.00000000 CLA 225.89504300 -188.70208500 0.00000000 CLA 227.20570600 -177.07028400 0.00000000 CLA 227.91573000 -165.46964900 0.00000000 CLA 218.96183500 -152.82525200 0.00000000 CLA 224.06330000 -145.36750000 0.00000000 CLA 230.88330000 -134.16890000 0.00000000 CLA 237.01280000 -122.76050000 0.00000000 CLA 242.43390000 -111.18030000 0.00000000 CLA 247.13070000 -99.46550000 0.00000000 CLA 251.09000000 -87.65220000 0.00000000 CLA 254.30090000 -75.77540000 0.00000000 CLA 256.75560000 -63.86940000 0.00000000 CLA 258.44930000 -51.96710000 0.00000000 CLA 259.38010000 -40.10040000 0.00000000 CLA 259.54960000 -28.30030000 0.00000000 CLA 258.96260000 -16.59660000 0.00000000 CLA 257.62740000 -5.01790000 0.00000000 CLA 255.55540000 6.40820000 0.00000000 CLA 252.76110000 17.65520000 0.00000000 CLA 249.26230000 28.69770000 0.00000000 CLA 245.07930000 39.51170000 0.00000000 CLA 240.23500000 50.07390000 0.00000000 CLA 234.75450000 60.36280000 0.00000000 CLA 228.66480000 70.35740000 0.00000000 CLA 221.99440000 80.03840000 0.00000000 CLA 214.77300000 89.38730000 0.00000000 CLA 207.03120000 98.38680000 0.00000000 CLA 198.80000000 107.02060000 0.00000000 CLA 190.11060000 115.27340000 0.00000000 CLA 180.99430000 123.13090000 0.00000000 CLA 171.48180000 130.57960000 0.00000000 CLA 161.60350000 137.60700000 0.00000000 CLA 151.38900000 144.20150000 0.00000000 CLA 140.86730000 150.35200000 0.00000000 CLA 130.06640000 156.04850000 0.00000000 CLA 119.01330000 161.28160000 0.00000000 CLA 107.73430000 166.04280000 0.00000000 CLA 96.25480000 170.32420000 0.00000000 CLA 84.59910000 174.11880000 0.00000000 CLA 72.79120000 177.42040000 0.00000000 CLA 60.85400000 180.22340000 0.00000000 CLA 48.81000000 182.52330000 0.00000000 CLA 36.68120000 184.31610000 0.00000000 CLA 24.48910000 185.59880000 0.00000000 CLA 12.25500000 186.36930000 0.00000000 CLA 0.00000000 186.62630000 0.00000000 CLA -12.25500000 186.36930000 0.00000000 CLA -24.48910000 185.59880000 0.00000000 CLA -36.68120000 184.31610000 0.00000000 CLA -48.81000000 182.52330000 0.00000000 CLA -60.85400000 180.22340000 0.00000000 CLA -72.79120000 177.42040000 0.00000000 CLA -84.59910000 174.11880000 0.00000000 CLA -96.25480000 170.32420000 0.00000000 CLA -107.73430000 166.04280000 0.00000000 CLA -119.01330000 161.28160000 0.00000000 CLA -130.06640000 156.04850000 0.00000000 CLA -140.86730000 150.35200000 0.00000000 CLA -151.38900000 144.20150000 0.00000000 CLA -161.60350000 137.60700000 0.00000000 CLA -171.48180000 130.57960000 0.00000000 CLA -180.99430000 123.13090000 0.00000000 CLA -190.11060000 115.27340000 0.00000000 CLA -198.80000000 107.02060000 0.00000000 CLA -207.03120000 98.38680000 0.00000000 CLA -214.77300000 89.38730000 0.00000000 CLA -221.99440000 80.03840000 0.00000000 CLA -228.66480000 70.35740000 0.00000000 CLA -234.75450000 60.36280000 0.00000000 CLA -240.23500000 50.07390000 0.00000000 CLA -245.07930000 39.51170000 0.00000000 CLA -249.26230000 28.69770000 0.00000000 CLA -252.76110000 17.65520000 0.00000000 CLA -255.55540000 6.40820000 0.00000000 CLA -257.62740000 -5.01790000 0.00000000 CLA -258.96260000 -16.59660000 0.00000000 CLA -259.54960000 -28.30030000 0.00000000 CLA -259.38010000 -40.10040000 0.00000000 CLA -258.44930000 -51.96710000 0.00000000 CLA -256.75560000 -63.86940000 0.00000000 CLA -254.30090000 -75.77540000 0.00000000 CLA -251.09000000 -87.65220000 0.00000000 CLA -247.13070000 -99.46550000 0.00000000 CLA -242.43390000 -111.18030000 0.00000000 CLA -237.01280000 -122.76050000 0.00000000 CLA -230.88330000 -134.16890000 0.00000000 CLA -224.06330000 -145.36750000 0.00000000 CLA -218.96183500 -152.82525200 0.00000000 CLA The non-illuminated obscuration area in the system pupil may be round, elliptical, square or rectangular. This non-illuminable area in the system pupil may also be relative to a center of the system pupil in the x Direction and / or in the y Direction to be decentered. Table 1 to Fig. 2 embodiment 2 N / A 12:55 wavelength 13.5 nm Feldgröße_x 26.0 mm Feldgröße_y 1.0 mm curvature of field -0.012345 1 / mm dazzle AS, AS2, AS3 (on M9), AS4 (on M10) Table 2 to Fig. 2 surface Radius_x [mm] Power_x [1 / mm] Radius_y [mm] Power_y [1 / mm] operation mode M10 -924.4981198 0.0021492 -841.5674623 0.0023921 REFL M9 1845.8313982 -0.0010835 356.4114777 -0.0056115 REFL M8 -807.7853011 0.0006289 -16794.6817783 0.0004689 REFL M7 -633.7019549 0.0007380 20332.8433550 -0.0004206 REFL M6 -1159.7877847 0.0003528 -7078.0588424 0.0013813 REFL M5 -7911.6202298 0.0000533 -2197.1749958 0.0043148 REFL M4 6252.7176733 -0.0000660 -2753.7274849 0.0035212 REFL M3 1718.6984546 -0.0002678 -10060.7554809 0.0008638 REFL M2 1592.6268445 -0.0002500 2592.5626309 -0.0038746 REFL M1 -2135.9876330 0.0009216 -1377.1202039 0.0014756 REFL Table 3a to Fig. 2 coefficient M10 M9 M8 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX -924.49811980 1845.83139800 -807.78530110 C7 5.32161644e-09 -7.17957299e-07 3.61958396e-07 C9 1.2051462e-08 1.48021766e-06 4.61852728e-08 C10 -4.28738318e-12 3.94779844e-10 1.36275822e-10 C12 -3.49709402e-11 2.67402017e-09 4.92199166e-11 C14 -9.81786584e-12 6.31481582e-09 -4.23949539e-10 C16 -3.40219667e-15 -2.74047503e-12 1.12548598e-12 C18 1.60335869e-14 2.04228406e-14 3.71761249e-13 C20 1.30399612e-14 3.2725238e-11 -2.05971586e-12 C21 -1.15274335e-17 2.35879877e-15 1.09054091e-15 C23 -6.9260806e-17 1.00239611e-14 1.70911423e-15 C25 -7.13524377e-17 5.05529889e-14 -3.62622238e-15 C27 -1.67322747e-17 1.78538542e-13 -7.36849912e-15 C29 -7.92528578e-21 -4.11347975e-18 -2.59696939e-18 C31 1.27834004e-20 -5.83032641e-17 1.25679501e-17 C33 3.27119661e-20 1.71591989e-16 -1.04543394e-17 C35 1.71377495e-20 1.22876874e-15 -3.91086555e-17 C36 -1.89551894e-23 -4.14843428e-22 5.26679107e-21 C38 -1.11996388e-22 1.06656248e-19 2.8502374e-20 C40 -1.96750203e-22 2.08419251e-19 6.3260457e-20 C42 -1.2392523e-22 8.95301505e-19 4.7233819e-21 C44 -2.47458966e-23 8.36809183e-18 -2.27707911e-19 C46 -9.77909864e-27 -1.02394711e-22 1.39450428e-23 C48 5.19824336e-27 -7.95041789e-23 1.68839235e-22 C50 5.59498452e-26 8.75666056e-22 2.79254271e-22 C52 6.43656264e-26 4.60087068e-21 -9.11661464e-23 C54 1.96031627e-26 4.50459082e-20 1.98458883e-22 C55 -1.9734083e-29 2.61667221e-26 -4.54521391e-26 C57 -1.39192995e-28 -1.48955085e-25 1.23387971e-24 C59 -3.49342237e-28 2.18616238e-24 4.57708029e-24 C61 -3.79015472e-28 8.50729665e-24 6.06052772e-24 C63 -1.77868817e-28 2.63725246e-23 -9.61661588e-26 C65 -2.61320106e-29 1.37431086e-22 9.18355997e-24 C67 -1.75320584e-32 1.91491617e-28 -2.00093096e-27 C69 -1.49695509e-32 -5.27938029e-27 2.16982668e-27 C71 6.84912486e-32 -5.29216183e-27 -7.30096104e-27 C73 1.54586906e-31 4.04146338e-26 -4.93769708e-27 C75 1.15783975e-31 2.37812676e-25 -4.16594376e-26 C77 4.14587364e-32 1.20314674e-24 -1.62235584e-25 C78 -5.34426777e-35 4.49836368e-31 6.13330316e-30 C80 -4.27488688e-34 1.29694668e-29 -1.62333428e-29 C82 -1.25436413e-33 3.24280489e-29 -1.68167617e-28 C84 -1.71502766e-33 3.00254831e-29 -4.89454528e-28 C86 -1.25734127e-33 7.46446045e-28 -6.5895393e-28 C88 -5.19929261e-34 5.84363659e-27 -1.5416679e-27 C90 -9.42013117e-35 2.61240017e-26 -3.38007496e-27 C92 1.00872668e-38 -4.95175891e-33 1.78435553e-32 C94 -1.45968234e-39 2.0913161e-33 1.10022934e-32 C96 2.49294655e-38 9.54156933e-32 1.00044858e-30 C98 1.25738947e-37 -7.47916509e-33 1.98972461e-30 C100 1.6844889e-37 7.35199153e-30 -3.47483305e-30 C102 7.66863005e-38 5.82871085e-29 -1.47027148e-29 C104 -1.4887687e-38 2.15570834e-28 -2.0886266e-29 C105 3.84331333e-41 -2.72151554e-36 -1.09100622e-34 C107 4.50330303e-40 -6.8970507e-35 3.91399908e-34 C109 1.60900752e-39 -2.41557224e-34 4.01031765e-33 C111 2.46751199e-39 1.07560857e-33 1.8289791e-32 C113 1.94052198e-39 8.96263507e-33 2.87152163e-32 C115 9.9606188e-40 4.77961552e-32 -4.19223781e-33 C117 4.55475999e-40 2.14647641e-31 -4.42634085e-32 C119 9.96424428e-41 6.08163641e-31 -4.46533131e-32 C121 -6.67748909e-44 0 0 C123 -1.35652075e-43 0 0 C125 1.98636308e-43 0 0 C127 1.25607622e-42 0 0 C129 2.10051386e-42 0 0 C131 1.77289428e-42 0 0 C133 7.94693346e-43 0 0 C135 1.74862061e-43 0 0 C136 -1.77390976e-46 0 0 C138 -2.00142247e-45 0 0 C140 -8.6258998e-45 0 0 C142 -1.91465627e-44 0 0 C144 -2.50271596e-44 0 0 C146 -2.03958823e-44 0 0 C148 -1.04613962e-44 0 0 C150 -3.18867421e-45 0 0 C152 -4.17582475e-46 0 0 Table 3 b to Fig. 2 coefficient M7 M6 M5 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX -633.70195490 -1159.78778500 -7911.62023000 C7 -3.6838108e-08 8.9762673e-08 1.29208819e-08 C9 1.66051547e-07 5.4606184e-08 -4.52621083e-08 C10 2.70786958e-11 -4.84436976e-10 -5.84676904e-10 C12 -4.05365907e-10 4.4034394e-11 3.29353371e-11 C14 1.17570885e-09 -8.49494866e-10 3.27657845e-11 C16 5.32058235e-13 -1.22366579e-12 -4.06185258e-13 C18 -2.33907349e-12 3.31495258e-12 -3.05655881e-13 C20 1.03622586e-11 4.74017946e-12 -9.90515078e-14 C21 1.84951658e-17 4.70815441e-16 6.8177486e-16 C23 1.97362743e-16 -5.63918759e-15 1.78311332e-16 C25 -4.50645748e-14 -2.04438614e-14 1.92769745e-15 C27 1.22197136e-13 -4.46320586e-14 1.11134948e-15 C29 -8.3397015e-19 3.12037967e-18 1.20925734e-18 C31 5.73336291e-17 2.52930984e-17 -2.68755339e-18 C33 -4.26965471e-16 2.57659349e-16 -5.94759876e-18 C35 1.12309508e-15 3.62043368e-16 -4.78247891e-18 C36 -2.54002154e-21 -2.33285817e-21 8.64176325e-21 C38 6.58698589e-22 6.78093367e-21 2.69603122e-21 C40 9.19834216e-19 -6.09316184e-19 1.90190625e-20 C42 -5.20603364e-18 -2.48560476e-18 2.06136053e-20 C44 1.95177251e-17 -3.71987432e-18 1.52178482e-20 C46 5.11031274e-23 -2.36475219e-24 1.40723013e-23 C48 -5.22351362e-22 1.08955249e-21 -1.74886691e-23 C50 1.29955621e-20 6.28062297e-21 -1.31280422e-22 C52 -7.19352591e-20 2.83502526e-20 -1.33189978e-22 C54 3.01583882e-19 4.05968238e-20 -5.11578136e-23 C55 -3.2378259e-26 5.04920803e-26 -9.74226056e-26 C57 2.56114803e-26 -1.66126857e-24 1.25073538e-25 C59 -2.15568526e-23 -1.21962666e-23 3.61644254e-25 C61 7.54597503e-23 -7.85294647e-23 6.17670028e-25 C63 -1.37768633e-21 -2.60819335e-22 3.1972004e-25 C65 -9.91159698e-22 -3.82043453e-22 5.14604952e-26 C67 8.86143266e-29 1.38719494e-27 -4.85096213e-29 C69 2.95926995e-28 1.1409927e-26 -1.52883817e-29 C71 -4.08946521e-25 1.70193798e-25 -2.99192047e-28 C73 1.1764e-24 5.79647838e-25 1.27326956e-27 C75 -1.82271068e-23 1.8185183e-24 2.14215183e-27 C77 -6.0476105e-23 2.47496013e-24 -2.43586456e-28 C78 -1.46974123e-31 -2.48880617e-30 2.2910216e-30 C80 -1.62035317e-29 -3.63910799e-30 -2.10355105e-30 C82 2.64119709e-28 -1.39124488e-28 -3.56165247e-30 C84 -2.75435112e-27 -9.92371827e-28 -1.25073816e-29 C86 6.06493358e-26 -2.9562807e-27 -1.02346615e-29 C88 -1.82794269e-25 -7.99387324e-27 1.25693216e-30 C90 8.10897778e-25 -1.01333935e-26 6.64972771e-30 C92 -5.94852836e-33 -2.20554773e-33 1.22259104e-33 C94 7.23973112e-32 1.10525284e-31 -1.24849687e-32 C96 7.40539289e-30 -4.613537e-32 -3.29652704e-32 C98 4.88216265e-30 4.80483016e-30 -8.41705133e-32 C100 9.65449531e-28 6.23756899e-30 -1.57134898e-31 C102 -1.70876067e-27 2.1445453e-29 -1.2032548e-31 C104 2.67082934e-26 2.28654521e-29 -3.36577402e-32 C105 2.35094421e-36 2.08468354e-35 -1.08251776e-35 C107 3.37747137e-34 -1.04397603e-34 3.142163e-35 C109 7.70896596e-34 2.85346997e-34 8.01180965e-35 C111 6.84579774e-32 -8.80664689e-35 3.89769754e-34 C113 -9.31004972e-32 -9.19882787e-33 7.80016296e-34 C115 5.48180337e-30 -1.39857273e-33 7.27970094e-34 C117 -9.40923091e-30 -2.85191959e-32 3.44660803e-34 C119 1.58250782e-28 -2.04899764e-32 5.28320959e-35 Table 3c to Fig. 2 coefficient M4 M3 M2 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 6252.71767300 1718.69845500 1592.62684400 C7 2.02039657e-07 -7.72442186e-08 -2.81200257e-07 C9 6.26194854e-08 -6.39011454e-08 -4.33420894e-07 C10 -1.17096485e-10 5.38504965e-10 2.16914992e-10 C12 1.65918593e-10 1.54474735e-10 -2.43233271e-10 C14 2.6047855e-11 -5.67012949e-11 1.0908048e-09 C16 1.53352973e-13 -1.28128634e-12 -1.3249687e-12 C18 6.85280998e-14 3.29016521e-13 2.3245033e-12 C20 1.33134745e-14 -7.9135182e-14 -2.74288101e-12 C21 9.63392843e-16 -2.23006179e-16 -3.54173468e-16 C23 -2.56356327e-16 8.08610012e-16 5.15456653e-15 C25 -4.93143601e-16 -1.64061139e-16 -1.06774698e-14 C27 -3.50827102e-17 -8.3638218e-18 5.96789915e-15 C29 -1.32470314e-18 2.06883208e-18 1.70541615e-18 C31 -1.08456401e-18 -3.75046097e-18 -2.42446489e-17 C33 -3.23480928e-19 1.52741866e-18 4.43191025e-17 C35 -3.72075346e-19 1.62584985e-18 -1.05861269e-17 C36 -3.85707039e-21 -2.85425871e-21 1.53834046e-21 C38 7.16357253e-21 4.79674043e-21 -1.1251108e-20 C40 -1.76766744e-21 6.62315222e-22 1.18315789e-19 C42 -5.70159933e-21 -2.6546097e-21 -1.77703731e-19 C44 -3.65158025e-21 1.5355861e-20 1.37862764e-20 C46 -2.99726604e-23 -7.26058549e-23 -2.55922076e-23 C48 -4.17503344e-23 -9.21476496e-23 1.00193833e-22 C50 -4.7884568e-23 -2.35567601e-22 -5.31735424e-22 C52 -6.91516977e-24 -1.35526865e-22 6.79507546e-22 C54 1.98546253e-23 9.61975988e-23 4.01660209e-23 C55 -1.94031018e-26 1.56888015e-25 -1.38213528e-26 C57 -3.42382432e-25 2.2750218e-25 1.79376182e-25 C59 -2.2756817e-25 -1.23549695e-25 -5.94897934e-25 C61 2.01539859e-25 2.29974662e-25 2.27901415e-24 C63 4.95631548e-25 8.59833428e-25 -2.22922414e-24 C65 1.12176727e-25 1.26876311e-24 -7.70058057e-25 C67 9.06942404e-28 9.3079309e-28 3.74223228e-28 C69 1.9957938e-27 4.99157193e-27 -9.62902214e-28 C71 3.12476201e-27 1.58761398e-26 2.15189986e-27 C73 4.54981924e-27 1.53821757e-26 -8.59545995e-27 C75 6.59335485e-28 3.62238546e-27 5.36715829e-27 C77 -1.58015986e-27 -1.19949042e-27 5.14863336e-27 C78 4.37655985e-30 -2.15256015e-30 -6.68041182e-32 C80 8.62343063e-30 -8.27474872e-30 -2.88698633e-30 C82 1.3965552e-29 -1.85964202e-29 2.97808799e-30 C84 1.2610299e-29 -5.63075807e-29 -9.25513518e-30 C86 -4.82567841e-30 -7.58802797e-29 2.1567675e-29 C88 -1.35566233e-29 -6.2816052e-29 -8.2378632e-30 C90 8.35698293e-31 -2.48292667e-29 -1.8363031e-29 C92 -6.20912191e-33 -1.53848466e-33 -2.72722676e-33 C94 -3.03339233e-32 -5.56751434e-32 9.35668771e-33 C96 -4.15846221e-32 -2.81174802e-31 1.01318148e-32 C98 -1.20240425e-31 -5.69729421e-31 4.31201041e-32 C100 -1.23999978e-31 -3.40400557e-31 -2.58821352e-32 C102 1.77507014e-33 -9.97858945e-32 6.91936623e-33 C104 3.83557979e-32 1.09580074e-31 3.45333625e-32 C105 -1.52261212e-35 5.38313447e-37 2.4018539e-36 C107 -7.96360046e-35 8.5583118e-35 1.94949839e-35 C109 -2.50162343e-34 3.84351739e-34 -2.7269109e-35 C111 -2.81541874e-34 1.85492006e-33 -5.57867255e-35 C113 -6.28531061e-34 2.60940268e-33 -8.0628501e-35 C115 2.25293161e-35 2.55655776e-33 6.48059264e-36 C117 7.79107372e-35 1.01920129e-33 -2.46632816e-36 C119 -1.12500845e-34 7.43677377e-34 -2.70846382e-35 Table 3d to Fig. 2 coefficient M1 KY 0.00000000 KX 0.00000000 RX -2135.98763300 C7 -3.62667214e-08 C9 -8.77001096e-09 C10 -7.9878408e-12 C12 3.57622422e-11 C14 5.67666306e-11 C16 -1.00670933e-14 C18 -6.43363507e-14 C20 3.49263438e-14 C21 -1.83622059e-18 C23 1.63146414e-17 C25 2.33281554e-16 C27 -2.13403252e-16 C29 -7.17734463e-22 C31 -7.76916167e-20 C33 -2.45391831e-19 C35 9.06895125e 19 C36 -2.87240432e-24 C38 -5.67479156e-24 C40 2.53075334e-22 C42 2.33441297e-22 C44 -4.90816027e-21 C46 -1.82993123e-26 C48 1.40735408e-25 C50 -1.62994831e-25 C52 4.12295522e-24 C54 2.26175423e-23 C55 6.84620783e-30 C57 -8.9211373e-29 C59 3.99552919e-28 C61 2.87701829e-26 C63 7.90515964e-26 C65 4.93963599e-26 C67 8.37008672e-32 C69 -9.8548077e-31 C71 -7.50758997e-30 C73 -6.72582496e-30 C75 2.5702957e-28 C77 -1.08487883e-27 C78 4.88158898e-36 C80 1.55182242e-33 C82 1.52095525e-32 C84 -1.27781492e-31 C86 -1.81913568e-30 C88 -5.89459163e-30 C90 2.69055495e-30 C92 -4.03243187e-38 C94 3.64827588e-36 C96 3.2629352e-35 C98 1.58289449e-34 C100 -1.41502554e-34 C102 -7.52721979e-33 C104 1.42550505e-32 C105 -9.85463233e-41 C107 -4.7133732e-39 C109 -9.62905307e-38 C111 -4.88592887e-38 C113 5.89605443e-36 C115 4.37586765e-35 C117 1.2944388e-34 C119 -5.79847892e-35 Table 4a to FIG. 2 surface DCX DCY DCZ image plane 0.00000000 0.00000000 0.00000000 M10 (AS4) 0.00000000 0.00000000 805.12545493 AS 0.00000000 121.91685762 283.85220626 M9 (AS3) -0.00000000 161.70815863 113.71871405 M8 0.00000000 -95.26534725 1237.21684296 M7 -0.00000000 -33.77425023 1447.75579022 M6 0.00000000 65.18321239 1551.64751609 M5 0.00000000 416.29245364 1699.16961083 AS2 -0.00000000 446.29210651 1699.02529226 M4 -0.00000000 1004.20719186 1696.34134424 M3 -0.00000000 1452.13094016 1490.08513977 M2 0.00000000 1660.63260708 1219.01552868 M1 -0.00000000 1898.51696847 380.25896967 object level -0.00000000 2052.66210418 2142.14593325 Table 4b to Fig. 2 surface TLA [deg] TLB [deg] TLC [deg] image plane -0.00000000 0.00000000 -0.00000000 M10 (AS4) 6.58193819 0.00000000 -0.00000000 AS -11.93243779 180.00000000 0.00000000 M9 (AS3) 193.02365372 -0.00000000 0.00000000 M8 88.30109261 -0.00000000 0.00000000 M7 60.05609350 0.00000000 0.00000000 M6 34.59181790 -0.00000000 -0.00000000 M5 11.25728686 -0.00000000 -0.00000000 AS2 269.72437077 0.00000000 0.00000000 M4 -12.50018064 0.00000000 -0.00000000 M3 -38.57896098 0.00000000 0.00000000 M2 -63.29951574 -0.00000000 0.00000000 M1 185.41707922 0.00000000 -0.00000000 object level 0.00000000 0.00000000 0.00000000 Table 5 to Fig. 2 surface Angle of incidence [deg] reflectivity M10 6.54595976 0.66117442 M9 0.00927824 0.66565898 M8 75.28640231 0.80872358 M7 76.47602867 0.82797480 M6 78.19600462 0.85363243 M5 77.82112299 0.84823720 M4 78.09659958 0.85221174 M3 76.69475350 0.83137235 M2 78.51548223 0.85815147 M1 10.19566395 0.65421760 total transmission 0.0849 Table 6 to FIG. 2: Aperture polygon AS4 to MIO X [mm] Y [mm] Z [mm] Type -461.17630000 -10.30450000 -123.68161700 CLA -461.14370000 -10.80690000 -123.67061100 CLA -461.11090000 -11.30930000 -123.65984400 CLA -458.94680000 -34.79650000 -123.19019500 CLA -455.54960000 -58.06020000 -122.77715600 CLA -450.94270000 -81.03510000 -122.42063900 CLA -445.15300000 -103.65790000 -122.11947100 CLA -438.21120000 -125.86830000 -121.87186800 CLA -430.15080000 -147.60870000 -121.67507300 CLA -421.00830000 -168.82430000 -121.52571100 CLA -410.82240000 -189.46380000 -121.41976700 CLA -399.63390000 -209.47900000 -121.35274200 CLA -387.48550000 -228.82490000 -121.31983600 CLA -374.42100000 -247.45960000 -121.31578700 CLA -360.48530000 -265.34480000 -121.33532100 CLA -345.72420000 -282.44490000 -121.37301600 CLA -330.18380000 -298.72750000 -121.42343900 CLA -313.91070000 -314.16310000 -121.48136900 CLA -296.95130000 -328.72480000 -121.54158300 CLA -279.35240000 -342.38840000 -121.59932900 CLA -261.16010000 -355.13180000 -121.64979700 CLA -242.42050000 -366.93550000 -121.68877800 CLA -223.17950000 -377.78180000 -121.71231900 CLA -203.48240000 -387.65510000 -121.71685900 CLA -183.37420000 -396.54150000 -121.69922000 CLA -162.89950000 -404.42860000 -121.65654300 CLA -142.10260000 -411.30570000 -121.58649000 CLA -121.02740000 -417.16350000 -121.48711600 CLA -99.71750000 -421.99390000 -121.35681900 CLA -78.21660000 -425.79020000 -121.19454200 CLA -56.56780000 -428.54670000 -120.99947300 CLA -34.81460000 -430.25900000 -120.77135000 CLA -13.00000000 -430.92370000 -120.51021500 CLA 13.00000000 -430.92370000 -120.51021500 CLA 34.81460000 -430.25900000 -120.77135000 CLA 56.56780000 -428.54670000 -120.99947300 CLA 78.21660000 -425.79020000 -121.19454200 CLA 99.71750000 -421.99390000 -121.35681900 CLA 121.02740000 -417.16350000 -121.48711600 CLA 142.10260000 -411.30570000 -121.58649000 CLA 162.89950000 -404.42860000 -121.65654300 CLA 183.37420000 -396.54150000 -121.69922000 CLA 203.48240000 -387.65510000 -121.71685900 CLA 223.17950000 -377.78180000 -121.71231900 CLA 242.42050000 -366.93550000 -121.68877800 CLA 261.16010000 -355.13180000 -121.64979700 CLA 279.35240000 -342.38840000 -121.59932900 CLA 296.95130000 -328.72480000 -121.54158300 CLA 313.91070000 -314.16310000 -121.48136900 CLA 330.18380000 -298.72750000 -121.42343900 CLA 345.72420000 -282.44490000 -121.37301600 CLA 360.48530000 -265.34480000 -121.33532100 CLA 374.42100000 -247.45960000 -121.31578700 CLA 387.48550000 -228.82490000 -121.31983600 CLA 399.63390000 -209.47900000 -121.35274200 CLA 410.82240000 -189.46380000 -121.41976700 CLA 421.00830000 -168.82430000 -121.52571100 CLA 430.15080000 -147.60870000 -121.67507300 CLA 438.21120000 -125.86830000 -121.87186800 CLA 445.15300000 -103.65790000 -122.11947100 CLA 450.94270000 -81.03510000 -122.42063900 CLA 455.54960000 -58.06020000 -122.77715600 CLA 458.94680000 -34.79650000 -123.19019500 CLA 461.11090000 -11.30930000 -123.65984400 CLA 461.14370000 -10.80690000 -123.67061100 CLA 461.17630000 -10.30450000 -123.68161700 CLA 462.07200000 13.33840000 -124.23127700 CLA 461.70020000 37.06640000 -124.83493200 CLA 460.05040000 60.80860000 -125.48977700 CLA 457.11670000 84.49360000 -126.19215400 CLA 452.89790000 108.04900000 -126.93756000 CLA 447.39740000 131.40220000 -127.72066800 CLA 440.62340000 154.48080000 -128.53554800 CLA 432.58870000 177.21270000 -129.37563400 CLA 423.31070000 199.52670000 -130.23393200 CLA 412.81130000 221.35250000 -131.10306200 CLA 401.11660000 242.62130000 -131.97536300 CLA 388.25720000 263.26580000 -132.84316100 CLA 374.26750000 283.22060000 -133.69864500 CLA 359.18570000 302.42230000 -134.53401400 CLA 343.05410000 320.81000000 -135.34191300 CLA 325.91810000 338.32500000 -136.11492000 CLA 307.82680000 354.91130000 -136.84610300 CLA 288.83230000 370.51600000 -137.52897300 CLA 268.98990000 385.08880000 -138.15736000 CLA 248.35740000 398.58260000 -138.72547500 CLA 226.99570000 410.95380000 -139.22831200 CLA 204.96780000 422.16200000 -139.66114600 CLA 182.33920000 432.17040000 -140.01989100 CLA 159.17740000 440.94580000 -140.30093200 CLA 135.55190000 448.45910000 -140.50142200 CLA 111.53350000 454.68480000 -140.61880600 CLA 87.19500000 459.60160000 -140.65130300 CLA 85.03370000 459.95990000 -140.64206700 CLA 82.87420000 460.27350000 -140.61012400 CLA 60.44340000 463.51260000 -140.63406900 CLA 58.27810000 463.78840000 -140.64763800 CLA 56.11400000 464.01970000 -140.63824200 CLA 31.35000000 466.15680000 -140.63405600 CLA 29.18360000 466.30570000 -140.64689700 CLA 27.01770000 466.41010000 -140.63648800 CLA 2.16670000 467.12350000 -140.63527200 CLA 0.00000000 467.14560000 -140.64684300 CLA -2.16670000 467.12350000 -140.63527200 CLA -27.01770000 466.41010000 -140.63648800 CLA -29.18360000 466.30570000 -140.64689700 CLA -31.35000000 466.15680000 -140.63405600 CLA -56.11400000 464.01970000 -140.63824200 CLA -58.27810000 463.78840000 -140.64763800 CLA -60.44340000 463.51260000 -140.63406900 CLA -82.87420000 460.27350000 -140.61012400 CLA -85.03370000 459.95990000 -140.64206700 CLA -87.19500000 459.60160000 -140.65130300 CLA -111.53350000 454.68480000 -140.61880600 CLA -135.55190000 448.45910000 -140.50142200 CLA -159.17740000 440.94580000 -140.30093200 CLA -182.33920000 432.17040000 -140.01989100 CLA -204.96780000 422.16200000 -139.66114600 CLA -226.99570000 410.95380000 -139.22831200 CLA -248.35740000 398.58260000 -138.72547500 CLA -268.98990000 385.08880000 -138.15736000 CLA -288.83230000 370.51600000 -137.52897300 CLA -307.82680000 354.91130000 -136.84610300 CLA -325.91810000 338.32500000 -136.11492000 CLA -343.05410000 320.81000000 -135.34191300 CLA -359.18570000 302.42230000 -134.53401400 CLA -374.26750000 283.22060000 -133.69864500 CLA -388.25720000 263.26580000 -132.84316100 CLA -401.11660000 242.62130000 -131.97536300 CLA -412.81130000 221.35250000 -131.10306200 CLA -423.31070000 199.52670000 -130.23393200 CLA -432.58870000 177.21270000 -129.37563400 CLA -440.62340000 154.48080000 -128.53554800 CLA -447.39740000 131.40220000 -127.72066800 CLA -452.89790000 108.04900000 -126.93756000 CLA -457.11670000 84.49360000 -126.19215400 CLA -460.05040000 60.80860000 -125.48977700 CLA -461.70020000 37.06640000 -124.83493200 CLA -462.07200000 13.33840000 -124.23127700 CLA -80.22010000 -4.03830000 -3.49703600 OBS -79.85040000 -8.24600000 -3.49589700 OBS -79.26240000 -12.42650000 -3.49682100 OBS -78.45800000 -16.56850000 -3.49976000 OBS -77.43970000 -20.66080000 -3.50464600 OBS -76.21070000 -24.69220000 -3.51139700 OBS -74.77460000 -28.65180000 -3.51989700 OBS -73.13550000 -32.52900000 -3.53001100 OBS -71.29830000 -36.31350000 -3.54161400 OBS -69.26820000 -39.99490000 -3.55452900 OBS -67.05090000 -43.56360000 -3.56858700 OBS -64.65270000 -47.01010000 -3.58360900 OBS -62.08040000 -50.32510000 -3.59939800 OBS -59.34100000 -53.49990000 -3.61574600 OBS -56.44210000 -56.52620000 -3.63245400 OBS -53.39170000 -59.39590000 -3.64930800 OBS -50.19820000 -62.10160000 -3.66610900 OBS -46.87020000 -64.63610000 -3.68263800 OBS -43.41690000 -66.99280000 -3.69870200 OBS -39.84750000 -69.16560000 -3.71410300 OBS -36.17180000 -71.14880000 -3.72865900 OBS -32.39950000 -72.93730000 -3.74219000 OBS -28.54080000 -74.52650000 -3.75454100 OBS -24.60620000 -75.91210000 -3.76555400 OBS -20.60600000 -77.09070000 -3.77510700 OBS -16.55090000 -78.05910000 -3.78307400 OBS -12.45190000 -78.81500000 -3.78938100 OBS -8.31970000 -79.35630000 -3.79393700 OBS -4.16540000 -79.68160000 -3.79668900 OBS 0.00000000 -79.79010000 -3.79760700 OBS 4.16540000 -79.68160000 -3.79668900 OBS 8.31970000 -79.35630000 -3.79393700 OBS 12.45190000 -78.81500000 -3.78938100 OBS 16.55090000 -78.05910000 -3.78307400 OBS 20.60600000 -77.09070000 -3.77510700 OBS 24.60620000 -75.91210000 -3.76555400 OBS 28.54080000 -74.52650000 -3.75454100 OBS 32.39950000 -72.93730000 -3.74219000 OBS 36.17180000 -71.14880000 -3.72865900 OBS 39.84750000 -69.16560000 -3.71410300 OBS 43.41690000 -66.99280000 -3.69870200 OBS 46.87020000 -64.63610000 -3.68263800 OBS 50.19820000 -62.10160000 -3.66610900 OBS 53.39170000 -59.39590000 -3.64930800 OBS 56.44210000 -56.52620000 -3.63245400 OBS 59.34100000 -53.49990000 -3.61574600 OBS 62.08040000 -50.32510000 -3.59939800 OBS 64.65270000 -47.01010000 -3.58360900 OBS 67.05090000 -43.56360000 -3.56858700 OBS 69.26820000 -39.99490000 -3.55452900 OBS 71.29830000 -36.31350000 -3.54161400 OBS 73.13550000 -32.52900000 -3.53001100 OBS 74.77460000 -28.65180000 -3.51989700 OBS 76.21070000 -24.69220000 -3.51139700 OBS 77.43970000 -20.66080000 -3.50464600 OBS 78.45800000 -16.56850000 -3.49976000 OBS 79.26240000 -12.42650000 -3.49682100 OBS 79.85040000 -8.24600000 -3.49589700 OBS 80.22010000 -4.03830000 -3.49703600 OBS 80.37020000 0.18500000 -3.50026800 OBS 80.29980000 4.41230000 -3.50557800 OBS 80.00890000 8.63210000 -3.51295600 OBS 79.49790000 12.83260000 -3.52234900 OBS 78.76800000 17.00240000 -3.53370200 OBS 77.82080000 21.12970000 -3.54691100 OBS 76.65870000 25.20320000 -3.56187600 OBS 75.28450000 29.21160000 -3.57845900 OBS 73.70190000 33.14350000 -3.59652000 OBS 71.91490000 36.98800000 -3.61588400 OBS 69.92820000 40.73430000 -3.63637100 OBS 67.74710000 44.37190000 -3.65778900 OBS 65.37750000 47.89050000 -3.67993500 OBS 62.82570000 51.28020000 -3.70259000 OBS 60.09880000 54.53140000 -3.72554400 OBS 57.20400000 57.63490000 -3.74855800 OBS 54.14950000 60.58180000 -3.77141500 OBS 50.94340000 63.36380000 -3.79387700 OBS 47.59480000 65.97300000 -3.81573800 OBS 44.11290000 68.40190000 -3.83677000 OBS 40.50730000 70.64350000 -3.85675400 OBS 36.78810000 72.69160000 -3.87551000 OBS 32.96560000 74.54010000 -3.89282800 OBS 29.05060000 76.18390000 -3.90855500 OBS 25.05390000 77.61810000 -3.92250900 OBS 20.98680000 78.83880000 -3.93457400 OBS 16.86070000 79.84230000 -3.94461000 OBS 12.68720000 80.62590000 -3.95253200 OBS 8.47800000 81.18720000 -3.95824500 OBS 4.24500000 81.52460000 -3.96169400 OBS 0.00000000 81.63720000 -3.96285000 OBS -4.24500000 81.52460000 -3.96169400 OBS -8.47800000 81.18720000 -3.95824500 OBS -12.68720000 80.62590000 -3.95253200 OBS -16.86070000 79.84230000 -3.94461000 OBS -20.98680000 78.83880000 -3.93457400 OBS -25.05390000 77.61810000 -3.92250900 OBS -29.05060000 76.18390000 -3.90855500 OBS -32.96560000 74.54010000 -3.89282800 OBS -36.78810000 72.69160000 -3.87551000 OBS -40.50730000 70.64350000 -3.85675400 OBS -44.11290000 68.40190000 -3.83677000 OBS -47.59480000 65.97300000 -3.81573800 OBS -50.94340000 63.36380000 -3.79387700 OBS -54.14950000 60.58180000 -3.77141500 OBS -57.20400000 57.63490000 -3.74855800 OBS -60.09880000 54.53140000 -3.72554400 OBS -62.82570000 51.28020000 -3.70259000 OBS -65.37750000 47.89050000 -3.67993500 OBS -67.74710000 44.37190000 -3.65778900 OBS -69.92820000 40.73430000 -3.63637100 OBS -71.91490000 36.98800000 -3.61588400 OBS -73.70190000 33.14350000 -3.59652000 OBS -75.28450000 29.21160000 -3.57845900 OBS -76.65870000 25.20320000 -3.56187600 OBS -77.82080000 21.12970000 -3.54691100 OBS -78.76800000 17.00240000 -3.53370200 OBS -79.49790000 12.83260000 -3.52234900 OBS -80.00890000 8.63210000 -3.51295600 OBS -80.29980000 4.41230000 -3.50557800 OBS -80.37020000 0.18500000 -3.50026800 OBS Table 7 to FIG. 2: Aperture polygon AS3 to M9 X [mm] Y [mm] Z [mm] Type 4.84286400 -99.11799200 13.02505600 CLA 7.85158500 -99.08636500 13.03128500 CLA 10.85934400 -99.01479100 13.03396300 CLA 13.86529000 -98.90330900 13.03309700 CLA 16.86857600 -98.75198300 13.02870000 CLA 19.86835400 -98.56090100 13.02079000 CLA 22.86377600 -98.33017600 13.00939400 CLA 25.85399400 -98.05994200 12.99454200 CLA 28.83816300 -97.75035900 12.97627200 CLA 31.81543500 -97.40160900 12.95462800 CLA 34.78496400 -97.01390100 12.92965900 CLA 37.74590400 -96.58746300 12.90142000 CLA 40.69741000 -96.12254800 12.86997200 CLA 43.63863800 -95.61943400 12.83538200 CLA 46.56874100 -95.07841700 12.79772100 CLA 49.48687600 -94.49982100 12.75706600 CLA 52.39220000 -93.88398800 12.71349900 CLA 55.28386700 -93.23128500 12.66710800 CLA 58.16103600 -92.54210000 12.61798300 CLA 61.02286300 -91.81684200 12.56622100 CLA 63.86850500 -91.05594200 12.51192300 CLA 66.69712100 -90.25985100 12.45519300 CLA 69.50786800 -89.42904300 12.39613800 CLA 72.29990300 -88.56401000 12.33487100 CLA 75.07238700 -87.66526400 12.27150700 CLA 77.82447700 -86.73333900 12.20616400 CLA 80.55533200 -85.76878700 12.13896300 CLA 83.26411300 -84.77217700 12.07002700 CLA 85.94997800 -83.74410000 11.99948200 CLA 88.61208700 -82.68516400 11.92745500 CLA 91.24960200 -81.59599200 11.85407600 CLA 93.86168200 -80.47722800 11.77947400 CLA 96.44749000 -79.32953100 11.70378200 CLA 99.00618600 -78.15357600 11.62713100 CLA 101.53693500 -76.95005500 11.54965500 CLA 104.03889900 -75.71967300 11.47148400 CLA 106.51124400 -74.46315300 11.39275200 CLA 108.95313400 -73.18123000 11.31359000 CLA 111.36373800 -71.87465300 11.23412900 CLA 113.74222400 -70.54418400 11.15449900 CLA 116.08776400 -69.19059800 11.07482700 CLA 118.39952900 -67.81468200 10.99523900 CLA 120.67669700 -66.41723400 10.91585800 CLA 122.91844500 -64.99906200 10.83680800 CLA 125.12395600 -63.56098300 10.75820500 CLA 127.29241500 -62.10382700 10.68016600 CLA 129.42301300 -60.62842900 10.60280200 CLA 131.51494400 -59.13563200 10.52622100 CLA 133.56740800 -57.62628900 10.45052900 CLA 135.57961200 -56.10125500 10.37582600 CLA 137.55076900 -54.56139500 10.30220800 CLA 139.48009800 -53.00757600 10.22976600 CLA 141.36682700 -51.44067000 10.15858700 CLA 143.21019400 -49.86155100 10.08875200 CLA 145.00944500 -48.27109700 10.02033800 CLA 146.76383500 -46.67018700 9.95341600 CLA 148.47263400 -45.05970100 9.88805200 CLA 150.13511900 -43.44051700 9.82430600 CLA 151.75058600 -41.81351600 9.76223200 CLA 153.31833900 -40.17957300 9.70188000 CLA 154.83770000 -38.53956200 9.64329100 CLA 156.30800600 -36.89435500 9.58650400 CLA 157.72861100 -35.24481700 9.53154900 CLA 159.09888600 -33.59180900 9.47845200 CLA 160.41822100 -31.93618600 9.42723300 CLA 161.68602700 -30.27879600 9.37790600 CLA 162.90173400 -28.62047800 9.33047800 CLA 164.06479400 -26.96206400 9.28495300 CLA 165.17468100 -25.30437400 9.24132800 CLA 166.23089600 -23.64822000 9.19959500 CLA 167.23296000 -21.99440100 9.15974000 CLA 168.18042200 -20.34370400 9.12174400 CLA 169.07285800 -18.69690500 9.08558600 CLA 169.90987000 -17.05476300 9.05123700 CLA 170.69108900 -15.41802500 9.01866400 CLA 171.41617600 -13.78742200 8.98783100 CLA 172.08482000 -12.16366800 8.95869900 CLA 172.69674200 -10.54746200 8.93122200 CLA 173.25169300 -8.93948200 8.90535300 CLA 173.74945900 -7.34039300 8.88104200 CLA 174.18985600 -5.75083700 8.85823500 CLA 174.57273400 -4.17143900 8.83687700 CLA 174.89797700 -2.60280200 8.81690800 CLA 175.16550300 -1.04551200 8.79826900 CLA 175.37526600 0.49987000 8.78089700 CLA 175.52725300 2.03280000 8.76473000 CLA 175.62148800 3.55276000 8.74970400 CLA 175.65802900 5.05924900 8.73575300 CLA 175.63697200 6.55179200 8.72281100 CLA 175.55844600 8.02993500 8.71081500 CLA 175.42261700 9.49324500 8.69969700 CLA 175.38539800 9.80003000 8.69732700 CLA 175.34809200 10.10667300 8.69525000 CLA 175.15412300 11.55752300 8.68773500 CLA 174.90330200 12.99272200 8.68099300 CLA 174.59590200 14.41190500 8.67496000 CLA 174.23223100 15.81472800 8.66957100 CLA 173.81263200 17.20086900 8.66476500 CLA 173.33748100 18.57003000 8.66048000 CLA 172.80718800 19.92193100 8.65665800 CLA 172.22219700 21.25631700 8.65324100 CLA 171.58298300 22.57295200 8.65017400 CLA 170.89005200 23.87162200 8.64740500 CLA 170.14394200 25.15213000 8.64488200 CLA 169.34522100 26.41430400 8.64255700 CLA 168.49448300 27.65798500 8.64038500 CLA 167.59235100 28.88303600 8.63832200 CLA 166.63947600 30.08933900 8.63632700 CLA 165.63653300 31.27679100 8.63436300 CLA 164.58422100 32.44530500 8.63239300 CLA 163.48326100 33.59481300 8.63038500 CLA 162.33439800 34.72526000 8.62830800 CLA 161.13839400 35.83660600 8.62613300 CLA 159.89603300 36.92882800 8.62383600 CLA 158.60811400 38.00191100 8.62139200 CLA 157.27545200 39.05585700 8.61878100 CLA 155.89887800 40.09067900 8.61598400 CLA 154.47923500 41.10640100 8.61298400 CLA 153.01737700 42.10305600 8.60976600 CLA 151.51416800 43.08069100 8.60631800 CLA 149.97048100 44.03935900 8.60262700 CLA 148.38719700 44.97912400 8.59868500 CLA 146.76520100 45.90005600 8.59448400 CLA 145.10538200 46.80223400 8.59001600 CLA 143.40863300 47.68574500 8.58527800 CLA 141.67584700 48.55068000 8.58026500 CLA 139.90791900 49.39713900 8.57497400 CLA 138.10574000 50.22522400 8.56940300 CLA 136.27020000 51.03504600 8.56355300 CLA 134.40218600 51.82671600 8.55742300 CLA 132.50257900 52.60035400 8.55101300 CLA 130.57225300 53.35607900 8.54432600 CLA 128.61207800 54.09401600 8.53736300 CLA 126.62291300 54.81429200 8.53012900 CLA 124.60561000 55.51703600 8.52262400 CLA 122.56100900 56.20238000 8.51485500 CLA 120.48994200 56.87045700 8.50682400 CLA 118.39322700 57.52140200 8.49853600 CLA 116.27167300 58.15535000 8.48999600 CLA 114.12607300 58.77243800 8.48121000 CLA 111.95721000 59.37280200 8.47218200 CLA 109.76585200 59.95657900 8.46291800 CLA 107.55275100 60.52390700 8.45342400 CLA 105.31864900 61.07492200 8.44370700 CLA 103.06426900 61.60976000 8.43377100 CLA 100.79032200 62.12855600 8.42362400 CLA 98.49750200 62.63144500 8.41327300 CLA 96.18649100 63.11855800 8.40272300 CLA 93.85795200 63.59002800 8.39198300 CLA 91.51253500 64.04598500 8.38105800 CLA 89.15087400 64.48655600 8.36995600 CLA 86.77358900 64.91186800 8.35868400 CLA 84.38128500 65.32204300 8.34725000 CLA 81.97455100 65.71720500 8.33566100 CLA 78.45385800 66.27039900 8.31981800 CLA 76.01539200 66.63736900 8.30974800 CLA 73.56432400 66.98967000 8.29955700 CLA 71.10119300 67.32741100 8.28925400 CLA 67.51185900 67.79723300 8.27551900 CLA 65.02213500 68.10760200 8.26679900 CLA 62.52204800 68.40372000 8.25799800 CLA 60.01208900 68.68568400 8.24912300 CLA 57.49274100 68.95358600 8.24018000 CLA 56.36541400 69.07342900 8.23728900 CLA 53.83371600 69.32874400 8.23006100 CLA 51.29372900 69.57017000 8.22278900 CLA 48.74590700 69.79778900 8.21547800 CLA 46.19069200 70.01168000 8.20813500 CLA 45.05275500 70.10458800 8.20539400 CLA 42.48779600 70.30617100 8.19979100 CLA 39.91648700 70.49416600 8.19417400 CLA 37.33924700 70.66863900 8.18855000 CLA 34.75648600 70.82965300 8.18292200 CLA 31.02012900 71.04435900 8.17624900 CLA 28.42562400 71.17993400 8.17239700 CLA 25.82698800 71.30220600 8.16856000 CLA 23.22460800 71.41121700 8.16474300 CLA 20.61886600 71.50700800 8.16094900 CLA 19.46491600 71.54680900 8.15967700 CLA 16.85499600 71.63071000 8.15767300 CLA 14.24266800 71.70145500 8.15570100 CLA 11.62830600 71.75906800 8.15376400 CLA 9.01227700 71.80357000 8.15186200 CLA 6.39495000 71.83497800 8.14999800 CLA 5.23741300 71.84868600 8.15017200 CLA 2.61888900 71.86829900 8.15011200 CLA 0.00000000 71.87483500 8.15009100 CLA -2.61888900 71.86829900 8.15011200 CLA -5.23741300 71.84868600 8.15017200 CLA -6.39495000 71.83497800 8.14999800 CLA -9.01227700 71.80357000 8.15186200 CLA -11.62830600 71.75906800 8.15376400 CLA -14.24266800 71.70145500 8.15570100 CLA -16.85499600 71.63071000 8.15767300 CLA -19.46491600 71.54680900 8.15967700 CLA -20.61886600 71.50700800 8.16094900 CLA -23.22460800 71.41121700 8.16474300 CLA -25.82698800 71.30220600 8.16856000 CLA -28.42562400 71.17993400 8.17239700 CLA -31.02012900 71.04435900 8.17624900 CLA -34.75648600 70.82965300 8.18292200 CLA -37.33924700 70.66863900 8.18855000 CLA -39.91648700 70.49416600 8.19417400 CLA -42.48779600 70.30617100 8.19979100 CLA -45.05275500 70.10458800 8.20539400 CLA -46.19069200 70.01168000 8.20813500 CLA -48.74590700 69.79778900 8.21547800 CLA -51.29372900 69.57017000 8.22278900 CLA -53.83371600 69.32874400 8.23006100 CLA -56.36541400 69.07342900 8.23728900 CLA -57.49274100 68.95358600 8.24018000 CLA -60.01208900 68.68568400 8.24912300 CLA -62.52204800 68.40372000 8.25799800 CLA -65.02213500 68.10760200 8.26679900 CLA -67.51185900 67.79723300 8.27551900 CLA -71.10119300 67.32741100 8.28925400 CLA -73.56432400 66.98967000 8.29955700 CLA -76.01539200 66.63736900 8.30974800 CLA -78.45385800 66.27039900 8.31981800 CLA -81.97455100 65.71720500 8.33566100 CLA -84.38128500 65.32204300 8.34725000 CLA -86.77358900 64.91186800 8.35868400 CLA -89.15087400 64.48655600 8.36995600 CLA -91.51253500 64.04598500 8.38105800 CLA -93.85795200 63.59002800 8.39198300 CLA -96.18649100 63.11855800 8.40272300 CLA -98.49750200 62.63144500 8.41327300 CLA -100.79032200 62.12855600 8.42362400 CLA -103.06426900 61.60976000 8.43377100 CLA -105.31864900 61.07492200 8.44370700 CLA -107.55275100 60.52390700 8.45342400 CLA -109.76585200 59.95657900 8.46291800 CLA -111.95721000 59.37280200 8.47218200 CLA -114.12607300 58.77243800 8.48121000 CLA -116.27167300 58.15535000 8.48999600 CLA -118.39322700 57.52140200 8.49853600 CLA -120.48994200 56.87045700 8.50682400 CLA -122.56100900 56.20238000 8.51485500 CLA -124.60561000 55.51703600 8.52262400 CLA -126.62291300 54.81429200 8.53012900 CLA -128.61207800 54.09401600 8.53736300 CLA -130.57225300 53.35607900 8.54432600 CLA -132.50257900 52.60035400 8.55101300 CLA -134.40218600 51.82671600 8.55742300 CLA -136.27020000 51.03504600 8.56355300 CLA -138.10574000 50.22522400 8.56940300 CLA -139.90791900 49.39713900 8.57497400 CLA -141.67584700 48.55068000 8.58026500 CLA -143.40863300 47.68574500 8.58527800 CLA -145.10538200 46.80223400 8.59001600 CLA -146.76520100 45.90005600 8.59448400 CLA -148.38719700 44.97912400 8.59868500 CLA -149.97048100 44.03935900 8.60262700 CLA -151.51416800 43.08069100 8.60631800 CLA -153.01737700 42.10305600 8.60976600 CLA -154.47923500 41.10640100 8.61298400 CLA -155.89887800 40.09067900 8.61598400 CLA -157.27545200 39.05585700 8.61878100 CLA -158.60811400 38.00191100 8.62139200 CLA -159.89603300 36.92882800 8.62383600 CLA -161.13839400 35.83660600 8.62613300 CLA -162.33439800 34.72526000 8.62830800 CLA -163.48326100 33.59481300 8.63038500 CLA -164.58422100 32.44530500 8.63239300 CLA -165.63653300 31.27679100 8.63436300 CLA -166.63947600 30.08933900 8.63632700 CLA -167.59235100 28.88303600 8.63832200 CLA -168.49448300 27.65798500 8.64038500 CLA -169.34522100 26.41430400 8.64255700 CLA -170.14394200 25.15213000 8.64488200 CLA -170.89005200 23.87162200 8.64740500 CLA -171.58298300 22.57295200 8.65017400 CLA -172.22219700 21.25631700 8.65324100 CLA -172.80718800 19.92193100 8.65665800 CLA -173.33748100 18.57003000 8.66048000 CLA -173.81263200 17.20086900 8.66476500 CLA -174.23223100 15.81472800 8.66957100 CLA -174.59590200 14.41190500 8.67496000 CLA -174.90330200 12.99272200 8.68099300 CLA -175.15412300 11.55752300 8.68773500 CLA -175.34809200 10.10667300 8.69525000 CLA -175.38539800 9.80003000 8.69732700 CLA -175.42261700 9.49324500 8.69969700 CLA -175.55844600 8.02993500 8.71081500 CLA -175.63697200 6.55179200 8.72281100 CLA -175.65802900 5.05924900 8.73575300 CLA -175.62148800 3.55276000 8.74970400 CLA -175.52725300 2.03280000 8.76473000 CLA -175.37526600 0.49987000 8.78089700 CLA -175.16550300 -1.04551200 8.79826900 CLA -174.89797700 -2.60280200 8.81690800 CLA -174.57273400 -4.17143900 8.83687700 CLA -174.18985600 -5.75083700 8.85823500 CLA -173.74945900 -7.34039300 8.88104200 CLA -173.25169300 -8.93948200 8.90535300 CLA -172.69674200 -10.54746200 8.93122200 CLA -172.08482000 -12.16366800 8.95869900 CLA -171.41617600 -13.78742200 8.98783100 CLA -170.69108900 -15.41802500 9.01866400 CLA -169.90987000 -17.05476300 9.05123700 CLA -169.07285800 -18.69690500 9.08558600 CLA -168.18042200 -20.34370400 9.12174400 CLA -167.23296000 -21.99440100 9.15974000 CLA -166.23089600 -23.64822000 9.19959500 CLA -165.17468100 -25.30437400 9.24132800 CLA -164.06479400 -26.96206400 9.28495300 CLA -162.90173400 -28.62047800 9.33047800 CLA -161.68602700 -30.27879600 9.37790600 CLA -160.41822100 -31.93618600 9.42723300 CLA -159.09888600 -33.59180900 9.47845200 CLA -157.72861100 -35.24481700 9.53154900 CLA -156.30800600 -36.89435500 9.58650400 CLA -154.83770000 -38.53956200 9.64329100 CLA -153.31833900 -40.17957300 9.70188000 CLA -151.75058600 -41.81351600 9.76223200 CLA -150.13511900 -43.44051700 9.82430600 CLA -148.47263400 -45.05970100 9.88805200 CLA -146.76383500 -46.67018700 9.95341600 CLA -145.00944500 -48.27109700 10.02033800 CLA -143.21019400 -49.86155100 10.08875200 CLA -141.36682700 -51.44067000 10.15858700 CLA -139.48009800 -53.00757600 10.22976600 CLA -137.55076900 -54.56139500 10.30220800 CLA -135.57961200 -56.10125500 10.37582600 CLA -133.56740800 -57.62628900 10.45052900 CLA -131.51494400 -59.13563200 10.52622100 CLA -129.42301300 -60.62842900 10.60280200 CLA -127.29241500 -62.10382700 10.68016600 CLA -125.12395600 -63.56098300 10.75820500 CLA -122.91844500 -64.99906200 10.83680800 CLA -120.67669700 -66.41723400 10.91585800 CLA -118.39952900 -67.81468200 10.99523900 CLA -116.08776400 -69.19059800 11.07482700 CLA -113.74222400 -70.54418400 11.15449900 CLA -111.36373800 -71.87465300 11.23412900 CLA -108.95313400 -73.18123000 11.31359000 CLA -106.51124400 -74.46315300 11.39275200 CLA -104.03889900 -75.71967300 11.47148400 CLA -101.53693500 -76.95005500 11.54965500 CLA -99.00618600 -78.15357600 11.62713100 CLA -96.44749000 -79.32953100 11.70378200 CLA -93.86168200 -80.47722800 11.77947400 CLA -91.24960200 -81.59599200 11.85407600 CLA -88.61208700 -82.68516400 11.92745500 CLA -85.94997800 -83.74410000 11.99948200 CLA -83.26411300 -84.77217700 12.07002700 CLA -80.55533200 -85.76878700 12.13896300 CLA -77.82447700 -86.73333900 12.20616400 CLA -75.07238700 -87.66526400 12.27150700 CLA -72.29990300 -88.56401000 12.33487100 CLA -69.50786800 -89.42904300 12.39613800 CLA -66.69712100 -90.25985100 12.45519300 CLA -63.86850500 -91.05594200 12.51192300 CLA -61.02286300 -91.81684200 12.56622100 CLA -58.16103600 -92.54210000 12.61798300 CLA -55.28386700 -93.23128500 12.66710800 CLA -52.39220000 -93.88398800 12.71349900 CLA -49.48687600 -94.49982100 12.75706600 CLA -46.56874100 -95.07841700 12.79772100 CLA -43.63863800 -95.61943400 12.83538200 CLA -40.69741000 -96.12254800 12.86997200 CLA -37.74590400 -96.58746300 12.90142000 CLA -34.78496400 -97.01390100 12.92965900 CLA -31.81543500 -97.40160900 12.95462800 CLA -28.83816300 -97.75035900 12.97627200 CLA -25.85399400 -98.05994200 12.99454200 CLA -22.86377600 -98.33017600 13.00939400 CLA -19.86835400 -98.56090100 13.02079000 CLA -16.86857600 -98.75198300 13.02870000 CLA -13.86529000 -98.90330900 13.03309700 CLA -10.85934400 -99.01479100 13.03396300 CLA -7.85158500 -99.08636500 13.03128500 CLA -4.84286400 -99.11799200 13.02505600 CLA Table 8 to FIG. 2: Aperture polygon AS2 X [mm] Y [mm] Z [mm] Type 0.00000000 -51.07217300 0.00000000 CLA 2.66162300 -51.05712900 0.00000000 CLA 5.32262300 -51.01202200 0.00000000 CLA 7.98237900 -50.93692400 0.00000000 CLA 10.64026700 -50.83195500 0.00000000 CLA 13.29566300 -50.69728600 0.00000000 CLA 16.66141500 -50.51366500 0.00000000 CLA 19.31292800 -50.34884700 0.00000000 CLA 21.96055600 -50.15484900 0.00000000 CLA 24.60366900 -49.93198400 0.00000000 CLA 27.24163700 -49.68060900 0.00000000 CLA 29.87382300 -49.40112300 0.00000000 CLA 32.49958900 -49.09397300 0.00000000 CLA 35.11829400 -48.75964300 0.00000000 CLA 37.72929300 -48.39866000 0.00000000 CLA 40.33193500 -48.01158900 0.00000000 CLA 42.92556700 -47.59903300 0.00000000 CLA 46.28092200 -47.05364500 0.00000000 CLA 48.86277100 -46.61658100 0.00000000 CLA 51.43416400 -46.15546400 0.00000000 CLA 53.99443400 -45.67100300 0.00000000 CLA 56.54291400 -45.16393500 0.00000000 CLA 59.07892900 -44.63502300 0.00000000 CLA 61.60180100 -44.08505900 0.00000000 CLA 64.11084700 -43.51485800 0.00000000 CLA 66.60538000 -42.92525600 0.00000000 CLA 69.08470900 -42.31710800 0.00000000 CLA 71.54813700 -41.69128700 0.00000000 CLA 73.99496400 -41.04868100 0.00000000 CLA 77.32711100 -40.16178300 0.00000000 CLA 79.75318800 -39.50583000 0.00000000 CLA 82.16115000 -38.83509200 0.00000000 CLA 84.55029100 -38.15048500 0.00000000 CLA 86.91990000 -37.45293200 0.00000000 CLA 89.26926400 -36.74335900 0.00000000 CLA 91.59766700 -36.02268900 0.00000000 CLA 93.90439200 -35.29184800 0.00000000 CLA 96.18871900 -34.55175500 0.00000000 CLA 98.44992800 -33.80332300 0.00000000 CLA 100.68729600 -33.04745700 0.00000000 CLA 102.90010300 -32.28505400 0.00000000 CLA 105.08762600 -31.51699400 0.00000000 CLA 107.24914300 -30.74414800 0.00000000 CLA 110.53967800 -29.56667400 0.00000000 CLA 112.66988600 -28.79613300 0.00000000 CLA 114.77260000 -28.02271900 0.00000000 CLA 116.84710900 -27.24724600 0.00000000 CLA 118.89270500 -26.47050500 0.00000000 CLA 120.90868100 -25.69326600 0.00000000 CLA 122.89433700 -24.91627500 0.00000000 CLA 124.84897500 -24.14025500 0.00000000 CLA 126.77190300 -23.36590300 0.00000000 CLA 128.66243200 -22.59388900 0.00000000 CLA 130.51988200 -21.82485700 0.00000000 CLA 132.34357700 -21.05942300 0.00000000 CLA 134.13284800 -20.29817500 0.00000000 CLA 139.12975100 -18.15044400 0.00000000 CLA 140.84325800 -17.41013300 0.00000000 CLA 142.52041200 -16.67583600 0.00000000 CLA 144.16058200 -15.94802200 0.00000000 CLA 145.76315200 -15.22712800 0.00000000 CLA 147.32751100 -14.51356500 0.00000000 CLA 148.85306200 -13.80771400 0.00000000 CLA 150.33921700 -13.10992800 0.00000000 CLA 151.78540100 -12.42053200 0.00000000 CLA 153.19104900 -11.73982500 0.00000000 CLA 157.77094000 -9.51969600 0.00000000 CLA 159.08933500 -8.87263300 0.00000000 CLA 160.36567200 -8.23521200 0.00000000 CLA 161.59944400 -7.60762000 0.00000000 CLA 162.79016200 -6.99001600 0.00000000 CLA 168.25884800 -4.10019400 0.00000000 CLA 169.31360100 -3.53291500 0.00000000 CLA 170.32361200 -2.97624700 0.00000000 CLA 171.28847200 -2.43022900 0.00000000 CLA 172.20778900 -1.89488100 0.00000000 CLA 173.08118800 -1.37020400 0.00000000 CLA 173.90830900 -0.85618200 0.00000000 CLA 174.68881100 -0.35278100 0.00000000 CLA 175.42236900 0.14004600 0.00000000 CLA 176.10867700 0.62236100 0.00000000 CLA 176.74744700 1.09424200 0.00000000 CLA 177.33840900 1.55577700 0.00000000 CLA 177.88131100 2.00706600 0.00000000 CLA 178.37592300 2.44822100 0.00000000 CLA 178.82203000 2.87936300 0.00000000 CLA 179.21943900 3.30062300 0.00000000 CLA 179.56797700 3.71213700 0.00000000 CLA 179.86749000 4.11405300 0.00000000 CLA 180.11784600 4.50652200 0.00000000 CLA 180.31893000 4.88970200 0.00000000 CLA 180.47065100 5.26375500 0.00000000 CLA 180.57293600 5.62884900 0.00000000 CLA 180.62573500 5.98515500 0.00000000 CLA 180.62901800 6.33284500 0.00000000 CLA 180.33196700 9.56040600 0.00000000 CLA 180.27786300 9.81759200 0.00000000 CLA 180.17435700 10.06691200 0.00000000 CLA 180.02149000 10.30860600 0.00000000 CLA 179.81932900 10.54291500 0.00000000 CLA 179.56796000 10.77007600 0.00000000 CLA 179.26749000 10.99032400 0.00000000 CLA 178.91804700 11.20389000 0.00000000 CLA 178.51978200 11.41100300 0.00000000 CLA 178.07286600 11.61188400 0.00000000 CLA 177.57749000 11.80675200 0.00000000 CLA 177.03386800 11.99581700 0.00000000 CLA 176.44223200 12.17928800 0.00000000 CLA 175.80283600 12.35736300 0.00000000 CLA 175.11595400 12.53023600 0.00000000 CLA 174.38187900 12.69809300 0.00000000 CLA 173.60092400 12.86111400 0.00000000 CLA 172.77342100 13.01947100 0.00000000 CLA 171.89972000 13.17333000 0.00000000 CLA 170.98019200 13.32284900 0.00000000 CLA 170.01522300 13.46817800 0.00000000 CLA 169.00522000 13.60946100 0.00000000 CLA 167.95060400 13.74683400 0.00000000 CLA 166.85181400 13.88042800 0.00000000 CLA 165.70930800 14.01036400 0.00000000 CLA 164.52355600 14.13675900 0.00000000 CLA 163.29504700 14.25972400 0.00000000 CLA 162.02428100 14.37936100 0.00000000 CLA 160.71177700 14.49576800 0.00000000 CLA 159.35806500 14.60903800 0.00000000 CLA 157.96368900 14.71925700 0.00000000 CLA 156.52920600 14.82650700 0.00000000 CLA 155.05518600 14.93086500 0.00000000 CLA 153.54220900 15.03240400 0.00000000 CLA 151.99086900 15.13119100 0.00000000 CLA 150.40176700 15.22729100 0.00000000 CLA 148.77551600 15.32076500 0.00000000 CLA 140.28917500 15.78795200 0.00000000 CLA 138.45153000 15.88904100 0.00000000 CLA 136.58103900 15.98734800 0.00000000 CLA 134.67837300 16.08292400 0.00000000 CLA 132.74420600 16.17581600 0.00000000 CLA 130.77921500 16.26607100 0.00000000 CLA 128.78408300 16.35373200 0.00000000 CLA 126.75949200 16.43884200 0.00000000 CLA 124.70613000 16.52144200 0.00000000 CLA 122.62468400 16.60157100 0.00000000 CLA 120.51584300 16.67926800 0.00000000 CLA 118.38029500 16.75456800 0.00000000 CLA 116.21873100 16.82751000 0.00000000 CLA 114.03183800 16.89812500 0.00000000 CLA 111.82030400 16.96645000 0.00000000 CLA 109.58481400 17.03251500 0.00000000 CLA 107.32605400 17.09635200 0.00000000 CLA 105.04470300 17.15799200 0.00000000 CLA 102.74144100 17.21746500 0.00000000 CLA 100.41694300 17.27479900 0.00000000 CLA 98.07188300 17.33002300 0.00000000 CLA 95.70692900 17.38316200 0.00000000 CLA 93.32274600 17.43424400 0.00000000 CLA 90.91999500 17.48329300 0.00000000 CLA 88.49933400 17.53033300 0.00000000 CLA 86.06141500 17.57538800 0.00000000 CLA 83.60688700 17.61847900 0.00000000 CLA 81.13639500 17.65962900 0.00000000 CLA 78.65057900 17.69885600 0.00000000 CLA 76.15007600 17.73618100 0.00000000 CLA 73.63551600 17.77162000 0.00000000 CLA 71.10752900 17.80519100 0.00000000 CLA 68.56673900 17.83690900 0.00000000 CLA 66.01376800 17.86678700 0.00000000 CLA 63.44923300 17.89484000 0.00000000 CLA 60.87374900 17.92107700 0.00000000 CLA 58.28792900 17.94551000 0.00000000 CLA 55.69238400 17.96814600 0.00000000 CLA 53.08772000 17.98899400 0.00000000 CLA 50.47454600 18.00805700 0.00000000 CLA 47.85346800 18.02534000 0.00000000 CLA 45.22509000 18.04084600 0.00000000 CLA 42.59001700 18.05457500 0.00000000 CLA 39.94885600 18.06652700 0.00000000 CLA 37.30221200 18.07669900 0.00000000 CLA 34.65069400 18.08508600 0.00000000 CLA 31.99491000 18.09168300 0.00000000 CLA 29.33547200 18.09648300 0.00000000 CLA 26.67299600 18.09947600 0.00000000 CLA 24.00809900 18.10065300 0.00000000 CLA -24.00809900 18.10065300 0.00000000 CLA -26.67299600 18.09947600 0.00000000 CLA -29.33547200 18.09648300 0.00000000 CLA -31.99491000 18.09168300 0.00000000 CLA -34.65069400 18.08508600 0.00000000 CLA -37.30221200 18.07669900 0.00000000 CLA -39.94885600 18.06652700 0.00000000 CLA -42.59001700 18.05457500 0.00000000 CLA -45.22509000 18.04084600 0.00000000 CLA -47.85346800 18.02534000 0.00000000 CLA -50.47454600 18.00805700 0.00000000 CLA -53.08772000 17.98899400 0.00000000 CLA -55.69238400 17.96814600 0.00000000 CLA -58.28792900 17.94551000 0.00000000 CLA -60.87374900 17.92107700 0.00000000 CLA -63.44923300 17.89484000 0.00000000 CLA -66.01376800 17.86678700 0.00000000 CLA -68.56673900 17.83690900 0.00000000 CLA -71.10752900 17.80519100 0.00000000 CLA -73.63551600 17.77162000 0.00000000 CLA -76.15007600 17.73618100 0.00000000 CLA -78.65057900 17.69885600 0.00000000 CLA -81.13639500 17.65962900 0.00000000 CLA -83.60688700 17.61847900 0.00000000 CLA -86.06141500 17.57538800 0.00000000 CLA -88.49933400 17.53033300 0.00000000 CLA -90.91999500 17.48329300 0.00000000 CLA -93.32274600 17.43424400 0.00000000 CLA -95.70692900 17.38316200 0.00000000 CLA -98.07188300 17.33002300 0.00000000 CLA -100.41694300 17.27479900 0.00000000 CLA -102.74144100 17.21746500 0.00000000 CLA -105.04470300 17.15799200 0.00000000 CLA -107.32605400 17.09635200 0.00000000 CLA -109.58481400 17.03251500 0.00000000 CLA -111.82030400 16.96645000 0.00000000 CLA -114.03183800 16.89812500 0.00000000 CLA -116.21873100 16.82751000 0.00000000 CLA -118.38029500 16.75456800 0.00000000 CLA -120.51584300 16.67926800 0.00000000 CLA -122.62468400 16.60157100 0.00000000 CLA -124.70613000 16.52144200 0.00000000 CLA -126.75949200 16.43884200 0.00000000 CLA -128.78408300 16.35373200 0.00000000 CLA -130.77921500 16.26607100 0.00000000 CLA -132.74420600 16.17581600 0.00000000 CLA -134.67837300 16.08292400 0.00000000 CLA -136.58103900 15.98734800 0.00000000 CLA -138.45153000 15.88904100 0.00000000 CLA -140.28917500 15.78795200 0.00000000 CLA -148.77551600 15.32076500 0.00000000 CLA -150.40176700 15.22729100 0.00000000 CLA -151.99086900 15.13119100 0.00000000 CLA -153.54220900 15.03240400 0.00000000 CLA -155.05518600 14.93086500 0.00000000 CLA -156.52920600 14.82650700 0.00000000 CLA -157.96368900 14.71925700 0.00000000 CLA -159.35806500 14.60903800 0.00000000 CLA -160.71177700 14.49576800 0.00000000 CLA -162.02428100 14.37936100 0.00000000 CLA -163.29504700 14.25972400 0.00000000 CLA -164.52355600 14.13675900 0.00000000 CLA -165.70930800 14.01036400 0.00000000 CLA -166.85181400 13.88042800 0.00000000 CLA -167.95060400 13.74683400 0.00000000 CLA -169.00522000 13.60946100 0.00000000 CLA -170.01522300 13.46817800 0.00000000 CLA -170.98019200 13.32284900 0.00000000 CLA -171.89972000 13.17333000 0.00000000 CLA -172.77342100 13.01947100 0.00000000 CLA -173.60092400 12.86111400 0.00000000 CLA -174.38187900 12.69809300 0.00000000 CLA -175.11595400 12.53023600 0.00000000 CLA -175.80283600 12.35736300 0.00000000 CLA -176.44223200 12.17928800 0.00000000 CLA -177.03386800 11.99581700 0.00000000 CLA -177.57749000 11.80675200 0.00000000 CLA -178.07286600 11.61188400 0.00000000 CLA -178.51978200 11.41100300 0.00000000 CLA -178.91804700 11.20389000 0.00000000 CLA -179.26749000 10.99032400 0.00000000 CLA -179.56796000 10.77007600 0.00000000 CLA -179.81932900 10.54291500 0.00000000 CLA -180.02149000 10.30860600 0.00000000 CLA -180.17435700 10.06691200 0.00000000 CLA -180.27786300 9.81759200 0.00000000 CLA -180.33196700 9.56040600 0.00000000 CLA -180.62901800 6.33284500 0.00000000 CLA -180.62573500 5.98515500 0.00000000 CLA -180.57293600 5.62884900 0.00000000 CLA -180.47065100 5.26375500 0.00000000 CLA -180.31893000 4.88970200 0.00000000 CLA -180.11784600 4.50652200 0.00000000 CLA -179.86749000 4.11405300 0.00000000 CLA -179.56797700 3.71213700 0.00000000 CLA -179.21943900 3.30062300 0.00000000 CLA -178.82203000 2.87936300 0.00000000 CLA -178.37592300 2.44822100 0.00000000 CLA -177.88131100 2.00706600 0.00000000 CLA -177.33840900 1.55577700 0.00000000 CLA -176.74744700 1.09424200 0.00000000 CLA -176.10867700 0.62236100 0.00000000 CLA -175.42236900 0.14004600 0.00000000 CLA -174.68881100 -0.35278100 0.00000000 CLA -173.90830900 -0.85618200 0.00000000 CLA -173.08118800 -1.37020400 0.00000000 CLA -172.20778900 -1.89488100 0.00000000 CLA -171.28847200 -2.43022900 0.00000000 CLA -170.32361200 -2.97624700 0.00000000 CLA -169.31360100 -3.53291500 0.00000000 CLA -168.25884800 -4.10019400 0.00000000 CLA -162.79016200 -6.99001600 0.00000000 CLA -161.59944400 -7.60762000 0.00000000 CLA -160.36567200 -8.23521200 0.00000000 CLA -159.08933500 -8.87263300 0.00000000 CLA -157.77094000 -9.51969600 0.00000000 CLA -153.19104900 -11.73982500 0.00000000 CLA -151.78540100 -12.42053200 0.00000000 CLA -150.33921700 -13.10992800 0.00000000 CLA -148.85306200 -13.80771400 0.00000000 CLA -147.32751100 -14.51356500 0.00000000 CLA -145.76315200 -15.22712800 0.00000000 CLA -144.16058200 -15.94802200 0.00000000 CLA -142.52041200 -16.67583600 0.00000000 CLA -140.84325800 -17.41013300 0.00000000 CLA -139.12975100 -18.15044400 0.00000000 CLA -134.13284800 -20.29817500 0.00000000 CLA -132.34357700 -21.05942300 0.00000000 CLA -130.51988200 -21.82485700 0.00000000 CLA -128.66243200 -22.59388900 0.00000000 CLA -126.77190300 -23.36590300 0.00000000 CLA -124.84897500 -24.14025500 0.00000000 CLA -122.89433700 -24.91627500 0.00000000 CLA -120.90868100 -25.69326600 0.00000000 CLA -118.89270500 -26.47050500 0.00000000 CLA -116.84710900 -27.24724600 0.00000000 CLA -114.77260000 -28.02271900 0.00000000 CLA -112.66988600 -28.79613300 0.00000000 CLA -110.53967800 -29.56667400 0.00000000 CLA -107.24914300 -30.74414800 0.00000000 CLA -105.08762600 -31.51699400 0.00000000 CLA -102.90010300 -32.28505400 0.00000000 CLA -100.68729600 -33.04745700 0.00000000 CLA -98.44992800 -33.80332300 0.00000000 CLA -96.18871900 -34.55175500 0.00000000 CLA -93.90439200 -35.29184800 0.00000000 CLA -91.59766700 -36.02268900 0.00000000 CLA -89.26926400 -36.74335900 0.00000000 CLA -86.91990000 -37.45293200 0.00000000 CLA -84.55029100 -38.15048500 0.00000000 CLA -82.16115000 -38.83509200 0.00000000 CLA -79.75318800 -39.50583000 0.00000000 CLA -77.32711100 -40.16178300 0.00000000 CLA -73.99496400 -41.04868100 0.00000000 CLA -71.54813700 -41.69128700 0.00000000 CLA -69.08470900 -42.31710800 0.00000000 CLA -66.60538000 -42.92525600 0.00000000 CLA -64.11084700 -43.51485800 0.00000000 CLA -61.60180100 -44.08505900 0.00000000 CLA -59.07892900 -44.63502300 0.00000000 CLA -56.54291400 -45.16393500 0.00000000 CLA -53.99443400 -45.67100300 0.00000000 CLA -51.43416400 -46.15546400 0.00000000 CLA -48.86277100 -46.61658100 0.00000000 CLA -46.28092200 -47.05364500 0.00000000 CLA -42.92556700 -47.59903300 0.00000000 CLA -40.33193500 -48.01158900 0.00000000 CLA -37.72929300 -48.39866000 0.00000000 CLA -35.11829400 -48.75964300 0.00000000 CLA -32.49958900 -49.09397300 0.00000000 CLA -29.87382300 -49.40112300 0.00000000 CLA -27.24163700 -49.68060900 0.00000000 CLA -24.60366900 -49.93198400 0.00000000 CLA -21.96055600 -50.15484900 0.00000000 CLA -19.31292800 -50.34884700 0.00000000 CLA -16.66141500 -50.51366500 0.00000000 CLA -13.29566300 -50.69728600 0.00000000 CLA -10.64026700 -50.83195500 0.00000000 CLA -7.98237900 -50.93692400 0.00000000 CLA -5.32262300 -51.01202200 0.00000000 CLA -2.66162300 -51.05712900 0.00000000 CLA Table 9 to FIG. 2: Aperture polygon AS X [mm] Y [mm] Z [mm] Type -227.91573000 -165.46964900 0.00000000 CLA -227.20570600 -177.07028400 0.00000000 CLA -225.89504300 -188.70208500 0.00000000 CLA -223.97406700 -200.33118800 0.00000000 CLA -221.43499800 -211.92240400 0.00000000 CLA -218.27195900 -223.43912600 0.00000000 CLA -214.48127800 -234.84332200 0.00000000 CLA -210.06189400 -246.09584400 0.00000000 CLA -205.01484800 -257.15653500 0.00000000 CLA -199.34429100 -267.98472500 0.00000000 CLA -193.05688700 -278.53883600 0.00000000 CLA -186.16251100 -288.77708100 0.00000000 CLA -178.67405200 -298.65757200 0.00000000 CLA -170.60750600 -308.13892000 0.00000000 CLA -161.98229300 -317.17983100 0.00000000 CLA -152.82083500 -325.74011900 0.00000000 CLA -143.14897400 -333.78069700 0.00000000 CLA -132.99576300 -341.26408800 0.00000000 CLA -122.39337200 -348.15452000 0.00000000 CLA -111.37687400 -354.41853100 0.00000000 CLA -99.98426300 -360.02496900 0.00000000 CLA -88.25634100 -364.94569400 0.00000000 CLA -76.23601500 -369.15568000 0.00000000 CLA -63.96850500 -372.63301500 0.00000000 CLA -51.50093800 -375.35980200 0.00000000 CLA -38.88184600 -377.32165800 0.00000000 CLA -26.16076100 -378.50812100 0.00000000 CLA -13.38842900 -378.91304000 0.00000000 CLA 13.38842900 -378.91304000 0.00000000 CLA 26.16076100 -378.50812100 0.00000000 CLA 38.88184600 -377.32165800 0.00000000 CLA 51.50093800 -375.35980200 0.00000000 CLA 63.96850500 -372.63301500 0.00000000 CLA 76.23601500 -369.15568000 0.00000000 CLA 88.25634100 -364.94569400 0.00000000 CLA 99.98426300 -360.02496900 0.00000000 CLA 111.37687400 -354.41853100 0.00000000 CLA 122.39337200 -348.15452000 0.00000000 CLA 132.99576300 -341.26408800 0.00000000 CLA 143.14897400 -333.78069700 0.00000000 CLA 152.82083500 -325.74011900 0.00000000 CLA 161.98229300 -317.17983100 0.00000000 CLA 170.60750600 -308.13892000 0.00000000 CLA 178.67405200 -298.65757200 0.00000000 CLA 186.16251100 -288.77708100 0.00000000 CLA 193.05688700 -278.53883600 0.00000000 CLA 199.34429100 -267.98472500 0.00000000 CLA 205.01484800 -257.15653500 0.00000000 CLA 210.06189400 -246.09584400 0.00000000 CLA 214.48127800 -234.84332200 0.00000000 CLA 218.27195900 -223.43912600 0.00000000 CLA 221.43499800 -211.92240400 0.00000000 CLA 223.97406700 -200.33118800 0.00000000 CLA 225.89504300 -188.70208500 0.00000000 CLA 227.20570600 -177.07028400 0.00000000 CLA 227.91573000 -165.46964900 0.00000000 CLA 218.96183500 -152.82525200 0.00000000 CLA 224.06330000 -145.36750000 0.00000000 CLA 230.88330000 -134.16890000 0.00000000 CLA 237.01280000 -122.76050000 0.00000000 CLA 242.43390000 -111.18030000 0.00000000 CLA 247.13070000 -99.46550000 0.00000000 CLA 251.09000000 -87.65220000 0.00000000 CLA 254.30090000 -75.77540000 0.00000000 CLA 256.75560000 -63.86940000 0.00000000 CLA 258.44930000 -51.96710000 0.00000000 CLA 259.38010000 -40.10040000 0.00000000 CLA 259.54960000 -28.30030000 0.00000000 CLA 258.96260000 -16.59660000 0.00000000 CLA 257.62740000 -5.01790000 0.00000000 CLA 255.55540000 6.40820000 0.00000000 CLA 252.76110000 17.65520000 0.00000000 CLA 249.26230000 28.69770000 0.00000000 CLA 245.07930000 39.51170000 0.00000000 CLA 240.23500000 50.07390000 0.00000000 CLA 234.75450000 60.36280000 0.00000000 CLA 228.66480000 70.35740000 0.00000000 CLA 221.99440000 80.03840000 0.00000000 CLA 214.77300000 89.38730000 0.00000000 CLA 207.03120000 98.38680000 0.00000000 CLA 198.80000000 107.02060000 0.00000000 CLA 190.11060000 115.27340000 0.00000000 CLA 180.99430000 123.13090000 0.00000000 CLA 171.48180000 130.57960000 0.00000000 CLA 161.60350000 137.60700000 0.00000000 CLA 151.38900000 144.20150000 0.00000000 CLA 140.86730000 150.35200000 0.00000000 CLA 130.06640000 156.04850000 0.00000000 CLA 119.01330000 161.28160000 0.00000000 CLA 107.73430000 166.04280000 0.00000000 CLA 96.25480000 170.32420000 0.00000000 CLA 84.59910000 174.11880000 0.00000000 CLA 72.79120000 177.42040000 0.00000000 CLA 60.85400000 180.22340000 0.00000000 CLA 48.81000000 182.52330000 0.00000000 CLA 36.68120000 184.31610000 0.00000000 CLA 24.48910000 185.59880000 0.00000000 CLA 12.25500000 186.36930000 0.00000000 CLA 0.00000000 186.62630000 0.00000000 CLA -12.25500000 186.36930000 0.00000000 CLA -24.48910000 185.59880000 0.00000000 CLA -36.68120000 184.31610000 0.00000000 CLA -48.81000000 182.52330000 0.00000000 CLA -60.85400000 180.22340000 0.00000000 CLA -72.79120000 177.42040000 0.00000000 CLA -84.59910000 174.11880000 0.00000000 CLA -96.25480000 170.32420000 0.00000000 CLA -107.73430000 166.04280000 0.00000000 CLA -119.01330000 161.28160000 0.00000000 CLA -130.06640000 156.04850000 0.00000000 CLA -140.86730000 150.35200000 0.00000000 CLA -151.38900000 144.20150000 0.00000000 CLA -161.60350000 137.60700000 0.00000000 CLA -171.48180000 130.57960000 0.00000000 CLA -180.99430000 123.13090000 0.00000000 CLA -190.11060000 115.27340000 0.00000000 CLA -198.80000000 107.02060000 0.00000000 CLA -207.03120000 98.38680000 0.00000000 CLA -214.77300000 89.38730000 0.00000000 CLA -221.99440000 80.03840000 0.00000000 CLA -228.66480000 70.35740000 0.00000000 CLA -234.75450000 60.36280000 0.00000000 CLA -240.23500000 50.07390000 0.00000000 CLA -245.07930000 39.51170000 0.00000000 CLA -249.26230000 28.69770000 0.00000000 CLA -252.76110000 17.65520000 0.00000000 CLA -255.55540000 6.40820000 0.00000000 CLA -257.62740000 -5.01790000 0.00000000 CLA -258.96260000 -16.59660000 0.00000000 CLA -259.54960000 -28.30030000 0.00000000 CLA -259.38010000 -40.10040000 0.00000000 CLA -258.44930000 -51.96710000 0.00000000 CLA -256.75560000 -63.86940000 0.00000000 CLA -254.30090000 -75.77540000 0.00000000 CLA -251.09000000 -87.65220000 0.00000000 CLA -247.13070000 -99.46550000 0.00000000 CLA -242.43390000 -111.18030000 0.00000000 CLA -237.01280000 -122.76050000 0.00000000 CLA -230.88330000 -134.16890000 0.00000000 CLA -224.06330000 -145.36750000 0.00000000 CLA -218.96183500 -152.82525200 0.00000000 CLA

Die Projektionsoptik 7 hat eine bildseitige numerische Apertur von 0,55. In einer Abbildungslicht-Ebene parallel zur x z-Ebene (Sagittalansicht nach 5) hat die Projektionsoptik 8 einen Verkleinerungsfaktor β_x von 4,00. In der hierzu senkrechten yz-Ebene (Meridionalebene nach 2) hat die Projektionsoptik 7 einen Verkleinerungsfaktor β_y von 8,00. Ein objektseitiger Hauptstrahlwinkel beträgt 5,1°. Dieser Winkel bezeichnet den Winkel eines Hauptstrahls eines zentralen Objektfeldpunktes zu einer Normalen auf die Objektebene 5. Eine Pupillenobskuration der Projektionsoptik 7 beträgt 13 % der numerischen Apertur der Projektionsoptik 7. Ein Flächenanteil von 0,13² einer Pupille der Projektionsoptik 7 ist somit obskuriert. Ein Objekt-Bild-Versatz d_OIS beträgt etwa 2050 mm. Die Spiegel der Projektionsoptik 7 können in einem Quader mit x y z-Kantenlängen von 924 mm × 2452 mm × 1639 mm untergebracht werden.The projection optics 7 has a picture-side numerical aperture of 0.55. In an imaging light plane parallel to x z Plane (Sagittal view after 5 ) has the projection optics 8th a reduction factor β _x of 4.00. In the perpendicular yz-plane (Meridionalebene nach 2 ) has the projection optics 7 a reduction factor β _y of 8.00. An object-side main beam angle is 5.1 °. This angle denotes the angle of a main ray of a central object field point to a normal to the object plane 5 , A pupil obscuration of the projection optics 7 is 13% of the numerical aperture of the projection optics 7 , An area fraction of 0.13 ^{2 of} a pupil of the projection optics 7 is thus obscured. An object-to-image offset d _OIS is about 2050 mm. The mirrors of the projection optics 7 can be in a cuboid with x y z Edge lengths of 924 mm × 2452 mm × 1639 mm.

