DE102010014377A1 - Leakage test structure for use in testing gas leakage in measuring system, has leakage detecting elements arranged behind one another and connected by dead volume, where volume is connected with atmosphere via adjusted opening - Google Patents

Leakage test structure for use in testing gas leakage in measuring system, has leakage detecting elements arranged behind one another and connected by dead volume, where volume is connected with atmosphere via adjusted opening Download PDF

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DE102010014377A1
DE102010014377A1 DE201010014377 DE102010014377A DE102010014377A1 DE 102010014377 A1 DE102010014377 A1 DE 102010014377A1 DE 201010014377 DE201010014377 DE 201010014377 DE 102010014377 A DE102010014377 A DE 102010014377A DE 102010014377 A1 DE102010014377 A1 DE 102010014377A1
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volume
leakage
measuring system
test leak
pressure
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DE201010014377
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German (de)
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Anmelder Gleich
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/007—Leak detector calibration, standard leaks

Abstract

The structure has two leakage detecting elements (1, 2) successively arranged behind one another and connected by a dead volume (4) i.e. intermediate volume, where the volume is connected with atmosphere (5) via an adjusted opening. A pressure regulating device produces pressure in the dead volume that is greater than pressure in a measuring system (6) to which the structure is attached. The structure consists of a cabinet with multiple components that jointly provide a descriptive function.

Description

Die Erfindung betrifft ein Testleck, welches bei verschieden großen Eingangsdrücken einen konstanten Gasstrom (Leckage) in ein Vakuum abgibt.The invention relates to a test leak, which emits a constant gas flow (leakage) in a vacuum at different input pressures.

Testlecks werden vorwiegend bei der Dichtheitsprüfung eingesetzt um Dichtprüfeinrichtungen zu kalibrieren und um diese zu überprüfen.Test leaks are mainly used in leak testing to calibrate and test leak test equipment.

Als Testlecks werden Löcher/Öffnungen/Materialien verwendet, die einen Gasdurchsatz aufweisen. Je nach Einsatzfall und Hersteller können Testlecks aus Glaskapillaren, gequetschten metallischen Kapillarrohren, Bohrungen (Blenden), mittels Laser oder Elektronenstrahl erzeugten Löchern in div. Materialien oder aus gasdurchlässigen, bzw. selektiv gasdurchlässigen, Materialien bestehen.Test leaks are holes / openings / materials that have a gas flow rate. Depending on the application and manufacturer, test leaks may consist of glass capillaries, pinched metallic capillary tubes, holes (apertures), laser or electron beam generated holes in div. Materials, or gas permeable or selectively gas permeable materials.

Bei Leckagen an geometrischen Öffnungen besteht das Problem, dass diese mit steigendem Eingangsdruck und gewünschter kleiner Leckagemenge im Durchmesser immer kleiner werden müssen. Je kleiner der Durchmesser ist um so kritischer ist eine reproduzierbare Herstellung und um so empfindlicher werden diese Lecks gegen eine mögliche Verstopfung durch Verunreinigungen.In the case of leaks at geometric openings, there is the problem that they must become smaller and smaller with increasing inlet pressure and the desired small leakage quantity. The smaller the diameter is the more critical is a reproducible production and the more sensitive are these leaks against possible clogging by impurities.

Ausgehend vom Stand der Technik ist es Aufgabe der Erfindung ein Testleck aufzuzeigen, welches mit unterschiedlichen Prüfdrücken betrieben werden kann und dabei immer einen konstanten Leckagestrom (Gasstrom) abgibt. Ferner lässt dieses Testleck größere geometrische Durchtrittsöffnungen für das Testgas zu als dies bei herkömmlichen Testlecks der Fall ist, wo die Druckdifferenz zwischen Gaseintritt und Gasaustritt nur über 1 leckbestimmendes Element erfolgt. Somit ist dieses Testleck unanfälliger gegen Verschmutzung/Verstopfung.Starting from the prior art, it is an object of the invention to show a test leak, which can be operated with different test pressures while always emits a constant leakage current (gas flow). Furthermore, this test leak allows larger geometric openings for the test gas than is the case with conventional test leaks, where the pressure difference between gas inlet and gas outlet takes place only via 1 leak-determining element. Thus, this test leak is less susceptible to contamination / blockage.

