DE102010029278B4 - Sensor and actuator for multiple rotational degrees of freedom - Google Patents

Abstract

Device (9) having at least one spiral spring (1) made of strip material (2) wound in a main plane of extension about an axis (8) running normal to the main plane of extension, a first end (7) of the strip material (2) being attached to a base (10 ), wherein a second end (6) of the strip material (2) on a device part (11) engages, wherein the device part (11) relative to the base (10) at least one rotational degree of freedom for rotation about the axis (8), wherein at least one surface (3, 13, 14, 15) of the strip material (2) running in its one main extension direction parallel to the axis (8) and winding around it in its other main extension direction attacks at least one mechanical-electrical converter (4), wherein at least two spiral springs (1) wound into one another are provided with mechanical-electrical transducers (4) acting on their band materials (2), the first ends (7) of the band materials ( 2) of the at least two coil springs (1) fixed to the same base (10) and wherein the second ends (6) of the band materials (2) of the at least two coil springs (1) on the device part (11) attack, characterized in that the at least two spiral springs (1) with mutually orthogonal main extension planes are wound into each other.

Description

TECHNICAL FIELD OF THE INVENTION

The invention relates to a device with coil springs and the further features of the preamble of independent claim 1.

In particular, the present invention relates to such a device which can be used as a sensor for a plurality of rotational degrees of freedom, wherein it in turn is particularly important to detect angular accelerations in the direction of rotational degrees of freedom. The detection of angles of rotation in the direction of rotational degrees of freedom may also be of interest. In parallel with this, the present invention also relates to such devices which are suitable as an actuator for a plurality of rotational degrees of freedom in order to apply torques or angles of rotation in the direction of rotational freedom of rotation.

However, the present invention is expressly not limited to such devices that cover only rotational degrees of freedom. Rather, additional translational degrees of freedom can be covered.

STATE OF THE ART

From the CH 684 029 A5 is a sensor for measuring angular acceleration known. The sensor is structured from a silicon carrier consisting of a substrate, an insulating layer applied thereto and a polysilicon layer applied to the insulating layer. From the polysilicon layer, an anchor point is structured, which is firmly connected to the substrate via the insulating layer. From this anchor point as the center two spirals run into each other, which are formed only in the polysilicon layer and are not connected via the anchor point with the substrate and thus are like coil springs movable. In each case on the outer turns of the spirals movable masses are also formed only in the polysilicon layer, which are arranged in a star shape to the anchor point. You have on two sides comb-shaped finger structures. Likewise in a star shape around the anchor point, fixed electrodes are arranged between the movable masses and are connected to the substrate and / or a frame. The fixed electrodes also have comb-shaped finger structures. The finger structures of the movable masses and the finger structures of the fixed electrodes engage each other. These finger structures together form interdigital capacitors or electrostatic reluctance drives, which can be used for position control but also for signal detection. A signal detection in this structure is also possible with arranged on the spirals piezoresistors. With this sensor, angular accelerations can be detected around an axis perpendicular to the carrier surface. The Archimedean spirals act like coil springs, which are stretched or compressed depending on the rotors, whereby the position of the movable masses is changed with respect to the fixed electrodes, which leads to changes in the electrical conditions of the interdigital capacitors. Due to the meshing finger structures of the movable masses and of the stationary electrodes, this known sensor is fundamentally only suitable for relatively small deflections of the movable masses. Moreover, its mobile masses are exclusively inert masses, which are detected against angular acceleration of the anchor point. Also, due to its miniaturized design, the known sensor, for example, not suitable for transmitting larger absolute forces between its anchor point and the moving masses.

From the DE 698 37 752 T2 a topology and movement measuring instrument is known in which a plurality of bending sensors and Verdrillungssensoren are arranged on a flexible pad which is bendable in at least two degrees of freedom. A single portion of the flexible pad extends from a base to the device part whose deflection in both the X, Y and Z directions as well as in all three rotational degrees of freedom can be detected by the signals from the flexure sensors and the twist sensors.

From the DE 601 30 940 T2 are a piezoelectric actuator with the features of the preamble of claim 1 and a device for information storage known. In this case, the piezoelectric actuator has two in its common main extension plane about an axis wound spiral springs with laminated piezoelectric layers. The coil springs are fixed in different angular ranges about the axis with their outer ends to a base and engage in different angular ranges about the axis with their other ends to a slider. By electrically driving the piezoelectric layers, the slider is rotated relative to the base about the normal to the main extension planes of the coil springs axis.

From the CH 684 029 A5 An acceleration sensor is known in which two spiral springs are wound around a common axis. In this case, the coil springs are fastened with their inner ends to an anchor point, while they massively support at their outer ends, which with finger structures in the circumferential direction engage the anchor point in electrodes, with the help of which deflections of the masses are detected.

From the JP 60070981 A For example, a piezoelectric rotary device is known. This rotating device comprises a coil spring made of a piezoelectric transducer material. The coil spring engages with its inner end to a shaft. It is fixed with its outer end. By applying a voltage to the piezoelectric transducer material of the coil spring, the shaft is rotated about its axis.

The US 6,121,568 A discloses an electric discharge machine having at least one wire electrode and a method of machining a workpiece in such a machine. The machine has a guide head for the wire electrode. The guide head is spherical with a central hole for the wire electrode. To rotate the guide head, piezoelectric actuators which act on the outer circumference of the guide head and operate according to the inchworm principle are provided. Specifically described is a rotation of the guide head only about the Z axis.

From the US 6,619,126 B2 a mechanical-electrical sensor is known. The sensor includes an inner body, an outer frame, and a plurality of individual piezoelectric support sheets that support the inner body in the frame. In this case, the support can take place in a plane, wherein the films extend within the plane, or be formed in three dimensions, wherein the films extend in all three spatial directions radially away from the inner body to the frame.

OBJECT OF THE INVENTION

The invention has for its object to provide a device with the features of the preamble of independent claim 1, which is suitable as a sensor and actuator for larger angles of rotation and forces in the direction of various rotational degrees of freedom.

SOLUTION

According to the invention, the object of the invention is achieved by a device having the features of independent patent claim 1. Preferred embodiments of the new device are defined in the dependent claims 2 to 14. The claim 15 relates to the use of the new device as a sensor at least for rotational movements and the claim 16 relates to the use of the new device as an actuator, at least for rotational movements.

DESCRIPTION OF THE INVENTION

In the new device, at least one mechanical-electrical converter engages at least one surface of the strip material of each coil spring that extends parallel to the axis in its one main extension direction and that winds around it in its other main extension direction. Such a mechanical-electrical converter converts mechanical stresses into electrical signals and vice versa. A piezoresistor does not fall within this definition, even if the preferred embodiment of the mechanical-electrical transducer is a piezoelectric transducer. By the mechanical-electrical transducer in the device according to the invention on the running parallel to the axis and about the axis winding surface of the strip material, it has a high sensitivity to the rotations of the device supported by the coil spring device part. Thus, both rotational movements of the device part relative to the base can be detected accurately and given the stiffness of the coil spring specific torques and thus angular accelerations are assigned, as well as in the opposite direction rotational movements of the device part relative to the base are deliberately caused. Although the prevailing force-displacement ratios affect these two sensitivities in opposite directions, in known mechanical-electrical transducers the distance traveled with increasing voltage is usually very small, so that a massive travel magnification under defined conditions only for balanced conditions and not ensures that the mechanical-electrical transducer as a sensor against small movements would be insensitive.

In the new device, it is preferable that the first end fixed to the base is the end of the strip material located at the respective coil spring and the second end engaging to the device part is the inner end of the strip material at the respective coil spring. The coil spring thus winds around the resiliently supported device part.

Further, it is preferred in the new device, when the second end is fixed to the device part or at least via a solid-state joint on the device part attacks to create a play and dead-point connection here.

In the new apparatus, the mechanical-electrical transducer of each coil spring has a working direction curved along the respective surface of the band material around the axis. It is preferred if the mechanical-electrical converter has connection electrodes, which run along its working direction and thus along the surface of the strip material, which is engaged by the mechanical electrical transducer. It is also possible to form at least one of the terminal electrodes of the piezoelectric transducer by the strip material or to electrically contact at least over the strip material, if this is electrically conductive. The latter is the case when the strip material is a metal or a conductive carbon fiber composite. However, the strip material does not have to be electrically conductive, but may also consist of an electrically insulating plastic, optionally with reinforcement, for example, by glass fibers.

In the new device, the mechanical-electrical transducer may engage one of the two outer surfaces of the strip material of each coil spring and only one of these surfaces. In another preferred embodiment, the mechanical-electrical transducer engages two opposing inner surfaces of the strip material. In this embodiment of the new device, for example, the d ₁₅ effect of piezoelectric materials can be exploited. Preferably, in this embodiment of the new device, the mechanical-electrical converter extends in the region of the neutral fiber of the strip material.

Also, multiple mechanical-electrical transducers may engage the same or different surfaces of the strip material of each coil spring. It is preferred in this case that the plurality of mechanical-electrical transducers are distributed over the extent of the strip material between the base and the device part in order to act on different areas of the strip material or to detect deformations of these different areas of the strip material.

It is particularly preferred if the mechanical electrical transducer or transducers are extended over at least 25%, more preferably over at least 33% and most preferably over at least 50% of the extent of the strip material between the base and the device part. Ideally, they are at least substantially extended over the entire extent of the strip material between the base and the device part.

If a plurality of mechanical-electrical transducers are provided on both outer surfaces of the strip material of each coil spring, this can usually be extended to the working area with respect to rotational movements of the device part relative to the base relative to the case that the transducers are present only on one of the outer surfaces because mechanical-electrical converter often can not be stretched and shortened in the same way by electrical control.

With regard to the number of turns of each coil spring about the axis, a minimum number of turns, preferably of 2 turns, must be observed in order to initiate as pure as possible a rotational movement of the device part about the axis by the attack of the mechanical-electrical transducer on the strip material of the spiral spring and vice versa. On the other hand, it should be noted that, in a larger number of turns of the coil spring rotational movements of the device part relative to the base in ever smaller local deformations of the strip material of the coil spring express. In addition, with the same rigidity of the strip material, the overall rigidity of the support of the device part is always lower. Therefore, a significantly larger number of turns of the coil spring is usually not favorable.

Regarding the shape of the coil springs, an Archimedean spiral around the axis is preferred. However, other spiral shapes such as logarithmic, Fermatsche and hyperbolic spiral shapes may be used.

In the new device at least two, preferably three coil springs are wound with mutually orthogonal main extension planes into each other, wherein the first end of their band materials are fixed to the same base and wherein the second ends attack their band materials on the device part. It is understood that the deformations of the individual coil springs are not independent of each other, but this can be taken into account in the evaluation of the signals from the mechanical-electrical converters or their control.

Advantageous developments of the invention will become apparent from the claims, the description and the drawings. The advantages of features and of combinations of several features mentioned in the introduction to the description are merely exemplary and can come into effect alternatively or cumulatively, without the advantages having to be achieved by embodiments according to the invention. Further features are the drawings - in particular the illustrated geometries and the relative dimensions of several components to each other and their relative arrangement and operative connection - refer. The combination of features of different embodiments of the invention or features of different claims is also possible and is hereby stimulated. This also applies to those features which are shown in separate drawings or are mentioned in their description. These features can also be used Characteristics of different claims are combined.

