DE102011007756A1 - Positionsmesseinrichtung sowie Maßstab und Verfahren zur Herstellung eines Maßstabs - Google Patents

Positionsmesseinrichtung sowie Maßstab und Verfahren zur Herstellung eines Maßstabs Download PDF

Info

Publication number
DE102011007756A1
DE102011007756A1 DE102011007756A DE102011007756A DE102011007756A1 DE 102011007756 A1 DE102011007756 A1 DE 102011007756A1 DE 102011007756 A DE102011007756 A DE 102011007756A DE 102011007756 A DE102011007756 A DE 102011007756A DE 102011007756 A1 DE102011007756 A1 DE 102011007756A1
Authority
DE
Germany
Prior art keywords
layer
scale
substrate
division
carrier layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102011007756A
Other languages
German (de)
English (en)
Inventor
Alexander Frank
Marc Oliver TIEMANN
Dr. Heumann Martin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Priority to DE102011007756A priority Critical patent/DE102011007756A1/de
Priority to EP12152572.9A priority patent/EP2515086B1/de
Priority to ES12152572.9T priority patent/ES2567781T3/es
Priority to JP2012089980A priority patent/JP6298589B2/ja
Priority to US13/448,590 priority patent/US8844152B2/en
Priority to CN201210117319.3A priority patent/CN102749023B/zh
Publication of DE102011007756A1 publication Critical patent/DE102011007756A1/de
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/2006—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
    • G01D5/2013—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils by a movable ferromagnetic element, e.g. a core
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49826—Assembling or joining

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
DE102011007756A 2011-04-20 2011-04-20 Positionsmesseinrichtung sowie Maßstab und Verfahren zur Herstellung eines Maßstabs Withdrawn DE102011007756A1 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE102011007756A DE102011007756A1 (de) 2011-04-20 2011-04-20 Positionsmesseinrichtung sowie Maßstab und Verfahren zur Herstellung eines Maßstabs
EP12152572.9A EP2515086B1 (de) 2011-04-20 2012-01-26 Positionsmesseinrichtung sowie Maßstab
ES12152572.9T ES2567781T3 (es) 2011-04-20 2012-01-26 Dispositivo de medición de la posición así como escala
JP2012089980A JP6298589B2 (ja) 2011-04-20 2012-04-11 エンコーダ並びにスケール及びスケールを製造するための方法
US13/448,590 US8844152B2 (en) 2011-04-20 2012-04-17 Position measuring instrument, scale, and method for producing a scale
CN201210117319.3A CN102749023B (zh) 2011-04-20 2012-04-20 位置测量设备以及标尺和用于制造标尺的方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102011007756A DE102011007756A1 (de) 2011-04-20 2011-04-20 Positionsmesseinrichtung sowie Maßstab und Verfahren zur Herstellung eines Maßstabs

Publications (1)

Publication Number Publication Date
DE102011007756A1 true DE102011007756A1 (de) 2012-10-25

Family

ID=45528983

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102011007756A Withdrawn DE102011007756A1 (de) 2011-04-20 2011-04-20 Positionsmesseinrichtung sowie Maßstab und Verfahren zur Herstellung eines Maßstabs

Country Status (6)

Country Link
US (1) US8844152B2 (https=)
EP (1) EP2515086B1 (https=)
JP (1) JP6298589B2 (https=)
CN (1) CN102749023B (https=)
DE (1) DE102011007756A1 (https=)
ES (1) ES2567781T3 (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011007756A1 (de) * 2011-04-20 2012-10-25 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung sowie Maßstab und Verfahren zur Herstellung eines Maßstabs
US8739424B2 (en) * 2011-06-24 2014-06-03 Mitutoyo Corporation Structure for protecting scale graduations
GB201311856D0 (en) * 2013-07-02 2013-08-14 Gill Res And Dev Ltd A position indicator device
WO2015010669A1 (de) * 2013-07-23 2015-01-29 BALLUF GmbH Verfahren zur dynamischen linearisierung von sensorsignalen eines magnetband-längenmesssystems
DE102014217458A1 (de) * 2014-09-02 2016-03-03 Schaeffler Technologies AG & Co. KG Encoder und Sensorvorrichtung für ein drehbares Maschinenteil
ES2618855T3 (es) * 2014-10-14 2017-06-22 Dr. Johannes Heidenhain Gmbh Dispositivo de medición de posición con dispositivo para la compensación de errores por dilatación térmica de una regla graduada
DE102017123772B4 (de) * 2017-10-12 2019-06-19 Paul Tutzu Elektromagnetisches Messsystem für die Erfassung von Länge und Winkel basierend auf dem Magnetoimpedanzeffekt
DE102018211402A1 (de) 2018-07-10 2020-01-16 Dr. Johannes Heidenhain Gmbh Induktive Positionsmesseinrichtung
DE102020214235A1 (de) * 2020-11-12 2022-05-12 Robert Bosch Gesellschaft mit beschränkter Haftung Induktive Positionssensoreinrichtung, Antriebseinrichtung
JP2022125006A (ja) * 2021-02-16 2022-08-26 株式会社ミツトヨ スケールおよびその製造方法
DE102022102338A1 (de) * 2021-02-16 2022-08-18 Mitutoyo Corporation Skala und Verfahren zu ihrer Herstellung
EP4567381B1 (de) 2023-12-07 2026-03-04 Dr. Johannes Heidenhain GmbH Induktive positionsmesseinrichtung

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0743508A2 (en) 1995-05-16 1996-11-20 Mitutoyo Corporation Induced current position transducer

