DE102013210594A1 - Sensor und Verfahren zum Betreiben eines Sensors - Google Patents

Sensor und Verfahren zum Betreiben eines Sensors Download PDF

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Publication number
DE102013210594A1
DE102013210594A1 DE102013210594.0A DE102013210594A DE102013210594A1 DE 102013210594 A1 DE102013210594 A1 DE 102013210594A1 DE 102013210594 A DE102013210594 A DE 102013210594A DE 102013210594 A1 DE102013210594 A1 DE 102013210594A1
Authority
DE
Germany
Prior art keywords
gate unit
sensor
channel region
channel
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102013210594.0A
Other languages
German (de)
English (en)
Inventor
Ando Feyh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE102013210594.0A priority Critical patent/DE102013210594A1/de
Priority to PCT/EP2014/060930 priority patent/WO2014195185A1/de
Priority to CN201480032219.8A priority patent/CN105393096B/zh
Priority to EP14728142.2A priority patent/EP3004818A1/de
Publication of DE102013210594A1 publication Critical patent/DE102013210594A1/de
Withdrawn legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/42Photometry, e.g. photographic exposure meter using electric radiation detectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/08Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
    • H01L31/10Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
    • H01L31/101Devices sensitive to infrared, visible or ultraviolet radiation
    • H01L31/112Devices sensitive to infrared, visible or ultraviolet radiation characterised by field-effect operation, e.g. junction field-effect phototransistor
    • H01L31/113Devices sensitive to infrared, visible or ultraviolet radiation characterised by field-effect operation, e.g. junction field-effect phototransistor being of the conductor-insulator-semiconductor type, e.g. metal-insulator-semiconductor field-effect transistor
    • H01L31/1136Devices sensitive to infrared, visible or ultraviolet radiation characterised by field-effect operation, e.g. junction field-effect phototransistor being of the conductor-insulator-semiconductor type, e.g. metal-insulator-semiconductor field-effect transistor the device being a metal-insulator-semiconductor field-effect transistor

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Pressure Sensors (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
DE102013210594.0A 2013-06-07 2013-06-07 Sensor und Verfahren zum Betreiben eines Sensors Withdrawn DE102013210594A1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE102013210594.0A DE102013210594A1 (de) 2013-06-07 2013-06-07 Sensor und Verfahren zum Betreiben eines Sensors
PCT/EP2014/060930 WO2014195185A1 (de) 2013-06-07 2014-05-27 Feldeffekttransistor-infrarotsensor mit beweglicher gateelektrode
CN201480032219.8A CN105393096B (zh) 2013-06-07 2014-05-27 具有可活动的栅极的场效应晶体管红外传感器
EP14728142.2A EP3004818A1 (de) 2013-06-07 2014-05-27 Feldeffekttransistor-infrarotsensor mit beweglicher gateelektrode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102013210594.0A DE102013210594A1 (de) 2013-06-07 2013-06-07 Sensor und Verfahren zum Betreiben eines Sensors

Publications (1)

Publication Number Publication Date
DE102013210594A1 true DE102013210594A1 (de) 2014-12-11

Family

ID=50884895

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102013210594.0A Withdrawn DE102013210594A1 (de) 2013-06-07 2013-06-07 Sensor und Verfahren zum Betreiben eines Sensors

Country Status (4)

Country Link
EP (1) EP3004818A1 (zh)
CN (1) CN105393096B (zh)
DE (1) DE102013210594A1 (zh)
WO (1) WO2014195185A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108885136B (zh) * 2015-12-16 2021-12-24 米克罗森斯电子工贸有限公司 微测辐射热计结构

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10019408C2 (de) 2000-04-19 2003-11-13 Bosch Gmbh Robert Feldeffekttransistor, insbesondere zur Verwendung als Sensorelement oder Beschleunigungssensor, und Verfahren zu dessen Herstellung

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005208582A (ja) * 2003-12-24 2005-08-04 Sanyo Electric Co Ltd 光センサおよびディスプレイ
TWI303714B (en) * 2004-10-14 2008-12-01 Toshiba Kk Nucleic acid detecting sensor, nucleic acid detecting chip, and nucleic acid detecting circuit
US8097850B2 (en) * 2006-05-25 2012-01-17 Panasonic Electric Works Co., Ltd. Infrared sensor
US7804143B2 (en) * 2008-08-13 2010-09-28 Intersil Americas, Inc. Radiation hardened device
US8716768B2 (en) * 2011-10-20 2014-05-06 Omnivision Technologies, Inc. Transistor with self-aligned channel width

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10019408C2 (de) 2000-04-19 2003-11-13 Bosch Gmbh Robert Feldeffekttransistor, insbesondere zur Verwendung als Sensorelement oder Beschleunigungssensor, und Verfahren zu dessen Herstellung

Also Published As

Publication number Publication date
EP3004818A1 (de) 2016-04-13
CN105393096A (zh) 2016-03-09
CN105393096B (zh) 2017-07-18
WO2014195185A1 (de) 2014-12-11

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Legal Events

Date Code Title Description
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee