DE102015207275B4 - Maßverkörperung mit signalkompensierenden Markierungen - Google Patents

Maßverkörperung mit signalkompensierenden Markierungen Download PDF

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Publication number
DE102015207275B4
DE102015207275B4 DE102015207275.4A DE102015207275A DE102015207275B4 DE 102015207275 B4 DE102015207275 B4 DE 102015207275B4 DE 102015207275 A DE102015207275 A DE 102015207275A DE 102015207275 B4 DE102015207275 B4 DE 102015207275B4
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Germany
Prior art keywords
measuring
rectangle
marking
edge portion
outline
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DE102015207275.4A
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German (de)
English (en)
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DE102015207275A1 (de
Inventor
Johannes Muehlfeld
Guenter Reusing
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Robert Bosch GmbH
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Robert Bosch GmbH
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Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE102015207275.4A priority Critical patent/DE102015207275B4/de
Priority to CH00168/16A priority patent/CH711009B1/de
Priority to CN201610249680.XA priority patent/CN106066137B/zh
Priority to JP2016086334A priority patent/JP6793465B2/ja
Publication of DE102015207275A1 publication Critical patent/DE102015207275A1/de
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Publication of DE102015207275B4 publication Critical patent/DE102015207275B4/de
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34746—Linear encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B3/00—Measuring instruments characterised by the use of mechanical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24428—Error prevention
    • G01D5/24433—Error prevention by mechanical means
    • G01D5/24438—Special design of the sensing element or scale
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Geophysics And Detection Of Objects (AREA)
DE102015207275.4A 2015-04-22 2015-04-22 Maßverkörperung mit signalkompensierenden Markierungen Active DE102015207275B4 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE102015207275.4A DE102015207275B4 (de) 2015-04-22 2015-04-22 Maßverkörperung mit signalkompensierenden Markierungen
CH00168/16A CH711009B1 (de) 2015-04-22 2016-02-08 Massverkörperung mit signalkompensierenden Markierungen.
CN201610249680.XA CN106066137B (zh) 2015-04-22 2016-04-21 带有信号补偿的标记的尺寸标准装置
JP2016086334A JP6793465B2 (ja) 2015-04-22 2016-04-22 信号補償マークを備えた標準器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102015207275.4A DE102015207275B4 (de) 2015-04-22 2015-04-22 Maßverkörperung mit signalkompensierenden Markierungen

Publications (2)

Publication Number Publication Date
DE102015207275A1 DE102015207275A1 (de) 2016-10-27
DE102015207275B4 true DE102015207275B4 (de) 2018-06-07

Family

ID=57110607

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102015207275.4A Active DE102015207275B4 (de) 2015-04-22 2015-04-22 Maßverkörperung mit signalkompensierenden Markierungen

Country Status (4)

Country Link
JP (1) JP6793465B2 (zh)
CN (1) CN106066137B (zh)
CH (1) CH711009B1 (zh)
DE (1) DE102015207275B4 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015203403A1 (de) * 2015-02-26 2016-09-01 Robert Bosch Gmbh Positionsmesssystem mit Kalibriermitteln

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6011389A (en) 1995-05-16 2000-01-04 Mitutoyo Corporation Induced current position transducer having a low power electronic circuit
EP1164358A1 (de) 2000-06-16 2001-12-19 AMO Automatisierung Messtechnik Optik GmbH Induktives Längenmesssystem
EP1052480B1 (de) 1999-05-14 2004-03-03 Rexroth Star GmbH Einrichtung zur Ermittlung der Relativposition zweier Körper
DE102007042796A1 (de) 2007-09-07 2009-03-12 Robert Bosch Gmbh Führungsschiene mit absoluter Maßverkörperung
DE102008018355A1 (de) 2008-04-11 2009-10-15 Robert Bosch Gmbh Absolute Positionsmessvorrichtung mit Interpolator
DE102011106940A1 (de) 2010-08-04 2012-02-09 Robert Bosch Gmbh Positionsmesseinrichtung mit Randkompensation
EP2502030B1 (de) 2009-11-18 2013-03-13 Victor Vasiloiu Induktive messeinrichtung für längen- und winkelerfassung
DE102013220749A1 (de) 2012-10-26 2014-05-15 Robert Bosch Gmbh Positionsmesssystem
DE102015213784A1 (de) 2014-08-13 2016-02-18 Robert Bosch Gmbh Positionsmesssystem mit Empfängerspulen, die über Schaltmittel differentiell zusammenschaltbar sind

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10132521A1 (de) * 2001-07-09 2003-01-30 Heidenhain Gmbh Dr Johannes Positionsmesseinrichtung
JPWO2004107415A1 (ja) * 2003-05-28 2006-07-20 株式会社ニコン 位置情報計測方法及び装置、並びに露光方法及び装置
DE10353808B4 (de) * 2003-11-14 2015-09-03 Dr. Johannes Heidenhain Gmbh Messteilung für eine Positionsmesseinrichtung und Positionsmesseinrichtung
TWI654661B (zh) * 2004-11-18 2019-03-21 日商尼康股份有限公司 位置測量方法、位置控制方法、測量方法、裝載方法、曝光方法及曝光裝置、及元件製造方法
US7553611B2 (en) * 2005-03-31 2009-06-30 Sandisk 3D Llc Masking of repeated overlay and alignment marks to allow reuse of photomasks in a vertical structure
JP4775705B2 (ja) * 2006-01-27 2011-09-21 日立金属株式会社 磁気式アブソリュートエンコーダー
DE102007024593A1 (de) * 2007-05-25 2008-11-27 Dr. Johannes Heidenhain Gmbh Maßstab für eine Positionsmesseinrichtung und Positionsmesseinrichtung
US8222890B2 (en) * 2007-08-31 2012-07-17 Pepperl + Fuchs Gmbh Inductive displacement transducer, coding device, and method for detecting a position of a first object in relation to a second object
DE102007056612A1 (de) * 2007-11-23 2009-05-28 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
WO2010086585A1 (en) * 2009-01-27 2010-08-05 Renishaw Plc Magnetic encoder apparatus
DE102011076055A1 (de) * 2011-05-18 2012-11-22 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102012201393A1 (de) * 2012-02-01 2013-08-01 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung und Anordnung mit mehreren Positionsmesseinrichtungen

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6011389A (en) 1995-05-16 2000-01-04 Mitutoyo Corporation Induced current position transducer having a low power electronic circuit
EP1052480B1 (de) 1999-05-14 2004-03-03 Rexroth Star GmbH Einrichtung zur Ermittlung der Relativposition zweier Körper
EP1164358A1 (de) 2000-06-16 2001-12-19 AMO Automatisierung Messtechnik Optik GmbH Induktives Längenmesssystem
DE102007042796A1 (de) 2007-09-07 2009-03-12 Robert Bosch Gmbh Führungsschiene mit absoluter Maßverkörperung
DE102008018355A1 (de) 2008-04-11 2009-10-15 Robert Bosch Gmbh Absolute Positionsmessvorrichtung mit Interpolator
EP2502030B1 (de) 2009-11-18 2013-03-13 Victor Vasiloiu Induktive messeinrichtung für längen- und winkelerfassung
DE102011106940A1 (de) 2010-08-04 2012-02-09 Robert Bosch Gmbh Positionsmesseinrichtung mit Randkompensation
DE102013220749A1 (de) 2012-10-26 2014-05-15 Robert Bosch Gmbh Positionsmesssystem
DE102015213784A1 (de) 2014-08-13 2016-02-18 Robert Bosch Gmbh Positionsmesssystem mit Empfängerspulen, die über Schaltmittel differentiell zusammenschaltbar sind

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
TEXAS INSTRUMENTS: TS5A623157 – Dual 10-Ω SPDT analog switch with undershoot/overshoot voltage protection. September 2007. URL: http://www.ti.com/lit/ds/symlink/ts5a623157.pdf [abgerufen am 27.10.2016] *

Also Published As

Publication number Publication date
JP2016206198A (ja) 2016-12-08
CN106066137A (zh) 2016-11-02
DE102015207275A1 (de) 2016-10-27
JP6793465B2 (ja) 2020-12-02
CH711009B1 (de) 2020-08-31
CN106066137B (zh) 2019-11-05
CH711009A2 (de) 2016-10-31

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