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2043919A5 (https=) * 1969-05-02 1971-02-19 Cii
DE3347052A1 (de) * 1983-12-24 1985-07-04 Robert Bosch Gmbh, 7000 Stuttgart Verfahren und vorrichtung zur messempfindlichkeitserhoehung von beruehrungsfrei arbeitenden wegmesssensoren
JPS61159101A (ja) * 1984-10-19 1986-07-18 コルモーゲン　コーポレイション 位置および速度センサ
US4893077A (en) * 1987-05-28 1990-01-09 Auchterlonie Richard C Absolute position sensor having multi-layer windings of different pitches providing respective indications of phase proportional to displacement
DE19947277A1 (de) * 1999-09-30 2001-04-05 Heidenhain Gmbh Dr Johannes Positionsmeßsystem mit integriertem Beschleunigungssensor
JP3668406B2 (ja) * 2000-03-13 2005-07-06 株式会社ミツトヨ 電磁誘導型位置検出装置
EP1164358B1 (de) * 2000-06-16 2005-08-24 AMO Automatisierung Messtechnik Optik GmbH Induktives Längenmesssystem
DE20011223U1 (de) * 2000-06-26 2000-10-05 Kindler, Ulrich, Prof. Dr.-Ing., 22143 Hamburg Vorrichtung zur berührungslosen Wegmessung, insbesondere zur Stellungs- und Bewegungserfassung
JP4435613B2 (ja) * 2003-10-14 2010-03-24 ハイデルベルガー ドルツクマシーネン アクチエンゲゼルシヤフト 版の画像付け装置
US7259553B2 (en) * 2005-04-13 2007-08-21 Sri International System and method of magnetically sensing position of a moving component
JP3128628U (ja) * 2006-10-31 2007-01-18 株式会社ミツトヨ リニアエンコーダ用スケール
DE102011007756A1 (de) * 2011-04-20 2012-10-25 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung sowie Maßstab und Verfahren zur Herstellung eines Maßstabs
DE102012203193A1 (de) * 2012-03-01 2013-09-05 Dr. Johannes Heidenhain Gmbh Längenmesseinrichtung
DE102012203220A1 (de) * 2012-03-01 2013-09-05 Dr. Johannes Heidenhain Gmbh Längenmesseinrichtung

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0743508A2 (en) 1995-05-16 1996-11-20 Mitutoyo Corporation Induced current position transducer

Also Published As

Publication number Publication date
EP2515086A2 (de) 2012-10-24
ES2567781T3 (es) 2016-04-26
CN102749023A (zh) 2012-10-24
JP2012225912A (ja) 2012-11-15
US20120266478A1 (en) 2012-10-25
CN102749023B (zh) 2016-12-14
US8844152B2 (en) 2014-09-30
EP2515086B1 (de) 2016-04-06
JP6298589B2 (ja) 2018-03-20
EP2515086A3 (de) 2013-12-25

Similar Documents

Publication Publication Date Title
EP2515086B1 (de) Positionsmesseinrichtung sowie Maßstab
DE69707536T2 (de) Induktive Linearpositionsgebervorrichtung
DE69315665T2 (de) Ein mechanischer Sensor
DE20011223U1 (de) Vorrichtung zur berührungslosen Wegmessung, insbesondere zur Stellungs- und Bewegungserfassung
EP2521894B1 (de) Verfahren und vorrichtung zur erfassung von magnetfeldern
DE69519227T2 (de) Berührungsloser magnetoelastischer drehmomentwandler
EP0170723A2 (de) Verfahren und Vorrichtung zur Messempfindlichkeitserhöhung von berührungsfrei arbeitenden Wegmesssensoren
CH675481A5 (https=)
DE112011101948T5 (de) Positionssensor
EP1965178B1 (de) Induktiver Sensor
DE102013202078A1 (de) Positionssensor
DE69407194T2 (de) Magnetoresistiver stromsensor und verfahren zu seiner herstellung
DE69406169T2 (de) Mechanischer Sensor
EP2834601B1 (de) Verfahren und anordnung zur positionsbestimmung eines bauteils
DE69418952T2 (de) Magnetoresistive Anordnung und Fühler mit wiederholenden geometrischen Strukturen
DE102005009390B3 (de) Kraftsensor, Verfahren zur Ermittlung einer auf einen Kraftsensor wirkenden Kraft mittels eines Mehrschichtsystems aus magnetischen Schichten
DE102011078956A1 (de) Teilungsträger für eine Positionsmesseinrichtung und Verfahren zur Herstellung des Teilungsträgers
DE102022106912A1 (de) Magnetsensor
DE4238863C2 (de) Vorrichtung zur Messung mechanischer Spannungszustände in Bauteilen
EP3574297B1 (de) Magnetischer kraftsensor und dessen herstellung
DE102019132543A1 (de) Magnetkern aus nanokristallinem laminat für ein induktives bauelement
DE3417893A1 (de) Anordnung zum beruehrungslosen nachweis bzw. zur beruehrungslosen messung mechanischer spannungszustaende von maschinenteilen
DE102017202835A1 (de) Sensorelement und Sensoreinrichtung
EP2281180B1 (de) Masselement für ein längenmesssystem
DE19733885A1 (de) Verfahren zum Messen von Wegen und Drehwinkeln an bewegten Gegenständen mit einer hartmagnetischen Oberfläche und Vorrichtung zur Durchführung des Verfahrens

Legal Events

Date Code Title Description
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee