DE102014221561A1 - Apparatus for receiving evaporating material and method for producing a device - Google Patents

Abstract

The invention relates to a device for receiving evaporating material, wherein the device (1) has a receiving part (2) with a receiving volume (3), wherein the device (1) has a head part (4) with an outlet opening (5), wherein the Receiving part (2) has a threaded portion (6) for mechanical connection with the head part (4), wherein the head part (4) has a corresponding threaded portion (7) for mechanical connection with the receiving part (2), wherein the receiving part (2) Pyrolytic boron nitride is formed, and a method for producing such a device (1).

Description

The invention relates to a device for receiving vaporized material and a method for producing such a device.

In the production of solar cells, certain materials can be applied to a carrier body or substrate by a vapor deposition method, in particular a vacuum vapor deposition method. Thus, e.g. Copper, indium, gallium, sodium fluoride, potassium fluoride and / or selenium can be applied by means of such a vapor deposition method in an efficient manner on a surface of the carrier body. This allows e.g. the production of a solar cell in a so-called thin-film process.

For such a vapor deposition method, which can also be referred to as a thermal evaporation method, evaporation devices are used. These may e.g. Means for generating thermal energy, means for transmitting thermal energy and at least one device for receiving evaporative material comprise. In this case, the evaporating material can be cooled by the device for generating and transmitting thermal energy to a desired temperature, e.g. a temperature in the range of 1000 ° C to 1200 ° C, are heated, in which case the resulting material vapor moves to a support body or substrate and can condense there.

After completion of the vapor deposition or in a fault, residual material may remain in the device for receiving vaporization. The removal of this residual material from the device for receiving can be problematic, especially in devices in which a diameter of a filling or outlet opening is smaller than a diameter of the actual receiving volume.

Various methods are known for removing a residual amount of material in a crucible, e.g. Melting, etching or the use of an open crucible built into a divisible graphite susceptor.

Also known are two-part devices for receiving vaporization. That's how it describes WO 2007/069865 A1 a crucible with a crucible body and a cap. The cap can be attached to the crucible body by a threaded fastener.

The US 4,812,326 discloses an evaporator with a crucible and a cap. However, in this document no connection of the crucible and the cap is disclosed by a thread.

The US 2007/0289526 A1 discloses a multi-part crucible with a base part and a top part. These can be put together. Also in this document no connection is revealed by a thread.

The US 2009/0229524 A1 discloses an evaporator having a cylindrical crucible and an outlet unit that can be attached to an upper portion of the crucible. Also, this document does not disclose a connection by a thread.

The US 2010/0040780 A1 discloses a container for evaporating material. A two-part crucible includes a top and a bottom. The upper part can be joined together with the lower part. However, no connection is disclosed by a thread in this document.

The US 2010/0031878 A1 discloses an applicator with a crucible. Here, however, the crucible is made in one piece.

The JP 2290963 A discloses a crucible with a crucible lid and a crucible body. It is disclosed that the crucible body and the crucible lid can be fixed together by threaded parts.

It raises the technical problem of providing a device for receiving evaporating material and a method for producing such a device which simplifies removal of residual material, ensures a contamination-free uptake of the evaporation material in the high temperature range, has good heat transfer properties, as possible reaction-free occurring under the influence Process gases and has a high corrosion resistance and sufficient mechanical stability of the device for loading and unloading.

The solution of the technical problem results from the objects with the features of claims 1 and 14. Further advantageous embodiments of the invention will become apparent from the dependent claims.

It is a basic idea of the invention to provide a two-part device for receiving evaporating material, which are mechanically connectable via a threaded connection, wherein a receiving part is formed from pyrolytic boron nitride and thus has a high corrosion resistance. At the same time, however, a high mechanical stability of the receiving part of the device is ensured.

Proposed is a device for receiving evaporating material. The device can also be referred to as a crucible. The evaporant may in particular be copper, indium, gallium, sodium fluoride, potassium fluoride, selenium or a mixture of at least two of these materials.

The device comprises a receiving part with a receiving volume. The receiving volume serves to accommodate the vaporization. This means that the evaporating material, in particular in the solid or liquid state, can be or can be arranged in the receiving volume. The receiving part can be open in particular to one side. Thus, the receiving part may be e.g. a hollow cylindrical portion having a first end-side, closed end and a further end-side, open end. A central center line of the receiving part may in this case extend from the first front end to the further front end. At the closed end, the receiving part may for example have a part-spherical, in particular hemispherical, section.

Furthermore, the device has a head part with at least one outlet opening. The outlet opening can be designed in particular as a passage or passage opening in the head part. In this case, various geometric configurations of the outlet opening are conceivable. Thus, the outlet opening can be bottle neck-shaped, carafe neck-shaped or designed as a, preferably thin-walled, blender. However, it is also conceivable that a surface which encloses or encloses the outlet opening can be formed as the surface of any rotational body.