Die Objektebene 5 verläuft parallel zur Bildebene 9.The object plane 5 runs parallel to the image plane 9 ,

Ein Arbeitsabstand zwischen dem wafernächsten Spiegel M9 und der Bildebene 9 beträgt 90 mm. Ein mittlerer Wellenfrontfehler rms beträgt 5,80 mλ, ist also abhängig von der Designwellenlänge definiert.A working distance between the nearest wafer M9 and the picture plane 9 is 90 mm. A mean wavefront error rms is 5.80 mλ, ie it is defined as a function of the design wavelength.

Die Spiegel M1, M5, M6, M8 und M10 haben negative Radiuswerte, sind also grundsätzlich Konkavspiegel. Die Spiegel M2 und M9 haben positive Radiuswerte, sind grundsätzlich also Konvexspiegel.The mirror M1 . M5 . M6 . M8 and M10 have negative radius values, so they are basically concave mirrors. The mirror M2 and M9 have positive radii, are therefore basically convex.

Die Spiegel M3, M4 und M7 haben unterschiedliche Vorzeichen hinsichtlich ihrer x- und y-Radiuswerte, haben also eine Sattelflächen-Grundform.The mirror M3 . M4 and M7 have different signs regarding their x - and y Radius values, so have a saddle surface basic shape.

Die Blende AS ist räumlich zwischen dem im Strahlengang vorletzten Spiegel M9 und dem im Strahlengang letzten Spiegel M10 angeordnet.The aperture AS is spatially between the penultimate mirror in the beam path M9 and the last in the beam path mirror M10 arranged.

Die Blende AS dient zur Vorgabe eines Abschnitts 18 einer äußeren Randkontur 19 der Pupille der Projektionsoptik 7. Diese Randkontur 19 der Pupille liegt in der Blendenebene E_AS und ist in der Schnittdarstellung nach 4 gezeigt. Der durch die Blende AS vorgesehene Randkonturabschnitt 18 überdeckt dabei einen Azimutwinkel B um einen Durchstoßpunkt Z der Koordinatenachse z durch die Blendenebene E_AS , der bei einem Pupillenzentrum liegt. In diesem Azimut-Winkelbereich B begrenzt die Blende AS ein Abbildungslicht-Teilbündel 3_M9M10 im Strahlengang zwischen den Spiegeln M9 und M10 (vergleiche 2 und 3). Im sonstigen Azimut-Winkelbereich M (vergleiche 4) hat die Blende AS keine Blendenwirkung für das Abbildungslicht 3, begrenzt also insbesondere nicht ein Abbildungslicht-Teilbündel 3_M10W zwischen dem Spiegel M10 und dem Bildfeld 8, also dem Wafer 11. In diesem verbleibenden Azimut-Winkelbereich M wird die Systempupille begrenzt durch die anderen Blenden AS2 bis AS4.The aperture AS is used to specify a section 18 an outer edge contour 19 the pupil of the projection optics 7 , This edge contour 19 the pupil lies in the diaphragm plane E _AS and is in the sectional view to 4 shown. The one through the aperture AS provided edge contour section 18 It covers an azimuth angle B about a penetration point Z of the coordinate axis z through the diaphragm plane E _AS who lies at a pupil center. In this azimuth angle range B limits the aperture AS an imaging light sub-beam 3 _M9M10 in the beam path between the mirrors M9 and M10 (see 2 and 3 ). In the other azimuth angle range M (see 4 ) has the aperture AS no glare for the picture light 3 in particular does not limit an imaging light sub-beam 3 _M10W between the mirror M10 and the image field 8th that is the wafer 11 , In this remaining azimuth angle range M the system pupil is limited by the other diaphragms AS2 to AS4 ,

Der Blenden-Azimutbereich B entspricht einem Azimutbereich um ein Zentrum der Pupille, der größer ist als 180°. Bei der Ausführung nach 4 beträgt der von der Blende AS die äußere Randkontur der Pupille abdeckende Azimutbereich um das Zentrum der Pupille etwa 240°. Dieser Azimutbereich kann alternativ auch 200°, 210°, 220° oder 230° betragen und kann auch größer sein als 240°, beispielsweise 250°, 260°, 280°, 300°, 320°, 340° und kann auch noch größer sein. Insbesondere kann der Azimutbereich 360° betragen, sodass bei einer Ausrührung der Blende AS die gesamte äußere Randkontur der Pupille der abbildenden Optik vorgegeben wird.The aperture azimuth area B corresponds to an azimuth area about a center of the pupil which is larger than 180 °. In the execution after 4 the azimuth area covering the outer edge contour of the pupil is about 240 ° around the center of the pupil. This azimuth range may alternatively be 200 °, 210 °, 220 ° or 230 ° and may also be greater than 240 °, for example 250 °, 260 °, 280 °, 300 °, 320 °, 340 ° and may be even greater , In particular, the azimuth range can be 360 °, so that when a Ausfrührung the aperture AS the entire outer edge contour of the pupil of the imaging optics is specified.

Die Blende AS ist plan, also in genau einer Ebene liegend ausgeführt.The aperture AS is plan, so running in exactly one plane.

Die Blende AS begrenzt in der der x-Richtung senkrecht zur Objektverlagerungsrichtung y beide extremen Randpositionen E(-x) und E(x) der äußeren Randkontur 19 der Pupille (vergleiche 4).The aperture AS limited in the x Direction perpendicular to the object displacement direction y both extreme edge positions E (-x) and E (x) of the outer edge contour 19 the pupil (compare 4 ).

5 zeigt eine sagittale Ansicht der Projektionsoptik 7. 5 shows a sagittal view of the projection optics 7 ,

Anhand der 6 wird nachfolgend eine weitere Ausführung einer Projektionsoptik 20 erläutert, die anstelle der Projektionsoptik 7 bei der Projektionsbelichtungsanlage 1 nach 1 zum Einsatz kommen kann. Komponenten und Funktionen, die vorstehend im Zusammenhang mit den 1 bis 5 bereits erläutert wurden, tragen gegebenenfalls die gleichen Bezugsziffern und werden nicht nochmals im Einzelnen diskutiert.Based on 6 Below is another embodiment of a projection optics 20 explains that instead of the projection optics 7 at the projection exposure machine 1 to 1 can be used. Components and functions discussed above in connection with the 1 to 5 have already been explained, if applicable, have the same reference numbers and will not be discussed again in detail.

Die Spiegel M1 bis M10 sind wiederum als Freiformflächen-Spiegel ausgeführt, für die die vorstehend angegebene Freiformflächengleichung (1) gilt. Die optischen Designdaten der Projektionsoptik 20 können den nachfolgenden Tabellen entnommen werden, die in ihrem Aufbau den Tabellen zur Projektionsoptik 7 nach 2 entsprechen. Tabelle 1 zu Fig. 6 Ausführungsbeispiel 6 NA 0.55 Wellenlänge 13.5 nm Feldgröße_x 26.0 mm Feldgröße_y 1.0 mm Feldkrümmung -0.012345 1/mm Blende AS Tabelle 2 zu Fig. 6 Oberfläche Radius_x[mm] Power_x[1/mm] Radius_y[mm] Power_y[1/mm] Betriebsmodus M10 -924.4981198 0.0021492 -841.5674623 0.0023921 REFL M9 1845.8313982 -0.0010835 356.4114777 -0.0056115 REFL M8 -807.7853011 0.0006289 -16794.6817783 0.0004689 REFL M7 -633.7019549 0.0007380 20332.8433550 -0.0004206 REFL M6 -1159.7877847 0.0003528 -7078.0588424 0.0013813 REFL M5 -7911.6202298 0.0000533 -2197.1749958 0.0043148 REFL M4 6252.7176733 -0.0000660 -2753.7274849 0.0035212 REFL M3 1718.6984546 -0.0002678 -10060.7554809 0.0008638 REFL M2 1592.6268445 -0.0002500 2592.5626309 -0.0038746 REFL M1 -2135.9876330 0.0009216 -1377.1202039 0.0014756 REFL Tabelle 3a zu Fig. 6 Koeffizient M10 M9 M8 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX -924.49811980 1845.83139800 -807.78530110 C7 5.32161644e-09 -7.17957299e-07 3.61958396e-07 C9 1.2051462e-08 1.48021766e-06 4.61852728e-08 C10 -4.28738318e-12 3.94779844e-10 1.36275822e-10 C12 -3.49709402e-11 2.67402017e-09 4.92199166e-11 C14 -9.81786584e-12 6.31481582e-09 -4.23949539e-10 C16 -3.40219667e-15 -2.74047503e-12 1.12548598e-12 C18 1.60335869e-14 2.04228406e-14 3.71761249e-13 C20 1.30399612e-14 3.2725238e-11 -2.05971586e-12 C21 -1.15274335e-17 2.35879877e-15 1.09054091e-15 C23 -6.9260806e-17 1.00239611e-14 1.70911423e-15 C25 -7.13524377e-17 5.05529889e-14 -3.62622238e-15 C27 -1.67322747e-17 1.78538542e-13 -7.36849912e-15 C29 -7.92528578e-21 -4.11347975e-18 -2.59696939e-18 C31 1.27834004e-20 -5.83032641e-17 1.25679501e-17 C33 3.27119661e-20 1.71591989e-16 -1.04543394e-17 C35 1.71377495e-20 1.22876874e-15 -3.91086555e-17 C36 -1.89551894e-23 -4.14843428e-22 5.26679107e-21 C38 -1.11996388e-22 1.06656248e-19 2.8502374e-20 C40 -1.96750203e-22 2.08419251e-19 6.3260457e-20 C42 -1.2392523e-22 8.95301505e-19 4.7233819e-21 C44 -2.47458966e-23 8.36809183e-18 -2.27707911e-19 C46 -9.77909864e-27 -1.02394711e-22 1.39450428e-23 C48 5.19824336e-27 -7.95041789e-23 1.68839235e-22 C50 5.59498452e-26 8.75666056e-22 2.79254271e-22 C52 6.43656264e-26 4.60087068e-21 -9.11661464e-23 C54 1.96031627e-26 4.50459082e-20 1.98458883e-22 C55 -1.9734083e-29 2.61667221e-26 -4.54521391e-26 C57 -1.39192995e-28 -1.48955085e-25 1.23387971e-24 C59 -3.49342237e-28 2.18616238e-24 4.57708029e-24 C61 -3.79015472e-28 8.50729665e-24 6.06052772e-24 C63 -1.77868817e-28 2.63725246e-23 -9.61661588e-26 C65 -2.61320106e-29 1.37431086e-22 9.18355997e-24 C67 -1.75320584e-32 1,91491617e-28 -2.00093096e-27 C69 -1.49695509e-32 -5.27938029e-27 2.16982668e-27 C71 6.84912486e-32 -5.29216183e-27 -7.30096104e-27 C73 1.54586906e-31 4.04146338e-26 -4.93769708e-27 C75 1.15783975e-31 2.37812676e-25 -4.16594376e-26 C77 4.14587364e-32 1.20314674e-24 -1.62235584e-25 C78 -5.34426777e-35 4.49836368e-31 6.13330316e-30 C80 -4.27488688e-34 1.29694668e-29 -1.62333428e-29 C82 -1.25436413e-33 3.24280489e-29 -1.68167617e-28 C84 -1.71502766e-33 3.00254831e-29 -4.89454528e-28 C86 -1.25734127e-33 7.46446045e-28 -6.5895393e-28 C88 -5.19929261e-34 5.84363659e-27 -1.5416679e-27 C90 -9.42013117e-35 2.61240017e-26 -3.38007496e-27 C92 1.00872668e-38 -4.95175891e-33 1.78435553e-32 C94 -1.45968234e-39 2.0913161e-33 1.10022934e-32 C96 2.49294655e-38 9.54156933e-32 1.00044858e-30 C98 1.25738947e-37 -7.47916509e-33 1.98972461e-30 C100 1.6844889e-37 7.35199153e-30 -3.47483305e-30 C102 7.66863005e-38 5.82871085e-29 -1.47027148e-29 C104 -1.4887687e-38 2.15570834e-28 -2.0886266e-29 C105 3.84331333e-41 -2.72151554e-36 -1.09100622e-34 C107 4.50330303e-40 -6.8970507e-35 3.91399908e-34 C109 1.60900752e-39 -2.41557224e-34 4.01031765e-33 C111 2.46751199e-39 1.07560857e-33 1.8289791e-32 C113 1.94052198e-39 8.96263507e-33 2.87152163e-32 C115 9.9606188e-40 4.77961552e-32 -4.19223781e-33 C117 4.55475999e-40 2.14647641e-31 -4.42634085e-32 C119 9.96424428e-41 6.08163641e-31 -4.46533131e-32 C121 -6.67748909e-44 0 0 C123 -1.35652075e-43 0 0 C125 1.98636308e-43 0 0 C127 1.25607622e-42 0 0 C129 2.10051386e-42 0 0 C131 1.77289428e-42 0 0 C133 7.94693346e-43 0 0 C135 1.74862061e-43 0 0 C136 -1.77390976e-46 0 0 C138 -2.00142247e-45 0 0 C140 -8.6258998e-45 0 0 C142 -1.91465627e-44 0 0 C144 -2.50271596e-44 0 0 C146 -2.03958823e-44 0 0 C148 -1.04613962e-44 0 0 C150 -3.18867421e-45 0 0 C152 -4.17582475e-46 0 0 Tabelle 3b zu Fig. 6 Koeffizient M7 M6 M5 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX -633.70195490 -1159.78778500 -7911.62023000 C7 -3.6838108e-08 8.9762673e-08 1.29208819e-08 C9 1.66051547e-07 5.4606184e-08 -4.52621083e-08 C10 2.70786958e-11 -4.84436976e-10 -5.84676904e-10 C12 -4.05365907e-10 4.4034394e-11 3.29353371e-11 C14 1.17570885e-09 -8.49494866e-10 3.27657845e-11 C16 5.32058235e-13 -1.22366579e-12 -4.06185258e-13 C18 -2.33907349e-12 3.31495258e-12 -3.05655881e-13 C20 1.03622586e-11 4.74017946e-12 -9.90515078e-14 C21 1.84951658e-17 4.70815441e-16 6.8177486e-16 C23 1.97362743e-16 -5.63918759e-15 1.78311332e-16 C25 -4.50645748e-14 -2.04438614e-14 1.92769745e-15 C27 1.22197136e-13 -4.46320586e-14 1.11134948e-15 C29 -8.3397015e-19 3.12037967e-18 1.20925734e-18 C31 5.73336291e-17 2.52930984e-17 -2.68755339e-18 C33 -4.26965471e-16 2.57659349e-16 -5.94759876e-18 C35 1.12309508e-15 3.62043368e-16 -4.78247891e-18 C36 -2.54002154e-21 -2.33285817e-21 8.64176325e-21 C38 6.58698589e-22 6.78093367e-21 2.69603122e-21 C40 9.19834216e-19 -6.09316184e-19 1.90190625e-20 C42 -5.20603364e-18 -2.48560476e-18 2.06136053e-20 C44 1.95177251e-17 -3.71987432e-18 1.52178482e-20 C46 5.11031274e-23 -2.36475219e-24 1.40723013e-23 C48 -5.22351362e-22 1.08955249e-21 -1.74886691e-23 C50 1.29955621e-20 6.28062297e-21 -1.31280422e-22 C52 -7.19352591e-20 2.83502526e-20 -1.33189978e-22 C54 3.01583882e-19 4.05968238e-20 -5.11578136e-23 C55 -3.2378259e-26 5.04920803e-26 -9.74226056e-26 C57 2.56114803e-26 -1.66126857e-24 1.25073538e-25 C59 -2.15568526e-23 -1.21962666e-23 3.61644254e-25 C61 7.54597503e-23 -7.85294647e-23 6.17670028e-25 C63 -1.37768633e-21 -2.60819335e-22 3.1972004e-25 C65 -9.91159698e-22 -3.82043453e-22 5.14604952e-26 C67 8.86143266e-29 1.38719494e-27 -4.85096213e-29 C69 2.95926995e-28 1.1409927e-26 -1.52883817e-29 C71 -4.08946521e-25 1.70193798e-25 -2.99192047e-28 C73 1.1764e-24 5.79647838e-25 1.27326956e-27 C75 -1.82271068e-23 1.8185183e-24 2.14215183e-27 C77 -6.0476105e-23 2.47496013e-24 -2.43586456e-28 C78 -1.46974123e-31 -2.48880617e-30 2.2910216e-30 C80 -1.62035317e-29 -3.63910799e-30 -2.10355105e-30 C82 2.64119709e-28 -1.39124488e-28 -3.56165247e-30 C84 -2.75435112e-27 -9.92371827e-28 -1.25073816e-29 C86 6.06493358e-26 -2.9562807e-27 -1.02346615e-29 C88 -1.82794269e-25 -7.99387324e-27 1.25693216e-30 C90 8.10897778e-25 -1.01333935e-26 6.64972771e-30 C92 -5.94852836e-33 -2.20554773e-33 1.22259104e-33 C94 7.23973112e-32 1.10525284e-31 -1.24849687e-32 C96 7.40539289e-30 -4.613537e-32 -3.29652704e-32 C98 4.88216265e-30 4.80483016e-30 -8.41705133e-32 C100 9.65449531e-28 6.23756899e-30 -1.57134898e-31 C102 -1.70876067e-27 2.1445453e-29 -1.2032548e-31 C104 2.67082934e-26 2.28654521e-29 -3.36577402e-32 C105 2.35094421e-36 2.08468354e-35 -1.08251776e-35 C107 3.37747137e-34 -1.04397603e-34 3.142163e-35 C109 7.70896596e-34 2.85346997e-34 8.01180965e-35 C111 6.84579774e-32 -8.80664689e-35 3.89769754e-34 C113 -9.31004972e-32 -9.19882787e-33 7.80016296e-34 C115 5.48180337e-30 -1.39857273e-33 7.27970094e-34 C117 -9.40923091e-30 -2.85191959e-32 3.44660803e-34 C119 1.58250782e-28 -2.04899764e-32 5.28320959e-35 Tabelle 3c zu Fig. 6 Koeffizient M4 M3 M2 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 6252.71767300 1718.69845500 1592.62684400 C7 2.02039657e-07 -7.72442186e-08 -2.81200257e-07 C9 6.26194854e-08 -6.39011454e-08 -4.33420894e-07 C10 -1.17096485e-10 5.38504965e-10 2.16914992e-10 C12 1.65918593e-10 1.54474735e-10 -2.43233271e-10 C14 2.6047855e-11 -5.67012949e-11 1.0908048e-09 C16 1.53352973e-13 -1.28128634e-12 -1.3249687e-12 C18 6.85280998e-14 3.29016521e-13 2.3245033e-12 C20 1.33134745e-14 -7.9135182e-14 -2.74288101e-12 C21 9.63392843e-16 -2.23006179e-16 -3.54173468e-16 C23 -2.56356327e-16 8.08610012e-16 5.15456653e-15 C25 -4.93143601e-16 -1.64061139e-16 -1.06774698e-14 C27 -3.50827102e-17 -8.3638218e-18 5.96789915e-15 C29 -1.32470314e-18 2.06883208e-18 1.70541615e-18 C31 -1.08456401e-18 -3.75046097e-18 -2.42446489e-17 C33 -3.23480928e-19 1.52741866e-18 4.43191025e-17 C35 -3.72075346e-19 1.62584985e-18 -1.05861269e-17 C36 -3.85707039e-21 -2.85425871e-21 1.53834046e-21 C38 7.16357253e-21 4.79674043e-21 -1.1251108e-20 C40 -1.76766744e-21 6.62315222e-22 1.18315789e-19 C42 -5.70159933e-21 -2.6546097e-21 -1.77703731e-19 C44 -3.65158025e-21 1.5355861e-20 1.37862764e-20 C46 -2.99726604e-23 -7.26058549e-23 -2.55922076e-23 C48 -4.17503344e-23 -9.21476496e-23 1.00193833e-22 C50 -4.7884568e-23 -2.35567601e-22 -5.31735424e-22 C52 -6.91516977e-24 -1.35526865e-22 6.79507546e-22 C54 1.98546253e-23 9.61975988e-23 4.01660209e-23 C55 -1.94031018e-26 1.56888015e-25 -1.38213528e-26 C57 -3.42382432e-25 2.2750218e-25 1.79376182e-25 C59 -2.2756817e-25 -1.23549695e-25 -5.94897934e-25 C61 2.01539859e-25 2.29974662e-25 2.27901415e-24 C63 4.95631548e-25 8.59833428e-25 -2.22922414e-24 C65 1.12176727e-25 1.26876311e-24 -7.70058057e-25 C67 9.06942404e-28 9.3079309e-28 3.74223228e-28 C69 1.9957938e-27 4.99157193e-27 -9.62902214e-28 C71 3.12476201e-27 1.58761398e-26 2.15189986e-27 C73 4.54981924e-27 1.53821757e-26 -8.59545995e-27 C75 6.59335485e-28 3.62238546e-27 5.36715829e-27 C77 -1.58015986e-27 -1.19949042e-27 5.14863336e-27 C78 4.37655985e-30 -2.15256015e-30 -6.68041182e-32 C80 8.62343063e-30 -8.27474872e-30 -2.88698633e-30 C82 1.3965552e-29 -1.85964202e-29 2.97808799e-30 C84 1.2610299e-29 -5.63075807e-29 -9.25513518e-30 C86 -4.82567841e-30 -7.58802797e-29 2.1567675e-29 C88 -1.35566233e-29 -6.2816052e-29 -8.2378632e-30 C90 8.35698293e-31 -2.48292667e-29 -1.8363031e-29 C92 -6.20912191e-33 -1.53848466e-33 -2.72722676e-33 C94 -3.03339233e-32 -5.56751434e-32 9.35668771e-33 C96 -4.15846221e-32 -2.81174802e-31 1.01318148e-32 C98 -1.20240425e-31 -5.69729421e-31 4.31201041e-32 C100 -1.23999978e-31 -3.40400557e-31 -2.58821352e-32 C102 1.77507014e-33 -9.97858945e-32 6.91936623e-33 C104 3.83557979e-32 1.09580074e-31 3.45333625e-32 C105 -1.52261212e-35 5.38313447e-37 2.4018539e-36 C107 -7.96360046e-35 8.5583118e-35 1.94949839e-35 C109 -2.50162343e-34 3.84351739e-34 -2.7269109e-35 C111 -2.81541874e-34 1.85492006e-33 -5.57867255e-35 C113 -6.28531061e-34 2.60940268e-33 -8.0628501e-35 C115 2.25293161e-35 2.55655776e-33 6.48059264e-36 C117 7.79107372e-35 1.01920129e-33 -2.46632816e-36 C119 -1.12500845e-34 7.43677377e-34 -2.70846382e-35 Tabelle 3d zu Fig. 6 Koeffizient M1 KY 0.00000000 KX 0.00000000 RX -2135.98763300 C7 -3.62667214e-08 C9 -8.77001096e-09 C10 -7.9878408e-12 C12 3.57622422e-11 C14 5.67666306e-11 C16 -1.00670933e-14 C18 -6.43363507e-14 C20 3.49263438e-14 C21 -1.83622059e-18 C23 1.63146414e-17 C25 2.33281554e-16 C27 -2.13403252e-16 C29 -7.17734463e-22 C31 -7.76916167e-20 C33 -2.45391831e-19 C35 9.06895125e-19 C36 -2.87240432e-24 C38 -5.67479156e-24 C40 2.53075334e-22 C42 2.33441297e-22 C44 -4.90816027e-21 C46 -1.82993123e-26 C48 1.40735408e-25 C50 -1.62994831e-25 C52 4.12295522e-24 C54 2.26175423e-23 C55 6.84620783e-30 C57 -8.9211373e-29 C59 3.99552919e-28 C61 2.87701829e-26 C63 7.90515964e-26 C65 4.93963599e-26 C67 8.37008672e-32 C69 -9.8548077e-31 C71 -7.50758997e-30 C73 -6.72582496e-30 C75 2.5702957e-28 C77 -1.08487883e-27 C78 4.88158898e-36 C80 1.55182242e-33 C82 1.52095525e-32 C84 -1.27781492e-31 C86 -1.81913568e-30 C88 -5.89459163e-30 C90 2.69055495e-30 C92 -4.03243187e-38 C94 3.64827588e-36 C96 3.2629352e-35 C98 1.58289449e-34 C100 -1.41502554e-34 C102 -7.52721979e-33 C104 1.42550505e-32 C105 -9.85463233e-41 C107 -4.7133732e-39 C109 -9.62905307e-38 C111 -4.88592887e-38 C113 5.89605443e-36 C115 4.37586765e-35 C117 1.2944388e-34 C119 -5.79847892e-35 Tabelle 4a zu Fig. 6 Oberfläche DCX DCY DCZ Bildebene 0.00000000 0.00000000 0.00000000 M10 0.00000000 0.00000000 805.12545493 AS 0.00000000 121.91685762 283.85220626 M9 0.00000000 161.70815863 113.71871405 M8 0.00000000 -95.26534725 1237.21684296 M7 0.00000000 -33.77425023 1447.75579022 M6 0.00000000 65.18321239 1551.64751609 M5 -0.00000000 416.29245364 1699.16961083 M4 -0.00000000 1004.20719186 1696.34134424 M3 -0.00000000 1452.13094016 1490.08513977 M2 0.00000000 1660.63260708 1219.01552868 M1 0.00000000 1898.51696847 380.25896967 Objektebene 0.00000000 2052.66210418 2142.14593325 Tabelle 4b zu Fig. 6 Oberfläche TLA[deg] TLB[deg] TLC[deg] Bildebene -0.00000000 0.00000000 -0.00000000 M10 6.58193819 0.00000000 -0.00000000 AS -11.93243779 180.00000000 0.00000000 M9 193.02365372 0.00000000 -0.00000000 M8 88.30109261 0.00000000 -0.00000000 M7 60.05609350 0.00000000 -0.00000000 M6 34.59181790 -0.00000000 0.00000000 M5 11.25728686 -0.00000000 -0.00000000 M4 -12.50018064 -0.00000000 -0.00000000 M3 -38.57896098 -0.00000000 -0.00000000 M2 -63.29951574 0.00000000 -0.00000000 M1 185.41707922 0.00000000 -0.00000000 Objektebene 0.00000000 -0.00000000 -0.00000000 Tabelle 5 zu Fig. 6 Oberfläche Einfallswinkel[deg] Reflektivität M10 6.54595976 0.66117442 M9 0.00927643 0.66565898 M8 75.28639991 0.80872354 M7 76.47603147 0.82797484 M6 78.19600441 0.85363243 M5 77.82111064 0.84823702 M4 78.09660546 0.85221183 M3 76.69476435 0.83137252 M2 78.51546985 0.85815129 M1 10.19565951 0.65421761 Gesamttransmission 0.0849 Tabelle 6 zu Fig. 6: Blenden-Polygon AS im Abbildungsstrahlengang zwischen M9 und M10 X[mm] Y[mm] Z[mm] Typ 0.00000000 186.44396300 0.00000000 CLA -7.35372500 186.35147200 0.00000000 CLA -14.70293000 186.07403500 0.00000000 CLA -22.04308600 185.61182900 0.00000000 CLA -29.36964700 184.96518200 0.00000000 CLA -36.67804500 184.13440100 0.00000000 CLA -43.96368200 183.12003500 0.00000000 CLA -51.22191700 181.92270400 0.00000000 CLA -58.44805800 180.54312300 0.00000000 CLA -65.63737700 178.98213000 0.00000000 CLA -72.78506700 177.24065500 0.00000000 CLA -79.88623100 175.31975300 0.00000000 CLA -86.93596800 173.22057400 0.00000000 CLA -93.92919900 170.94433700 0.00000000 CLA -100.86081300 168.49243500 0.00000000 CLA -107.72561700 165.86632300 0.00000000 CLA -114.51817800 163.06745500 0.00000000 CLA -121.23320200 160.09761200 0.00000000 CLA -127.86509600 156.95849800 0.00000000 CLA -134.40820300 153.65200500 0.00000000 CLA -140.85671700 150.17999100 0.00000000 CLA -147.20471200 146.54456300 0.00000000 CLA -153.44628600 142.74788800 0.00000000 CLA -159.57526400 138.79218000 0.00000000 CLA -165.58539900 134.67982000 0.00000000 CLA -171.47033600 130.41326100 0.00000000 CLA -177.22373200 125.99505700 0.00000000 CLA -182.83880500 121.42778500 0.00000000 CLA -188.30943000 116.71453300 0.00000000 CLA -193.62848600 111.85789200 0.00000000 CLA -198.78943200 106.86098000 0.00000000 CLA -203.78559400 101.72694700 0.00000000 CLA -208.61006200 96.45897500 0.00000000 CLA -213.25621900 91.06052500 0.00000000 CLA -217.71726100 85.53509300 0.00000000 CLA -221.64901400 80.02685000 0.75883100 CLA -224.92026500 74.62899500 2.51098300 CLA -227.96741300 69.17817200 4.24784700 CLA -227.95344500 65.14191000 12.02424500 CLA -227.12122900 61.57814900 20.84485000 CLA -226.13600200 58.16537900 29.29174900 CLA -225.00391900 54.89925100 37.37569500 CLA -223.73072400 51.77538400 45.10754800 CLA -222.32096800 48.78916600 52.49869000 CLA -220.77884700 45.93608000 59.56032000 CLA -219.10785500 43.21147900 66.30394300 CLA -217.31114600 40.61084100 72.74070800 CLA -215.39130600 38.12963900 78.88190200 CLA -213.35065800 35.76334400 84.73869500 CLA -211.19147600 33.50760700 90.32183800 CLA -208.91541000 31.35813700 95.64194500 CLA -206.52437200 29.31065100 100.70964500 CLA -204.01998900 27.36108900 105.53499200 CLA -201.40409200 25.50539800 110.12799200 CLA -198.67828500 23.73971400 114.49825000 CLA -195.84432600 22.06021900 118.65512200 CLA -192.90404400 20.46324100 122.60777000 CLA -189.85948300 18.94530500 126.36481000 CLA -186.71258400 17.50289700 129.93489500 CLA -183.46561700 16.13274600 133.32612800 CLA -180.12097900 14.83174200 136.54624500 CLA -176.68110900 13.59664400 139.60322200 CLA -173.14867400 12.42461700 142.50407800 CLA -169.52649800 11.31290900 145.25565800 CLA -165.81747500 10.25866300 147.86498500 CLA -162.02456000 9.25931400 150.33846500 CLA -158.15106700 8.31237400 152.68225100 CLA -154.20002700 7.41549400 154.90205700 CLA -150.17487800 6.56640100 157.00369200 CLA -146.07892700 5.76289700 158.99242700 CLA -141.91554000 5.00295700 160.87334600 CLA -137.68807700 4.28459200 162.65135200 CLA -133.39999600 3.60596600 164.33101000 CLA -129.05467700 2.96531800 165.91665100 CLA -124.65533100 2.36095400 167.41255500 CLA -120.20527800 1.79126700 168.82252900 CLA -115.70776900 1.25482400 170.15030200 CLA -111.16585800 0.75015100 171.39936900 CLA -106.58255900 0.27593600 172.57309400 CLA -101.96080900 -0.16912300 173.67466600 CLA -97.30348300 -0.58612700 174.70677900 CLA -92.61320100 -0.97618500 175.67221000 CLA -87.89258900 -1.34039400 176.57364900 CLA -83.14404000 -1.67974700 177.41357200 CLA -78.36997500 -1.99507900 178.19405200 CLA -73.57255500 -2.28728800 178.91731600 CLA -68.75389700 -2.55709000 179.58512000 CLA -63.91599300 -2.80527500 180.19940100 CLA -59.06068500 -3.03248700 180.76176400 CLA -54.18980800 -3.23932800 181.27369700 CLA -49.30495700 -3.42635500 181.73660500 CLA -44.40776200 -3.59407000 182.15171600 CLA -39.49967000 -3.74294100 182.52018300 CLA -34.72856800 -5.38995400 181.76530200 CLA -29.78751600 -5.57165600 181.99973400 CLA -24.83568700 -5.70520100 182.21115500 CLA -19.85720500 -5.45684800 182.63399600 CLA -14.87055900 -4.88189700 183.22816000 CLA -9.89854300 -4.30609100 183.76604500 CLA -4.94917700 -4.28491600 183.86163300 CLA -0.00000000 -4.29338300 183.88257600 CLA 4.94917700 -4.28491600 183.86163600 CLA 9.89854300 -4.30609100 183.76604500 CLA 14.87055900 -4.88189700 183.22816000 CLA 19.85720500 -5.45684800 182.63399600 CLA 24.83568700 -5.70520100 182.21115500 CLA 29.78751600 -5.57165600 181.99973400 CLA 34.72856800 -5.38995400 181.76530200 CLA 39.49967000 -3.74294100 182.52018300 CLA 44.40776200 -3.59407000 182.15171600 CLA 49.30495700 -3.42635500 181.73660500 CLA 54.18980800 -3.23932800 181.27369700 CLA 59.06068500 -3.03248700 180.76176400 CLA 63.91599100 -2.80527500 180.19940100 CLA 68.75389500 -2.55709000 179.58512000 CLA 73.57255800 -2.28727100 178.91729500 CLA 78.36997500 -1.99507900 178.19405200 CLA 83.14404000 -1.67974700 177.41357200 CLA 87.89258900 -1.34039400 176.57364900 CLA 92.61320100 -0.97618500 175.67221000 CLA 97.30348300 -0.58612700 174.70677900 CLA 101.96080900 -0.16912300 173.67466600 CLA 106.58255900 0.27593600 172.57309400 CLA 111.16585800 0.75015100 171.39936900 CLA 115.70776900 1.25482400 170.15030200 CLA 120.20527800 1.79127100 168.82252900 CLA 124.65533100 2.36095500 167.41251400 CLA 129.05467500 2.96531400 165.91669400 CLA 133.40000700 3.60598900 164.33096700 CLA 137.68808700 4.28461400 162.65129000 CLA 141.91554100 5.00295900 160.87334600 CLA 146.07893600 5.76289900 158.99242700 CLA 150.17490500 6.56642700 157.00360400 CLA 154.20002700 7.41549400 154.90205700 CLA 158.15106700 8.31237400 152.68225100 CLA 162.02457400 9.25929100 150.33850000 CLA 165.81746100 10.25864300 147.86503800 CLA 169.52648100 11.31288100 145.25571300 CLA 173.14868300 12.42463300 142.50404300 CLA 176.68112300 13.59665400 139.60319000 CLA 180.12098800 14.83171400 136.54629600 CLA 183.46561700 16.13275100 133.32612800 CLA 186.71259200 17.50290300 129.93487300 CLA 189.85947400 18.94530200 126.36483200 CLA 192.90404400 20.46324100 122.60777000 CLA 195.84432600 22.06021900 118.65512200 CLA 198.67828500 23.73971400 114.49825000 CLA 201.40409200 25.50539800 110.12798100 CLA 204.01998900 27.36108900 105.53499200 CLA 206.52437200 29.31065100 100.70965600 CLA 208.91541000 31.35813700 95.64195600 CLA 211.19147600 33.50760700 90.32183800 CLA 213.35065800 35.76334400 84.73868400 CLA 215.39130600 38.12963900 78.88190700 CLA 217.31114600 40.61084100 72.74071900 CLA 219.10785500 43.21147900 66.30393200 CLA 220.77884700 45.93608000 59.56031000 CLA 222.32096800 48.78916600 52.49869000 CLA 223.73072400 51.77538400 45.10753500 CLA 225.00391900 54.89925100 37.37569500 CLA 226.13600200 58.16537900 29.29174900 CLA 227.12122900 61.57814900 20.84483900 CLA 227.95344500 65.14191000 12.02423400 CLA 227.96741000 69.17817300 4.24784700 CLA 224.92026200 74.62899500 2.51098200 CLA 221.64901100 80.02685100 0.75883000 CLA 217.71726100 85.53509300 0.00000000 CLA 213.25621500 91.06052500 0.00000000 CLA 208.61005500 96.45897500 0.00000000 CLA 203.78559400 101.72694700 0.00000000 CLA 198.78942700 106.86098000 0.00000000 CLA 193.62848300 111.85789200 0.00000000 CLA 188.30942700 116.71453300 0.00000000 CLA 182.83880500 121.42778500 0.00000000 CLA 177.22372500 125.99505700 0.00000000 CLA 171.47033100 130.41326100 0.00000000 CLA 165.58539100 134.67982000 0.00000000 CLA 159.57526500 138.79218000 0.00000000 CLA 153.44628100 142.74788800 0.00000000 CLA 147.20470800 146.54456300 0.00000000 CLA 140.85671700 150.17999100 0.00000000 CLA 134.40815300 153.65196000 0.00000000 CLA 127.86507800 156.95847900 0.00000000 CLA 121.23319300 160.09759500 0.00000000 CLA 114.51820300 163.06746100 0.00000000 CLA 107.72555500 165.86627400 0.00000000 CLA 100.86080300 168.49243500 0.00000000 CLA 93.92919400 170.94433800 0.00000000 CLA 86.93605000 173.22065200 0.00000000 CLA 79.88623100 175.31975300 0.00000000 CLA 72.78506700 177.24065500 0.00000000 CLA 65.63737700 178.98213000 0.00000000 CLA 58.44805800 180.54312300 0.00000000 CLA 51.22191700 181.92270400 0.00000000 CLA 43.96368200 183.12003500 0.00000000 CLA 36.67804500 184.13440100 0.00000000 CLA 29.36964700 184.96518200 0.00000000 CLA 22.04308600 185.61182900 0.00000000 CLA 14.70293000 186.07403500 0.00000000 CLA 7.35372500 186.35147200 0.00000000 CLA The mirror M1 to M10 are again implemented as free-form surface mirrors for which the freeform surface equation ( 1 ) applies. The optical design data of the projection optics 20 can be found in the following tables, which in their structure the tables for projection optics 7 to 2 correspond. Table 1 to Fig. 6 embodiment 6 N / A 12:55 wavelength 13.5 nm Feldgröße_x 26.0 mm Feldgröße_y 1.0 mm curvature of field -0.012345 1 / mm cover AS Table 2 to Fig. 6 surface Radius_x [mm] Power_x [1 / mm] Radius_y [mm] Power_y [1 / mm] operation mode M10 -924.4981198 0.0021492 -841.5674623 0.0023921 REFL M9 1845.8313982 -0.0010835 356.4114777 -0.0056115 REFL M8 -807.7853011 0.0006289 -16794.6817783 0.0004689 REFL M7 -633.7019549 0.0007380 20332.8433550 -0.0004206 REFL M6 -1159.7877847 0.0003528 -7078.0588424 0.0013813 REFL M5 -7911.6202298 0.0000533 -2197.1749958 0.0043148 REFL M4 6252.7176733 -0.0000660 -2753.7274849 0.0035212 REFL M3 1718.6984546 -0.0002678 -10060.7554809 0.0008638 REFL M2 1592.6268445 -0.0002500 2592.5626309 -0.0038746 REFL M1 -2135.9876330 0.0009216 -1377.1202039 0.0014756 REFL Table 3a to Fig. 6 coefficient M10 M9 M8 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX -924.49811980 1845.83139800 -807.78530110 C7 5.32161644e-09 -7.17957299e-07 3.61958396e-07 C9 1.2051462e-08 1.48021766e-06 4.61852728e-08 C10 -4.28738318e-12 3.94779844e-10 1.36275822e-10 C12 -3.49709402e-11 2.67402017e-09 4.92199166e-11 C14 -9.81786584e-12 6.31481582e-09 -4.23949539e-10 C16 -3.40219667e-15 -2.74047503e-12 1.12548598e-12 C18 1.60335869e-14 2.04228406e-14 3.71761249e-13 C20 1.30399612e-14 3.2725238e-11 -2.05971586e-12 C21 -1.15274335e-17 2.35879877e-15 1.09054091e-15 C23 -6.9260806e-17 1.00239611e-14 1.70911423e-15 C25 -7.13524377e-17 5.05529889e-14 -3.62622238e-15 C27 -1.67322747e-17 1.78538542e-13 -7.36849912e-15 C29 -7.92528578e-21 -4.11347975e-18 -2.59696939e-18 C31 1.27834004e-20 -5.83032641e-17 1.25679501e-17 C33 3.27119661e-20 1.71591989e-16 -1.04543394e-17 C35 1.71377495e-20 1.22876874e-15 -3.91086555e-17 C36 -1.89551894e-23 -4.14843428e-22 5.26679107e-21 C38 -1.11996388e-22 1.06656248e-19 2.8502374e-20 C40 -1.96750203e-22 2.08419251e-19 6.3260457e-20 C42 -1.2392523e-22 8.95301505e-19 4.7233819e-21 C44 -2.47458966e-23 8.36809183e-18 -2.27707911e-19 C46 -9.77909864e-27 -1.02394711e-22 1.39450428e-23 C48 5.19824336e-27 -7.95041789e-23 1.68839235e-22 C50 5.59498452e-26 8.75666056e-22 2.79254271e-22 C52 6.43656264e-26 4.60087068e-21 -9.11661464e-23 C54 1.96031627e-26 4.50459082e-20 1.98458883e-22 C55 -1.9734083e-29 2.61667221e-26 -4.54521391e-26 C57 -1.39192995e-28 -1.48955085e-25 1.23387971e-24 C59 -3.49342237e-28 2.18616238e-24 4.57708029e-24 C61 -3.79015472e-28 8.50729665e-24 6.06052772e-24 C63 -1.77868817e-28 2.63725246e-23 -9.61661588e-26 C65 -2.61320106e-29 1.37431086e-22 9.18355997e-24 C67 -1.75320584e-32 1,91491617e-28 -2.00093096e-27 C69 -1.49695509e-32 -5.27938029e-27 2.16982668e-27 C71 6.84912486e-32 -5.29216183e-27 -7.30096104e-27 C73 1.54586906e-31 4.04146338e-26 -4.93769708e-27 C75 1.15783975e-31 2.37812676e-25 -4.16594376e-26 C77 4.14587364e-32 1.20314674e-24 -1.62235584e-25 C78 -5.34426777e-35 4.49836368e-31 6.13330316e-30 C80 -4.27488688e-34 1.29694668e-29 -1.62333428e-29 C82 -1.25436413e-33 3.24280489e-29 -1.68167617e-28 C84 -1.71502766e-33 3.00254831e-29 -4.89454528e-28 C86 -1.25734127e-33 7.46446045e-28 -6.5895393e-28 C88 -5.19929261e-34 5.84363659e-27 -1.5416679e-27 C90 -9.42013117e-35 2.61240017e-26 -3.38007496e-27 C92 1.00872668e-38 -4.95175891e-33 1.78435553e-32 C94 -1.45968234e-39 2.0913161e-33 1.10022934e-32 C96 2.49294655e-38 9.54156933e-32 1.00044858e-30 C98 1.25738947e-37 -7.47916509e-33 1.98972461e-30 C100 1.6844889e-37 7.35199153e-30 -3.47483305e-30 C102 7.66863005e-38 5.82871085e-29 -1.47027148e-29 C104 -1.4887687e-38 2.15570834e-28 -2.0886266e-29 C105 3.84331333e-41 -2.72151554e-36 -1.09100622e-34 C107 4.50330303e-40 -6.8970507e-35 3.91399908e-34 C109 1.60900752e-39 -2.41557224e-34 4.01031765e-33 C111 2.46751199e-39 1.07560857e-33 1.8289791e-32 C113 1.94052198e-39 8.96263507e-33 2.87152163e-32 C115 9.9606188e-40 4.77961552e-32 -4.19223781e-33 C117 4.55475999e-40 2.14647641e-31 -4.42634085e-32 C119 9.96424428e-41 6.08163641e-31 -4.46533131e-32 C121 -6.67748909e-44 0 0 C123 -1.35652075e-43 0 0 C125 1.98636308e-43 0 0 C127 1.25607622e-42 0 0 C129 2.10051386e-42 0 0 C131 1.77289428e-42 0 0 C133 7.94693346e-43 0 0 C135 1.74862061e-43 0 0 C136 -1.77390976e-46 0 0 C138 -2.00142247e-45 0 0 C140 -8.6258998e-45 0 0 C142 -1.91465627e-44 0 0 C144 -2.50271596e-44 0 0 C146 -2.03958823e-44 0 0 C148 -1.04613962e-44 0 0 C150 -3.18867421e-45 0 0 C152 -4.17582475e-46 0 0 Table 3b to Fig. 6 coefficient M7 M6 M5 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX -633.70195490 -1159.78778500 -7911.62023000 C7 -3.6838108e-08 8.9762673e-08 1.29208819e-08 C9 1.66051547e-07 5.4606184e-08 -4.52621083e-08 C10 2.70786958e-11 -4.84436976e-10 -5.84676904e-10 C12 -4.05365907e-10 4.4034394e-11 3.29353371e-11 C14 1.17570885e-09 -8.49494866e-10 3.27657845e-11 C16 5.32058235e-13 -1.22366579e-12 -4.06185258e-13 C18 -2.33907349e-12 3.31495258e-12 -3.05655881e-13 C20 1.03622586e-11 4.74017946e-12 -9.90515078e-14 C21 1.84951658e-17 4.70815441e-16 6.8177486e-16 C23 1.97362743e-16 -5.63918759e-15 1.78311332e-16 C25 -4.50645748e-14 -2.04438614e-14 1.92769745e-15 C27 1.22197136e-13 -4.46320586e-14 1.11134948e-15 C29 -8.3397015e-19 3.12037967e-18 1.20925734e-18 C31 5.73336291e-17 2.52930984e-17 -2.68755339e-18 C33 -4.26965471e-16 2.57659349e-16 -5.94759876e-18 C35 1.12309508e-15 3.62043368e-16 -4.78247891e-18 C36 -2.54002154e-21 -2.33285817e-21 8.64176325e-21 C38 6.58698589e-22 6.78093367e-21 2.69603122e-21 C40 9.19834216e-19 -6.09316184e-19 1.90190625e-20 C42 -5.20603364e-18 -2.48560476e-18 2.06136053e-20 C44 1.95177251e-17 -3.71987432e-18 1.52178482e-20 C46 5.11031274e-23 -2.36475219e-24 1.40723013e-23 C48 -5.22351362e-22 1.08955249e-21 -1.74886691e-23 C50 1.29955621e-20 6.28062297e-21 -1.31280422e-22 C52 -7.19352591e-20 2.83502526e-20 -1.33189978e-22 C54 3.01583882e-19 4.05968238e-20 -5.11578136e-23 C55 -3.2378259e-26 5.04920803e-26 -9.74226056e-26 C57 2.56114803e-26 -1.66126857e-24 1.25073538e-25 C59 -2.15568526e-23 -1.21962666e-23 3.61644254e-25 C61 7.54597503e-23 -7.85294647e-23 6.17670028e-25 C63 -1.37768633e-21 -2.60819335e-22 3.1972004e-25 C65 -9.91159698e-22 -3.82043453e-22 5.14604952e-26 C67 8.86143266e-29 1.38719494e-27 -4.85096213e-29 C69 2.95926995e-28 1.1409927e-26 -1.52883817e-29 C71 -4.08946521e-25 1.70193798e-25 -2.99192047e-28 C73 1.1764e-24 5.79647838e-25 1.27326956e-27 C75 -1.82271068e-23 1.8185183e-24 2.14215183e-27 C77 -6.0476105e-23 2.47496013e-24 -2.43586456e-28 C78 -1.46974123e-31 -2.48880617e-30 2.2910216e-30 C80 -1.62035317e-29 -3.63910799e-30 -2.10355105e-30 C82 2.64119709e-28 -1.39124488e-28 -3.56165247e-30 C84 -2.75435112e-27 -9.92371827e-28 -1.25073816e-29 C86 6.06493358e-26 -2.9562807e-27 -1.02346615e-29 C88 -1.82794269e-25 -7.99387324e-27 1.25693216e-30 C90 8.10897778e-25 -1.01333935e-26 6.64972771e-30 C92 -5.94852836e-33 -2.20554773e-33 1.22259104e-33 C94 7.23973112e-32 1.10525284e-31 -1.24849687e-32 C96 7.40539289e-30 -4.613537e-32 -3.29652704e-32 C98 4.88216265e-30 4.80483016e-30 -8.41705133e-32 C100 9.65449531e-28 6.23756899e-30 -1.57134898e-31 C102 -1.70876067e-27 2.1445453e-29 -1.2032548e-31 C104 2.67082934e-26 2.28654521e-29 -3.36577402e-32 C105 2.35094421e-36 2.08468354e-35 -1.08251776e-35 C107 3.37747137e-34 -1.04397603e-34 3.142163e-35 C109 7.70896596e-34 2.85346997e-34 8.01180965e-35 C111 6.84579774e-32 -8.80664689e-35 3.89769754e-34 C113 -9.31004972e-32 -9.19882787e-33 7.80016296e-34 C115 5.48180337e-30 -1.39857273e-33 7.27970094e-34 C117 -9.40923091e-30 -2.85191959e-32 3.44660803e-34 C119 1.58250782e-28 -2.04899764e-32 5.28320959e-35 Table 3c to Fig. 6 coefficient M4 M3 M2 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 6252.71767300 1718.69845500 1592.62684400 C7 2.02039657e-07 -7.72442186e-08 -2.81200257e-07 C9 6.26194854e-08 -6.39011454e-08 -4.33420894e-07 C10 -1.17096485e-10 5.38504965e-10 2.16914992e-10 C12 1.65918593e-10 1.54474735e-10 -2.43233271e-10 C14 2.6047855e-11 -5.67012949e-11 1.0908048e-09 C16 1.53352973e-13 -1.28128634e-12 -1.3249687e-12 C18 6.85280998e-14 3.29016521e-13 2.3245033e-12 C20 1.33134745e-14 -7.9135182e-14 -2.74288101e-12 C21 9.63392843e-16 -2.23006179e-16 -3.54173468e-16 C23 -2.56356327e-16 8.08610012e-16 5.15456653e-15 C25 -4.93143601e-16 -1.64061139e-16 -1.06774698e-14 C27 -3.50827102e-17 -8.3638218e-18 5.96789915e-15 C29 -1.32470314e-18 2.06883208e-18 1.70541615e-18 C31 -1.08456401e-18 -3.75046097e-18 -2.42446489e-17 C33 -3.23480928e-19 1.52741866e-18 4.43191025e-17 C35 -3.72075346e-19 1.62584985e-18 -1.05861269e-17 C36 -3.85707039e-21 -2.85425871e-21 1.53834046e-21 C38 7.16357253e-21 4.79674043e-21 -1.1251108e-20 C40 -1.76766744e-21 6.62315222e-22 1.18315789e-19 C42 -5.70159933e-21 -2.6546097e-21 -1.77703731e-19 C44 -3.65158025e-21 1.5355861e-20 1.37862764e-20 C46 -2.99726604e-23 -7.26058549e-23 -2.55922076e-23 C48 -4.17503344e-23 -9.21476496e-23 1.00193833e-22 C50 -4.7884568e-23 -2.35567601e-22 -5.31735424e-22 C52 -6.91516977e-24 -1.35526865e-22 6.79507546e-22 C54 1.98546253e-23 9.61975988e-23 4.01660209e-23 C55 -1.94031018e-26 1.56888015e-25 -1.38213528e-26 C57 -3.42382432e-25 2.2750218e-25 1.79376182e-25 C59 -2.2756817e-25 -1.23549695e-25 -5.94897934e-25 C61 2.01539859e-25 2.29974662e-25 2.27901415e-24 C63 4.95631548e-25 8.59833428e-25 -2.22922414e-24 C65 1.12176727e-25 1.26876311e-24 -7.70058057e-25 C67 9.06942404e-28 9.3079309e-28 3.74223228e-28 C69 1.9957938e-27 4.99157193e-27 -9.62902214e-28 C71 3.12476201e-27 1.58761398e-26 2.15189986e-27 C73 4.54981924e-27 1.53821757e-26 -8.59545995e-27 C75 6.59335485e-28 3.62238546e-27 5.36715829e-27 C77 -1.58015986e-27 -1.19949042e-27 5.14863336e-27 C78 4.37655985e-30 -2.15256015e-30 -6.68041182e-32 C80 8.62343063e-30 -8.27474872e-30 -2.88698633e-30 C82 1.3965552e-29 -1.85964202e-29 2.97808799e-30 C84 1.2610299e-29 -5.63075807e-29 -9.25513518e-30 C86 -4.82567841e-30 -7.58802797e-29 2.1567675e-29 C88 -1.35566233e-29 -6.2816052e-29 -8.2378632e-30 C90 8.35698293e-31 -2.48292667e-29 -1.8363031e-29 C92 -6.20912191e-33 -1.53848466e-33 -2.72722676e-33 C94 -3.03339233e-32 -5.56751434e-32 9.35668771e-33 C96 -4.15846221e-32 -2.81174802e-31 1.01318148e-32 C98 -1.20240425e-31 -5.69729421e-31 4.31201041e-32 C100 -1.23999978e-31 -3.40400557e-31 -2.58821352e-32 C102 1.77507014e-33 -9.97858945e-32 6.91936623e-33 C104 3.83557979e-32 1.09580074e-31 3.45333625e-32 C105 -1.52261212e-35 5.38313447e-37 2.4018539e-36 C107 -7.96360046e-35 8.5583118e-35 1.94949839e-35 C109 -2.50162343e-34 3.84351739e-34 -2.7269109e-35 C111 -2.81541874e-34 1.85492006e-33 -5.57867255e-35 C113 -6.28531061e-34 2.60940268e-33 -8.0628501e-35 C115 2.25293161e-35 2.55655776e-33 6.48059264e-36 C117 7.79107372e-35 1.01920129e-33 -2.46632816e-36 C119 -1.12500845e-34 7.43677377e-34 -2.70846382e-35 Table 3d to Fig. 6 coefficient M1 KY 0.00000000 KX 0.00000000 RX -2135.98763300 C7 -3.62667214e-08 C9 -8.77001096e-09 C10 -7.9878408e-12 C12 3.57622422e-11 C14 5.67666306e-11 C16 -1.00670933e-14 C18 -6.43363507e-14 C20 3.49263438e-14 C21 -1.83622059e-18 C23 1.63146414e-17 C25 2.33281554e-16 C27 -2.13403252e-16 C29 -7.17734463e-22 C31 -7.76916167e-20 C33 -2.45391831e-19 C35 9.06895125e 19 C36 -2.87240432e-24 C38 -5.67479156e-24 C40 2.53075334e-22 C42 2.33441297e-22 C44 -4.90816027e-21 C46 -1.82993123e-26 C48 1.40735408e-25 C50 -1.62994831e-25 C52 4.12295522e-24 C54 2.26175423e-23 C55 6.84620783e-30 C57 -8.9211373e-29 C59 3.99552919e-28 C61 2.87701829e-26 C63 7.90515964e-26 C65 4.93963599e-26 C67 8.37008672e-32 C69 -9.8548077e-31 C71 -7.50758997e-30 C73 -6.72582496e-30 C75 2.5702957e-28 C77 -1.08487883e-27 C78 4.88158898e-36 C80 1.55182242e-33 C82 1.52095525e-32 C84 -1.27781492e-31 C86 -1.81913568e-30 C88 -5.89459163e-30 C90 2.69055495e-30 C92 -4.03243187e-38 C94 3.64827588e-36 C96 3.2629352e-35 C98 1.58289449e-34 C100 -1.41502554e-34 C102 -7.52721979e-33 C104 1.42550505e-32 C105 -9.85463233e-41 C107 -4.7133732e-39 C109 -9.62905307e-38 C111 -4.88592887e-38 C113 5.89605443e-36 C115 4.37586765e-35 C117 1.2944388e-34 C119 -5.79847892e-35 Table 4a to FIG. 6 surface DCX DCY DCZ image plane 0.00000000 0.00000000 0.00000000 M10 0.00000000 0.00000000 805.12545493 AS 0.00000000 121.91685762 283.85220626 M9 0.00000000 161.70815863 113.71871405 M8 0.00000000 -95.26534725 1237.21684296 M7 0.00000000 -33.77425023 1447.75579022 M6 0.00000000 65.18321239 1551.64751609 M5 -0.00000000 416.29245364 1699.16961083 M4 -0.00000000 1004.20719186 1696.34134424 M3 -0.00000000 1452.13094016 1490.08513977 M2 0.00000000 1660.63260708 1219.01552868 M1 0.00000000 1898.51696847 380.25896967 object level 0.00000000 2052.66210418 2142.14593325 Table 4b to Fig. 6 surface TLA [deg] TLB [deg] TLC [deg] image plane -0.00000000 0.00000000 -0.00000000 M10 6.58193819 0.00000000 -0.00000000 AS -11.93243779 180.00000000 0.00000000 M9 193.02365372 0.00000000 -0.00000000 M8 88.30109261 0.00000000 -0.00000000 M7 60.05609350 0.00000000 -0.00000000 M6 34.59181790 -0.00000000 0.00000000 M5 11.25728686 -0.00000000 -0.00000000 M4 -12.50018064 -0.00000000 -0.00000000 M3 -38.57896098 -0.00000000 -0.00000000 M2 -63.29951574 0.00000000 -0.00000000 M1 185.41707922 0.00000000 -0.00000000 object level 0.00000000 -0.00000000 -0.00000000 Table 5 to Fig. 6 surface Angle of incidence [deg] reflectivity M10 6.54595976 0.66117442 M9 0.00927643 0.66565898 M8 75.28639991 0.80872354 M7 76.47603147 0.82797484 M6 78.19600441 0.85363243 M5 77.82111064 0.84823702 M4 78.09660546 0.85221183 M3 76.69476435 0.83137252 M2 78.51546985 0.85815129 M1 10.19565951 0.65421761 total transmission 0.0849 Table 6 to FIG. 6: Aperture polygon AS in the imaging beam path between M9 and M10 X [mm] Y [mm] Z [mm] Type 0.00000000 186.44396300 0.00000000 CLA -7.35372500 186.35147200 0.00000000 CLA -14.70293000 186.07403500 0.00000000 CLA -22.04308600 185.61182900 0.00000000 CLA -29.36964700 184.96518200 0.00000000 CLA -36.67804500 184.13440100 0.00000000 CLA -43.96368200 183.12003500 0.00000000 CLA -51.22191700 181.92270400 0.00000000 CLA -58.44805800 180.54312300 0.00000000 CLA -65.63737700 178.98213000 0.00000000 CLA -72.78506700 177.24065500 0.00000000 CLA -79.88623100 175.31975300 0.00000000 CLA -86.93596800 173.22057400 0.00000000 CLA -93.92919900 170.94433700 0.00000000 CLA -100.86081300 168.49243500 0.00000000 CLA -107.72561700 165.86632300 0.00000000 CLA -114.51817800 163.06745500 0.00000000 CLA -121.23320200 160.09761200 0.00000000 CLA -127.86509600 156.95849800 0.00000000 CLA -134.40820300 153.65200500 0.00000000 CLA -140.85671700 150.17999100 0.00000000 CLA -147.20471200 146.54456300 0.00000000 CLA -153.44628600 142.74788800 0.00000000 CLA -159.57526400 138.79218000 0.00000000 CLA -165.58539900 134.67982000 0.00000000 CLA -171.47033600 130.41326100 0.00000000 CLA -177.22373200 125.99505700 0.00000000 CLA -182.83880500 121.42778500 0.00000000 CLA -188.30943000 116.71453300 0.00000000 CLA -193.62848600 111.85789200 0.00000000 CLA -198.78943200 106.86098000 0.00000000 CLA -203.78559400 101.72694700 0.00000000 CLA -208.61006200 96.45897500 0.00000000 CLA -213.25621900 91.06052500 0.00000000 CLA -217.71726100 85.53509300 0.00000000 CLA -221.64901400 80.02685000 0.75883100 CLA -224.92026500 74.62899500 2.51098300 CLA -227.96741300 69.17817200 4.24784700 CLA -227.95344500 65.14191000 12.02424500 CLA -227.12122900 61.57814900 20.84485000 CLA -226.13600200 58.16537900 29.29174900 CLA -225.00391900 54.89925100 37.37569500 CLA -223.73072400 51.77538400 45.10754800 CLA -222.32096800 48.78916600 52.49869000 CLA -220.77884700 45.93608000 59.56032000 CLA -219.10785500 43.21147900 66.30394300 CLA -217.31114600 40.61084100 72.74070800 CLA -215.39130600 38.12963900 78.88190200 CLA -213.35065800 35.76334400 84.73869500 CLA -211.19147600 33.50760700 90.32183800 CLA -208.91541000 31.35813700 95.64194500 CLA -206.52437200 29.31065100 100.70964500 CLA -204.01998900 27.36108900 105.53499200 CLA -201.40409200 25.50539800 110.12799200 CLA -198.67828500 23.73971400 114.49825000 CLA -195.84432600 22.06021900 118.65512200 CLA -192.90404400 20.46324100 122.60777000 CLA -189.85948300 18.94530500 126.36481000 CLA -186.71258400 17.50289700 129.93489500 CLA -183.46561700 16.13274600 133.32612800 CLA -180.12097900 14.83174200 136.54624500 CLA -176.68110900 13.59664400 139.60322200 CLA -173.14867400 12.42461700 142.50407800 CLA -169.52649800 11.31290900 145.25565800 CLA -165.81747500 10.25866300 147.86498500 CLA -162.02456000 9.25931400 150.33846500 CLA -158.15106700 8.31237400 152.68225100 CLA -154.20002700 7.41549400 154.90205700 CLA -150.17487800 6.56640100 157.00369200 CLA -146.07892700 5.76289700 158.99242700 CLA -141.91554000 5.00295700 160.87334600 CLA -137.68807700 4.28459200 162.65135200 CLA -133.39999600 3.60596600 164.33101000 CLA -129.05467700 2.96531800 165.91665100 CLA -124.65533100 2.36095400 167.41255500 CLA -120.20527800 1.79126700 168.82252900 CLA -115.70776900 1.25482400 170.15030200 CLA -111.16585800 0.75015100 171.39936900 CLA -106.58255900 0.27593600 172.57309400 CLA -101.96080900 -0.16912300 173.67466600 CLA -97.30348300 -0.58612700 174.70677900 CLA -92.61320100 -0.97618500 175.67221000 CLA -87.89258900 -1.34039400 176.57364900 CLA -83.14404000 -1.67974700 177.41357200 CLA -78.36997500 -1.99507900 178.19405200 CLA -73.57255500 -2.28728800 178.91731600 CLA -68.75389700 -2.55709000 179.58512000 CLA -63.91599300 -2.80527500 180.19940100 CLA -59.06068500 -3.03248700 180.76176400 CLA -54.18980800 -3.23932800 181.27369700 CLA -49.30495700 -3.42635500 181.73660500 CLA -44.40776200 -3.59407000 182.15171600 CLA -39.49967000 -3.74294100 182.52018300 CLA -34.72856800 -5.38995400 181.76530200 CLA -29.78751600 -5.57165600 181.99973400 CLA -24.83568700 -5.70520100 182.21115500 CLA -19.85720500 -5.45684800 182.63399600 CLA -14.87055900 -4.88189700 183.22816000 CLA -9.89854300 -4.30609100 183.76604500 CLA -4.94917700 -4.28491600 183.86163300 CLA -0.00000000 -4.29338300 183.88257600 CLA 4.94917700 -4.28491600 183.86163600 CLA 9.89854300 -4.30609100 183.76604500 CLA 14.87055900 -4.88189700 183.22816000 CLA 19.85720500 -5.45684800 182.63399600 CLA 24.83568700 -5.70520100 182.21115500 CLA 29.78751600 -5.57165600 181.99973400 CLA 34.72856800 -5.38995400 181.76530200 CLA 39.49967000 -3.74294100 182.52018300 CLA 44.40776200 -3.59407000 182.15171600 CLA 49.30495700 -3.42635500 181.73660500 CLA 54.18980800 -3.23932800 181.27369700 CLA 59.06068500 -3.03248700 180.76176400 CLA 63.91599100 -2.80527500 180.19940100 CLA 68.75389500 -2.55709000 179.58512000 CLA 73.57255800 -2.28727100 178.91729500 CLA 78.36997500 -1.99507900 178.19405200 CLA 83.14404000 -1.67974700 177.41357200 CLA 87.89258900 -1.34039400 176.57364900 CLA 92.61320100 -0.97618500 175.67221000 CLA 97.30348300 -0.58612700 174.70677900 CLA 101.96080900 -0.16912300 173.67466600 CLA 106.58255900 0.27593600 172.57309400 CLA 111.16585800 0.75015100 171.39936900 CLA 115.70776900 1.25482400 170.15030200 CLA 120.20527800 1.79127100 168.82252900 CLA 124.65533100 2.36095500 167.41251400 CLA 129.05467500 2.96531400 165.91669400 CLA 133.40000700 3.60598900 164.33096700 CLA 137.68808700 4.28461400 162.65129000 CLA 141.91554100 5.00295900 160.87334600 CLA 146.07893600 5.76289900 158.99242700 CLA 150.17490500 6.56642700 157.00360400 CLA 154.20002700 7.41549400 154.90205700 CLA 158.15106700 8.31237400 152.68225100 CLA 162.02457400 9.25929100 150.33850000 CLA 165.81746100 10.25864300 147.86503800 CLA 169.52648100 11.31288100 145.25571300 CLA 173.14868300 12.42463300 142.50404300 CLA 176.68112300 13.59665400 139.60319000 CLA 180.12098800 14.83171400 136.54629600 CLA 183.46561700 16.13275100 133.32612800 CLA 186.71259200 17.50290300 129.93487300 CLA 189.85947400 18.94530200 126.36483200 CLA 192.90404400 20.46324100 122.60777000 CLA 195.84432600 22.06021900 118.65512200 CLA 198.67828500 23.73971400 114.49825000 CLA 201.40409200 25.50539800 110.12798100 CLA 204.01998900 27.36108900 105.53499200 CLA 206.52437200 29.31065100 100.70965600 CLA 208.91541000 31.35813700 95.64195600 CLA 211.19147600 33.50760700 90.32183800 CLA 213.35065800 35.76334400 84.73868400 CLA 215.39130600 38.12963900 78.88190700 CLA 217.31114600 40.61084100 72.74071900 CLA 219.10785500 43.21147900 66.30393200 CLA 220.77884700 45.93608000 59.56031000 CLA 222.32096800 48.78916600 52.49869000 CLA 223.73072400 51.77538400 45.10753500 CLA 225.00391900 54.89925100 37.37569500 CLA 226.13600200 58.16537900 29.29174900 CLA 227.12122900 61.57814900 20.84483900 CLA 227.95344500 65.14191000 12.02423400 CLA 227.96741000 69.17817300 4.24784700 CLA 224.92026200 74.62899500 2.51098200 CLA 221.64901100 80.02685100 0.75883000 CLA 217.71726100 85.53509300 0.00000000 CLA 213.25621500 91.06052500 0.00000000 CLA 208.61005500 96.45897500 0.00000000 CLA 203.78559400 101.72694700 0.00000000 CLA 198.78942700 106.86098000 0.00000000 CLA 193.62848300 111.85789200 0.00000000 CLA 188.30942700 116.71453300 0.00000000 CLA 182.83880500 121.42778500 0.00000000 CLA 177.22372500 125.99505700 0.00000000 CLA 171.47033100 130.41326100 0.00000000 CLA 165.58539100 134.67982000 0.00000000 CLA 159.57526500 138.79218000 0.00000000 CLA 153.44628100 142.74788800 0.00000000 CLA 147.20470800 146.54456300 0.00000000 CLA 140.85671700 150.17999100 0.00000000 CLA 134.40815300 153.65196000 0.00000000 CLA 127.86507800 156.95847900 0.00000000 CLA 121.23319300 160.09759500 0.00000000 CLA 114.51820300 163.06746100 0.00000000 CLA 107.72555500 165.86627400 0.00000000 CLA 100.86080300 168.49243500 0.00000000 CLA 93.92919400 170.94433800 0.00000000 CLA 86.93605000 173.22065200 0.00000000 CLA 79.88623100 175.31975300 0.00000000 CLA 72.78506700 177.24065500 0.00000000 CLA 65.63737700 178.98213000 0.00000000 CLA 58.44805800 180.54312300 0.00000000 CLA 51.22191700 181.92270400 0.00000000 CLA 43.96368200 183.12003500 0.00000000 CLA 36.67804500 184.13440100 0.00000000 CLA 29.36964700 184.96518200 0.00000000 CLA 22.04308600 185.61182900 0.00000000 CLA 14.70293000 186.07403500 0.00000000 CLA 7.35372500 186.35147200 0.00000000 CLA

Eine Gesamt-Reflektivität der Projektionsoptik 20 beträgt 8,49 %.A total reflectivity of the projection optics 20 is 8.49%.

Die Projektionsoptik 20 hat eine bildseitige numerische Apertur von 0,55. Das Bildfeld 8 hat eine x-Erstreckung von zweimal 13,0 mm und eine y-Erstreckung von 1 mm. Die Projektionsoptik 20 ist optimiert für eine Betriebswellenlänge des Beleuchtungslichts 3 von 13,5 nm.The projection optics 20 has a picture-side numerical aperture of 0.55. The image field 8th has a x -Extraction of twice 13.0 mm and one y Extension of 1 mm. The projection optics 20 is optimized for an operating wavelength of the illumination light 3 of 13.5 nm.

Anstelle von vier Blenden AS bis AS4 bei der Projektionsoptik 7 nach den 2 bis 5 hat die Projektionsoptik 20 genau eine Blende AS (vergleiche 7), die räumlich zwischen dem im Strahlengang vorletzten Spiegel M9 und dem im Strahlengang letzten Spiegel M10 angeordnet ist.Instead of four apertures AS to AS4 in the projection optics 7 after the 2 to 5 has the projection optics 20 exactly one aperture AS (see 7 ), which spatially between the penultimate mirror in the beam path M9 and the last in the beam path mirror M10 is arranged.

Die Blende AS der Projektionsoptik 20 begrenzt die äußere Randkontur der Pupille der Projektionsoptik 20 in einem Azimutbereich von 360°, also vollumfänglich. Die Blende AS der Projektionsoptik 20 gibt also die gesamte äußere Randkontur der Pupille vor.The aperture AS the projection optics 20 limits the outer edge contour of the pupil of the projection optics 20 in an azimuth range of 360 °, so in full. The aperture AS of the projection optics 20 So gives the entire outer edge contour of the pupil.

Die Blende AS der Projektionsoptik 20 ist abschnittsweise plan ausgeführt und umfasst zwei plane Blendenabschnitte 21, 22 und einen weiteren planen Tragabschnitt 23. Die Blende AS der Projektionsoptik 20 begrenzt eine Randkontur 24 der Pupille der Projektionsoptik 20 in mehr als einer Ebene, nämlich in Blendenebenen E_AS ¹ und E_AS ² .The aperture AS of the projection optics 20 is executed in sections plan and includes two flat aperture sections 21 . 22 and another plane support section 23 , The aperture AS of the projection optics 20 limits a border contour 24 the pupil of the projection optics 20 in more than one plane, namely in aperture planes E _AS ¹ and E _AS ² ,

8 zeigt eine Projektion der Randkontur 24 der Pupille der Projektionsoptik 20 auf die Blendenebene E_AS ¹ . Eine äußere Randkontur der Blende AS, also eine Kontur dieser Blende AS dort, wo sie nicht bündelbegrenzend ist, ist nicht näher dargestellt, sondern durch eine Bruchlinie angedeutet. 8th shows a projection of the edge contour 24 the pupil of the projection optics 20 on the aperture plane E _AS ¹ , An outer edge contour of the panel AS So a contour of this aperture AS where it is not bundle limiting, is not shown in detail, but indicated by a break line.

In der ersten Blendenebene E_AS ¹ begrenzt die Blende AS die Pupillen-Randkontur 24 durch Abblenden des Abbildungslicht-Teilbündels 3_M9M10 zwischen den Spiegeln M9 und M10 mit dem Blendenabschnitt 21.In the first aperture plane E _AS ¹ limits the aperture AS the pupil border contour 24 by dimming the image light sub-beam 3 _M9M10 between the mirrors M9 and M10 with the aperture section 21 ,

Zwischen den Blendenabschnitten 21 und 22 verläuft die Blende AS der Projektionsoptik 20 abgeknickt. Die Abschnitte 21, 22 einerseits und die Abschnitte 22, 23 andererseits der Blende AS der Projektionsoptik 20 verlaufen stumpfwinklig zueinander. Die extremen Randpositionen E(x), E(-x) der äußeren Pupillen-Randkontur 24 liegen im Knickbereich zwischen den Blendenabschnitten 21 und 22.Between the panel sections 21 and 22 runs the aperture AS the projection optics 20 kinked. The sections 21 . 22 on the one hand and the sections 22 . 23 on the other hand, the aperture AS the projection optics 20 run obtusely to each other. The extreme edge positions E (x), E (-x) of the outer pupil edge contour 24 lie in the kink area between the panel sections 21 and 22 ,

In der zweiten Blendenebene E_AS ² begrenzt die Blende AS die Pupillen-Randkontur der Projektionsoptik 20 durch äußeres Abblenden ebenfalls des Abbildungslicht-Teilbündels 3_M9M10 . Im Bereich kleinster y-Werte, nämlich genau zwischen den beiden Abbildungslicht-Teilbündeln 3_M9M10 und 3_M10W , ist die Blende AS der Projektionsoptik 20 schmal ausgeführt, sodass sie das Abbildungslicht-Teilbündel 3_M10W nicht begrenzt. In dem Bereich zwischen den Abbilddungslicht-Teilbündeln 3_M9M10 und 3_M10W ist die Blende AS der Projektionsoptik 20 als schmaler Steg S ausgeführt. Der Tragabschnitt 23 ist an beiden Seiten, also bei negativen und bei positiven x-Werten, am Abbildungslicht-Teilbündel 3_M10W vorbeigeführt.In the second aperture plane E _AS ² limits the aperture AS the pupil edge contour of the projection optics 20 by externally dimming also the imaging light sub-beam 3 _M9M10 , In the range of smallest y values, namely exactly between the two imaging light sub-beams 3 _M9M10 and 3 _M10W , is the aperture AS the projection optics 20 made narrow so that they the imaging light sub-beam 3 _M10W not limited. In the area between the imaging light sub-beams 3 _M9M10 and 3 _M10W is the aperture AS of the projection optics 20 as a narrow bridge S executed. The supporting section 23 is on both sides, so negative and positive x Values, at the picture light sub-beam 3 _M10W past.

9 ist wiederum eine sagittale Ansicht der Projektionsoptik 20. 9 again is a sagittal view of the projection optics 20 ,

Anhand der 10 wird nachfolgend eine weitere Ausführung einer Projektionsoptik 25 erläutert, die anstelle der Projektionsoptik 7 bei der Projektionsbelichtungsanlage 1 nach 1 zum Einsatz kommen kann. Komponenten und Funktionen, die vorstehend im Zusammenhang mit den 1 bis 9 bereits erläutert wurden, tragen gegebenenfalls die gleichen Bezugsziffern und werden nicht nochmals im Einzelnen diskutiert.Based on 10 Below is another embodiment of a projection optics 25 explains that instead of the projection optics 7 at the projection exposure machine 1 to 1 can be used. Components and functions discussed above in connection with the 1 to 9 have already been explained, if applicable, have the same reference numbers and will not be discussed again in detail.

Die Spiegel M1 bis M10 sind wiederum als Freiformflächen ausgestaltet, für die die oben angegebene Freiformflächengleichung (1) gilt. Die optischen Designdaten der Projektionsoptik 21 können den nachfolgenden Tabellen entnommen werden, die in ihrem Aufbau den Tabellen zur Projektionsoptik 7 nach 2 entsprechen. Tabelle 1 zu Fig. 10 Ausführungsbeispiel 10 NA 0.55 Wellenlänge 13.5 nm Feldgröße_x 26.0 mm Feldgröße_y 1.0 mm Feldkrümmung -0.012345 1/mm Blende AS Tabelle 2 zu Fig. 10 Oberfläche Radius_x[mm] Power_x[1/mm] Radius_y[mm] Power_y[1/mm] Betriebs- M10 -924.4981198 0.0021492 -841.5674623 0.0023921 REFL M9 1845.8313982 -0.0010835 356.4114777 -0.0056115 REFL M8 -807.7853011 0.0006289 -16794.6817783 0.0004689 REFL M7 -633.7019549 0.0007380 20332.8433550 -0.0004206 REFL M6 -1159.7877847 0.0003528 -7078.0588424 0.0013813 REFL M5 -7911.6202298 0.0000533 -2197.1749958 0.0043148 REFL M4 6252.7176733 -0.0000660 -2753.7274849 0.0035212 REFL M3 1718.6984546 -0.0002678 -10060.7554809 0.0008638 REFL M2 1592.6268445 -0.0002500 2592.5626309 -0.0038746 REFL M1 -2135.9876330 0.0009216 -1377.1202039 0.0014756 REFL Tabelle 3a zu Fig. 10 Koeffizient M10 M9 M8 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX -924.49811980 1845.83139800 -807.78530110 C7 5.32161644e-09 -7.17957299e-07 3.61958396e-07 C9 1.2051462e-08 1.48021766e-06 4.61852728e-08 C10 -4.28738318e-12 3.94779844e-10 1.36275822e-10 C12 -3.49709402e-11 2.67402017e-09 4.92199166e-11 C14 -9.81786584e-12 6.31481582e-09 -4.23949539e-10 C16 -3.40219667e-15 -2.74047503e-12 1.12548598e-12 C18 1.60335869e-14 2.04228406e-14 3.71761249e-13 C20 1.30399612e-14 3.2725238e-11 -2.05971586e-12 C21 -1.15274335e-17 2.35879877e-15 1.09054091e-15 C23 -6.9260806e-17 1.00239611e-14 1.70911423e-15 C25 -7.13524377e-17 5.05529889e-14 -3.62622238e-15 C27 -1.67322747e-17 1.78538542e-13 -7.36849912e-15 C29 -7.92528578e-21 -4.11347975e-18 -2.59696939e-18 C31 1.27834004e-20 -5.83032641e-17 1.25679501e-17 C33 3.27119661e-20 1.71591989e-16 -1.04543394e-17 C35 1.71377495e-20 1.22876874e-15 -3.91086555e-17 C36 -1.89551894e-23 -4.14843428e-22 5.26679107e-21 C38 -1.11996388e-22 1.06656248e-19 2.8502374e-20 C40 -1.96750203e-22 2.08419251e-19 6.3260457e-20 C42 -1.2392523e-22 8.95301505e-19 4.7233819e-21 C44 -2.47458966e-23 8.36809183e-18 -2.27707911e-19 C46 -9.77909864e-27 -1.02394711e-22 1.39450428e-23 C48 5.19824336e-27 -7.95041789e-23 1.68839235e-22 C50 5.59498452e-26 8.75666056e-22 2.79254271e-22 C52 6.43656264e-26 4.60087068e-21 -9.11661464e-23 C54 1.96031627e-26 4.50459082e-20 1.98458883e-22 C55 -1.9734083e-29 2.61667221e-26 -4.54521391e-26 C57 -1.39192995e-28 -1.48955085e-25 1.23387971e-24 C59 -3.49342237e-28 2.18616238e-24 4.57708029e-24 C61 -3.79015472e-28 8.50729665e-24 6.06052772e-24 C63 -1.77868817e-28 2.63725246e-23 -9.61661588e-26 C65 -2.61320106e-29 1.37431086e-22 9.18355997e-24 C67 -1.75320584e-32 1.91491617e-28 -2.00093096e-27 C69 -1.49695509e-32 -5.27938029e-27 2.16982668e-27 C71 6.84912486e-32 -5.29216183e-27 -7.30096104e-27 C73 1.54586906e-31 4.04146338e-26 -4.93769708e-27 C75 1.15783975e-31 2.37812676e-25 -4.16594376e-26 C77 4.14587364e-32 1.20314674e-24 -1.62235584e-25 C78 -5.34426777e-35 4.49836368e-31 6.13330316e-30 C80 -4.27488688e-34 1.29694668e-29 -1.62333428e-29 C82 -1.25436413e-33 3.24280489e-29 -1.68167617e-28 C84 -1.71502766e-33 3.00254831e-29 -4.89454528e-28 C86 -1.25734127e-33 7.46446045e-28 -6.5895393e-28 C88 -5.19929261e-34 5.84363659e-27 -1.5416679e-27 C90 -9.42013117e-35 2.61240017e-26 -3.38007496e-27 C92 1.00872668e-38 -4.95175891e-33 1.78435553e-32 C94 -1.45968234e-39 2.0913161e-33 1.10022934e-32 C96 2.49294655e-38 9.54156933e-32 1.00044858e-30 C98 1.25738947e-37 -7.47916509e-33 1.98972461e-30 C100 1.6844889e-37 7.35199153e-30 -3.47483305e-30 C102 7.66863005e-38 5.82871085e-29 -1.47027148e-29 C104 -1.4887687e-38 2.15570834e-28 -2.0886266e-29 C105 3.84331333e-41 -2.72151554e-36 -1.09100622e-34 C107 4.50330303e-40 -6.8970507e-35 3.91399908e-34 C109 1.60900752e-39 -2.41557224e-34 4.01031765e-33 C111 2.46751199e-39 1.07560857e-33 1.8289791e-32 C113 1.94052198e-39 8.96263507e-33 2.87152163e-32 C115 9.9606188e-40 4.77961552e-32 -4.19223781e-33 C117 4.55475999e-40 2.14647641e-31 -4.42634085e-32 C119 9.96424428e-41 6.08163641e-31 -4.46533131e-32 C121 -6.67748909e-44 0 0 C123 -1.35652075e-43 0 0 C125 1.98636308e-43 0 0 C127 1.25607622e-42 0 0 C129 2.10051386e-42 0 0 C131 1.77289428e-42 0 0 C133 7.94693346e-43 0 0 C135 1.74862061e-43 0 0 C136 -1.77390976e-46 0 0 C138 -2.00142247e-45 0 0 C140 -8.6258998e-45 0 0 C142 -1.91465627e-44 0 0 C144 -2.50271596e-44 0 0 C146 -2.03958823e-44 0 0 C148 -1.04613962e-44 0 0 C150 -3.18867421e-45 0 0 C152 -4.17582475e-46 0 0 Tabelle 3b zu Fig. 10 Koeffizient M7 M6 M5 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX -633.70195490 -1159.78778500 -7911.62023000 C7 -3.6838108e-08 8.9762673e-08 1.29208819e-08 C9 1.66051547e-07 5.4606184e-08 -4.52621083e-08 C10 2.70786958e-11 -4.84436976e-10 -5.84676904e-10 C12 -4.05365907e-10 4.4034394e-11 3.29353371e-11 C14 1.17570885e-09 -8.49494866e-10 3.27657845e-11 C16 5.32058235e-13 -1.22366579e-12 -4.06185258e-13 C18 -2.33907349e-12 3.31495258e-12 -3.05655881e-13 C20 1.03622586e-11 4.74017946e-12 -9.90515078e-14 C21 1.84951658e-17 4.70815441 e-16 6.8177486e-16 C23 1.97362743e-16 -5.63918759e-15 1.78311332e-16 C25 -4.50645748e-14 -2.04438614e-14 1.92769745e-15 C27 1.22197136e-13 -4.46320586e-14 1.11134948e-15 C29 -8.3397015e-19 3.12037967e-18 1.20925734e-18 C31 5.73336291e-17 2.52930984e-17 -2.68755339e-18 C33 -4.26965471e-16 2.57659349e-16 -5.94759876e-18 C35 1.12309508e-15 3.62043368e-16 -4.78247891e-18 C36 -2.54002154e-21 -2.33285817e-21 8.64176325e-21 C38 6.58698589e-22 6.78093367e-21 2.69603122e-21 C40 9.19834216e-19 -6.09316184e-19 1.90190625e-20 C42 -5.20603364e-18 -2.48560476e-18 2.06136053e-20 C44 1.95177251e-17 -3.71987432e-18 1.52178482e-20 C46 5.11031274e-23 -2.36475219e-24 1.40723013e-23 C48 -5.22351362e-22 1.08955249e-21 -1.74886691e-23 C50 1.29955621e-20 6.28062297e-21 -1.31280422e-22 C52 -7.19352591e-20 2.83502526e-20 -1.33189978e-22 C54 3.01583882e-19 4.05968238e-20 -5.11578136e-23 C55 -3.2378259e-26 5.04920803e-26 -9.74226056e-26 C57 2.56114803e-26 -1.66126857e-24 1.25073538e-25 C59 -2.15568526e-23 -1.21962666e-23 3.61644254e-25 C61 7.54597503e-23 -7.85294647e-23 6.17670028e-25 C63 -1.37768633e-21 -2.60819335e-22 3.1972004e-25 C65 -9.91159698e-22 -3.82043453e-22 5.14604952e-26 C67 8.86143266e-29 1.38719494e-27 -4.85096213e-29 C69 2.95926995e-28 1.1409927e-26 -1.52883817e-29 C71 -4.08946521e-25 1.70193798e-25 -2.99192047e-28 C73 1.1764e-24 5.79647838e-25 1.27326956e-27 C75 -1.82271068e-23 1.8185183e-24 2.14215183e-27 C77 -6.0476105e-23 2.47496013e-24 -2.43586456e-28 C78 -1.46974123e-31 -2.48880617e-30 2.2910216e-30 C80 -1.62035317e-29 -3.63910799e-30 -2.10355105e-30 C82 2.64119709e-28 -1.39124488e-28 -3.56165247e-30 C84 -2.75435112e-27 -9.92371827e-28 -1.25073816e-29 C86 6.06493358e-26 -2.9562807e-27 -1.02346615e-29 C88 -1.82794269e-25 -7.99387324e-27 1.25693216e-30 C90 8.10897778e-25 -1.01333935e-26 6.64972771e-30 C92 -5.94852836e-33 -2.20554773e-33 1.22259104e-33 C94 7.23973112e-32 1.10525284e-31 -1.24849687e-32 C96 7.40539289e-30 -4.613537e-32 -3.29652704e-32 C98 4.88216265e-30 4.80483016e-30 -8.41705133e-32 C100 9.65449531e-28 6.23756899e-30 -1.57134898e-31 C102 -1.70876067e-27 2.1445453e-29 -1.2032548e-31 C104 2.67082934e-26 2.28654521e-29 -3.36577402e-32 C105 2.35094421e-36 2.08468354e-35 -1.08251776e-35 C107 3.37747137e-34 -1.04397603e-34 3.142163e-35 C109 7.70896596e-34 2.85346997e-34 8.01180965e-35 C111 6.84579774e-32 -8.80664689e-35 3.89769754e-34 C113 -9.31004972e-32 -9.19882787e-33 7.80016296e-34 C115 5.48180337e-30 -1.39857273e-33 7.27970094e-34 C117 -9.40923091e-30 -2.85191959e-32 3.44660803e-34 C119 1.58250782e-28 -2.04899764e-32 5.28320959e-35 Tabelle 3c zu Fig. 10 Koeffizient M4 M3 M2 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 6252.71767300 1718.69845500 1592.62684400 C7 2.02039657e-07 -7.72442186e-08 -2.81200257e-07 C9 6.26194854e-08 -6.39011454e-08 -4.33420894e-07 C10 -1.17096485e-10 5.38504965e-10 2.16914992e-10 C12 1.65918593e-10 1.54474735e-10 -2.43233271e-10 C14 2.6047855e-11 -5.67012949e-11 1.0908048e-09 C16 1.53352973e-13 -1.28128634e-12 -1.3249687e-12 C18 6.85280998e-14 3.29016521e-13 2.3245033e-12 C20 1.33134745e-14 -7.9135182e-14 -2.74288101e-12 C21 9.63392843e-16 -2.23006179e-16 -3.54173468e-16 C23 -2.56356327e-16 8.08610012e-16 5.15456653e-15 C25 -4.93143601e-16 -1.64061139e-16 -1.06774698e-14 C27 -3.50827102e-17 -8.3638218e-18 5.96789915e-15 C29 -1.32470314e-18 2.06883208e-18 1.70541615e-18 C31 -1.08456401e-18 -3.75046097e-18 -2.42446489e-17 C33 -3.23480928e-19 1.52741866e-18 4.43191025e-17 C35 -3.72075346e-19 1.62584985e-18 -1.05861269e-17 C36 -3.85707039e-21 -2.85425871e-21 1.53834046e-21 C38 7.16357253e-21 4.79674043e-21 -1.1251108e-20 C40 -1.76766744e-21 6.62315222e-22 1.18315789e-19 C42 -5.70159933e-21 -2.6546097e-21 -1.77703731e-19 C44 -3.65158025e-21 1.5355861e-20 1.37862764e-20 C46 -2.99726604e-23 -7.26058549e-23 -2.55922076e-23 C48 -4.17503344e-23 -9.21476496e-23 1.00193833e-22 C50 -4.7884568e-23 -2.35567601e-22 -5.31735424e-22 C52 -6.91516977e-24 -1.35526865e-22 6.79507546e-22 C54 1.98546253e-23 9.61975988e-23 4.01660209e-23 C55 -1.94031018e-26 1.56888015e-25 -1.38213528e-26 C57 -3.42382432e-25 2.2750218e-25 1.79376182e-25 C59 -2.2756817e-25 -1.23549695e-25 -5.94897934e-25 C61 2.01539859e-25 2.29974662e-25 2.27901415e-24 C63 4.95631548e-25 8.59833428e-25 -2.22922414e-24 C65 1.12176727e-25 1.26876311e-24 -7.70058057e-25 C67 9.06942404e-28 9.3079309e-28 3.74223228e-28 C69 1.9957938e-27 4.99157193e-27 -9.62902214e-28 C71 3.12476201e-27 1.58761398e-26 2.15189986e-27 C73 4.54981924e-27 1.53821757e-26 -8.59545995e-27 C75 6.59335485e-28 3.62238546e-27 5.36715829e-27 C77 -1.58015986e-27 -1.19949042e-27 5.14863336e-27 C78 4.37655985e-30 -2.15256015e-30 -6.68041182e-32 C80 8.62343063e-30 -8.27474872e-30 -2.88698633e-30 C82 1.3965552e-29 -1.85964202e-29 2.97808799e-30 C84 1.2610299e-29 -5.63075807e-29 -9.25513518e-30 C86 -4.82567841e-30 -7.58802797e-29 2.1567675e-29 C88 -1.35566233e-29 -6.2816052e-29 -8.2378632e-30 C90 8.35698293e-31 -2.48292667e-29 -1.8363031e-29 C92 -6.20912191e-33 -1.53848466e-33 -2.72722676e-33 C94 -3.03339233e-32 -5.56751434e-32 9.35668771e-33 C96 -4.15846221e-32 -2.81174802e-31 1.01318148e-32 C98 -1.20240425e-31 -5.69729421e-31 4.31201041e-32 C100 -1.23999978e-31 -3.40400557e-31 -2.58821352e-32 C102 1.77507014e-33 -9.97858945e-32 6.91936623e-33 C104 3.83557979e-32 1.09580074e-31 3.45333625e-32 C105 -1.52261212e-35 5.38313447e-37 2.4018539e-36 C107 -7.96360046e-35 8.5583118e-35 1.94949839e-35 C109 -2.50162343e-34 3.84351739e-34 -2.7269109e-35 C111 -2.81541874e-34 1.85492006e-33 -5.57867255e-35 C113 -6.28531061e-34 2.60940268e-33 -8.0628501e-35 C115 2.25293161e-35 2.55655776e-33 6.48059264e-36 C117 7.79107372e-35 1.01920129e-33 -2.46632816e-36 C119 -1.12500845e-34 7.43677377e-34 -2.70846382e-35 Tabelle 3d zu Fig. 10 Koeffizient M1 KY 0.00000000 KX 0.00000000 RX -2135.98763300 C7 -3.62667214e-08 C9 -8.77001096e-09 C10 -7.9878408e-12 C12 3.57622422e-11 C14 5.67666306e-11 C16 -1.00670933e-14 C18 -6.43363507e-14 C20 3.49263438e-14 C21 -1.83622059e-18 C23 1.63146414e-17 C25 2.33281554e-16 C27 -2.13403252e-16 C29 -7.17734463e-22 C31 -7.76916167e-20 C33 -2.45391831e-19 C35 9.06895125e-19 C36 -2.87240432e-24 C38 -5.67479156e-24 C40 2.53075334e-22 C42 2.33441297e-22 C44 -4.90816027e-21 C46 -1.82993123e-26 C48 1.40735408e-25 C50 -1.62994831e-25 C52 4.12295522e-24 C54 2.26175423e-23 C55 6.84620783e-30 C57 -8.9211373e-29 C59 3.99552919e-28 C61 2.87701829e-26 C63 7.90515964e-26 C65 4.93963599e-26 C67 8.37008672e-32 C69 -9.8548077e-31 C71 -7.50758997e-30 C73 -6.72582496e-30 C75 2.5702957e-28 C77 -1.08487883e-27 C78 4.88158898e-36 C80 1.55182242e-33 C82 1.52095525e-32 C84 -1.27781492e-31 C86 -1.81913568e-30 C88 -5.89459163e-30 C90 2.69055495e-30 C92 -4.03243187e-38 C94 3.64827588e-36 C96 3.2629352e-35 C98 1.58289449e-34 C100 -1.41502554e-34 C102 -7.52721979e-33 C104 1.42550505e-32 C105 -9.85463233e-41 C107 -4.7133732e-39 C109 -9.62905307e-38 C111 -4.88592887e-38 C113 5.89605443e-36 C115 4.37586765e-35 C117 1.2944388e-34 C119 -5.79847892e-35 Tabelle 4a zu Fig. 10 Oberfläche DCX DCY DCZ Bildebene 0.00000000 0.00000000 0.00000000 M10 0.00000000 0.00000000 805.12545493 AS 0.00000000 121.91685762 283.85220626 M9 0.00000000 161.70815863 113.71871405 M8 -0.00000000 -95.26534725 1237.21684296 M7 -0.00000000 -33.77425023 1447.75579022 M6 -0.00000000 65.18321239 1551.64751609 M5 -0.00000000 416.29245364 1699.16961083 M4 -0.00000000 1004.20719186 1696.34134424 M3 -0.00000000 1452.13094016 1490.08513977 M2 0.00000000 1660.63260708 1219.01552868 M1 0.00000000 1898.51696847 380.25896967 Objektebene -0.00000000 2052.66210418 2142.14593325 Tabelle 4b zu Fig. 10 Oberfläche TLA[deg] TLB[deg] TLC[deg] Bildebene -0.00000000 0.00000000 -0.00000000 M10 6.58193819 0.00000000 -0.00000000 AS 33.06787638 180.00000000 0.00000000 M9 193.02365372 0.00000000 -0.00000000 M8 88.30109261 -0.00000000 0.00000000 M7 60.05609350 -0.00000000 -0.00000000 M6 34.59181790 -0.00000000 0.00000000 M5 11.25728686 -0.00000000 -0.00000000 M4 -12.50018064 -0.00000000 -0.00000000 M3 -38.57896098 -0.00000000 -0.00000000 M2 -63.29951574 0.00000000 -0.00000000 M1 185.41707922 0.00000000 -0.00000000 Objektebene 0.00000000 -0.00000000 -0.00000000 Tabelle 5 zu Fig. 10 Oberfläche Einfallswinkel[deg] Reflektivität M10 6.54595976 0.66117442 M9 0.00927824 0.66565898 M8 75.28640231 0.80872358 M7 76.47602867 0.82797480 M6 78.19600462 0.85363243 M5 77.82112299 0.84823720 M4 78.09659958 0.85221174 M3 76.69475350 0.83137235 M2 78.51548223 0.85815147 M1 10.19566395 0.65421760 Gesamttransmission 0.0849 Tabelle 6 zu Fig. 10: Blenden-Polygon AS im Abbildungsstrahlengang zwischen M9 und M10 X[mm] Y[mm] Z[mm] Typ 0.00000000 131.83589200 131.83589200 CLA -7.35374100 131.77048700 131.77048700 CLA -14.70296100 131.57431400 131.57431400 CLA -22.04313100 131.24749000 131.24749000 CLA -29.36970700 130.79021600 130.79021600 CLA -36.67812000 130.20277000 130.20277000 CLA -43.96377000 129.48550800 129.48550800 CLA -51.22201700 128.63886500 128.63886500 CLA -58.44817700 127.66335300 127.66335300 CLA -65.63750700 126.55956000 126.55956000 CLA -72.78520400 125.32814900 125.32814900 CLA -79.88639400 123.96985800 123.96985800 CLA -86.93612800 122.48549900 122.48549900 CLA -93.92937000 120.87595600 120.87595600 CLA -100.86099500 119.14218500 119.14218500 CLA -107.72578000 117.28521600 117.28521600 CLA -114.51840200 115.30614500 115.30614500 CLA -121.23342700 113.20614300 113.20614300 CLA -127.86531200 110.98644900 110.98644900 CLA -134.40839900 108.64837300 108.64837300 CLA -140.85691200 106.19329300 106.19329300 CLA -147.20495800 103.62266000 103.62266000 CLA -153.44653000 100.93799400 100.93799400 CLA -159.57550100 98.14088700 98.14088700 CLA -165.58563900 95.23300400 95.23300400 CLA -171.47060200 92.21608300 92.21608300 CLA -177.22395400 89.09193600 89.09193600 CLA -182.83916900 85.86245400 85.86245400 CLA -188.30964600 82.52960300 82.52960300 CLA -193.62872100 79.09543300 79.09543300 CLA -198.78968100 75.56207400 75.56207400 CLA -203.78578300 71.93174200 71.93174200 CLA -208.61027600 68.20674000 68.20674000 CLA -213.25641600 64.38946000 64.38946000 CLA -217.71749400 60.48238700 60.48238700 CLA -221.98685600 56.48810300 56.48810300 CLA -226.05793100 52.40928400 52.40928400 CLA -229.92425500 48.24870700 48.24870700 CLA -233.57949800 44.00925100 44.00925100 CLA -237.01749200 39.69389700 39.69389700 CLA -240.23226000 35.30573300 35.30573300 CLA -243.21803600 30.84795100 30.84795100 CLA -245.96930200 26.32385100 26.32385100 CLA -248.48080600 21.73684100 21.73684100 CLA -250.74758900 17.09043500 17.09043500 CLA -252.76501100 12.38825600 12.38825600 CLA -254.52877100 7.63403200 7.63403200 CLA -256.03492600 2.83160000 2.83160000 CLA -257.27991400 -2.01510200 -2.01510200 CLA -258.26056300 -6.90202700 -6.90202700 CLA -258.97411000 -11.82502800 -11.82502800 CLA -259.41821000 -16.77985300 -16.77985300 CLA -259.59094200 -21.76215200 -21.76215200 CLA -259.49081700 -26.76747100 -26.76747100 CLA -259.11677800 -31.79125700 -31.79125700 CLA -258.46820200 -36.82885800 -36.82885800 CLA -257.54489300 -41.87552300 -41.87552300 CLA -256.34708200 -46.92640000 -46.92640000 CLA -254.87541300 -51.97654200 -51.97654200 CLA -253.13093700 -57.02090100 -57.02090100 CLA -251.11510000 -62.05433300 -62.05433300 CLA -248.82972800 -67.07159700 -67.07159700 CLA -246.27701400 -72.06735500 -72.06735500 CLA -243.45950400 -77.03617900 -77.03617900 CLA -240.38007900 -81.97254400 -81.97254400 CLA -237.04194200 -86.87084100 -86.87084100 CLA -231.96108600 -91.93003900 -87.66439900 CLA -215.75319900 -97.95558800 -57.71637300 CLA -200.50494000 -102.97145500 -29.26997800 CLA -187.50396000 -107.03629500 -6.21712400 CLA -176.16536800 -110.38803000 12.79151000 CLA -166.08539300 -113.19140700 28.69025100 CLA -156.97673300 -115.56411200 42.14652500 CLA -148.62973700 -117.59244200 53.64975800 CLA -140.88812900 -119.34110800 63.56693800 CLA -133.63328500 -120.85957600 72.17859500 CLA -126.77374700 -122.18629300 79.70278000 CLA -120.23804100 -123.35158400 86.31147700 CLA -113.96964400 -124.37968000 92.14209800 CLA -107.92338600 -125.29016100 97.30569100 CLA -102.06283300 -126.09901100 101.89290600 CLA -96.35834900 -126.81939500 105.97841200 CLA -90.78564100 -127.46224600 109.62420100 CLA -85.32465800 -128.03670200 112.88210200 CLA -79.95873600 -128.55045100 115.79571500 CLA -74.67394200 -129.00999300 118.40190700 CLA -69.45855200 -129.42085000 120.73199200 CLA -64.30264200 -129.78772800 122.81266100 CLA -59.19775900 -130.11464900 124.66672400 CLA -54.13665500 -130.40505600 126.31370400 CLA -49.11308000 -130.66189700 127.77032000 CLA -44.12159800 -130.88769300 129.05087400 CLA -39.15744700 -131.08459700 130.16757100 CLA -34.21642400 -131.25443500 131.13077000 CLA -29.29477500 -131.39874700 131.94920200 CLA -24.38912200 -131.51881300 132.63013400 CLA -19.49638000 -131.61568300 133.17950800 CLA -14.61370400 -131.69018800 133.60204800 CLA -9.73842500 -131.74296200 133.90134800 CLA -4.86800800 -131.77445100 134.07993100 CLA -0.00000000 -131.78491900 134.13929300 CLA 4.86800800 -131.77445100 134.07993100 CLA 9.73842500 -131.74296200 133.90134800 CLA 14.61370400 -131.69018800 133.60204800 CLA 19.49638000 -131.61568300 133.17950800 CLA 24.38912200 -131.51881300 132.63013400 CLA 29.29477500 -131.39874700 131.94920200 CLA 34.21642400 -131.25443500 131.13077000 CLA 39.15744700 -131.08459700 130.16757100 CLA 44.12159800 -130.88769300 129.05087400 CLA 49.11308000 -130.66189700 127.77032000 CLA 54.13665500 -130.40505600 126.31370400 CLA 59.19775900 -130.11464900 124.66672400 CLA 64.30264200 -129.78772800 122.81266100 CLA 69.45855200 -129.42085000 120.73199200 CLA 74.67394200 -129.00999300 118.40190700 CLA 79.95873600 -128.55045100 115.79571500 CLA 85.32465800 -128.03670200 112.88210200 CLA 90.78564100 -127.46224600 109.62420100 CLA 96.35834900 -126.81939500 105.97841200 CLA 102.06283300 -126.09901100 101.89290600 CLA 107.92338600 -125.29016100 97.30569100 CLA 113.96964400 -124.37968000 92.14209800 CLA 120.23804100 -123.35158400 86.31147700 CLA 126.77374700 -122.18629300 79.70278000 CLA 133.63328500 -120.85957600 72.17859500 CLA 140.88812900 -119.34110800 63.56693800 CLA 148.62973700 -117.59244200 53.64975800 CLA 156.97673300 -115.56411200 42.14652500 CLA 166.08539300 -113.19140700 28.69025100 CLA 176.16536800 -110.38803000 12.79151000 CLA 187.50396000 -107.03629500 -6.21712400 CLA 200.50494000 -102.97145500 -29.26997800 CLA 215.75319900 -97.95558800 -57.71637300 CLA 231.96108600 -91.93003900 -87.66439900 CLA 237.04194200 -86.87084100 -86.87084100 CLA 240.38007900 -81.97254400 -81.97254400 CLA 243.45950400 -77.03617900 -77.03617900 CLA 246.27701400 -72.06735500 -72.06735500 CLA 248.82972800 -67.07159700 -67.07159700 CLA 251.11510000 -62.05433300 -62.05433300 CLA 253.13093700 -57.02090100 -57.02090100 CLA 254.87541300 -51.97654200 -51.97654200 CLA 256.34708200 -46.92640000 -46.92640000 CLA 257.54489300 -41.87552300 -41.87552300 CLA 258.46820200 -36.82885800 -36.82885800 CLA 259.11677800 -31.79125700 -31.79125700 CLA 259.49081700 -26.76747100 -26.76747100 CLA 259.59094200 -21.76215200 -21.76215200 CLA 259.41821000 -16.77985300 -16.77985300 CLA 258.97411000 -11.82502800 -11.82502800 CLA 258.26056300 -6.90202700 -6.90202700 CLA 257.27991400 -2.01510200 -2.01510200 CLA 256.03492600 2.83160000 2.83160000 CLA 254.52877100 7.63403200 7.63403200 CLA 252.76501100 12.38825600 12.38825600 CLA 250.74758900 17.09043500 17.09043500 CLA 248.48080600 21.73684100 21.73684100 CLA 245.96930200 26.32385100 26.32385100 CLA 243.21803600 30.84795100 30.84795100 CLA 240.23226000 35.30573300 35.30573300 CLA 237.01749200 39.69389700 39.69389700 CLA 233.57949800 44.00925100 44.00925100 CLA 229.92425500 48.24870700 48.24870700 CLA 226.05793100 52.40928400 52.40928400 CLA 221.98685600 56.48810300 56.48810300 CLA 217.71749400 60.48238700 60.48238700 CLA 213.25641600 64.38946000 64.38946000 CLA 208.61027600 68.20674000 68.20674000 CLA 203.78578300 71.93174200 71.93174200 CLA 198.78968100 75.56207400 75.56207400 CLA 193.62872100 79.09543300 79.09543300 CLA 188.30964600 82.52960300 82.52960300 CLA 182.83916900 85.86245400 85.86245400 CLA 177.22395400 89.09193600 89.09193600 CLA 171.47060200 92.21608300 92.21608300 CLA 165.58563900 95.23300400 95.23300400 CLA 159.57550100 98.14088700 98.14088700 CLA 153.44653000 100.93799400 100.93799400 CLA 147.20495800 103.62266000 103.62266000 CLA 140.85691200 106.19329300 106.19329300 CLA 134.40839900 108.64837300 108.64837300 CLA 127.86531200 110.98644900 110.98644900 CLA 121.23342700 113.20614300 113.20614300 CLA 114.51840200 115.30614500 115.30614500 CLA 107.72578000 117.28521600 117.28521600 CLA 100.86099500 119.14218500 119.14218500 CLA 93.92937000 120.87595600 120.87595600 CLA 86.93612800 122.48549900 122.48549900 CLA 79.88639400 123.96985800 123.96985800 CLA 72.78520400 125.32814900 125.32814900 CLA 65.63750700 126.55956000 126.55956000 CLA 58.44817700 127.66335300 127.66335300 CLA 51.22201700 128.63886500 128.63886500 CLA 43.96377000 129.48550800 129.48550800 CLA 36.67812000 130.20277000 130.20277000 CLA 29.36970700 130.79021600 130.79021600 CLA 22.04313100 131.24749000 131.24749000 CLA 14.70296100 131.57431400 131.57431400 CLA 7.35374100 131.77048700 131.77048700 CLA The mirror M1 to M10 are again configured as free-form surfaces, for which the free-form surface equation (1) given above applies. The optical design data of the projection optics 21 can be found in the following tables, which in their structure the tables for projection optics 7 to 2 correspond. Table 1 to FIG. 10 embodiment 10 N / A 12:55 wavelength 13.5 nm Feldgröße_x 26.0 mm Feldgröße_y 1.0 mm curvature of field -0.012345 1 / mm cover AS Table 2 to FIG. 10 surface Radius_x [mm] Power_x [1 / mm] Radius_y [mm] Power_y [1 / mm] operating M10 -924.4981198 0.0021492 -841.5674623 0.0023921 REFL M9 1845.8313982 -0.0010835 356.4114777 -0.0056115 REFL M8 -807.7853011 0.0006289 -16794.6817783 0.0004689 REFL M7 -633.7019549 0.0007380 20332.8433550 -0.0004206 REFL M6 -1159.7877847 0.0003528 -7078.0588424 0.0013813 REFL M5 -7911.6202298 0.0000533 -2197.1749958 0.0043148 REFL M4 6252.7176733 -0.0000660 -2753.7274849 0.0035212 REFL M3 1718.6984546 -0.0002678 -10060.7554809 0.0008638 REFL M2 1592.6268445 -0.0002500 2592.5626309 -0.0038746 REFL M1 -2135.9876330 0.0009216 -1377.1202039 0.0014756 REFL Table 3a to Fig. 10 coefficient M10 M9 M8 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX -924.49811980 1845.83139800 -807.78530110 C7 5.32161644e-09 -7.17957299e-07 3.61958396e-07 C9 1.2051462e-08 1.48021766e-06 4.61852728e-08 C10 -4.28738318e-12 3.94779844e-10 1.36275822e-10 C12 -3.49709402e-11 2.67402017e-09 4.92199166e-11 C14 -9.81786584e-12 6.31481582e-09 -4.23949539e-10 C16 -3.40219667e-15 -2.74047503e-12 1.12548598e-12 C18 1.60335869e-14 2.04228406e-14 3.71761249e-13 C20 1.30399612e-14 3.2725238e-11 -2.05971586e-12 C21 -1.15274335e-17 2.35879877e-15 1.09054091e-15 C23 -6.9260806e-17 1.00239611e-14 1.70911423e-15 C25 -7.13524377e-17 5.05529889e-14 -3.62622238e-15 C27 -1.67322747e-17 1.78538542e-13 -7.36849912e-15 C29 -7.92528578e-21 -4.11347975e-18 -2.59696939e-18 C31 1.27834004e-20 -5.83032641e-17 1.25679501e-17 C33 3.27119661e-20 1.71591989e-16 -1.04543394e-17 C35 1.71377495e-20 1.22876874e-15 -3.91086555e-17 C36 -1.89551894e-23 -4.14843428e-22 5.26679107e-21 C38 -1.11996388e-22 1.06656248e-19 2.8502374e-20 C40 -1.96750203e-22 2.08419251e-19 6.3260457e-20 C42 -1.2392523e-22 8.95301505e-19 4.7233819e-21 C44 -2.47458966e-23 8.36809183e-18 -2.27707911e-19 C46 -9.77909864e-27 -1.02394711e-22 1.39450428e-23 C48 5.19824336e-27 -7.95041789e-23 1.68839235e-22 C50 5.59498452e-26 8.75666056e-22 2.79254271e-22 C52 6.43656264e-26 4.60087068e-21 -9.11661464e-23 C54 1.96031627e-26 4.50459082e-20 1.98458883e-22 C55 -1.9734083e-29 2.61667221e-26 -4.54521391e-26 C57 -1.39192995e-28 -1.48955085e-25 1.23387971e-24 C59 -3.49342237e-28 2.18616238e-24 4.57708029e-24 C61 -3.79015472e-28 8.50729665e-24 6.06052772e-24 C63 -1.77868817e-28 2.63725246e-23 -9.61661588e-26 C65 -2.61320106e-29 1.37431086e-22 9.18355997e-24 C67 -1.75320584e-32 1.91491617e-28 -2.00093096e-27 C69 -1.49695509e-32 -5.27938029e-27 2.16982668e-27 C71 6.84912486e-32 -5.29216183e-27 -7.30096104e-27 C73 1.54586906e-31 4.04146338e-26 -4.93769708e-27 C75 1.15783975e-31 2.37812676e-25 -4.16594376e-26 C77 4.14587364e-32 1.20314674e-24 -1.62235584e-25 C78 -5.34426777e-35 4.49836368e-31 6.13330316e-30 C80 -4.27488688e-34 1.29694668e-29 -1.62333428e-29 C82 -1.25436413e-33 3.24280489e-29 -1.68167617e-28 C84 -1.71502766e-33 3.00254831e-29 -4.89454528e-28 C86 -1.25734127e-33 7.46446045e-28 -6.5895393e-28 C88 -5.19929261e-34 5.84363659e-27 -1.5416679e-27 C90 -9.42013117e-35 2.61240017e-26 -3.38007496e-27 C92 1.00872668e-38 -4.95175891e-33 1.78435553e-32 C94 -1.45968234e-39 2.0913161e-33 1.10022934e-32 C96 2.49294655e-38 9.54156933e-32 1.00044858e-30 C98 1.25738947e-37 -7.47916509e-33 1.98972461e-30 C100 1.6844889e-37 7.35199153e-30 -3.47483305e-30 C102 7.66863005e-38 5.82871085e-29 -1.47027148e-29 C104 -1.4887687e-38 2.15570834e-28 -2.0886266e-29 C105 3.84331333e-41 -2.72151554e-36 -1.09100622e-34 C107 4.50330303e-40 -6.8970507e-35 3.91399908e-34 C109 1.60900752e-39 -2.41557224e-34 4.01031765e-33 C111 2.46751199e-39 1.07560857e-33 1.8289791e-32 C113 1.94052198e-39 8.96263507e-33 2.87152163e-32 C115 9.9606188e-40 4.77961552e-32 -4.19223781e-33 C117 4.55475999e-40 2.14647641e-31 -4.42634085e-32 C119 9.96424428e-41 6.08163641e-31 -4.46533131e-32 C121 -6.67748909e-44 0 0 C123 -1.35652075e-43 0 0 C125 1.98636308e-43 0 0 C127 1.25607622e-42 0 0 C129 2.10051386e-42 0 0 C131 1.77289428e-42 0 0 C133 7.94693346e-43 0 0 C135 1.74862061e-43 0 0 C136 -1.77390976e-46 0 0 C138 -2.00142247e-45 0 0 C140 -8.6258998e-45 0 0 C142 -1.91465627e-44 0 0 C144 -2.50271596e-44 0 0 C146 -2.03958823e-44 0 0 C148 -1.04613962e-44 0 0 C150 -3.18867421e-45 0 0 C152 -4.17582475e-46 0 0 Table 3b to FIG. 10 coefficient M7 M6 M5 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX -633.70195490 -1159.78778500 -7911.62023000 C7 -3.6838108e-08 8.9762673e-08 1.29208819e-08 C9 1.66051547e-07 5.4606184e-08 -4.52621083e-08 C10 2.70786958e-11 -4.84436976e-10 -5.84676904e-10 C12 -4.05365907e-10 4.4034394e-11 3.29353371e-11 C14 1.17570885e-09 -8.49494866e-10 3.27657845e-11 C16 5.32058235e-13 -1.22366579e-12 -4.06185258e-13 C18 -2.33907349e-12 3.31495258e-12 -3.05655881e-13 C20 1.03622586e-11 4.74017946e-12 -9.90515078e-14 C21 1.84951658e-17 4.70815441 e-16 6.8177486e-16 C23 1.97362743e-16 -5.63918759e-15 1.78311332e-16 C25 -4.50645748e-14 -2.04438614e-14 1.92769745e-15 C27 1.22197136e-13 -4.46320586e-14 1.11134948e-15 C29 -8.3397015e-19 3.12037967e-18 1.20925734e-18 C31 5.73336291e-17 2.52930984e-17 -2.68755339e-18 C33 -4.26965471e-16 2.57659349e-16 -5.94759876e-18 C35 1.12309508e-15 3.62043368e-16 -4.78247891e-18 C36 -2.54002154e-21 -2.33285817e-21 8.64176325e-21 C38 6.58698589e-22 6.78093367e-21 2.69603122e-21 C40 9.19834216e-19 -6.09316184e-19 1.90190625e-20 C42 -5.20603364e-18 -2.48560476e-18 2.06136053e-20 C44 1.95177251e-17 -3.71987432e-18 1.52178482e-20 C46 5.11031274e-23 -2.36475219e-24 1.40723013e-23 C48 -5.22351362e-22 1.08955249e-21 -1.74886691e-23 C50 1.29955621e-20 6.28062297e-21 -1.31280422e-22 C52 -7.19352591e-20 2.83502526e-20 -1.33189978e-22 C54 3.01583882e-19 4.05968238e-20 -5.11578136e-23 C55 -3.2378259e-26 5.04920803e-26 -9.74226056e-26 C57 2.56114803e-26 -1.66126857e-24 1.25073538e-25 C59 -2.15568526e-23 -1.21962666e-23 3.61644254e-25 C61 7.54597503e-23 -7.85294647e-23 6.17670028e-25 C63 -1.37768633e-21 -2.60819335e-22 3.1972004e-25 C65 -9.91159698e-22 -3.82043453e-22 5.14604952e-26 C67 8.86143266e-29 1.38719494e-27 -4.85096213e-29 C69 2.95926995e-28 1.1409927e-26 -1.52883817e-29 C71 -4.08946521e-25 1.70193798e-25 -2.99192047e-28 C73 1.1764e-24 5.79647838e-25 1.27326956e-27 C75 -1.82271068e-23 1.8185183e-24 2.14215183e-27 C77 -6.0476105e-23 2.47496013e-24 -2.43586456e-28 C78 -1.46974123e-31 -2.48880617e-30 2.2910216e-30 C80 -1.62035317e-29 -3.63910799e-30 -2.10355105e-30 C82 2.64119709e-28 -1.39124488e-28 -3.56165247e-30 C84 -2.75435112e-27 -9.92371827e-28 -1.25073816e-29 C86 6.06493358e-26 -2.9562807e-27 -1.02346615e-29 C88 -1.82794269e-25 -7.99387324e-27 1.25693216e-30 C90 8.10897778e-25 -1.01333935e-26 6.64972771e-30 C92 -5.94852836e-33 -2.20554773e-33 1.22259104e-33 C94 7.23973112e-32 1.10525284e-31 -1.24849687e-32 C96 7.40539289e-30 -4.613537e-32 -3.29652704e-32 C98 4.88216265e-30 4.80483016e-30 -8.41705133e-32 C100 9.65449531e-28 6.23756899e-30 -1.57134898e-31 C102 -1.70876067e-27 2.1445453e-29 -1.2032548e-31 C104 2.67082934e-26 2.28654521e-29 -3.36577402e-32 C105 2.35094421e-36 2.08468354e-35 -1.08251776e-35 C107 3.37747137e-34 -1.04397603e-34 3.142163e-35 C109 7.70896596e-34 2.85346997e-34 8.01180965e-35 C111 6.84579774e-32 -8.80664689e-35 3.89769754e-34 C113 -9.31004972e-32 -9.19882787e-33 7.80016296e-34 C115 5.48180337e-30 -1.39857273e-33 7.27970094e-34 C117 -9.40923091e-30 -2.85191959e-32 3.44660803e-34 C119 1.58250782e-28 -2.04899764e-32 5.28320959e-35 Table 3c to Fig. 10 coefficient M4 M3 M2 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 6252.71767300 1718.69845500 1592.62684400 C7 2.02039657e-07 -7.72442186e-08 -2.81200257e-07 C9 6.26194854e-08 -6.39011454e-08 -4.33420894e-07 C10 -1.17096485e-10 5.38504965e-10 2.16914992e-10 C12 1.65918593e-10 1.54474735e-10 -2.43233271e-10 C14 2.6047855e-11 -5.67012949e-11 1.0908048e-09 C16 1.53352973e-13 -1.28128634e-12 -1.3249687e-12 C18 6.85280998e-14 3.29016521e-13 2.3245033e-12 C20 1.33134745e-14 -7.9135182e-14 -2.74288101e-12 C21 9.63392843e-16 -2.23006179e-16 -3.54173468e-16 C23 -2.56356327e-16 8.08610012e-16 5.15456653e-15 C25 -4.93143601e-16 -1.64061139e-16 -1.06774698e-14 C27 -3.50827102e-17 -8.3638218e-18 5.96789915e-15 C29 -1.32470314e-18 2.06883208e-18 1.70541615e-18 C31 -1.08456401e-18 -3.75046097e-18 -2.42446489e-17 C33 -3.23480928e-19 1.52741866e-18 4.43191025e-17 C35 -3.72075346e-19 1.62584985e-18 -1.05861269e-17 C36 -3.85707039e-21 -2.85425871e-21 1.53834046e-21 C38 7.16357253e-21 4.79674043e-21 -1.1251108e-20 C40 -1.76766744e-21 6.62315222e-22 1.18315789e-19 C42 -5.70159933e-21 -2.6546097e-21 -1.77703731e-19 C44 -3.65158025e-21 1.5355861e-20 1.37862764e-20 C46 -2.99726604e-23 -7.26058549e-23 -2.55922076e-23 C48 -4.17503344e-23 -9.21476496e-23 1.00193833e-22 C50 -4.7884568e-23 -2.35567601e-22 -5.31735424e-22 C52 -6.91516977e-24 -1.35526865e-22 6.79507546e-22 C54 1.98546253e-23 9.61975988e-23 4.01660209e-23 C55 -1.94031018e-26 1.56888015e-25 -1.38213528e-26 C57 -3.42382432e-25 2.2750218e-25 1.79376182e-25 C59 -2.2756817e-25 -1.23549695e-25 -5.94897934e-25 C61 2.01539859e-25 2.29974662e-25 2.27901415e-24 C63 4.95631548e-25 8.59833428e-25 -2.22922414e-24 C65 1.12176727e-25 1.26876311e-24 -7.70058057e-25 C67 9.06942404e-28 9.3079309e-28 3.74223228e-28 C69 1.9957938e-27 4.99157193e-27 -9.62902214e-28 C71 3.12476201e-27 1.58761398e-26 2.15189986e-27 C73 4.54981924e-27 1.53821757e-26 -8.59545995e-27 C75 6.59335485e-28 3.62238546e-27 5.36715829e-27 C77 -1.58015986e-27 -1.19949042e-27 5.14863336e-27 C78 4.37655985e-30 -2.15256015e-30 -6.68041182e-32 C80 8.62343063e-30 -8.27474872e-30 -2.88698633e-30 C82 1.3965552e-29 -1.85964202e-29 2.97808799e-30 C84 1.2610299e-29 -5.63075807e-29 -9.25513518e-30 C86 -4.82567841e-30 -7.58802797e-29 2.1567675e-29 C88 -1.35566233e-29 -6.2816052e-29 -8.2378632e-30 C90 8.35698293e-31 -2.48292667e-29 -1.8363031e-29 C92 -6.20912191e-33 -1.53848466e-33 -2.72722676e-33 C94 -3.03339233e-32 -5.56751434e-32 9.35668771e-33 C96 -4.15846221e-32 -2.81174802e-31 1.01318148e-32 C98 -1.20240425e-31 -5.69729421e-31 4.31201041e-32 C100 -1.23999978e-31 -3.40400557e-31 -2.58821352e-32 C102 1.77507014e-33 -9.97858945e-32 6.91936623e-33 C104 3.83557979e-32 1.09580074e-31 3.45333625e-32 C105 -1.52261212e-35 5.38313447e-37 2.4018539e-36 C107 -7.96360046e-35 8.5583118e-35 1.94949839e-35 C109 -2.50162343e-34 3.84351739e-34 -2.7269109e-35 C111 -2.81541874e-34 1.85492006e-33 -5.57867255e-35 C113 -6.28531061e-34 2.60940268e-33 -8.0628501e-35 C115 2.25293161e-35 2.55655776e-33 6.48059264e-36 C117 7.79107372e-35 1.01920129e-33 -2.46632816e-36 C119 -1.12500845e-34 7.43677377e-34 -2.70846382e-35 Table 3d to Fig. 10 coefficient M1 KY 0.00000000 KX 0.00000000 RX -2135.98763300 C7 -3.62667214e-08 C9 -8.77001096e-09 C10 -7.9878408e-12 C12 3.57622422e-11 C14 5.67666306e-11 C16 -1.00670933e-14 C18 -6.43363507e-14 C20 3.49263438e-14 C21 -1.83622059e-18 C23 1.63146414e-17 C25 2.33281554e-16 C27 -2.13403252e-16 C29 -7.17734463e-22 C31 -7.76916167e-20 C33 -2.45391831e-19 C35 9.06895125e 19 C36 -2.87240432e-24 C38 -5.67479156e-24 C40 2.53075334e-22 C42 2.33441297e-22 C44 -4.90816027e-21 C46 -1.82993123e-26 C48 1.40735408e-25 C50 -1.62994831e-25 C52 4.12295522e-24 C54 2.26175423e-23 C55 6.84620783e-30 C57 -8.9211373e-29 C59 3.99552919e-28 C61 2.87701829e-26 C63 7.90515964e-26 C65 4.93963599e-26 C67 8.37008672e-32 C69 -9.8548077e-31 C71 -7.50758997e-30 C73 -6.72582496e-30 C75 2.5702957e-28 C77 -1.08487883e-27 C78 4.88158898e-36 C80 1.55182242e-33 C82 1.52095525e-32 C84 -1.27781492e-31 C86 -1.81913568e-30 C88 -5.89459163e-30 C90 2.69055495e-30 C92 -4.03243187e-38 C94 3.64827588e-36 C96 3.2629352e-35 C98 1.58289449e-34 C100 -1.41502554e-34 C102 -7.52721979e-33 C104 1.42550505e-32 C105 -9.85463233e-41 C107 -4.7133732e-39 C109 -9.62905307e-38 C111 -4.88592887e-38 C113 5.89605443e-36 C115 4.37586765e-35 C117 1.2944388e-34 C119 -5.79847892e-35 Table 4a to FIG. 10 surface DCX DCY DCZ image plane 0.00000000 0.00000000 0.00000000 M10 0.00000000 0.00000000 805.12545493 AS 0.00000000 121.91685762 283.85220626 M9 0.00000000 161.70815863 113.71871405 M8 -0.00000000 -95.26534725 1237.21684296 M7 -0.00000000 -33.77425023 1447.75579022 M6 -0.00000000 65.18321239 1551.64751609 M5 -0.00000000 416.29245364 1699.16961083 M4 -0.00000000 1004.20719186 1696.34134424 M3 -0.00000000 1452.13094016 1490.08513977 M2 0.00000000 1660.63260708 1219.01552868 M1 0.00000000 1898.51696847 380.25896967 object level -0.00000000 2052.66210418 2142.14593325 Table 4b to Fig. 10 surface TLA [deg] TLB [deg] TLC [deg] image plane -0.00000000 0.00000000 -0.00000000 M10 6.58193819 0.00000000 -0.00000000 AS 33.06787638 180.00000000 0.00000000 M9 193.02365372 0.00000000 -0.00000000 M8 88.30109261 -0.00000000 0.00000000 M7 60.05609350 -0.00000000 -0.00000000 M6 34.59181790 -0.00000000 0.00000000 M5 11.25728686 -0.00000000 -0.00000000 M4 -12.50018064 -0.00000000 -0.00000000 M3 -38.57896098 -0.00000000 -0.00000000 M2 -63.29951574 0.00000000 -0.00000000 M1 185.41707922 0.00000000 -0.00000000 object level 0.00000000 -0.00000000 -0.00000000 Table 5 to FIG. 10 surface Angle of incidence [deg] reflectivity M10 6.54595976 0.66117442 M9 0.00927824 0.66565898 M8 75.28640231 0.80872358 M7 76.47602867 0.82797480 M6 78.19600462 0.85363243 M5 77.82112299 0.84823720 M4 78.09659958 0.85221174 M3 76.69475350 0.83137235 M2 78.51548223 0.85815147 M1 10.19566395 0.65421760 total transmission 0.0849 Table 6 to FIG. 10: Aperture polygon AS in the imaging beam path between M9 and M10 X [mm] Y [mm] Z [mm] Type 0.00000000 131.83589200 131.83589200 CLA -7.35374100 131.77048700 131.77048700 CLA -14.70296100 131.57431400 131.57431400 CLA -22.04313100 131.24749000 131.24749000 CLA -29.36970700 130.79021600 130.79021600 CLA -36.67812000 130.20277000 130.20277000 CLA -43.96377000 129.48550800 129.48550800 CLA -51.22201700 128.63886500 128.63886500 CLA -58.44817700 127.66335300 127.66335300 CLA -65.63750700 126.55956000 126.55956000 CLA -72.78520400 125.32814900 125.32814900 CLA -79.88639400 123.96985800 123.96985800 CLA -86.93612800 122.48549900 122.48549900 CLA -93.92937000 120.87595600 120.87595600 CLA -100.86099500 119.14218500 119.14218500 CLA -107.72578000 117.28521600 117.28521600 CLA -114.51840200 115.30614500 115.30614500 CLA -121.23342700 113.20614300 113.20614300 CLA -127.86531200 110.98644900 110.98644900 CLA -134.40839900 108.64837300 108.64837300 CLA -140.85691200 106.19329300 106.19329300 CLA -147.20495800 103.62266000 103.62266000 CLA -153.44653000 100.93799400 100.93799400 CLA -159.57550100 98.14088700 98.14088700 CLA -165.58563900 95.23300400 95.23300400 CLA -171.47060200 92.21608300 92.21608300 CLA -177.22395400 89.09193600 89.09193600 CLA -182.83916900 85.86245400 85.86245400 CLA -188.30964600 82.52960300 82.52960300 CLA -193.62872100 79.09543300 79.09543300 CLA -198.78968100 75.56207400 75.56207400 CLA -203.78578300 71.93174200 71.93174200 CLA -208.61027600 68.20674000 68.20674000 CLA -213.25641600 64.38946000 64.38946000 CLA -217.71749400 60.48238700 60.48238700 CLA -221.98685600 56.48810300 56.48810300 CLA -226.05793100 52.40928400 52.40928400 CLA -229.92425500 48.24870700 48.24870700 CLA -233.57949800 44.00925100 44.00925100 CLA -237.01749200 39.69389700 39.69389700 CLA -240.23226000 35.30573300 35.30573300 CLA -243.21803600 30.84795100 30.84795100 CLA -245.96930200 26.32385100 26.32385100 CLA -248.48080600 21.73684100 21.73684100 CLA -250.74758900 17.09043500 17.09043500 CLA -252.76501100 12.38825600 12.38825600 CLA -254.52877100 7.63403200 7.63403200 CLA -256.03492600 2.83160000 2.83160000 CLA -257.27991400 -2.01510200 -2.01510200 CLA -258.26056300 -6.90202700 -6.90202700 CLA -258.97411000 -11.82502800 -11.82502800 CLA -259.41821000 -16.77985300 -16.77985300 CLA -259.59094200 -21.76215200 -21.76215200 CLA -259.49081700 -26.76747100 -26.76747100 CLA -259.11677800 -31.79125700 -31.79125700 CLA -258.46820200 -36.82885800 -36.82885800 CLA -257.54489300 -41.87552300 -41.87552300 CLA -256.34708200 -46.92640000 -46.92640000 CLA -254.87541300 -51.97654200 -51.97654200 CLA -253.13093700 -57.02090100 -57.02090100 CLA -251.11510000 -62.05433300 -62.05433300 CLA -248.82972800 -67.07159700 -67.07159700 CLA -246.27701400 -72.06735500 -72.06735500 CLA -243.45950400 -77.03617900 -77.03617900 CLA -240.38007900 -81.97254400 -81.97254400 CLA -237.04194200 -86.87084100 -86.87084100 CLA -231.96108600 -91.93003900 -87.66439900 CLA -215.75319900 -97.95558800 -57.71637300 CLA -200.50494000 -102.97145500 -29.26997800 CLA -187.50396000 -107.03629500 -6.21712400 CLA -176.16536800 -110.38803000 12.79151000 CLA -166.08539300 -113.19140700 28.69025100 CLA -156.97673300 -115.56411200 42.14652500 CLA -148.62973700 -117.59244200 53.64975800 CLA -140.88812900 -119.34110800 63.56693800 CLA -133.63328500 -120.85957600 72.17859500 CLA -126.77374700 -122.18629300 79.70278000 CLA -120.23804100 -123.35158400 86.31147700 CLA -113.96964400 -124.37968000 92.14209800 CLA -107.92338600 -125.29016100 97.30569100 CLA -102.06283300 -126.09901100 101.89290600 CLA -96.35834900 -126.81939500 105.97841200 CLA -90.78564100 -127.46224600 109.62420100 CLA -85.32465800 -128.03670200 112.88210200 CLA -79.95873600 -128.55045100 115.79571500 CLA -74.67394200 -129.00999300 118.40190700 CLA -69.45855200 -129.42085000 120.73199200 CLA -64.30264200 -129.78772800 122.81266100 CLA -59.19775900 -130.11464900 124.66672400 CLA -54.13665500 -130.40505600 126.31370400 CLA -49.11308000 -130.66189700 127.77032000 CLA -44.12159800 -130.88769300 129.05087400 CLA -39.15744700 -131.08459700 130.16757100 CLA -34.21642400 -131.25443500 131.13077000 CLA -29.29477500 -131.39874700 131.94920200 CLA -24.38912200 -131.51881300 132.63013400 CLA -19.49638000 -131.61568300 133.17950800 CLA -14.61370400 -131.69018800 133.60204800 CLA -9.73842500 -131.74296200 133.90134800 CLA -4.86800800 -131.77445100 134.07993100 CLA -0.00000000 -131.78491900 134.13929300 CLA 4.86800800 -131.77445100 134.07993100 CLA 9.73842500 -131.74296200 133.90134800 CLA 14.61370400 -131.69018800 133.60204800 CLA 19.49638000 -131.61568300 133.17950800 CLA 24.38912200 -131.51881300 132.63013400 CLA 29.29477500 -131.39874700 131.94920200 CLA 34.21642400 -131.25443500 131.13077000 CLA 39.15744700 -131.08459700 130.16757100 CLA 44.12159800 -130.88769300 129.05087400 CLA 49.11308000 -130.66189700 127.77032000 CLA 54.13665500 -130.40505600 126.31370400 CLA 59.19775900 -130.11464900 124.66672400 CLA 64.30264200 -129.78772800 122.81266100 CLA 69.45855200 -129.42085000 120.73199200 CLA 74.67394200 -129.00999300 118.40190700 CLA 79.95873600 -128.55045100 115.79571500 CLA 85.32465800 -128.03670200 112.88210200 CLA 90.78564100 -127.46224600 109.62420100 CLA 96.35834900 -126.81939500 105.97841200 CLA 102.06283300 -126.09901100 101.89290600 CLA 107.92338600 -125.29016100 97.30569100 CLA 113.96964400 -124.37968000 92.14209800 CLA 120.23804100 -123.35158400 86.31147700 CLA 126.77374700 -122.18629300 79.70278000 CLA 133.63328500 -120.85957600 72.17859500 CLA 140.88812900 -119.34110800 63.56693800 CLA 148.62973700 -117.59244200 53.64975800 CLA 156.97673300 -115.56411200 42.14652500 CLA 166.08539300 -113.19140700 28.69025100 CLA 176.16536800 -110.38803000 12.79151000 CLA 187.50396000 -107.03629500 -6.21712400 CLA 200.50494000 -102.97145500 -29.26997800 CLA 215.75319900 -97.95558800 -57.71637300 CLA 231.96108600 -91.93003900 -87.66439900 CLA 237.04194200 -86.87084100 -86.87084100 CLA 240.38007900 -81.97254400 -81.97254400 CLA 243.45950400 -77.03617900 -77.03617900 CLA 246.27701400 -72.06735500 -72.06735500 CLA 248.82972800 -67.07159700 -67.07159700 CLA 251.11510000 -62.05433300 -62.05433300 CLA 253.13093700 -57.02090100 -57.02090100 CLA 254.87541300 -51.97654200 -51.97654200 CLA 256.34708200 -46.92640000 -46.92640000 CLA 257.54489300 -41.87552300 -41.87552300 CLA 258.46820200 -36.82885800 -36.82885800 CLA 259.11677800 -31.79125700 -31.79125700 CLA 259.49081700 -26.76747100 -26.76747100 CLA 259.59094200 -21.76215200 -21.76215200 CLA 259.41821000 -16.77985300 -16.77985300 CLA 258.97411000 -11.82502800 -11.82502800 CLA 258.26056300 -6.90202700 -6.90202700 CLA 257.27991400 -2.01510200 -2.01510200 CLA 256.03492600 2.83160000 2.83160000 CLA 254.52877100 7.63403200 7.63403200 CLA 252.76501100 12.38825600 12.38825600 CLA 250.74758900 17.09043500 17.09043500 CLA 248.48080600 21.73684100 21.73684100 CLA 245.96930200 26.32385100 26.32385100 CLA 243.21803600 30.84795100 30.84795100 CLA 240.23226000 35.30573300 35.30573300 CLA 237.01749200 39.69389700 39.69389700 CLA 233.57949800 44.00925100 44.00925100 CLA 229.92425500 48.24870700 48.24870700 CLA 226.05793100 52.40928400 52.40928400 CLA 221.98685600 56.48810300 56.48810300 CLA 217.71749400 60.48238700 60.48238700 CLA 213.25641600 64.38946000 64.38946000 CLA 208.61027600 68.20674000 68.20674000 CLA 203.78578300 71.93174200 71.93174200 CLA 198.78968100 75.56207400 75.56207400 CLA 193.62872100 79.09543300 79.09543300 CLA 188.30964600 82.52960300 82.52960300 CLA 182.83916900 85.86245400 85.86245400 CLA 177.22395400 89.09193600 89.09193600 CLA 171.47060200 92.21608300 92.21608300 CLA 165.58563900 95.23300400 95.23300400 CLA 159.57550100 98.14088700 98.14088700 CLA 153.44653000 100.93799400 100.93799400 CLA 147.20495800 103.62266000 103.62266000 CLA 140.85691200 106.19329300 106.19329300 CLA 134.40839900 108.64837300 108.64837300 CLA 127.86531200 110.98644900 110.98644900 CLA 121.23342700 113.20614300 113.20614300 CLA 114.51840200 115.30614500 115.30614500 CLA 107.72578000 117.28521600 117.28521600 CLA 100.86099500 119.14218500 119.14218500 CLA 93.92937000 120.87595600 120.87595600 CLA 86.93612800 122.48549900 122.48549900 CLA 79.88639400 123.96985800 123.96985800 CLA 72.78520400 125.32814900 125.32814900 CLA 65.63750700 126.55956000 126.55956000 CLA 58.44817700 127.66335300 127.66335300 CLA 51.22201700 128.63886500 128.63886500 CLA 43.96377000 129.48550800 129.48550800 CLA 36.67812000 130.20277000 130.20277000 CLA 29.36970700 130.79021600 130.79021600 CLA 22.04313100 131.24749000 131.24749000 CLA 14.70296100 131.57431400 131.57431400 CLA 7.35374100 131.77048700 131.77048700 CLA

Eine Gesamt-Reflektivität der Projektionsoptik 25 beträgt 8,49 %.A total reflectivity of the projection optics 25 is 8.49%.