list of figures

• 1 zeigt eine sich nur über einen Bogenwinkel von 90° erstreckende Spiralfeder mit darauf angeordnetem mechanisch-elektrischem Wandler und die Auslenkung eines freien Endes der Spiralfeder bei Ansteuerung des mechanisch-elektrischen Wandlers auf Längendehnung.
• 2 ist eine 1 entsprechende Darstellung einer sich über einen Bogenwinkel von 180° erstreckenden Spiralfeder.
• 3 ist eine 1 entsprechende Darstellung einer sich über einen Bogenwinkel von 270° erstreckenden Spiralfeder.
• 4 ist eine 1 entsprechende Darstellung einer sich über einen Bogenwinkel von 360° erstreckenden Spiralfeder.
• 5 ist eine 1 entsprechende Darstellung einer sich über einen Bogenwinkel von 540° erstreckenden Spiralfeder.
• 6 ist eine 1 entsprechende Darstellung einer sich über einen Bogenwinkel von 720° oder zwei Windungen entsprechenden Spiralfeder.
• 7 zeigt eine Vorrichtung mit einer zwei Windungen aufweisenden Spiralfeder und mehreren darin angeordneten mechanisch-elektrischen Wandlern.
• 8 zeigt eine Vorrichtung mit einer zwei Windungen aufweisenden Spiralfeder und darin im Bereich ihrer neutralen Faser integrierten mechanisch-elektrischen Wandlern.
• 9 zeigt eine Grundstellung einer Vorrichtung mit zwei jeweils zwei Windungen aufweisenden, ineinander gewundenen Spiralfedern und den Effekt deren gleichsinniger Ansteuerung durch an ihnen angebrachte mechanisch-elektrische Wandler.
• 10 zeigt die Anordnung gemäß 9 bei gegensinniger Ansteuerung der beiden Spiralfedern.
• 11 zeigt eine Ausführungsform der neuen Vorrichtung mit drei sich jeweils über einen Bogenwinkel von 270° erstreckenden Spiralfedern.
• 12 zeigt eine Vorrichtung mit vier sich jeweils über knapp eine Windung erstreckenden, ineinander gewundenen Spiralfedern bei Ansteuerung der Spiralfedern auf eine erste translatorische Bewegung des von ihnen abgestützten Vorrichtungsteils.
• 13 zeigt die Anordnung gemäß 12 bei Ansteuerung der Spiralfedern auf eine zweite translatorische Bewegung des von ihnen abgestützten Vorrichtungsteils.
• 14 zeigt die Anordnung gemäß 12 bei einer Ansteuerung der Spiralfedern auf eine Überlagung der translatorischen Bewegungen gemäß 12 und 13.
• 15 zeigt eine Vorrichtung mit vier Spiralfedern, die jeweils zwei Windungen aufweisen bei Ansteuerung auf eine rotatorische Bewegung des von ihnen abgestützten Vorrichtungsteils.
• 16 skizziert eine archimedische Spirale.
• 17 skizziert eine logarithmische Spirale.
• 18 skizziert eine fermatsche Spirale.
• 19 skizziert eine hyperbolische Spirale.
• 20 skizziert eine kaskadierte Anordnung mehrerer Vorrichtungen mit zueinander orthogonalen Rotationsfreiheitsgraden der einzelnen Kaskadenstufen; und
• 21 skizziert eine Anordnung von drei zueinander orthogonale Haupterstreckungsebenen aufweisenden, ineinander gewundenen Spiralfedern, die mit ihren inneren Enden an demselben Vorrichtungsteil angreifen und gegenüber einer hier nicht dargestellten Basis abstützen.

In the following the invention will be further explained and described with reference to preferred embodiments shown in the figures. It just shows 21 a device which as such falls under the claims.

• 1 shows a coil spring extending only over an arc angle of 90 ° with arranged thereon mechanical-electrical converter and the deflection of a free end of the coil spring when driving the mechanical-electrical converter to elongation.
• 2 is a 1 corresponding representation of a over a arc angle of 180 ° extending coil spring.
• 3 is a 1 corresponding representation of a over a arc angle of 270 ° extending coil spring.
• 4 is a 1 corresponding representation of a over a arc angle of 360 ° extending coil spring.
• 5 is a 1 corresponding representation of a over a arc angle of 540 ° extending coil spring.
• 6 is a 1 corresponding representation of a corresponding over an arc angle of 720 ° or two turns coil spring.
• 7 shows a device with a two-turns coil spring and a plurality of arranged therein mechanical-electrical converters.
• 8th shows a device with a two-turn coil spring and integrated therein in the region of its neutral fiber mechanical-electrical transducers.
• 9 shows a basic position of a device with two coils each having two turns, spiral springs wound into each other and the effect of the same direction control by attached to them mechanical-electrical converter.
• 10 shows the arrangement according to 9 with opposite control of the two coil springs.
• 11 shows an embodiment of the new device with three extending over an arc angle of 270 ° coil springs.
• 12 shows a device with four, each extending over just one turn, spiral springs inturned upon control of the coil springs on a first translational movement of the supported part of them device part.
• 13 shows the arrangement according to 12 upon control of the coil springs on a second translational movement of the device part supported by them.
• 14 shows the arrangement according to 12 in a control of the coil springs on a superposition of the translational movements according to 12 and 13 ,
• 15 shows a device with four coil springs, each having two windings when driven to a rotational movement of the device part supported by them.
• 16 Sketches an Archimedean spiral.
• 17 outlines a logarithmic spiral.
• 18 outlines a Fermatian spiral.
• 19 outlines a hyperbolic spiral.
• 20 outlines a cascaded arrangement of several devices with mutually orthogonal rotational degrees of freedom of the individual cascade stages; and
• 21 outlines an arrangement of three mutually orthogonal major planes extending, spiraling spiral springs, which engage with their inner ends on the same device part and support against a base, not shown here.

DESCRIPTION OF THE FIGURES

In the 1 shown spiral spring 1 is from a band material 2 bent over a bend angle of 90 °. On an outer surface 3 of the band material 2 is a mechanical-electrical converter 4 in the form of a piezoelectric transducer 5 arranged. Shown is next to the initial position of the coil spring 2 the deflection of a second, here free end 6 of the band material 3 opposite a first, fixed here end 7 , The deflected end 6 ' is with respect to the radius of curvature of the coil spring 2 deflected substantially radially inward.

At the coil spring 1 according to 2 , according to those 1 matches, except that the strip material 2 over an arc angle of 180 ° around the axis drawn here 8th winds, causes the control of the mechanical-electrical converter 4 on an increase in its length, although still a movement of the second end 6 to the axis 8th towards, but increasingly in the circumferential direction about the axis 8th , This will still be more evident at the spiral spring winding over an arc angle of 270 ° 1 according to 3 ,

When spiraling over a full turn spiral spring 1 according to 4 almost exclusively results in a deflection of the free end 6 in the circumferential direction.

At about 1.5 turns around the axis 8th extending spiral spring 1 according to 5 Although again comes a slight radial portion of the deflection of the free end 6 added; at the spiral spring extending over two full turns 1 according to 6 shifts the free end 6 upon activation of the mechanical-electrical converter on its outer surface 3 but again almost exclusively in the circumferential direction.

7 outlines a device 9 that according to the 1 to 6 deliberately exploited explained effect. Here is the coil spring 1 with her first end 7 at a base 10 set while her second end 6 on a device part 11 attacks, around the axis 8th rotatable relative to the base 10 is stored. It is between the end 6 and the device part 11 a not shown here in detail solid state joint 12 educated. On the outward facing outer surface 3 of the band material 2 Here are two mechanical-electrical converters 4 in the form of piezoelectric transducers 5 in different sections of the strip material 2 arranged. Two more mechanical-electrical converters 4 in the form of piezoelectric transducers 5 are in different sections of the strip material 2 on its inwardly facing outer surfaces 13 arranged. The on the outer surfaces 3 and 13 attacking mechanical-electrical converter 4 are alternately driven to the device part 11 in opposite directions around the axis 8th to rotate, or the electrical signals emitted by them are used to a rotational movement of the device part 11 opposite the base 10 to capture, for example, an angular acceleration about the axis 8th take.

In 8th is outlined that the one or more mechanical-electrical converters 4 also in the band material 2 integrated and there on inner surfaces 14 and 15 of the band material 2 can attack, for example, when it comes to piezoelectric transducers 5 which are driven by a d ₁₅ effect. Preferably, the piezoelectric transducers extend 5 in this case in the area of the neutral fibers of the strip material 2 ,

9 outlines an embodiment of the device 9 with two spiral springs 11 and indicates a rotation of the device part supported by them 11 clockwise when both coil springs 1 be driven in the same direction to a "unwinding" of the common axis by mechanical-electrical converter not shown here.

Opposite shows 10 the effect of opposing control of the two coil springs 1 the device according to 9 , where the spiral spring 1 whose ends in the illustrations on the left are just as controlled as in 9 and the other coil spring 1 on a "winding up" on the common axis. This results in a displacement of the device part 11 in the illustration of the figures down.

11 outlines the support of the device part 11 opposite the base 10 around the axis 8th by a total of 3 intertwined, each having an arc angle of 270 ° about the axis 8th extending coil springs 1 at the device 9 ,

12 shows a device 9 with a total of four coil springs 1 and arranged thereon mechanical-electrical transducers 4 for supporting the device part 11 , In this case, such a coordinated control of the coil springs 11 , each extending over an arc angle of about 270 °, indicated that a translational movement of the device part 11 results in the vertical direction of the figure.

13 sketched at the device 9 according to 12 such a controlled control of the coil springs 1 in that the device part 11 moved in a horizontal direction of the figure translational.

14 outlines the superimposition of the control of the coil springs 1 the device 9 according to 12 and 13 , This results in a translational movement of the device part 11 in the diagonal direction of the figure.

In contrast, outlined 15 again the effect of a co-directional control of all coil springs 1 at the device 9 according to the 12 to 14 , in a pure rotary motion of the device part 11 results.

Of the in the 16 to 19 Spiral shapes shown for the new device in 16 reproduced Archimedean spiral for the formation of the coil springs particularly preferred.

20 outlines a cascaded arrangement of devices 9 with coil springs 1 , wherein an inner device 9 that the device part 11 around an axis perpendicular to the plane of the drawing 8th towards a base 10 supports, with this base 10 turn to one in the 11 horizontally extending axis via two devices 9 ' at a base 10 ' supported, in turn, via two more devices 9 " around a vertical axis at a base 10 " is supported. The devices 9 . 9 ' and 9 " detect each rotational movements about one of the three orthogonal axes 8th or serves to control the device part 11 on such rotational movements.

In the device 9 according to 21 are three coil springs 1 whose main extension planes are aligned orthogonal to each other, wound into each other and jointly supported the same device part 11 opposite to the base not shown separately from where their ends 7 are fixed. It is understood that here the individual degrees of freedom of movement, in particular the three rotational degrees of freedom are not decoupled from one another, ie a rotation of the device part 11 relative to the base about an axis leads to the deformation of all three coil springs 1 even if the rotation is about an axis perpendicular to the main extension plane of one of the coil springs 1 runs.

Experimental testing of the new device revealed a largely linear relationship between the voltage at which piezoelectric transducers were driven on the coil spring and the angle about the axis around a rigid axis 8th mounted device part 11 could be twisted. With relatively low drive voltages of 400 volts, even with the piezoelectric transducers not extending over the entire extent of the strip material between the base and the device part, the device part could be statically rotated by 5 °, with an angular resolution of 0.02 ° being achieved. With dynamic operation in the range of the resonance frequency of the arrangement of 12 Hertz a dynamic rotation by 20 ° could be achieved. The corresponding experimental setup included a coil spring with two turns. Variations in the resonant frequency of the arrangement are possible via the stiffness of the coil springs in large areas.