The head part may, for example, have a first inlet-side surface and a further, outlet-side surface, wherein the first surface may designate a surface of the head part lying opposite the further surface. The outlet opening may extend from the first surface to the further surface. Along a central centerline of the head portion, which may be oriented from the further surface toward the first surface, a diameter of the outlet opening may vary. Thus, e.g. a diameter in a first section should be constant and correspond to an inlet diameter, then reduce to a minimum diameter and then increase again to an outlet diameter. Of course, however, other courses of the diameter are conceivable, in particular a constant course, a tapered course or a spreading course of the diameter.

Hereinafter reference will also be made to a vertical direction, wherein the vertical direction is oriented with respect to the receiving part from the first end to the further end of the receiving part and with respect to the head part from the first surface to the further surface. Furthermore, the vertical direction can be parallel to the central center lines of the receiving and head part. With respect to the vertical direction, the closed end of the receiving part may also be referred to as the lower end and the open end as the upper end. Further, the first surface may be referred to as a lower surface and the other surface as an upper surface of the head part.

Further, the receiving part has a threaded portion for mechanical connection with the head part. The threaded portion is in this case preferably arranged in the region of the further, ie upper, end of the receiving part. Here, the threaded portion may be arranged on the receiving part, that between a (upper) edge of the other end and the threaded portion no distance or a predetermined distance is provided. The distance can be detected along the previously explained vertical direction. Thus, the threaded portion may immediately adjoin the edge of the open (upper) end or be spaced apart from the edge by the predetermined distance. This receiving part-side threaded portion may be arranged in particular in or on the above-explained hollow cylindrical portion of the receiving part.

The head part has a corresponding threaded portion for mechanical connection with the receiving part. This head part-side threaded portion is arranged in particular in the lower regions of the head part.

Thus, the receiving part can be mechanically connected to the head part via the threaded portions. Corresponding means here that thread parameters of the receiving part-side threaded portion are adapted to the thread parameters of the head part side threaded portion such that a stable mechanical connection is possible. Thus, therefore, a two-part design of the device for receiving Evaporative material is described, wherein both parts are mechanically connected via a threaded connection. In a connected state, the center lines of both parts can then be arranged collinearly or superposed.

The thread parameters can in this case be selected such that a play-free mechanical connection is ensured. Preferably, however, a mechanical connection is provided or made possible with a predetermined clearance. In particular, production-related tolerances that result, for example, in unevenness, can be compensated for by the clearance. Also, the game can allow, in particular smooth running, screwing. Further, the thread parameters can be selected adapted to the respective material of the receiving part and the head part. This will be explained in more detail below.

An inner diameter of the receiving part can be between 10 mm and 200 mm. An outer diameter of the receiving part may be between 10.4 mm to 200.4 mm. A wall thickness of the receiving part can be between 0.4 mm to 5.0 mm.

A maximum diameter of the outlet opening may in this case be less than or equal to a maximum inner diameter of the receiving part. A maximum outer diameter of the head part may in this case be greater than the maximum outer diameter of the receiving part.

According to the invention, the receiving part is formed from pyrolytic boron nitride (pBN).

The use of pyrolytic boron nitride for the receiving part ensures in an advantageous manner that the receiving part is formed with a very high corrosion resistance and causes only a very low contamination of the evaporating material under the usual process conditions in a vapor deposition.

Pyrolytic boron nitride usually has only a low mechanical strength and rigidity. In particular, a component made of pyrolytic boron nitride is easily deformable and easily fragile, in particular if the component has holes or incisions. So far, it has therefore been assumed that pyrolytic boron nitride is mechanically not suitable to form a threaded portion or provide a threaded portion on a pyrolytic boron nitride component. This also shows the above-explained prior art. So are in the pamphlets US 2007/0289526 A1 . US 2010/0031878 A1 and US 2010/0040780 A1 , each disclosing pyrolytic boron nitride in the context of crucibles, at no point discloses threaded portions provided on or on a pyrolytic boron nitride member.

Surprisingly, however, it has been shown that a threaded portion, in particular with special thread parameters, can also be arranged or formed on a receiving part made of pyrolytic boron nitride.

Thus, in summary advantageously results in a simplification of the removal of residual material from the receiving part, as the head and receiving part can be easily separated mechanically. Furthermore, there is advantageously a reliable mechanical connection which can be provided without impairing mechanical stability of the receiving part, in particular without destruction.

In a preferred embodiment, the threaded portion of the receiving part is formed as an internal thread, wherein the corresponding threaded portion of the head part is formed as an external thread. This results in an advantageous manner a compact design.