Das Bildfeld 8 hat eine x-Erstreckung von zweimal 13,0 mm und eine y-Erstreckung von 1,0 mm. Die Projektionsoptik 25 ist optimiert für eine Betriebswellenlänge des Beleuchtungslichts 3 von 13,5 nm.The image field 8th has a x -Extraction of twice 13.0 mm and one y Extension of 1.0 mm. The projection optics 25 is optimized for an operating wavelength of the illumination light 3 of 13.5 nm.

11 zeigt den Verlauf der Blende AS bei der Projektionsoptik 25. Nachfolgend werden die Unterschiede dieser Blende AS der Projektionsoptik 25 zu derjenigen der Blende AS der Projektionsoptik 20 erläutert. 11 shows the course of the aperture AS in the projection optics 25 , Below are the differences of this aperture AS the projection optics 25 to that of the aperture AS of the projection optics 20 explained.

Zwischen den Blendenabschnitten 21 und 22 einerseits und dem Blendenabschnitt 22 und dem Tragabschnitt 23 andererseits ist die Blende AS der Projektionsoptik 25 jeweils wesentlich stärker abgeknickt als bei der Blende AS der Projektionsoptik 20. Die Abknickwinkel sind bei der Blende AS der Projektionsoptik 25 jeweils so, dass die Abschnitte 21, 22 einerseits und die Abschnitte 22, 23 andererseits spitzwinklig zueinander verlaufen.Between the panel sections 21 and 22 on the one hand and the diaphragm section 22 and the support section 23 on the other hand, the aperture is AS the projection optics 25 in each case much more bent than in the aperture AS the projection optics 20 , The kink angles are at the aperture AS the projection optics 25 each so that the sections 21 . 22 on the one hand and the sections 22 . 23 on the other hand extend at an acute angle to each other.

Der Blendenabschnitt 21 begrenzt die Pupillen-Randkontur der Projektionsoptik 25 über die beiden extremen Randpositionen E(x), E(-x) hinaus, bis etwa zu maximalen Randpositionen R_max(x) und R_max(-x) (vergleiche 4). Ab diesen maximalen Randpositionen R_max(x) und R_max(-x) weicht die Blendenkontur einerseits in negativer z-Richtung und andererseits in positiver y-Richtung dem Abbildungslicht-Teilbündel 3_M10W aus und begrenzt die restliche Pupillen-Randkontur entsprechend der Blende AS der Projektionsoptik 21. Die Blende AS der Projektionsoptik 25 geht nach den Randpositionen R_max(x) und R_max(-x) also in den Stegbereich S der Blendenausführung der Projektionsoptik 20 nach den 7 und 8 über.The aperture section 21 limits the pupil edge contour of the projection optics 25 beyond the two extreme edge positions E (x), E (-x), up to approximately maximum edge positions R _{max (x)} and R _{max (-x)} (see 4 ). From these maximum edge positions R _{max (x)} and R _{max (-x)} deviates the aperture contour on the one hand in the negative z-direction and on the other hand in positive y Direction the picture light sub-beam 3 _M10W and limits the rest of the pupil edge contour according to the aperture AS the projection optics 21 , The aperture AS the projection optics 25 goes to the edge positions R _{max (x)} and R _{max (-x)} So in the bridge area S the aperture design of the projection optics 20 after the 7 and 8th over.

Die Randkonturen der Blenden AS der Projektionsoptiken 20 und 25 haben einen dreidimensionalen Verlauf. Die Randkonturen der Blenden AS der Projektionsoptiken 20 und 25 sind jeweils abschnittsweise plan ausgeführt. Die Blenden AS der Projektionsoptiken 20 und 25 begrenzen die Pupillen-Randkontur 24 in mehr als einer Ebene.The edge contours of the panels AS the projection optics 20 and 25 have a three-dimensional course. The edge contours of the aperture AS of the projection optics 20 and 25 Each of them is executed in sections. The irises AS the projection optics 20 and 25 limit the pupil edge contour 24 in more than one level.

Die 12 zeigt eine Sagittalansicht der Projektionsoptik 25.The 12 shows a sagittal view of the projection optics 25 ,

Anhand der 13 wird nachfolgend eine weitere Ausführung einer Projektionsoptik 26 erläutert, die anstelle der Projektionsoptik 7 bei der Projektionsbelichtungsanlage 1 nach 1 zum Einsatz kommen kann. Komponenten und Funktionen, die vorstehend im Zusammenhang mit den 1 bis 12 bereits erläutert wurden, tragen gegebenenfalls die gleichen Bezugsziffern und werden nicht nochmals im Einzelnen diskutiert.Based on 13 Below is another embodiment of a projection optics 26 explains that instead of the projection optics 7 at the projection exposure machine 1 to 1 can be used. Components and functions discussed above in connection with the 1 to 12 have already been explained, if applicable, have the same reference numbers and will not be discussed again in detail.

Die Spiegel M1 bis M10 sind wiederum als Freiformflächen ausgestaltet, für die die oben angegebene Freiformflächengleichung (1) gilt. Die optischen Designdaten der Projektionsoptik 21 können den nachfolgenden Tabellen entnommen werden, die in ihrem Aufbau den Tabellen zur Projektionsoptik 7 nach 2 entsprechen. Tabelle 1 zu Fig. 13 Ausführungsbeispiel 13 NA 0.55 Wellenlänge 13.5 nm Feldgröße_x 26.0 mm Feldgröße_y 1.0 mm Feldkrümmung -0.012345 1/mm Blende AS Tabelle 2 zu Fig. 13 Oberfläche Radius_x[mm] Power_x[1/mm] Radius_y[mm] Power_y[1/mm] Betriebs- M10 -924.4981198 0.0021492 -841.5674623 0.0023921 REFL M9 1845.8313982 -0.0010835 356.4114777 -0.0056115 REFL M8 -807.7853011 0.0006289 -16794.6817783 0.0004689 REFL M7 -633.7019549 0.0007380 20332.8433550 -0.0004206 REFL M6 -1159.7877847 0.0003528 -7078.0588424 0.0013813 REFL M5 -7911.6202298 0.0000533 -2197.1749958 0.0043148 REFL M4 6252.7176733 -0.0000660 -2753.7274849 0.0035212 REFL M3 1718.6984546 -0.0002678 -10060.7554809 0.0008638 REFL M2 1592.6268445 -0.0002500 2592.5626309 -0.0038746 REFL M1 -2135.9876330 0.0009216 -1377.1202039 0.0014756 REFL Tabelle 3a zu Fig. 13 Koeffizient M10 M9 M8 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX -924.49811980 1845.83139800 -807.78530110 C7 5.32161644e-09 -7.17957299e-07 3.61958396e-07 C9 1.2051462e-08 1.48021766e-06 4.61852728e-08 C10 -4.28738318e-12 3.94779844e-10 1.36275822e-10 C12 -3.49709402e-11 2.67402017e-09 4.92199166e-11 C14 -9.81786584e-12 6.31481582e-09 -4.23949539e-10 C16 -3.40219667e-15 -2.74047503e-12 1.12548598e-12 C18 1.60335869e-14 2.04228406e-14 3.71761249e-13 C20 1.30399612e-14 3.2725238e-11 -2.05971586e-12 C21 -1.15274335e-17 2.35879877e-15 1.09054091e-15 C23 -6.9260806e-17 1.00239611e-14 1.70911423e-15 C25 -7.13524377e-17 5.05529889e-14 -3.62622238e-15 C27 -1.67322747e-17 1.78538542e-13 -7.36849912e-15 C29 -7.92528578e-21 -4.11347975e-18 -2.59696939e-18 C31 1.27834004e-20 -5.83032641e-17 1.25679501e-17 C33 3.27119661e-20 1.71591989e-16 -1.04543394e-17 C35 1.71377495e-20 1.22876874e-15 -3.91086555e-17 C36 -1.89551894e-23 -4.14843428e-22 5.26679107e-21 C38 -1.11996388e-22 1.06656248e-19 2.8502374e-20 C40 -1.96750203e-22 2.08419251e-19 6.3260457e-20 C42 -1.2392523e-22 8.95301505e-19 4.7233819e-21 C44 -2.47458966e-23 8.36809183e-18 -2.27707911e-19 C46 -9.77909864e-27 -1.02394711e-22 1.39450428e-23 C48 5.19824336e-27 -7.95041789e-23 1.68839235e-22 C50 5.59498452e-26 8.75666056e-22 2.79254271e-22 C52 6.43656264e-26 4.60087068e-21 -9.11661464e-23 C54 1.96031627e-26 4.50459082e-20 1.98458883e-22 C55 -1.9734083e-29 2.61667221e-26 -4.54521391e-26 C57 -1.39192995e-28 -1.48955085e-25 1.23387971e-24 C59 -3.49342237e-28 2.18616238e-24 4.57708029e-24 C61 -3.79015472e-28 8.50729665e-24 6.06052772e-24 C63 -1.77868817e-28 2.63725246e-23 -9.61661588e-26 C65 -2.61320106e-29 1.37431086e-22 9.18355997e-24 C67 -1.75320584e-32 1.91491617e-28 -2.00093096e-27 C69 -1.49695509e-32 -5.27938029e-27 2.16982668e-27 C71 6.84912486e-32 -5.29216183e-27 -7.30096104e-27 C73 1.54586906e-31 4.04146338e-26 -4.93769708e-27 C75 1.15783975e-31 2.37812676e-25 -4.16594376e-26 C77 4.14587364e-32 1.20314674e-24 -1.62235584e-25 C78 -5.34426777e-35 4.49836368e-31 6.13330316e-30 C80 -4.27488688e-34 1.29694668e-29 -1.62333428e-29 C82 -1.25436413e-33 3.24280489e-29 -1.68167617e-28 C84 -1.71502766e-33 3.00254831e-29 -4.89454528e-28 C86 -1.25734127e-33 7.46446045e-28 -6.5895393e-28 C88 -5.19929261e-34 5.84363659e-27 -1.5416679e-27 C90 -9.42013117e-35 2.61240017e-26 -3.38007496e-27 C92 1.00872668e-38 -4.95175891e-33 1.78435553e-32 C94 -1.45968234e-39 2.0913161e-33 1.10022934e-32 C96 2.49294655e-38 9.54156933e-32 1.00044858e-30 C98 1.25738947e-37 -7.47916509e-33 1.98972461e-30 C100 1.6844889e-37 7.35199153e-30 -3.47483305e-30 C102 7.66863005e-38 5.82871085e-29 -1.47027148e-29 C104 -1.4887687e-38 2.15570834e-28 -2.0886266e-29 C105 3.84331333e-41 -2.72151554e-36 -1.09100622e-34 C107 4.50330303e-40 -6.8970507e-35 3.91399908e-34 C109 1.60900752e-39 -2.41557224e-34 4.01031765e-33 C111 2.46751199e-39 1.07560857e-33 1.8289791e-32 C113 1.94052198e-39 8.96263507e-33 2.87152163e-32 C115 9.9606188e-40 4.77961552e-32 -4.19223781e-33 C117 4.55475999e-40 2.14647641e-31 -4.42634085e-32 C119 9.96424428e-41 6.08163641e-31 -4.46533131e-32 C121 -6.67748909e-44 0 0 C123 -1.35652075e-43 0 0 C125 1.98636308e-43 0 0 C127 1.25607622e-42 0 0 C129 2.10051386e-42 0 0 C131 1.77289428e-42 0 0 C133 7.94693346e-43 0 0 C135 1.74862061e-43 0 0 C136 -1.77390976e-46 0 0 C138 -2.00142247e-45 0 0 C140 -8.6258998e-45 0 0 C142 -1.91465627e-44 0 0 C144 -2.50271596e-44 0 0 C146 -2.03958823e-44 0 0 C148 -1.04613962e-44 0 0 C150 -3.18867421e-45 0 0 C152 -4.17582475e-46 0 0 Tabelle 3b zu Fig. 13 Koeffizient M7 M6 M5 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX -633.70195490 -1159.78778500 -7911.62023000 C7 -3.6838108e-08 8.9762673e-08 1.29208819e-08 C9 1.66051547e-07 5.4606184e-08 -4.52621083e-08 C10 2.70786958e-11 -4.84436976e-10 -5.84676904e-10 C12 -4.05365907e-10 4.4034394e-11 3.29353371e-11 C14 1.17570885e-09 -8.49494866e-10 3.27657845e-11 C16 5.32058235e-13 -1,22366579e-12 -4.06185258e-13 C18 -2.33907349e-12 3.31495258e-12 -3.05655881e-13 C20 1.03622586e-11 4.74017946e-12 -9.90515078e-14 C21 1.84951658e-17 4.70815441e-16 6.8177486e-16 C23 1.97362743e-16 -5.63918759e-15 1.78311332e-16 C25 -4.50645748e-14 -2.04438614e-14 1.92769745e-15 C27 1.22197136e-13 -4.46320586e-14 1.11134948e-15 C29 -8.3397015e-19 3.12037967e-18 1.20925734e-18 C31 5.73336291e-17 2.52930984e-17 -2.68755339e-18 C33 -4.26965471e-16 2.57659349e-16 -5.94759876e-18 C35 1.12309508e-15 3.62043368e-16 -4.78247891e-18 C36 -2.54002154e-21 -2.33285817e-21 8.64176325e-21 C38 6.58698589e-22 6.78093367e-21 2.69603122e-21 C40 9.19834216e-19 -6.09316184e-19 1.90190625e-20 C42 -5.20603364e-18 -2.48560476e-18 2.06136053e-20 C44 1.95177251e-17 -3.71987432e-18 1.52178482e-20 C46 5.11031274e-23 -2.36475219e-24 1.40723013e-23 C48 -5.22351362e-22 1.08955249e-21 -1.74886691e-23 C50 1.29955621e-20 6.28062297e-21 -1.31280422e-22 C52 -7.19352591e-20 2.83502526e-20 -1.33189978e-22 C54 3.01583882e-19 4.05968238e-20 -5.11578136e-23 C55 -3.2378259e-26 5.04920803e-26 -9.74226056e-26 C57 2.56114803e-26 -1.66126857e-24 1.25073538e-25 C59 -2.15568526e-23 -1.21962666e-23 3.61644254e-25 C61 7.54597503e-23 -7.85294647e-23 6.17670028e-25 C63 -1.37768633e-21 -2.60819335e-22 3.1972004e-25 C65 -9.91159698e-22 -3.82043453e-22 5.14604952e-26 C67 8.86143266e-29 1.38719494e-27 -4.85096213e-29 C69 2.95926995e-28 1.1409927e-26 -1.52883817e-29 C71 -4.08946521e-25 1.70193798e-25 -2.99192047e-28 C73 1.1764e-24 5.79647838e-25 1.27326956e-27 C75 -1.82271068e-23 1.8185183e-24 2.14215183e-27 C77 -6.0476105e-23 2.47496013e-24 -2.43586456e-28 C78 -1.46974123e-31 -2.48880617e-30 2.2910216e-30 C80 -1.62035317e-29 -3.63910799e-30 -2.10355105e-30 C82 2.64119709e-28 -1.39124488e-28 -3.56165247e-30 C84 -2.75435112e-27 -9.92371827e-28 -1.25073816e-29 C86 6.06493358e-26 -2.9562807e-27 -1.02346615e-29 C88 -1.82794269e-25 -7.99387324e-27 1.25693216e-30 C90 8.10897778e-25 -1.01333935e-26 6.64972771e-30 C92 -5.94852836e-33 -2.20554773e-33 1.22259104e-33 C94 7.23973112e-32 1.10525284e-31 -1.24849687e-32 C96 7.40539289e-30 -4.613537e-32 -3.29652704e-32 C98 4.88216265e-30 4.80483016e-30 -8.41705133e-32 C100 9.65449531e-28 6.23756899e-30 -1.57134898e-31 C102 -1.70876067e-27 2.1445453e-29 -1.2032548e-31 C104 2.67082934e-26 2.28654521e-29 -3.36577402e-32 C105 2.35094421e-36 2.08468354e-35 -1.08251776e-35 C107 3.37747137e-34 -1.04397603e-34 3.142163e-35 C109 7.70896596e-34 2.85346997e-34 8.01180965e-35 C111 6.84579774e-32 -8.80664689e-35 3.89769754e-34 C113 -9.31004972e-32 -9.19882787e-33 7.80016296e-34 C115 5.48180337e-30 -1.39857273e-33 7.27970094e-34 C117 -9.40923091e-30 -2.85191959e-32 3.44660803e-34 C119 1.58250782e-28 -2.04899764e-32 5.28320959e-35 Tabelle 3c zu Fig. 13 Koeffizient M4 M3 M2 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 6252.71767300 1718.69845500 1592.62684400 C7 2.02039657e-07 -7.72442186e-08 -2.81200257e-07 C9 6.26194854e-08 -6.39011454e-08 -4.33420894e-07 C10 -1.17096485e-10 5.38504965e-10 2.16914992e-10 C12 1.65918593e-10 1.54474735e-10 -2.43233271e-10 C14 2.6047855e-11 -5.67012949e-11 1.0908048e-09 C16 1.53352973e-13 -1.28128634e-12 -1.3249687e-12 C18 6.85280998e-14 3.29016521e-13 2.3245033e-12 C20 1.33134745e-14 -7.9135182e-14 -2.74288101e-12 C21 9.63392843e-16 -2.23006179e-16 -3.54173468e-16 C23 -2.56356327e-16 8.08610012e-16 5.15456653e-15 C25 -4.93143601e-16 -1.64061139e-16 -1.06774698e-14 C27 -3.50827102e-17 -8.3638218e-18 5.96789915e-15 C29 -1.32470314e-18 2.06883208e-18 1.70541615e-18 C31 -1.08456401e-18 -3.75046097e-18 -2.42446489e-17 C33 -3.23480928e-19 1.52741866e-18 4.43191025e-17 C35 -3.72075346e-19 1.62584985e-18 -1.05861269e-17 C36 -3.85707039e-21 -2.85425871e-21 1.53834046e-21 C38 7.16357253e-21 4.79674043e-21 -1.1251108e-20 C40 -1.76766744e-21 6.62315222e-22 1.18315789e-19 C42 -5.70159933e-21 -2.6546097e-21 -1.77703731e-19 C44 -3.65158025e-21 1.5355861e-20 1.37862764e-20 C46 -2.99726604e-23 -7.26058549e-23 -2.55922076e-23 C48 -4.17503344e-23 -9.21476496e-23 1.00193833e-22 C50 -4.7884568e-23 -2.35567601e-22 -5.31735424e-22 C52 -6.91516977e-24 -1.35526865e-22 6.79507546e-22 C54 1.98546253e-23 9.61975988e-23 4.01660209e-23 C55 -1.94031018e-26 1.56888015e-25 -1.38213528e-26 C57 -3.42382432e-25 2.2750218e-25 1.79376182e-25 C59 -2.2756817e-25 -1.23549695e-25 -5.94897934e-25 C61 2.01539859e-25 2.29974662e-25 2.27901415e-24 C63 4.95631548e-25 8.59833428e-25 -2.22922414e-24 C65 1.12176727e-25 1.26876311e-24 -7.70058057e-25 C67 9.06942404e-28 9.3079309e-28 3.74223228e-28 C69 1.9957938e-27 4.99157193e-27 -9.62902214e-28 C71 3.12476201e-27 1.58761398e-26 2.15189986e-27 C73 4.54981924e-27 1.53821757e-26 -8.59545995e-27 C75 6.59335485e-28 3.62238546e-27 5.36715829e-27 C77 -1.58015986e-27 -1.19949042e-27 5.14863336e-27 C78 4.37655985e-30 -2.15256015e-30 -6.68041182e-32 C80 8.62343063e-30 -8.27474872e-30 -2.88698633e-30 C82 1.3965552e-29 -1.85964202e-29 2.97808799e-30 C84 1.2610299e-29 -5.63075807e-29 -9.25513518e-30 C86 -4.82567841e-30 -7.58802797e-29 2.1567675e-29 C88 -1.35566233e-29 -6.2816052e-29 -8.2378632e-30 C90 8.35698293e-31 -2.48292667e-29 -1.8363031e-29 C92 -6.20912191e-33 -1.53848466e-33 -2.72722676e-33 C94 -3.03339233e-32 -5.56751434e-32 9.35668771e-33 C96 -4.15846221e-32 -2.81174802e-31 1.01318148e-32 C98 -1.20240425e-31 -5.69729421e-31 4.31201041e-32 C100 -1.23999978e-31 -3.40400557e-31 -2.58821352e-32 C102 1.77507014e-33 -9.97858945e-32 6.91936623e-33 C104 3.83557979e-32 1.09580074e-31 3.45333625e-32 C105 -1.52261212e-35 5.38313447e-37 2.4018539e-36 C107 -7.96360046e-35 8.5583118e-35 1.94949839e-35 C109 -2.50162343e-34 3.84351739e-34 -2.7269109e-35 C111 -2.81541874e-34 1.85492006e-33 -5.57867255e-35 C113 -6.28531061e-34 2.60940268e-33 -8.0628501e-35 C115 2.25293161e-35 2.55655776e-33 6.48059264e-36 C117 7.79107372e-35 1.01920129e-33 -2.46632816e-36 C119 -1.12500845e-34 7.43677377e-34 -2.70846382e-35 Tabelle 3d zu Fig. 13 Koeffizient M1 KY 0.00000000 KX 0.00000000 RX -2135.98763300 C7 -3.62667214e-08 C9 -8.77001096e-09 C10 -7.9878408e-12 C12 3.57622422e-11 C14 5.67666306e-11 C16 -1.00670933e-14 C18 -6.43363507e-14 C20 3.49263438e-14 C21 -1.83622059e-18 C23 1.63146414e-17 C25 2.33281554e-16 C27 -2.13403252e-16 C29 -7.17734463e-22 C31 -7.76916167e-20 C33 -2.45391831e-19 C35 9.06895125e-19 C36 -2.87240432e-24 C38 -5.67479156e-24 C40 2.53075334e-22 C42 2.33441297e-22 C44 -4.90816027e-21 C46 -1.82993123e-26 C48 1.40735408e-25 C50 -1.62994831e-25 C52 4.12295522e-24 C54 2.26175423e-23 C55 6.84620783e-30 C57 -8.9211373e-29 C59 3.99552919e-28 C61 2.87701829e-26 C63 7.90515964e-26 C65 4.93963599e-26 C67 8.37008672e-32 C69 -9.8548077e-31 C71 -7.50758997e-30 C73 -6.72582496e-30 C75 2.5702957e-28 C77 -1.08487883e-27 C78 4.88158898e-36 C80 1.55182242e-33 C82 1.52095525e-32 C84 -1.27781492e-31 C86 -1.81913568e-30 C88 -5.89459163e-30 C90 2.69055495e-30 C92 -4.03243187e-38 C94 3.64827588e-36 C96 3.2629352e-35 C98 1.58289449e-34 C100 -1.41502554e-34 C102 -7.52721979e-33 C104 1.42550505e-32 C105 -9.85463233e-41 C107 -4.7133732e-39 C109 -9.62905307e-38 C111 -4.88592887e-38 C113 5.89605443e-36 C115 4.37586765e-35 C117 1.2944388e-34 C119 -5.79847892e-35 Tabelle 4a zu Fig. 13 Oberfläche DCX DCY DCZ Bildebene 0.00000000 0.00000000 0.00000000 M10 0.00000000 0.00000000 805.12545493 AS 0.00000000 229.02635233 308.90327698 M9 0.00000000 161.70815863 113.71871405 M8 0.00000000 -95.26534725 1237.21684296 M7 0.00000000 -33.77425023 1447.75579022 M6 0.00000000 65.18321239 1551.64751609 M5 -0.00000000 416.29245364 1699.16961083 M4 -0.00000000 1004.20719186 1696.34134424 M3 -0.00000000 1452.13094016 1490.08513977 M2 0.00000000 1660.63260708 1219.01552868 M1 0.00000000 1898.51696847 380.25896967 Objektebene 0.00000000 2052.66210418 2142.14593325 Tabelle 4b zu Fig. 13 Oberfläche TLA[deg] TLB[deg] TLC[deg] Bildebene -0.00000000 0.00000000 -0.00000000 M10 6.58193819 0.00000000 -0.00000000 AS 55.06787638 180.00000000 0.00000000 M9 193.02365372 0.00000000 -0.00000000 M8 88.30109261 0.00000000 -0.00000000 M7 60.05609350 0.00000000 -0.00000000 M6 34.59181790 0.00000000 0.00000000 M5 11.25728686 -0.00000000 -0.00000000 M4 -12.50018064 -0.00000000 -0.00000000 M3 -38.57896098 -0.00000000 -0.00000000 M2 -63.29951574 0.00000000 -0.00000000 M1 185.41707922 0.00000000 -0.00000000 Objektebene 0.00000000 -0.00000000 -0.00000000 Tabelle 5 zu Fig. 13 Oberfläche Einfallswinkel[deg] Reflektivität M10 6.54595976 0.66117442 M9 0.00927824 0.66565898 M8 75.28640231 0.80872358 M7 76.47602867 0.82797480 M6 78.19600462 0.85363243 M5 77.82112299 0.84823720 M4 78.09659958 0.85221174 M3 76.69475350 0.83137235 M2 78.51548223 0.85815147 M1 10.19566395 0.65421760 Gesamttransmission 0.0849 Tabelle 6 zu Fig. 13: Blenden-Polygon AS im Abbildungsstrahlengang zwischen M9 und M10 X[mm] Y[mm] Z[mm] Typ 0.00000000 353.51387100 0.00000000 CLA -12.96238300 352.78667200 0.00000000 CLA -25.85530400 350.61342700 0.00000000 CLA -38.61060800 347.01896200 0.00000000 CLA -51.16270500 342.04388900 0.00000000 CLA -63.44972800 335.74349800 0.00000000 CLA -75.41455000 328.18629200 0.00000000 CLA -87.00562600 319.45221900 0.00000000 CLA -98.17764100 309.63070300 0.00000000 CLA -108.89195400 298.81854400 0.00000000 CLA -119.11683100 287.11777800 0.00000000 CLA -128.82747700 274.63358000 0.00000000 CLA -138.00590000 261.47227200 0.00000000 CLA -146.64060400 247.73949500 0.00000000 CLA -154.72616300 233.53858800 0.00000000 CLA -162.26269100 218.96920100 0.00000000 CLA -169.25524900 204.12615200 0.00000000 CLA -175.71320100 189.09853000 0.00000000 CLA -181.64955800 173.96904400 0.00000000 CLA -187.08033200 158.81358700 0.00000000 CLA -192.02390600 143.70100000 0.00000000 CLA -196.50044400 128.69301600 0.00000000 CLA -200.53134900 113.84434200 0.00000000 CLA -204.13877400 99.20286700 0.00000000 CLA -207.34519000 84.80996300 0.00000000 CLA -210.17301200 70.70085100 0.00000000 CLA -212.64428600 56.90502000 0.00000000 CLA -214.78042700 43.44667100 0.00000000 CLA -216.60201000 30.34518200 0.00000000 CLA -218.12860900 17.61556600 0.00000000 CLA -219.37867800 5.26892700 0.00000000 CLA -220.36947300 -6.68710700 0.00000000 CLA -221.11699800 -18.24796700 0.00000000 CLA -221.63599400 -29.41175400 0.00000000 CLA -221.93993900 -40.17888700 0.00000000 CLA -222.04107500 -50.55176400 0.00000000 CLA -221.95044900 -60.53447000 0.00000000 CLA -221.67796800 -70.13250500 0.00000000 CLA -221.23246600 -79.35254200 0.00000000 CLA -220.62177400 -88.20221800 0.00000000 CLA -219.85279900 -96.68994000 0.00000000 CLA -218.93160700 -104.82472400 0.00000000 CLA -217.86350300 -112.61605400 0.00000000 CLA -216.65311600 -120.07375400 0.00000000 CLA -215.30448300 -127.20788700 0.00000000 CLA -213.82112600 -134.02866400 0.00000000 CLA -212.20613200 -140.54636700 0.00000000 CLA -210.46222800 -146.77128700 0.00000000 CLA -208.59184900 -152.71367000 0.00000000 CLA -206.59720300 -158.38367400 0.00000000 CLA -204.48033700 -163.79132900 0.00000000 CLA -202.24318600 -168.94651100 0.00000000 CLA -199.88762700 -173.85891600 0.00000000 CLA -197.41552400 -178.53803800 0.00000000 CLA -194.82876600 -182.99315700 0.00000000 CLA -192.12929800 -187.23332000 0.00000000 CLA -189.31915400 -191.26733600 0.00000000 CLA -186.40047400 -195.10376400 0.00000000 CLA -183.37552100 -198.75090800 0.00000000 CLA -180.24669500 -202.21681200 0.00000000 CLA -177.01653700 -205.50925400 0.00000000 CLA -173.68773300 -208.63574800 0.00000000 CLA -170.26310600 -211.60353800 0.00000000 CLA -166.74561700 -214.41960100 0.00000000 CLA -163.13835200 -217.09064600 0.00000000 CLA -159.44450600 -219.62311500 0.00000000 CLA -155.66737600 -222.02318800 0.00000000 CLA -151.81033800 -224.29678000 0.00000000 CLA -147.87683200 -226.44955100 0.00000000 CLA -143.87034100 -228.48690600 0.00000000 CLA -139.79437800 -230.41400200 0.00000000 CLA -135.65245800 -232.23575100 0.00000000 CLA -131.44809000 -233.95682800 0.00000000 CLA -127.18474800 -235.58167300 0.00000000 CLA -122.86586500 -237.11450300 0.00000000 CLA -118.49481100 -238.55931300 0.00000000 CLA -114.07488000 -239.91988600 0.00000000 CLA -109.60928000 -241.19979600 0.00000000 CLA -105.10112300 -242.40242000 0.00000000 CLA -100.55341100 -243.53093800 0.00000000 CLA -95.96903600 -244.58834400 0.00000000 CLA -91.35076900 -245.57745200 0.00000000 CLA -86.70126100 -246.50089900 0.00000000 CLA -82.02303800 -247.36115400 0.00000000 CLA -77.31850200 -248.16052200 0.00000000 CLA -72.58993100 -248.90114800 0.00000000 CLA -67.83948100 -249.58502600 0.00000000 CLA -63.06919300 -250.21399800 0.00000000 CLA -58.28099200 -250.78976400 0.00000000 CLA -53.47669600 -251.31388100 0.00000000 CLA -48.65802100 -251.78777000 0.00000000 CLA -43.82658700 -252.21271800 0.00000000 CLA -38.98392900 -252.58987900 0.00000000 CLA -34.13149800 -252.92028200 0.00000000 CLA -29.27067600 -253.20482600 0.00000000 CLA -24.40278100 -253.44429000 0.00000000 CLA -19.52907500 -253.63932700 0.00000000 CLA -14.65077700 -253.79047200 0.00000000 CLA -9.76906600 -253.89813800 0.00000000 CLA -4.88509600 -253.96261900 0.00000000 CLA -0.00000000 -253.98409300 0.00000000 CLA 4.88509600 -253.96261900 0.00000000 CLA 9.76906600 -253.89813800 0.00000000 CLA 14.65077700 -253.79047200 0.00000000 CLA 19.52907500 -253.63932700 0.00000000 CLA 24.40278100 -253.44429000 0.00000000 CLA 29.27067600 -253.20482600 0.00000000 CLA 34.13149800 -252.92028200 0.00000000 CLA 38.98392900 -252.58987900 0.00000000 CLA 43.82658700 -252.21271800 0.00000000 CLA 48.65802100 -251.78777000 0.00000000 CLA 53.47669600 -251.31388100 0.00000000 CLA 58.28099200 -250.78976400 0.00000000 CLA 63.06919300 -250.21399800 0.00000000 CLA 67.83948100 -249.58502600 0.00000000 CLA 72.58993100 -248.90114800 0.00000000 CLA 77.31850200 -248.16052200 0.00000000 CLA 82.02303800 -247.36115400 0.00000000 CLA 86.70126100 -246.50089900 0.00000000 CLA 91.35076900 -245.57745200 0.00000000 CLA 95.96903600 -244.58834400 0.00000000 CLA 100.55341100 -243.53093800 0.00000000 CLA 105.10112300 -242.40242000 0.00000000 CLA 109.60928000 -241.19979600 0.00000000 CLA 114.07488000 -239.91988600 0.00000000 CLA 118.49481100 -238.55931300 0.00000000 CLA 122.86586500 -237.11450300 0.00000000 CLA 127.18474800 -235.58167300 0.00000000 CLA 131.44809000 -233.95682800 0.00000000 CLA 135.65245800 -232.23575100 0.00000000 CLA 139.79437800 -230.41400200 0.00000000 CLA 143.87034100 -228.48690600 0.00000000 CLA 147.87683200 -226.44955100 0.00000000 CLA 151.81033800 -224.29678000 0.00000000 CLA 155.66737600 -222.02318800 0.00000000 CLA 159.44450600 -219.62311500 0.00000000 CLA 163.13835200 -217.09064600 0.00000000 CLA 166.74561700 -214.41960100 0.00000000 CLA 170.26310600 -211.60353800 0.00000000 CLA 173.68773300 -208.63574800 0.00000000 CLA 177.01653700 -205.50925400 0.00000000 CLA 180.24669500 -202.21681200 0.00000000 CLA 183.37552100 -198.75090800 0.00000000 CLA 186.40047400 -195.10376400 0.00000000 CLA 189.31915400 -191.26733600 0.00000000 CLA 192.12929800 -187.23332000 0.00000000 CLA 194.82876600 -182.99315700 0.00000000 CLA 197.41552400 -178.53803800 0.00000000 CLA 199.88762700 -173.85891600 0.00000000 CLA 202.24318600 -168.94651100 0.00000000 CLA 204.48033700 -163.79132900 0.00000000 CLA 206.59720300 -158.38367400 0.00000000 CLA 208.59184900 -152.71367000 0.00000000 CLA 210.46222800 -146.77128700 0.00000000 CLA 212.20613200 -140.54636700 0.00000000 CLA 213.82112600 -134.02866400 0.00000000 CLA 215.30448300 -127.20788700 0.00000000 CLA 216.65311600 -120.07375400 0.00000000 CLA 217.86350300 -112.61605400 0.00000000 CLA 218.93160700 -104.82472400 0.00000000 CLA 219.85279900 -96.68994000 0.00000000 CLA 220.62177400 -88.20221800 0.00000000 CLA 221.23246600 -79.35254200 0.00000000 CLA 221.67796800 -70.13250500 0.00000000 CLA 221.95044900 -60.53447000 0.00000000 CLA 222.04107500 -50.55176400 0.00000000 CLA 221.93993900 -40.17888700 0.00000000 CLA 221.63599400 -29.41175400 0.00000000 CLA 221.11699800 -18.24796700 0.00000000 CLA 220.36947300 -6.68710700 0.00000000 CLA 219.37867800 5.26892700 0.00000000 CLA 218.12860900 17.61556600 0.00000000 CLA 216.60201000 30.34518200 0.00000000 CLA 214.78042700 43.44667100 0.00000000 CLA 212.64428600 56.90502000 0.00000000 CLA 210.17301200 70.70085100 0.00000000 CLA 207.34519000 84.80996300 0.00000000 CLA 204.13877400 99.20286700 0.00000000 CLA 200.53134900 113.84434200 0.00000000 CLA 196.50044400 128.69301600 0.00000000 CLA 192.02390600 143.70100000 0.00000000 CLA 187.08033200 158.81358700 0.00000000 CLA 181.64955800 173.96904400 0.00000000 CLA 175.71320100 189.09853000 0.00000000 CLA 169.25524900 204.12615200 0.00000000 CLA 162.26269100 218.96920100 0.00000000 CLA 154.72616300 233.53858800 0.00000000 CLA 146.64060400 247.73949500 0.00000000 CLA 138.00590000 261.47227200 0.00000000 CLA 128.82747700 274.63358000 0.00000000 CLA 119.11683100 287.11777800 0.00000000 CLA 108.89195400 298.81854400 0.00000000 CLA 98.17764100 309.63070300 0.00000000 CLA 87.00562600 319.45221900 0.00000000 CLA 75.41455000 328.18629200 0.00000000 CLA 63.44972800 335.74349800 0.00000000 CLA 51.16270500 342.04388900 0.00000000 CLA 38.61060800 347.01896200 0.00000000 CLA 25.85530400 350.61342700 0.00000000 CLA 12.96238300 352.78667200 0.00000000 CLA The mirror M1 to M10 are again configured as free-form surfaces, for which the free-form surface equation (1) given above applies. The optical design data of the projection optics 21 can be found in the following tables, which in their structure the tables for projection optics 7 to 2 correspond. Table 1 to FIG. 13 embodiment 13 N / A 12:55 wavelength 13.5 nm Feldgröße_x 26.0 mm Feldgröße_y 1.0 mm curvature of field -0.012345 1 / mm cover AS Table 2 to FIG. 13 surface Radius_x [mm] Power_x [1 / mm] Radius_y [mm] Power_y [1 / mm] operating M10 -924.4981198 0.0021492 -841.5674623 0.0023921 REFL M9 1845.8313982 -0.0010835 356.4114777 -0.0056115 REFL M8 -807.7853011 0.0006289 -16794.6817783 0.0004689 REFL M7 -633.7019549 0.0007380 20332.8433550 -0.0004206 REFL M6 -1159.7877847 0.0003528 -7078.0588424 0.0013813 REFL M5 -7911.6202298 0.0000533 -2197.1749958 0.0043148 REFL M4 6252.7176733 -0.0000660 -2753.7274849 0.0035212 REFL M3 1718.6984546 -0.0002678 -10060.7554809 0.0008638 REFL M2 1592.6268445 -0.0002500 2592.5626309 -0.0038746 REFL M1 -2135.9876330 0.0009216 -1377.1202039 0.0014756 REFL Table 3a to FIG. 13 coefficient M10 M9 M8 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX -924.49811980 1845.83139800 -807.78530110 C7 5.32161644e-09 -7.17957299e-07 3.61958396e-07 C9 1.2051462e-08 1.48021766e-06 4.61852728e-08 C10 -4.28738318e-12 3.94779844e-10 1.36275822e-10 C12 -3.49709402e-11 2.67402017e-09 4.92199166e-11 C14 -9.81786584e-12 6.31481582e-09 -4.23949539e-10 C16 -3.40219667e-15 -2.74047503e-12 1.12548598e-12 C18 1.60335869e-14 2.04228406e-14 3.71761249e-13 C20 1.30399612e-14 3.2725238e-11 -2.05971586e-12 C21 -1.15274335e-17 2.35879877e-15 1.09054091e-15 C23 -6.9260806e-17 1.00239611e-14 1.70911423e-15 C25 -7.13524377e-17 5.05529889e-14 -3.62622238e-15 C27 -1.67322747e-17 1.78538542e-13 -7.36849912e-15 C29 -7.92528578e-21 -4.11347975e-18 -2.59696939e-18 C31 1.27834004e-20 -5.83032641e-17 1.25679501e-17 C33 3.27119661e-20 1.71591989e-16 -1.04543394e-17 C35 1.71377495e-20 1.22876874e-15 -3.91086555e-17 C36 -1.89551894e-23 -4.14843428e-22 5.26679107e-21 C38 -1.11996388e-22 1.06656248e-19 2.8502374e-20 C40 -1.96750203e-22 2.08419251e-19 6.3260457e-20 C42 -1.2392523e-22 8.95301505e-19 4.7233819e-21 C44 -2.47458966e-23 8.36809183e-18 -2.27707911e-19 C46 -9.77909864e-27 -1.02394711e-22 1.39450428e-23 C48 5.19824336e-27 -7.95041789e-23 1.68839235e-22 C50 5.59498452e-26 8.75666056e-22 2.79254271e-22 C52 6.43656264e-26 4.60087068e-21 -9.11661464e-23 C54 1.96031627e-26 4.50459082e-20 1.98458883e-22 C55 -1.9734083e-29 2.61667221e-26 -4.54521391e-26 C57 -1.39192995e-28 -1.48955085e-25 1.23387971e-24 C59 -3.49342237e-28 2.18616238e-24 4.57708029e-24 C61 -3.79015472e-28 8.50729665e-24 6.06052772e-24 C63 -1.77868817e-28 2.63725246e-23 -9.61661588e-26 C65 -2.61320106e-29 1.37431086e-22 9.18355997e-24 C67 -1.75320584e-32 1.91491617e-28 -2.00093096e-27 C69 -1.49695509e-32 -5.27938029e-27 2.16982668e-27 C71 6.84912486e-32 -5.29216183e-27 -7.30096104e-27 C73 1.54586906e-31 4.04146338e-26 -4.93769708e-27 C75 1.15783975e-31 2.37812676e-25 -4.16594376e-26 C77 4.14587364e-32 1.20314674e-24 -1.62235584e-25 C78 -5.34426777e-35 4.49836368e-31 6.13330316e-30 C80 -4.27488688e-34 1.29694668e-29 -1.62333428e-29 C82 -1.25436413e-33 3.24280489e-29 -1.68167617e-28 C84 -1.71502766e-33 3.00254831e-29 -4.89454528e-28 C86 -1.25734127e-33 7.46446045e-28 -6.5895393e-28 C88 -5.19929261e-34 5.84363659e-27 -1.5416679e-27 C90 -9.42013117e-35 2.61240017e-26 -3.38007496e-27 C92 1.00872668e-38 -4.95175891e-33 1.78435553e-32 C94 -1.45968234e-39 2.0913161e-33 1.10022934e-32 C96 2.49294655e-38 9.54156933e-32 1.00044858e-30 C98 1.25738947e-37 -7.47916509e-33 1.98972461e-30 C100 1.6844889e-37 7.35199153e-30 -3.47483305e-30 C102 7.66863005e-38 5.82871085e-29 -1.47027148e-29 C104 -1.4887687e-38 2.15570834e-28 -2.0886266e-29 C105 3.84331333e-41 -2.72151554e-36 -1.09100622e-34 C107 4.50330303e-40 -6.8970507e-35 3.91399908e-34 C109 1.60900752e-39 -2.41557224e-34 4.01031765e-33 C111 2.46751199e-39 1.07560857e-33 1.8289791e-32 C113 1.94052198e-39 8.96263507e-33 2.87152163e-32 C115 9.9606188e-40 4.77961552e-32 -4.19223781e-33 C117 4.55475999e-40 2.14647641e-31 -4.42634085e-32 C119 9.96424428e-41 6.08163641e-31 -4.46533131e-32 C121 -6.67748909e-44 0 0 C123 -1.35652075e-43 0 0 C125 1.98636308e-43 0 0 C127 1.25607622e-42 0 0 C129 2.10051386e-42 0 0 C131 1.77289428e-42 0 0 C133 7.94693346e-43 0 0 C135 1.74862061e-43 0 0 C136 -1.77390976e-46 0 0 C138 -2.00142247e-45 0 0 C140 -8.6258998e-45 0 0 C142 -1.91465627e-44 0 0 C144 -2.50271596e-44 0 0 C146 -2.03958823e-44 0 0 C148 -1.04613962e-44 0 0 C150 -3.18867421e-45 0 0 C152 -4.17582475e-46 0 0 Table 3b to FIG. 13 coefficient M7 M6 M5 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX -633.70195490 -1159.78778500 -7911.62023000 C7 -3.6838108e-08 8.9762673e-08 1.29208819e-08 C9 1.66051547e-07 5.4606184e-08 -4.52621083e-08 C10 2.70786958e-11 -4.84436976e-10 -5.84676904e-10 C12 -4.05365907e-10 4.4034394e-11 3.29353371e-11 C14 1.17570885e-09 -8.49494866e-10 3.27657845e-11 C16 5.32058235e-13 -1,22366579e-12 -4.06185258e-13 C18 -2.33907349e-12 3.31495258e-12 -3.05655881e-13 C20 1.03622586e-11 4.74017946e-12 -9.90515078e-14 C21 1.84951658e-17 4.70815441e-16 6.8177486e-16 C23 1.97362743e-16 -5.63918759e-15 1.78311332e-16 C25 -4.50645748e-14 -2.04438614e-14 1.92769745e-15 C27 1.22197136e-13 -4.46320586e-14 1.11134948e-15 C29 -8.3397015e-19 3.12037967e-18 1.20925734e-18 C31 5.73336291e-17 2.52930984e-17 -2.68755339e-18 C33 -4.26965471e-16 2.57659349e-16 -5.94759876e-18 C35 1.12309508e-15 3.62043368e-16 -4.78247891e-18 C36 -2.54002154e-21 -2.33285817e-21 8.64176325e-21 C38 6.58698589e-22 6.78093367e-21 2.69603122e-21 C40 9.19834216e-19 -6.09316184e-19 1.90190625e-20 C42 -5.20603364e-18 -2.48560476e-18 2.06136053e-20 C44 1.95177251e-17 -3.71987432e-18 1.52178482e-20 C46 5.11031274e-23 -2.36475219e-24 1.40723013e-23 C48 -5.22351362e-22 1.08955249e-21 -1.74886691e-23 C50 1.29955621e-20 6.28062297e-21 -1.31280422e-22 C52 -7.19352591e-20 2.83502526e-20 -1.33189978e-22 C54 3.01583882e-19 4.05968238e-20 -5.11578136e-23 C55 -3.2378259e-26 5.04920803e-26 -9.74226056e-26 C57 2.56114803e-26 -1.66126857e-24 1.25073538e-25 C59 -2.15568526e-23 -1.21962666e-23 3.61644254e-25 C61 7.54597503e-23 -7.85294647e-23 6.17670028e-25 C63 -1.37768633e-21 -2.60819335e-22 3.1972004e-25 C65 -9.91159698e-22 -3.82043453e-22 5.14604952e-26 C67 8.86143266e-29 1.38719494e-27 -4.85096213e-29 C69 2.95926995e-28 1.1409927e-26 -1.52883817e-29 C71 -4.08946521e-25 1.70193798e-25 -2.99192047e-28 C73 1.1764e-24 5.79647838e-25 1.27326956e-27 C75 -1.82271068e-23 1.8185183e-24 2.14215183e-27 C77 -6.0476105e-23 2.47496013e-24 -2.43586456e-28 C78 -1.46974123e-31 -2.48880617e-30 2.2910216e-30 C80 -1.62035317e-29 -3.63910799e-30 -2.10355105e-30 C82 2.64119709e-28 -1.39124488e-28 -3.56165247e-30 C84 -2.75435112e-27 -9.92371827e-28 -1.25073816e-29 C86 6.06493358e-26 -2.9562807e-27 -1.02346615e-29 C88 -1.82794269e-25 -7.99387324e-27 1.25693216e-30 C90 8.10897778e-25 -1.01333935e-26 6.64972771e-30 C92 -5.94852836e-33 -2.20554773e-33 1.22259104e-33 C94 7.23973112e-32 1.10525284e-31 -1.24849687e-32 C96 7.40539289e-30 -4.613537e-32 -3.29652704e-32 C98 4.88216265e-30 4.80483016e-30 -8.41705133e-32 C100 9.65449531e-28 6.23756899e-30 -1.57134898e-31 C102 -1.70876067e-27 2.1445453e-29 -1.2032548e-31 C104 2.67082934e-26 2.28654521e-29 -3.36577402e-32 C105 2.35094421e-36 2.08468354e-35 -1.08251776e-35 C107 3.37747137e-34 -1.04397603e-34 3.142163e-35 C109 7.70896596e-34 2.85346997e-34 8.01180965e-35 C111 6.84579774e-32 -8.80664689e-35 3.89769754e-34 C113 -9.31004972e-32 -9.19882787e-33 7.80016296e-34 C115 5.48180337e-30 -1.39857273e-33 7.27970094e-34 C117 -9.40923091e-30 -2.85191959e-32 3.44660803e-34 C119 1.58250782e-28 -2.04899764e-32 5.28320959e-35 Table 3c to FIG. 13 coefficient M4 M3 M2 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 6252.71767300 1718.69845500 1592.62684400 C7 2.02039657e-07 -7.72442186e-08 -2.81200257e-07 C9 6.26194854e-08 -6.39011454e-08 -4.33420894e-07 C10 -1.17096485e-10 5.38504965e-10 2.16914992e-10 C12 1.65918593e-10 1.54474735e-10 -2.43233271e-10 C14 2.6047855e-11 -5.67012949e-11 1.0908048e-09 C16 1.53352973e-13 -1.28128634e-12 -1.3249687e-12 C18 6.85280998e-14 3.29016521e-13 2.3245033e-12 C20 1.33134745e-14 -7.9135182e-14 -2.74288101e-12 C21 9.63392843e-16 -2.23006179e-16 -3.54173468e-16 C23 -2.56356327e-16 8.08610012e-16 5.15456653e-15 C25 -4.93143601e-16 -1.64061139e-16 -1.06774698e-14 C27 -3.50827102e-17 -8.3638218e-18 5.96789915e-15 C29 -1.32470314e-18 2.06883208e-18 1.70541615e-18 C31 -1.08456401e-18 -3.75046097e-18 -2.42446489e-17 C33 -3.23480928e-19 1.52741866e-18 4.43191025e-17 C35 -3.72075346e-19 1.62584985e-18 -1.05861269e-17 C36 -3.85707039e-21 -2.85425871e-21 1.53834046e-21 C38 7.16357253e-21 4.79674043e-21 -1.1251108e-20 C40 -1.76766744e-21 6.62315222e-22 1.18315789e-19 C42 -5.70159933e-21 -2.6546097e-21 -1.77703731e-19 C44 -3.65158025e-21 1.5355861e-20 1.37862764e-20 C46 -2.99726604e-23 -7.26058549e-23 -2.55922076e-23 C48 -4.17503344e-23 -9.21476496e-23 1.00193833e-22 C50 -4.7884568e-23 -2.35567601e-22 -5.31735424e-22 C52 -6.91516977e-24 -1.35526865e-22 6.79507546e-22 C54 1.98546253e-23 9.61975988e-23 4.01660209e-23 C55 -1.94031018e-26 1.56888015e-25 -1.38213528e-26 C57 -3.42382432e-25 2.2750218e-25 1.79376182e-25 C59 -2.2756817e-25 -1.23549695e-25 -5.94897934e-25 C61 2.01539859e-25 2.29974662e-25 2.27901415e-24 C63 4.95631548e-25 8.59833428e-25 -2.22922414e-24 C65 1.12176727e-25 1.26876311e-24 -7.70058057e-25 C67 9.06942404e-28 9.3079309e-28 3.74223228e-28 C69 1.9957938e-27 4.99157193e-27 -9.62902214e-28 C71 3.12476201e-27 1.58761398e-26 2.15189986e-27 C73 4.54981924e-27 1.53821757e-26 -8.59545995e-27 C75 6.59335485e-28 3.62238546e-27 5.36715829e-27 C77 -1.58015986e-27 -1.19949042e-27 5.14863336e-27 C78 4.37655985e-30 -2.15256015e-30 -6.68041182e-32 C80 8.62343063e-30 -8.27474872e-30 -2.88698633e-30 C82 1.3965552e-29 -1.85964202e-29 2.97808799e-30 C84 1.2610299e-29 -5.63075807e-29 -9.25513518e-30 C86 -4.82567841e-30 -7.58802797e-29 2.1567675e-29 C88 -1.35566233e-29 -6.2816052e-29 -8.2378632e-30 C90 8.35698293e-31 -2.48292667e-29 -1.8363031e-29 C92 -6.20912191e-33 -1.53848466e-33 -2.72722676e-33 C94 -3.03339233e-32 -5.56751434e-32 9.35668771e-33 C96 -4.15846221e-32 -2.81174802e-31 1.01318148e-32 C98 -1.20240425e-31 -5.69729421e-31 4.31201041e-32 C100 -1.23999978e-31 -3.40400557e-31 -2.58821352e-32 C102 1.77507014e-33 -9.97858945e-32 6.91936623e-33 C104 3.83557979e-32 1.09580074e-31 3.45333625e-32 C105 -1.52261212e-35 5.38313447e-37 2.4018539e-36 C107 -7.96360046e-35 8.5583118e-35 1.94949839e-35 C109 -2.50162343e-34 3.84351739e-34 -2.7269109e-35 C111 -2.81541874e-34 1.85492006e-33 -5.57867255e-35 C113 -6.28531061e-34 2.60940268e-33 -8.0628501e-35 C115 2.25293161e-35 2.55655776e-33 6.48059264e-36 C117 7.79107372e-35 1.01920129e-33 -2.46632816e-36 C119 -1.12500845e-34 7.43677377e-34 -2.70846382e-35 Table 3d to Fig. 13 coefficient M1 KY 0.00000000 KX 0.00000000 RX -2135.98763300 C7 -3.62667214e-08 C9 -8.77001096e-09 C10 -7.9878408e-12 C12 3.57622422e-11 C14 5.67666306e-11 C16 -1.00670933e-14 C18 -6.43363507e-14 C20 3.49263438e-14 C21 -1.83622059e-18 C23 1.63146414e-17 C25 2.33281554e-16 C27 -2.13403252e-16 C29 -7.17734463e-22 C31 -7.76916167e-20 C33 -2.45391831e-19 C35 9.06895125e 19 C36 -2.87240432e-24 C38 -5.67479156e-24 C40 2.53075334e-22 C42 2.33441297e-22 C44 -4.90816027e-21 C46 -1.82993123e-26 C48 1.40735408e-25 C50 -1.62994831e-25 C52 4.12295522e-24 C54 2.26175423e-23 C55 6.84620783e-30 C57 -8.9211373e-29 C59 3.99552919e-28 C61 2.87701829e-26 C63 7.90515964e-26 C65 4.93963599e-26 C67 8.37008672e-32 C69 -9.8548077e-31 C71 -7.50758997e-30 C73 -6.72582496e-30 C75 2.5702957e-28 C77 -1.08487883e-27 C78 4.88158898e-36 C80 1.55182242e-33 C82 1.52095525e-32 C84 -1.27781492e-31 C86 -1.81913568e-30 C88 -5.89459163e-30 C90 2.69055495e-30 C92 -4.03243187e-38 C94 3.64827588e-36 C96 3.2629352e-35 C98 1.58289449e-34 C100 -1.41502554e-34 C102 -7.52721979e-33 C104 1.42550505e-32 C105 -9.85463233e-41 C107 -4.7133732e-39 C109 -9.62905307e-38 C111 -4.88592887e-38 C113 5.89605443e-36 C115 4.37586765e-35 C117 1.2944388e-34 C119 -5.79847892e-35 Table 4a to FIG. 13 surface DCX DCY DCZ image plane 0.00000000 0.00000000 0.00000000 M10 0.00000000 0.00000000 805.12545493 AS 0.00000000 229.02635233 308.90327698 M9 0.00000000 161.70815863 113.71871405 M8 0.00000000 -95.26534725 1237.21684296 M7 0.00000000 -33.77425023 1447.75579022 M6 0.00000000 65.18321239 1551.64751609 M5 -0.00000000 416.29245364 1699.16961083 M4 -0.00000000 1004.20719186 1696.34134424 M3 -0.00000000 1452.13094016 1490.08513977 M2 0.00000000 1660.63260708 1219.01552868 M1 0.00000000 1898.51696847 380.25896967 object level 0.00000000 2052.66210418 2142.14593325 Table 4b to FIG. 13 surface TLA [deg] TLB [deg] TLC [deg] image plane -0.00000000 0.00000000 -0.00000000 M10 6.58193819 0.00000000 -0.00000000 AS 55.06787638 180.00000000 0.00000000 M9 193.02365372 0.00000000 -0.00000000 M8 88.30109261 0.00000000 -0.00000000 M7 60.05609350 0.00000000 -0.00000000 M6 34.59181790 0.00000000 0.00000000 M5 11.25728686 -0.00000000 -0.00000000 M4 -12.50018064 -0.00000000 -0.00000000 M3 -38.57896098 -0.00000000 -0.00000000 M2 -63.29951574 0.00000000 -0.00000000 M1 185.41707922 0.00000000 -0.00000000 object level 0.00000000 -0.00000000 -0.00000000 Table 5 to FIG. 13 surface Angle of incidence [deg] reflectivity M10 6.54595976 0.66117442 M9 0.00927824 0.66565898 M8 75.28640231 0.80872358 M7 76.47602867 0.82797480 M6 78.19600462 0.85363243 M5 77.82112299 0.84823720 M4 78.09659958 0.85221174 M3 76.69475350 0.83137235 M2 78.51548223 0.85815147 M1 10.19566395 0.65421760 total transmission 0.0849 Table 6 to FIG. 13: Aperture polygon AS in the imaging beam path between M9 and M10 X [mm] Y [mm] Z [mm] Type 0.00000000 353.51387100 0.00000000 CLA -12.96238300 352.78667200 0.00000000 CLA -25.85530400 350.61342700 0.00000000 CLA -38.61060800 347.01896200 0.00000000 CLA -51.16270500 342.04388900 0.00000000 CLA -63.44972800 335.74349800 0.00000000 CLA -75.41455000 328.18629200 0.00000000 CLA -87.00562600 319.45221900 0.00000000 CLA -98.17764100 309.63070300 0.00000000 CLA -108.89195400 298.81854400 0.00000000 CLA -119.11683100 287.11777800 0.00000000 CLA -128.82747700 274.63358000 0.00000000 CLA -138.00590000 261.47227200 0.00000000 CLA -146.64060400 247.73949500 0.00000000 CLA -154.72616300 233.53858800 0.00000000 CLA -162.26269100 218.96920100 0.00000000 CLA -169.25524900 204.12615200 0.00000000 CLA -175.71320100 189.09853000 0.00000000 CLA -181.64955800 173.96904400 0.00000000 CLA -187.08033200 158.81358700 0.00000000 CLA -192.02390600 143.70100000 0.00000000 CLA -196.50044400 128.69301600 0.00000000 CLA -200.53134900 113.84434200 0.00000000 CLA -204.13877400 99.20286700 0.00000000 CLA -207.34519000 84.80996300 0.00000000 CLA -210.17301200 70.70085100 0.00000000 CLA -212.64428600 56.90502000 0.00000000 CLA -214.78042700 43.44667100 0.00000000 CLA -216.60201000 30.34518200 0.00000000 CLA -218.12860900 17.61556600 0.00000000 CLA -219.37867800 5.26892700 0.00000000 CLA -220.36947300 -6.68710700 0.00000000 CLA -221.11699800 -18.24796700 0.00000000 CLA -221.63599400 -29.41175400 0.00000000 CLA -221.93993900 -40.17888700 0.00000000 CLA -222.04107500 -50.55176400 0.00000000 CLA -221.95044900 -60.53447000 0.00000000 CLA -221.67796800 -70.13250500 0.00000000 CLA -221.23246600 -79.35254200 0.00000000 CLA -220.62177400 -88.20221800 0.00000000 CLA -219.85279900 -96.68994000 0.00000000 CLA -218.93160700 -104.82472400 0.00000000 CLA -217.86350300 -112.61605400 0.00000000 CLA -216.65311600 -120.07375400 0.00000000 CLA -215.30448300 -127.20788700 0.00000000 CLA -213.82112600 -134.02866400 0.00000000 CLA -212.20613200 -140.54636700 0.00000000 CLA -210.46222800 -146.77128700 0.00000000 CLA -208.59184900 -152.71367000 0.00000000 CLA -206.59720300 -158.38367400 0.00000000 CLA -204.48033700 -163.79132900 0.00000000 CLA -202.24318600 -168.94651100 0.00000000 CLA -199.88762700 -173.85891600 0.00000000 CLA -197.41552400 -178.53803800 0.00000000 CLA -194.82876600 -182.99315700 0.00000000 CLA -192.12929800 -187.23332000 0.00000000 CLA -189.31915400 -191.26733600 0.00000000 CLA -186.40047400 -195.10376400 0.00000000 CLA -183.37552100 -198.75090800 0.00000000 CLA -180.24669500 -202.21681200 0.00000000 CLA -177.01653700 -205.50925400 0.00000000 CLA -173.68773300 -208.63574800 0.00000000 CLA -170.26310600 -211.60353800 0.00000000 CLA -166.74561700 -214.41960100 0.00000000 CLA -163.13835200 -217.09064600 0.00000000 CLA -159.44450600 -219.62311500 0.00000000 CLA -155.66737600 -222.02318800 0.00000000 CLA -151.81033800 -224.29678000 0.00000000 CLA -147.87683200 -226.44955100 0.00000000 CLA -143.87034100 -228.48690600 0.00000000 CLA -139.79437800 -230.41400200 0.00000000 CLA -135.65245800 -232.23575100 0.00000000 CLA -131.44809000 -233.95682800 0.00000000 CLA -127.18474800 -235.58167300 0.00000000 CLA -122.86586500 -237.11450300 0.00000000 CLA -118.49481100 -238.55931300 0.00000000 CLA -114.07488000 -239.91988600 0.00000000 CLA -109.60928000 -241.19979600 0.00000000 CLA -105.10112300 -242.40242000 0.00000000 CLA -100.55341100 -243.53093800 0.00000000 CLA -95.96903600 -244.58834400 0.00000000 CLA -91.35076900 -245.57745200 0.00000000 CLA -86.70126100 -246.50089900 0.00000000 CLA -82.02303800 -247.36115400 0.00000000 CLA -77.31850200 -248.16052200 0.00000000 CLA -72.58993100 -248.90114800 0.00000000 CLA -67.83948100 -249.58502600 0.00000000 CLA -63.06919300 -250.21399800 0.00000000 CLA -58.28099200 -250.78976400 0.00000000 CLA -53.47669600 -251.31388100 0.00000000 CLA -48.65802100 -251.78777000 0.00000000 CLA -43.82658700 -252.21271800 0.00000000 CLA -38.98392900 -252.58987900 0.00000000 CLA -34.13149800 -252.92028200 0.00000000 CLA -29.27067600 -253.20482600 0.00000000 CLA -24.40278100 -253.44429000 0.00000000 CLA -19.52907500 -253.63932700 0.00000000 CLA -14.65077700 -253.79047200 0.00000000 CLA -9.76906600 -253.89813800 0.00000000 CLA -4.88509600 -253.96261900 0.00000000 CLA -0.00000000 -253.98409300 0.00000000 CLA 4.88509600 -253.96261900 0.00000000 CLA 9.76906600 -253.89813800 0.00000000 CLA 14.65077700 -253.79047200 0.00000000 CLA 19.52907500 -253.63932700 0.00000000 CLA 24.40278100 -253.44429000 0.00000000 CLA 29.27067600 -253.20482600 0.00000000 CLA 34.13149800 -252.92028200 0.00000000 CLA 38.98392900 -252.58987900 0.00000000 CLA 43.82658700 -252.21271800 0.00000000 CLA 48.65802100 -251.78777000 0.00000000 CLA 53.47669600 -251.31388100 0.00000000 CLA 58.28099200 -250.78976400 0.00000000 CLA 63.06919300 -250.21399800 0.00000000 CLA 67.83948100 -249.58502600 0.00000000 CLA 72.58993100 -248.90114800 0.00000000 CLA 77.31850200 -248.16052200 0.00000000 CLA 82.02303800 -247.36115400 0.00000000 CLA 86.70126100 -246.50089900 0.00000000 CLA 91.35076900 -245.57745200 0.00000000 CLA 95.96903600 -244.58834400 0.00000000 CLA 100.55341100 -243.53093800 0.00000000 CLA 105.10112300 -242.40242000 0.00000000 CLA 109.60928000 -241.19979600 0.00000000 CLA 114.07488000 -239.91988600 0.00000000 CLA 118.49481100 -238.55931300 0.00000000 CLA 122.86586500 -237.11450300 0.00000000 CLA 127.18474800 -235.58167300 0.00000000 CLA 131.44809000 -233.95682800 0.00000000 CLA 135.65245800 -232.23575100 0.00000000 CLA 139.79437800 -230.41400200 0.00000000 CLA 143.87034100 -228.48690600 0.00000000 CLA 147.87683200 -226.44955100 0.00000000 CLA 151.81033800 -224.29678000 0.00000000 CLA 155.66737600 -222.02318800 0.00000000 CLA 159.44450600 -219.62311500 0.00000000 CLA 163.13835200 -217.09064600 0.00000000 CLA 166.74561700 -214.41960100 0.00000000 CLA 170.26310600 -211.60353800 0.00000000 CLA 173.68773300 -208.63574800 0.00000000 CLA 177.01653700 -205.50925400 0.00000000 CLA 180.24669500 -202.21681200 0.00000000 CLA 183.37552100 -198.75090800 0.00000000 CLA 186.40047400 -195.10376400 0.00000000 CLA 189.31915400 -191.26733600 0.00000000 CLA 192.12929800 -187.23332000 0.00000000 CLA 194.82876600 -182.99315700 0.00000000 CLA 197.41552400 -178.53803800 0.00000000 CLA 199.88762700 -173.85891600 0.00000000 CLA 202.24318600 -168.94651100 0.00000000 CLA 204.48033700 -163.79132900 0.00000000 CLA 206.59720300 -158.38367400 0.00000000 CLA 208.59184900 -152.71367000 0.00000000 CLA 210.46222800 -146.77128700 0.00000000 CLA 212.20613200 -140.54636700 0.00000000 CLA 213.82112600 -134.02866400 0.00000000 CLA 215.30448300 -127.20788700 0.00000000 CLA 216.65311600 -120.07375400 0.00000000 CLA 217.86350300 -112.61605400 0.00000000 CLA 218.93160700 -104.82472400 0.00000000 CLA 219.85279900 -96.68994000 0.00000000 CLA 220.62177400 -88.20221800 0.00000000 CLA 221.23246600 -79.35254200 0.00000000 CLA 221.67796800 -70.13250500 0.00000000 CLA 221.95044900 -60.53447000 0.00000000 CLA 222.04107500 -50.55176400 0.00000000 CLA 221.93993900 -40.17888700 0.00000000 CLA 221.63599400 -29.41175400 0.00000000 CLA 221.11699800 -18.24796700 0.00000000 CLA 220.36947300 -6.68710700 0.00000000 CLA 219.37867800 5.26892700 0.00000000 CLA 218.12860900 17.61556600 0.00000000 CLA 216.60201000 30.34518200 0.00000000 CLA 214.78042700 43.44667100 0.00000000 CLA 212.64428600 56.90502000 0.00000000 CLA 210.17301200 70.70085100 0.00000000 CLA 207.34519000 84.80996300 0.00000000 CLA 204.13877400 99.20286700 0.00000000 CLA 200.53134900 113.84434200 0.00000000 CLA 196.50044400 128.69301600 0.00000000 CLA 192.02390600 143.70100000 0.00000000 CLA 187.08033200 158.81358700 0.00000000 CLA 181.64955800 173.96904400 0.00000000 CLA 175.71320100 189.09853000 0.00000000 CLA 169.25524900 204.12615200 0.00000000 CLA 162.26269100 218.96920100 0.00000000 CLA 154.72616300 233.53858800 0.00000000 CLA 146.64060400 247.73949500 0.00000000 CLA 138.00590000 261.47227200 0.00000000 CLA 128.82747700 274.63358000 0.00000000 CLA 119.11683100 287.11777800 0.00000000 CLA 108.89195400 298.81854400 0.00000000 CLA 98.17764100 309.63070300 0.00000000 CLA 87.00562600 319.45221900 0.00000000 CLA 75.41455000 328.18629200 0.00000000 CLA 63.44972800 335.74349800 0.00000000 CLA 51.16270500 342.04388900 0.00000000 CLA 38.61060800 347.01896200 0.00000000 CLA 25.85530400 350.61342700 0.00000000 CLA 12.96238300 352.78667200 0.00000000 CLA

Eine Gesamt-Reflektivität der Projektionsoptik 26 beträgt 8,49 %.A total reflectivity of the projection optics 26 is 8.49%.

Das Bildfeld 8 hat eine x-Erstreckung von zweimal 13 mm und eine y-Erstreckung von 1 mm. Die Projektionsoptik 26 ist optimiert für eine Betriebswellenlänge des Beleuchtungslichts 3 von 13,5 nm.The image field 8th has an x extension of two times 13 mm and one y Extension of 1 mm. The projection optics 26 is optimized for an operating wavelength of the illumination light 3 of 13.5 nm.

Die Blende AS der Projektionsoptik 26 ist wiederum räumlich zwischen dem im Strahlengang vorletzten Spiegel M9 und dem im Strahlengang letzten Spiegel M10 angeordnet und begrenzt die Systempupille vollumfänglich im Bereich des Abbildungslicht-Teilbündels 3_M9M10 . Die Blende AS ist die einzige Blende zur Vorgabe der äußeren Pupillen-Randkontur. Die Blende AS ist insgesamt plan ausgeführt und liegt in der Blendenebene E_AS (vergleiche 14). Diese Blendenebene E_AS schließt mit der Bildebene 9 einen Winkel von etwa 55° ein. Eine Schnittlinie SL zwischen der Blendenebene E_AS und der Bildebene 9 verläuft im Bereich des Bildfeldes 8. Auch die Blende AS der Projektionsoptik 26 hat einen Stegabschnitt S zwischen den Abbildungslicht-Teilbündeln 3_M9M10 und 3_M10W , der ebenfalls in der Ebene E_AS nach 14 liegt.The aperture AS of the projection optics 26 is in turn spatially between the penultimate mirror in the beam path M9 and the last in the beam path mirror M10 arranged and limits the system pupil fully in the area of the imaging light sub-beam 3 _M9M10 , The aperture AS is the only aperture to default the outer pupil edge contour. The aperture AS is overall plan executed and lies in the aperture plane E _AS (see 14 ). This aperture plane E _AS closes with the picture plane 9 an angle of about 55 °. A cutting line SL between the diaphragm plane E _AS and the picture plane 9 runs in the area of the image field 8th , Also the aperture AS of the projection optics 26 has a bridge section S between the image light sub-beams 3 _M9M10 and 3 _M10W who is also in the plane E _AS to 14 lies.

Zur Herstellung eines mikro- oder nanostrukturierten Bauteils wird die Projektionsbelichtungsanlage 1 folgendermaßen eingesetzt: Zunächst werden die Reflexionsmaske 10 beziehungsweise das Retikel und das Substrat beziehungsweise der Wafer 11 bereitgestellt. Anschließend wird eine Struktur auf dem Retikel 10 auf eine lichtempfindliche Schicht des Wafers 11 mithilfe der Projektionsbelichtungsanlage 1 projiziert. Durch Entwicklung der lichtempfindlichen Schicht wird dann eine Mikro- oder Nanostruktur auf dem Wafer 11 und somit das mikrostrukturierte Bauteil erzeugt.The projection exposure apparatus is used to produce a microstructured or nanostructured component 1 used as follows: First, the reflection mask 10 or the reticle and the substrate or the wafer 11 provided. Subsequently, a structure on the reticle 10 on a photosensitive layer of the wafer 11 using the projection exposure system 1 projected. By developing the photosensitive layer, a micro or nanostructure is then formed on the wafer 11 and thus produces the microstructured component.

Claims

Imaging optics after Claim 1 , characterized in that the last mirror in the beam path (M10) has a passage opening (17) for the passage of the imaging light (3).

Imaging optics after Claim 1 or 2 , characterized in that the diaphragm (AS) covers the outer edge contour (19; 24) of the pupil in an azimuthal region (B) about a center (Z) of the pupil which is greater than 180 °.

Imaging optics after one of the Claims 1 to 3 , characterized by exactly one aperture (AS) for specifying the complete outer edge contour (24) of the pupil of the imaging optics (7; 20; 25; 26).

Imaging optics after one of the Claims 1 to 4 , characterized in that the diaphragm (AS) is executed at least partially planar.

Imaging optics after one of the Claims 1 to 5 , characterized in that an edge contour of the diaphragm (AS) has a three-dimensional course.

Imaging optics after one of the Claims 1 to 6 , characterized in that the diaphragm (AS) limits the edge contour (24) of the pupil in more than one plane (E _AS ¹ , E _AS ² ).

Imaging optics (7; 20; 25; 26) for projection lithography with a plurality of mirrors (M1 to M10) for imaging an object field (4) in an object plane (5) into an image field (8) in an image plane (9) along an imaging beam path between the object field (4) and the image field (8) guided imaging light (3), with a penultimate in the beam path mirror (M9) without passage opening for the passage of the imaging light (3), - having at least one aperture (AS) for specifying at least a portion (18) of an outer edge contour (19; 24) of a pupil of the imaging optics (7; 20; 25; 26), - The diaphragm (AS) is arranged spatially between the penultimate in the beam path mirror (M9) and one in the beam path last mirror (M10), - An entrance pupil (EP) of the imaging optics (7; 20; 25; 26) in the beam path of the imaging light (31) in front of the object field (4) is arranged.

Optical system - with illumination optics (6) for illuminating the object field (4) with the imaging light (3), - with an imaging optic (7; 20; 25; 26) after one of the Claims 1 to 8th ,

Optical system - with an imaging optic (7; 20; 25; 26) after one of the Claims 1 to 8th with a wafer holder (12) for displacing a wafer (11) along an object displacement direction (y), wherein the aperture (AS) in a direction (x) perpendicular to the object displacement direction (y) both extreme edge positions (E (x), E (-x)) of the outer edge contour (19; 24) of the pupil of the imaging optics (7; 20; 25; 26).

Projection exposure system with an optical system after Claim 9 or 10 and with an EUV light source (2).