LIST OF REFERENCE NUMBERS

1

spiral spring

2

band material

3

outer surface

4

mechanical-electrical converter

5

piezoelectric transducer

6

second end

7

first end

8th

axis

9

device

10

Base

11

device part

12

Solid joint

13

outer surface

14

inner surface

15

inner surface

Claims (16)

Device (9) having at least one spiral spring (1) made of strip material (2) wound in a main plane of extension about an axis (8) running normal to the main plane of extension, a first end (7) of the strip material (2) being attached to a base (10 ), wherein a second end (6) of the strip material (2) on a device part (11) engages, wherein the device part (11) relative to the base (10) at least one rotational degree of freedom for rotation about the axis (8), wherein at least one surface (3, 13, 14, 15) of the strip material (2) running in its one main extension direction parallel to the axis (8) and winding around it in its other main extension direction attacks at least one mechanical-electrical converter (4), wherein at least two spiral springs (1) wound into one another are provided with mechanical-electrical transducers (4) acting on their band materials (2), the first ends (7) of the band materials ( 2) of the at least two coil springs (1) fixed to the same base (10) and wherein the second ends (6) of the band materials (2) of the at least two coil springs (1) on the device part (11) attack, characterized in that the at least two spiral springs (1) with mutually orthogonal main extension planes are wound into each other. Device (9) according to one of the preceding claims, characterized in that at least three coil springs (1) are wound with mutually orthogonal main extension planes and each with at least one mechanical-electrical converter (4), wherein the first ends (7) of the strip materials ( 2) of the at least three coil springs (1) fixed to the same base (10) and wherein the second ends (6) of the band materials (2) of the at least three coil springs (1) on the device part (11) engage. Device (9) according to Claim 1 or 2 , characterized in that the first, fixed to the base (10) end (7) at the respective coil spring (1) outer end of the strip material (2) and the second, on the device part (11) engaging end (6) which is at the respective coil spring (1) inside the end of the strip material (2). Device (9) according to Claim 1 or 2 , characterized in that the second end (6) on the device part (11) is fixed or via a solid-state joint (12) on the device part (11) engages. Device (9) according to one of the preceding claims, characterized in that the mechanical-electrical converter (4) is a piezoelectric transducer (5). Device (9) according to one of the preceding claims, characterized in that the mechanical-electrical converter (4) has a working direction curved along the respective surface (3, 13, 14, 15) about the axis (8). Device (9) according to any one of the preceding claims, characterized in that the mechanical-electrical converter (4) has connection electrodes extending along its working direction. Device (9) according to one of the preceding claims, characterized in that the mechanical-electrical transducer (4) on one of the two outer surfaces (3, 13) of the strip material (2) engages. Device (9) according to one of the preceding claims, characterized in that the mechanical-electrical transducer (4) engages on two mutually opposite inner surfaces (14, 15) of the strip material (2). Device (9) according to Claim 9 , characterized in that the mechanical-electrical transducer (4) extends in the region of the neutral fiber of the strip material (2). Device (9) according to one of the preceding claims, characterized in that a plurality of mechanical-electrical transducers (4) over the extension of the strip material (2) between the base (10) and the device part (11) are arranged distributed. Device (9) according to one of the preceding claims, characterized in that the one or more mechanical-electrical converter (4) over at least 25%, preferably at least 33% and most preferably over at least 50% of the extension of the strip material (2) between the base (10) and the device part (11) are expanded. Device (9) according to one of the preceding claims, characterized in that the spiral spring (1) has one to three, preferably one and a half to two and a half and most preferably two turns of the strip material (2) about the axis (8). Device (9) according to one of the preceding claims, characterized in that the strip material (2) of the spiral spring (1) is wound around the axis (8) like an Archimedean spiral. Use of a device (9) according to any one of the preceding claims as a sensor for rotational movements of the device part (11) about the axes (8) of the coil springs (1) relative to the base (10). Use of a device (9) according to any one of the preceding claims as an actuator for rotational movements of the device part (11) about the axes (8) of the coil springs (1) relative to the base (10).

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