Here, the head part may have or form a stop edge or surface for an edge portion of the receiving part, wherein the stop element limits a relative movement between the receiving part and the head part during screwing. Thus, e.g. the head part having the threaded portion and a section following the above-described center line of the head part, in particular in the vertical direction, on the threaded portion, wherein the diameter of the following section is greater than an outer diameter of the threaded portion of the head part and thus a projection or a stop surface is provided ,

The stop edge or surface may in this case be e.g. be provided by a sudden increase in the (outer) diameter of the head part of the threaded portion to the following section. It is also conceivable that the diameter increases continuously along the center line, in particular in the vertical direction, from the threaded section to the following section and / or in the following section, e.g. linear. Thus, the following section may have a cone-shaped outer surface whose diameter increases along the center line, in particular in the vertical direction. As a result, good sealing properties can be achieved when screwing.

In an alternative embodiment, the threaded portion of the receiving part is formed as an external thread, wherein the corresponding threaded portion of the head part is formed as an internal thread. This makes it possible to produce a head part with larger outlet openings. Also in this case, the head part may have or form a stop edge or surface for an edge portion of the receiving part.

In a further preferred embodiment, the threaded portion of the receiving part is formed as a stiffening element. This may mean that at least one thread parameter of the threaded portion of the receiving part is selected such that that a desired mechanical stability of the receiving part is provided.

In accordance with a function of beads, in particular the depressions of the receiving part-side threaded portion can serve to stiffen the receiving part.

In particular, the at least one thread parameter can thus be selected such that a torsional strength and / or shear strength and / or compressive strength and / or tensile strength and / or compressive strength and / or flexural strength and / or shear strength of the female member is greater with the threaded portion than that of a female part without a threaded portion. Here, the receiving part without threaded portion except for the threaded portion of the same configuration as the receiving part with threaded portion, in particular the same shape and dimensions on. As a result, the mechanical strength of the receiving part is advantageously increased by the provision of the threaded portion.

This advantageously allows a simplified handling of the device for receiving evaporating material, in particular a simplified removal from an evaporation device. Thus, e.g. the proposed device also goes wrong, i. in a direction that is not parallel to a gravitational direction are taken out of an evaporator device. Up to now, this has been possible only with great care and therefore a high expenditure of time, since such an oblique withdrawal of the pyrolytic boron nitride-formed receiving part is due to remaining residual material, which is e.g. may still weigh up to 20 kg, deformed and due to deformation e.g. could come into mechanical contact with other components of the evaporation device, in particular with heating wires. This in turn could lead to destruction or damage to these components and the receiving part. By providing a threaded portion, such a deformation of the receiving part is reduced or even prevented, so that now also the previously described oblique removal is possible.

In a further embodiment, the threaded portion of the receiving part has a pitch of a range between 2 mm (inclusive) and 50 mm (inclusive).

Alternatively or cumulatively, the threaded portion of the female part has a number of turns ranging from 1 (inclusive) to 10 (inclusive).

Alternatively or cumulatively, the threaded portion of the receiving part has an outer diameter ranging between 10 mm (inclusive) and 200 mm (inclusive).

Alternatively or cumulatively, the threaded portion of the female part has an inner diameter ranging between 10 mm (inclusive) and 200 mm (inclusive).

Alternatively or cumulatively, the threaded portion of the female part has a core diameter ranging between 10 mm (inclusive) and 200 mm (inclusive).

Of course, in this case, the outer diameter, the inner diameter and the core diameter are adapted to each other adapted to provide a thread with desired properties.

Alternatively or cumulatively, the threaded portion of the female part has a flank angle ranging between 20 ° (inclusive) and 120 ° (inclusive).

It has been found that with one or more thread parameters from the previously described areas, a desired mechanical stability, in particular strength, of the receiving part can be achieved, which makes it possible even large masses of evaporating material, e.g. Masses up to 40 kg, in the receiving part and without deformation of the receiving part to be stored and transported, especially in the above-mentioned oblique removal. Here, the thread parameters are specially adapted to the use of pyrolytic boron nitride as a material for the receiving part.

The screwed device can be handled, in particular with already arranged in the receiving volume evaporation material, as a one-piece component, with deformations, in particular of the receiving part can be reduced or even avoided.

In a further embodiment, the threaded portion of the receiving part is formed as a round thread. This makes it possible to produce the crucible with the known manufacturing method for receiving parts of pyrolytic boron nitride.

In a further embodiment, the head part is made of graphite. This results in an advantageous manner that the head part has sufficient mechanical strength for the proposed threaded connection. At the same time, the head part has a desired thermal conductivity and also causes only one minimal contamination of the evaporation material during evaporation. Furthermore, there is advantageously a cost savings in the production of the proposed device for receiving evaporative material.

By using in particular thick-walled headboards made of graphite, it is possible to achieve optimum temperature distributions. In addition, condensation of the vaporization material on the head part can be avoided.

It also results in an advantageous manner that by a graphite head part, the device for receiving evaporating material, in particular the receiving part, against destruction, in particular by glass breakage falling on the proposed device, e.g. during the manufacture of solar cells, can be protected.

In a further embodiment, a maximum wall thickness of the receiving part is less than or equal to 5.0 mm, in particular less than or equal to 2.0 mm. This results in an advantageous adaptation to the requirements of the production of the receiving part.

In a further embodiment, the head part has at least one fastening means for arranging the head part on a holding structure or forms such a fastening means. This can also mean that the fastening means can be attached to the head part.

The at least one fastening means can in this case be designed such that a non-positive and / or positive mechanical connection with the support structure is possible. The holding structure may in this case be in particular a further component of an evaporation device. In particular, the holding structure may be at least partially formed by a cooling device, for example a wall section of such a cooling device. Alternatively or cumulatively, the support structure may be at least partially e.g. be formed by a housing portion of the evaporation device.

The fastening means may be arranged or formed, for example in a mounting portion of the head part, for example in the form of a recess and / or recess, in particular blind hole-like depression and / or recess.

Of course, however, differently shaped fastening means are conceivable.

For example, the head part may have a partial section, in particular a (hollow) cylindrical partial section, wherein a maximum diameter of this retaining section is greater than an outer diameter of the threaded section of the head section. In an edge section of this subsection, in particular an edge section which extends from a first inner diameter to a further inner diameter of the subsection, the subsection can have recesses and / or recesses, in particular pocket holes. In this case, the first inner diameter greater than the maximum outer diameter of the threaded portion can be selected. The additional inner diameter can be selected to be smaller than or equal to the maximum diameter of the subsection. In particular, the edge portion may be a protruding or projecting portion (of the subsection) of the head part.

The fastening means may in this case also designate a partial element for producing a mechanical connection, for example a further thread, an element of a latching or clamping connection or an element of a further mechanical connection.

In a further embodiment, the head part has at least one partial section, wherein an outer diameter of the head part increases in this partial section. The partial section may extend along or parallel to the center line of the head part. In particular, the outer diameter in the vertical direction can increase.

The outer diameter can thereby increase along the or parallel to the center line jump. Alternatively, the outer diameter can increase continuously along or parallel to the center line, in particular differentiable, preferably linear. In the case of a linear enlargement of the outer diameter, the head part can thus have a part-cone-shaped or partially hollow conical section.

As previously explained, the enlargement of the outer diameter between the threaded portion and along the center line, in particular in the vertical direction following the threaded portion following and / or in the subsequent to the threaded portion section. However, this is not mandatory. The enlargement can also occur between and / or in further sections of the head part along the center line of the head part.

In particular, the outer diameter can be greater than a maximum outer diameter of the receiving part. As a result, good sealing properties can be achieved when screwing.

In a further embodiment, the head part has at least one section with a predetermined outer diameter, wherein the predetermined outer diameter of the subsection is greater than the outer diameter (s) of the subsections of the header disposed along or parallel to the centerline of the header adjacent to the predetermined outer diameter subsection. The subsection (s) disposed along or parallel to the center line adjacent to the subsection having the predetermined outer diameter may be, for example, the subsection (s) onto which the subsection having the predetermined outer diameter extends along or in parallel to the center line, in particular in the vertical direction, follows and / or follows along or parallel to the center line, in particular in the vertical direction, on the portion with the predetermined outer diameter. Also, the predetermined outer diameter of the section may be greater than the / the outer diameter of all other sections of the head part.

Thus, the head part may in particular have a projecting or cantilevered portion. This projecting section can, for example, form the stop edge explained in more detail below. The predetermined outer diameter may be, for example, in a range between 20 mm and 400 mm.

This portion having the predetermined outer diameter advantageously allows for improved transfer of thermal energy into the header. This in turn advantageously leads to the fact that a growth of the passage opening of the head part can be minimized or completely prevented by Evaporation.

Namely, if the head part, e.g. via the above-described support structure, in or on an evaporation device with a heating device, a spatial distance between the head part and the heating device, e.g. a heater formed by at least one heating wire to be reduced in the portion having the predetermined outer diameter. This may in particular be the case when the heating device surrounds or encloses the head part. Thereby, the thermal energy, which is transmitted in this area from the heater to the head part, can be increased.

Also described is an arrangement of an evaporation device and a head part, wherein the evaporation device comprises a heating device, wherein the heating device encloses the head part or at least a partial section of the head part. Thus, the heating device may include or enclose a hollow cylindrical portion, in the internal volume of the head part can be arranged. The head part can in this case be arranged over a holding structure in the evaporation device. An inner diameter of the heating device may in this case be greater than a maximum outer diameter of the head part or of the subsection of the head part arranged in the heating device. The inner diameter of the heater is preferably constant. The head part may in this case have the previously described partial section with the predetermined outside diameter. Thus, a (radial) distance between header and heater in at least a portion of a space between header and heater may be less than the pitch (s) in portions of the gap that are along or parallel to the centerline of the header adjacent to that portion of the gap is / are, be.

It is possible that in the space between the head part and the heater, an insulating material, in particular an insulating material other than air, for thermal insulation of the head part is arranged. Here, the insulating material may be disposed in the entire space. Preferably, however, the portion of the gap in the region of the portion of the head portion with the predetermined outer diameter insulating material free. This means that no insulating material is arranged in this section of the gap. For example, can be arranged in this section air. This improves the transmission of thermal energy in exactly this subarea.

In a further embodiment, the head part has a stop edge or forms a stop edge. The stop edge limits in this case a Einbring- or screwing of the head part relative to the receiving part. In particular, the head part can only be screwed so deeply into the receiving part until the receiving part, in particular an end face of the receiving part, abuts against a stop surface formed by the stop edge.

Here, the stop edge may be provided or arranged or formed on a lateral surface of the head part. As previously explained, the abutment edge may be provided by a sudden increase in the diameter of the head portion in a threaded portion to a diameter of the head portion in a following portion, the following portion following along the center line, in particular in the vertical direction of the head portion on the threaded portion.

This results in an advantageous manner, a mechanical limitation of the screwing depth and thus improved handling of the device.

In a further embodiment, in a first subsection a Through opening of the head portion of the diameter of the passage opening along or parallel to the center line of the head portion from an inlet side end of the passage opening toward the outlet end, wherein the diameter in the remaining portion enlarged again. This may mean that the diameter at the inlet end is greater than the diameter at the end of the first section, the diameter at the outlet end being greater than the diameter at the end of the first section corresponding to the beginning of the remaining section. Between the inlet-side end and the end of the first partial section and / or between the end of the first partial section and the outlet-side end, the diameter along the center line of the head part can thus be reduced and / or increased. For example, the diameter in a subsection of the passage opening in a first alternative can only increase or remain constant, in a second alternative only decrease or remain constant or in a third alternative both increase and decrease and remain constant.

The inlet-side end of the passage opening may in this case designate the opening of the passage opening facing the receiving volume in the screwed-on state. The outlet end may refer to the end of the passage opening opposite the inlet end. The diameter can in this case in particular change continuously, preferably differentiable. Preferably, the diameter of the passage opening at the inlet end is greater than the diameter at the outlet end.

Further proposed is a method for producing a device for receiving vaporization. In this case, a receiving part is provided with a receiving volume. Furthermore, a head part is provided with an outlet opening. Further, the receiving part is provided with a threaded portion for mechanical connection with the head part. Further, the head part is provided with a corresponding threaded portion for mechanical connection with the receiving part. According to the invention, the receiving part is or is formed of pyrolytic boron nitride.

The method advantageously makes it possible to produce a device according to one of the previously explained embodiments.

In particular, the threaded portion can be produced by a vapor deposition of boron nitride on a corresponding negative mold.

Also described is a use of the device according to one of the previously explained embodiments in an evaporation device for applying evaporation material to a carrier body, in particular a substrate in the manufacture of a solar cell.

Also described is an evaporation device for applying evaporating material to a carrier body, in particular a substrate in the manufacture of a solar cell, with a device according to one of the previously explained embodiments. The vaporizing device may further comprise the previously described holding structure and / or heating device.

The invention will be explained in more detail with reference to an embodiment. The figures show:

1 a side view of a device according to the invention for receiving evaporative material,

2 a cross section through a device according to the invention in a bolted state,

3 a cross section through a receiving part,

4 a cross section through a head part in a first embodiment,

5 a cross section through a head part in a further embodiment and

6 a cross section through an evaporation device.

Hereinafter, like reference numerals designate elements having the same or similar technical features.

In 1 is a perspective view of a device according to the invention 1 shown for receiving not shown evaporating. The device 1 has a receiving part 2 with a recording volume 3 (please refer 2 ) on. Next, the device 1 a headboard 4 with an outlet opening 5 (please refer 2 ) on.

The recording part 2 has a receiving part side threaded portion 6 on, which is designed as an internal thread. Here it is shown that the receiving part-side threaded portion 6 has a number of turns of four. The headboard 4 has a head part side threaded portion 7 on, which is designed as an external thread.

The receiving part-side threaded portion 6 and the headboard side threaded portion 7 in this case form corresponding threaded sections, which provide a mechanical connection of receiving part and headboard 4 enable. The recording part 2 is formed of pyrolytic boron nitride.

Also shown is a vertical direction z, which in 1 oriented from bottom to top. The receiving part-side threaded portion 6 is here at an upper end of the receiving part 2 and the headboard side threaded portion 7 at a lower end of the headboard 4 arranged.

For evaporating evaporating material on a not shown substrate, in particular in the production of solar cells, is in the receiving part 2 arranged evaporation material heated and can by the receiving volume 3 and through the outlet opening 5 from the recording volume 3 emerge towards the substrate.

2 shows a cross section through a device according to the invention 1 , Shown again is the receiving part 2 and the headboard 4 in the in 2 shown state are screwed together. Here, the receiving part-side threaded portion interacts 6 with the head part side threaded portion 7 ,

In 2 it can be seen that the receiving part 2 a first hollow cylindrical portion 8th and a bottom section 9 having. The bottom section 9 is here formed hemispherical and includes the first hollow cylindrical portion 8th at a first end of the hollow cylindrical portion 8th , which can also be referred to as the lower end, from. Here, a lower end denotes a lower end of the hollow cylindrical portion with respect to a vertical direction z 8th , Here is in 2 illustrated that the vertical direction z is oriented from bottom to top.

At another end of the hollow cylindrical section 8th , which may also be referred to as the upper end, is the hollow cylindrical portion 8th open. Here it is shown that the receiving part-side threaded portion 6 at a vertical direction z upper end of the receiving part 2 , in particular of the hollow cylindrical portion 8th , is arranged.

The receiving part-side threaded portion 6 in this case forms part of the lateral surface of the hollow cylindrical portion 8th out. Thus, both an inner circumferential surface of the hollow cylindrical portion 8th as well as an outer circumferential surface of the hollow cylindrical portion 8th in the region of the receiving part-side threaded portion 6 Elevations and depressions on the receiving part side threaded portion 6 form part of it. This advantageously allows a thin-walled design of the receiving part-side threaded portion 6 ,

Also shown is a passage opening 5 of the headboard 4 , The passage opening 5 is designed carafe neck in cross section. This may mean that a diameter of the passage opening at a first end of the head part 4 , which may also be referred to as the lower end, having a first diameter (inlet diameter). Along the vertical direction z, the diameter can remain constant in a first section and can be reduced in a second section, which adjoins the first section in the vertical direction z, until a second, in particular minimum, diameter is reached. In a third section, which adjoins the second section in the vertical direction z, the diameter may increase again, for example to a further diameter (outlet diameter), which has a diameter of the outlet opening 5 at another end of the headboard 4 , which may also be referred to as the upper end forms. Here, the additional diameter may be smaller than the first diameter.

In 3 is a cross section through the in 1 shown receiving part 2 shown. Here it is shown that the first hollow cylindrical section 8th has a first inner diameter ID1_2. It is further shown that in the vertical direction z to the receiving part side threaded portion 6 another hollow cylindrical section 10 connects, which has a further inner diameter ID2_2, wherein the further inner diameter ID2_2 may be greater than the first inner diameter ID1_2. Also shown is a wall thickness WS_2 of the receiving part 2 , In 3 In particular, it can also be seen that the receiving part-side threaded portion 6 is designed as a round thread.

Also shown is an overall height H_2 of the receiving part 2 , which may for example be in a range of 250 mm to 600 mm.

Also shown is a height H10_2 of the further cylindrical portion 10 , which can be in a range of 5 mm to 15 mm. Also shown is a height H6_2 of the receiving part-side threaded portion 6 , This height H6_2 can be between 2 mm to 100 mm, preferably between 5 mm to 45 mm.

In 4 is a cross section through the in 1 illustrated headboard 4 shown. Again, it is clear that too 2 described passage opening 5 , Also shown is a first diameter ID1_4 of the outlet opening 5 , The first diameter ID1_4 of the outlet opening is smaller than that in FIG 3 shown further inner diameter ID2_2 of the further hollow cylindrical portion 10 of the receiving part 2 ,

Also shown is a minimum outer diameter ADmin_7 of the headboard side threaded portion 7 , A difference between the minimum outer diameter ADmin_7 and the first diameter ID1_4 of the exhaust port 5 This forms a minimum wall thickness of the head part 4 , Also shown is a maximum outer diameter ADmax_7 of the head part-side threaded portion 7 ,

The headboard 4 in this case includes the headboard side threaded portion 7 , a first hollow cylindrical portion 27 and another hollow cylindrical portion 28 , wherein in the vertical direction z, the first hollow cylindrical portion 27 to the headboard side threaded portion 7 and the further hollow cylindrical portion 28 to the first hollow cylindrical 27 Section connects.

An outer diameter of the first hollow cylindrical portion 27 is greater than the maximum outer diameter ADmax_7 of the headboard side threaded portion 7 , Thus, the head part forms 4 stop edges 12 or surfaces for the receiving part 2 , in particular a vertical direction 7 upper end or upper end side of the receiving part 2 , out.

An outer diameter of the further hollow cylindrical portion 28 is again smaller than the outer diameter of the first hollow cylindrical portion 27 and smaller than the first diameter ID1_4 of the exhaust port 5 , However, the outer diameter of the further hollow cylindrical portion 28 greater than the minimum inner diameter of the outlet opening 5 ,

5 shows a cross section through a head part 4 in a further embodiment.

Unlike the in 4 illustrated headboard 4 has the in 5 illustrated headboard 4 a holding section 13 for holding the head part 4 on a holding structure, not shown.

The holding section 13 here has a hollow cylindrical section 14 on or trains this. Next, the holding section 13 an annular section 16 on or trains this. About the annular section 16 are an upper end of the headboard 4 with an upper end of the hollow cylindrical portion 14 connected. In particular, the annular section can 16 the previously explained first hollow cylindrical portion 27 of the headboard 4 with the hollow cylindrical section 14 of the holding section 13 connect. The annular section 16 and the hollow cylindrical portion 14 can be formed in one piece. Also can headboard 4 and holding section 13 be formed in one piece.

The hollow cylindrical section 14 is here at a first end face, which can also be referred to as the lower end face, open. The annular section 16 in this case forms an end face of the hollow cylindrical portion 14 on a further end face, which can also be referred to as the upper end side. Thus, the hollow cylindrical section has 14 a closed further end.

The headboard 4 or the in 4 shown headboard structure is in this case in an inner volume of the hollow cylindrical portion 14 arranged and protrudes at the first end of the hollow cylindrical portion 14 out of this internal volume.

An inner diameter of the hollow cylindrical portion 14 is greater than a maximum outer diameter of the head part 4 , Thus, the head part forms 4 with the holding section 13 a blind hole receiving opening 15 in the form of an annular recess, which can serve to receive portions of a support structure. In 5 is shown that the annular gap-blind hole-like receiving opening 15 is formed stepped, with an inner diameter of the hollow cylindrical portion 14 along the vertical direction z jump-like and / or steadily, in particular linear, change, in particular reduce, can.

6 shows a cross section through a vertical direction z upper end of an evaporation device. The evaporation device in this case comprises a device according to the invention 1 for holding evaporating material with a head part 4 , which according to the in 5 illustrated embodiment is formed.

It is shown that the headboard 4 on an upper section 17 the evaporation device is placed. The evaporation device in this case comprises an at least partially hollow cylindrical heating device 18 that covers much of the headboard 4 includes. Between the heater 18 and the headboard 4 can, at least in sections, a non-designated insulating material may be arranged.

Furthermore, the evaporation device comprises a hollow cylindrical insulating space 19 and a hollow cylindrical cooling device 20 , where the isolation room 19 between the cooling device 20 and the heater 18 is arranged. The isolation room 19 here denotes a cavity, eg a vacuumized cavity. The isolation room 19 This is from a hollow cylindrical insulating cylinder 22 edged. The cooling device 20 In turn, it consists of an outer cylinder and an inner cylinder, wherein between the inner and the outer cylinder, a cooling fluid can be arranged or flow.

Here it is shown that an upper end of the heater 18 , the insulation room 19 and the cooling device 20 in the receiving opening 15 protrude or in this receiving opening 15 are arranged. As a result, the headrest is supported 4 over the hollow cylindrical section 14 , in particular over the lower end of the hollow cylindrical portion 14 and the stopper surface formed by the steps, on the cooling device 20 and a retaining ring 21 from.

Further shown is this retaining ring 21 , on the one hand a stop element for the insulating cylinder 22 and / or the cooling device 20 forms and on the other hand another hollow cylindrical insulating sheet 23 jammed. The insulation sheet 23 protrudes with its upper end in an annular groove in the annular portion 16 , The retaining ring 21 may in this case comprise an inner ring and an outer ring, wherein the outer ring on an outer circumferential surface of the insulating sheet 23 and the inner ring on an inner circumferential surface of the insulating sheet 23 is applied. Next, the retaining ring 21 Connecting webs for connecting the inner ring and outer ring have, through slots in the insulating sheet 23 extend, wherein the slots at the lower end of the insulating sheet 23 are arranged. The retaining ring 21 can by a retaining screw 24 be tense.

The hollow cylindrical section 14 is supported in particular by the retaining ring 21 or the retaining screw 24 and a support member 26 on the cooling device 20 , in particular on an upper cooling jacket element 25 , from. The cooling jacket element 25 in this case closes the between the outer and inner cylinder of the cooling device 20 enclosed cavity.

Thus, a hanging attachment of the device according to the invention 1 allows. However, this type of hanging attachment to parts of the evaporator device is only possible because the formation of the receiving part side threaded portion as stiffening element sufficient mechanical strength of the device 1 , in particular of the receiving part 2 , guaranteed.

LIST OF REFERENCE NUMBERS

1

Device for receiving evaporating material

2

receiving part

3

receiving volume

4

headboard

5

outlet

6

receiving part side threaded portion

7

Headboard side threaded section

8th

hollow cylindrical section

9

hemispherical section

10

another hollow cylindrical section

12

stop surface

13

holding section

14

hollow cylindrical section

15

receiving opening

16

annular section

17

upper section

18

heater

19

isolation room

20

cooling device

21

retaining ring

22

insulating

23

insulation sheet

24

retention screw

25

Cooling jacket element

26

supporting member

27

first hollow cylindrical section

28

another hollow cylindrical section

z

vertical direction

ID1_2

 first inner diameter of the receiving part

ID2_2

 further inner diameter of the receiving part

WS_2

 Wall thickness of the receiving part

H2

Total height of the receiving part

H6_2

Height of the receiving part side threaded portion

H10_2

 Height of the further hollow cylindrical section

ID1_4

 first inner diameter of the head part

ADmin_7

minimum outer diameter of the head part side threaded portion

ADmax_7

maximum outer diameter of the head part side threaded portion

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• WO 2007/069865 A1 [0006]
• US 4812326 [0007]
• US 2007/0289526 A1 [0008, 0029]
• US 2009/0229524 A1 [0009]
• US 2010/0040780 A1 [0010, 0029]
• US 2010/0031878 A1 [0011, 0029]
• JP 2290963A [0012]

Claims (14)

Device for receiving vaporized material, the device ( 1 ) a receiving part ( 2 ) with a receiving volume ( 3 ), the device ( 1 ) a headboard ( 4 ) with an outlet opening ( 5 ), wherein the receiving part ( 2 ) a threaded portion ( 6 ) for mechanical connection with the head part ( 4 ), wherein the head part ( 4 ) a corresponding threaded portion ( 7 ) to mechanical connection with the receiving part ( 2 ), characterized in that the receiving part ( 2 ) is formed of pyrolytic boron nitride. Apparatus according to claim 1, characterized in that the threaded portion ( 6 ) of the receiving part ( 2 ) is formed as an internal thread, wherein the corresponding threaded portion ( 7 ) of the header ( 4 ) is designed as an external thread. Apparatus according to claim 1, characterized in that the threaded portion ( 6 ) of the receiving part ( 2 ) is formed as an external thread, wherein the corresponding threaded portion ( 7 ) of the header ( 4 ) is designed as an internal thread. Device according to one of the preceding claims, characterized in that the threaded portion ( 4 ) of the receiving part ( 2 ) is formed as a stiffening element. Device according to one of the preceding claims, characterized in that the threaded portion ( 6 ) of the receiving part ( 2 ) a slope of a range between 2 mm and 50 mm and / or a number of threads of a range between 1 and 10 and / or an outer diameter of a range between 10 mm and 200 mm and / or an inner diameter of a range between 10 mm and 200 mm and / or a core diameter from a range between 10 mm and 200 mm and / or has a flank angle from a range between 30 ° and 120 °. Device according to one of the preceding claims, characterized in that the threaded portion ( 6 ) of the receiving part ( 2 ) is designed as a round thread. Device according to one of the preceding claims, characterized in that the head part ( 4 ) is made of graphite. Device according to one of the preceding claims, characterized in that a maximum wall thickness of the receiving part ( 2 ) is less than or equal to 5.0 mm. Device according to one of the preceding claims, characterized in that the head part ( 4 ) at least one fastening means for arranging the head part ( 4 ) has on a support structure or forms such a fastener. Device according to one of claims 1 to 9, characterized in that the head part ( 4 ) has at least one subsection, wherein an outer diameter of the head part ( 4 ) in this section. Device according to one of claims 1 to 10, characterized in that the head part ( 4 ) has at least one partial section with a predetermined outer diameter, wherein the predetermined outer diameter of the partial section is greater than the outer diameter (s) of the partial sections of the head part ( 4 ), which is along the center line of the head ( 4 ) is arranged adjacent to the portion having the predetermined outer diameter / are. Device according to one of claims 1 to 11, characterized in that the head part ( 4 ) has or forms a stop edge. Device according to one of claims 1 to 12, characterized in that in a first section of a passage opening ( 5 ) of the header ( 4 ) the diameter of the passage opening ( 5 ) along the center line of the head part ( 4 ) from an inlet-side end of the passage opening ( 5 ) to the outlet end of the passage opening ( 5 ), wherein the diameter in the remaining section is increased again. Method for producing a device ( 1 ) for receiving vaporized material, wherein a receiving part ( 2 ) with a receiving volume ( 3 ), wherein a header ( 4 ) with an outlet opening ( 5 ), wherein the receiving part ( 2 ) with a threaded portion ( 6 ) for mechanical connection with the head part ( 4 ), the head part ( 4 ) with a corresponding threaded portion ( 7 ) for mechanical connection with the receiving part ( 2 ), characterized in that the receiving part ( 2 ) is formed of pyrolytic boron nitride.

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