Um dies zu erreichen ist erfindungsgemäß vorgesehen, entsprechend der 1 zwei leckbestimmende Elemente (1 + 2) über ein kleines Todvolumen (4) miteinander zu verbinden. Das auf der Hochdruckseite (3) liegende leckbestimmende Element ist erfindungsgemäß so ausgeführt, dass die in das Todvolumen (4) austretende Gasmenge innerhalb einer durch den Messaufbau vorgegebenen Zeit, die sich im Todvolumen befindliche Gasmenge, verdrängt. Das Todvolumen, ist erfindungsgemäß, mit der Atmosphäre (5) verbunden.To achieve this, the invention provides, according to the 1 two leak-determining elements ( 1 + 2 ) about a small death volume ( 4 ) to connect with each other. That on the high pressure side ( 3 ) lying leakage-determining element according to the invention is designed so that in the death volume ( 4 ) escaping gas within a predetermined time by the measurement setup, which displaces the amount of gas in the dead volume. The death volume, according to the invention, with the atmosphere ( 5 ) connected.

Das zweite leckbestimmende Element (2) bildet die Verbindung zwischen Messsystem (6) (Vakuum) und Todraum (4). Somit entsteht an diesem leckbestimmenden Element (2) immer ein Differenzdruck, der der Differenz zwischen dem Druck im Todvolumen und dem Vakuum des Messsystems entspricht. Für die in das Messsystem austretende Gasmenge ist somit das zweite leckbestimmende Element (2) maßgebend.The second leak-determining element ( 2 ) forms the connection between the measuring system ( 6 ) (Vacuum) and dead space ( 4 ). This results in this leak-determining element ( 2 ) always a differential pressure corresponding to the difference between the pressure in the dead volume and the vacuum of the measuring system. For the amount of gas exiting into the measuring system, therefore, the second leak-determining element ( 2 ).

Claims (6)

Aufbau eines Testlecks, dadurch gekennzeichnet, daß zwei hintereinander angeordnete leckbestimmender Elemente über ein Todvolumen (Zwischenvolumen) miteinander verbunden sind, wobei das Zwischenvolumen über eine angepasste Öffnung mit der Atmosphäre verbunden ist.Structure of a test leak, characterized in that two successively arranged leak-determining elements via a dead volume (intermediate volume) are interconnected, wherein the intermediate volume is connected via a suitable opening with the atmosphere. Aufbau eines Testlecks gemäß Anspruch 1, dadurch gekennzeichnet, dass es mit einer Druckregeleinrichtung ausgestattet ist (Vakuum oder Überdruck), die es ermöglicht einen beliebigen Druck im Todraum zu erzeugen, der größer ist als der Druck im Messsystem an welches das Testleck angeschlossen ist.Structure of a test leak according to claim 1, characterized in that it is equipped with a pressure control device (vacuum or positive pressure), which makes it possible to generate any pressure in the dead space, which is greater than the pressure in the measuring system to which the test leak is connected. Aufbau und Verwendung eines Testlecks gemäß Anspruch 1 oder Anspruch 2 bei dem der Anschluss des Todvolumens über eine geeignete Leitung und über einen geeigneten Durchgang am Messsystem, bei Verwendung des Testlecks innerhalb eines Messsystems, im Druck geregelt oder ungeregelt, nach außen (Atmosphäre) geführt wird.Design and use of a test leak according to claim 1 or claim 2 wherein the connection of the dead volume via a suitable line and a suitable passage on the measuring system, when using the test leak within a measuring system, in the regulated or unregulated pressure, out (atmosphere) is performed , Aufbau und Verwendung eines Testlecks gemäß Anspruch 1 oder Anspruch 2 montiert an der Außenseite eines Messsystems, wobei das in das Todvolumen einströmende Gas, im Druck geregelt oder ungeregelt, nach außen (Atmosphäre) geführt wird.Structure and use of a test leak according to claim 1 or claim 2 mounted on the outside of a measuring system, wherein the gas flowing into the dead volume, regulated in the pressure or unregulated, out (atmosphere) is performed. Aufbau eines Testlecks gemäß Anspruch 1 oder Anspruch 2, gekennzeichnet dadurch, dass alle Komponenten des Testlecks in einem Gehäuse vereinigt sind.Structure of a test leak according to claim 1 or claim 2, characterized in that all components of the test leak are combined in a housing. Aufbau eines Testlecks gemäß Anspruch 1 oder Anspruch 2, gekennzeichnet dadurch, dass das Testleck aus mehreren Komponenten besteht, welche zusammengefügt die beschriebene Funktion ergeben.Structure of a test leak according to claim 1 or claim 2, characterized in that the test leak consists of several components, which together give the described function.
DE201010014377 2010-04-01 2010-04-01 Leakage test structure for use in testing gas leakage in measuring system, has leakage detecting elements arranged behind one another and connected by dead volume, where volume is connected with atmosphere via adjusted opening Withdrawn DE102010014377A1 (en)

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DE201010014377 DE102010014377A1 (en) 2010-04-01 2010-04-01 Leakage test structure for use in testing gas leakage in measuring system, has leakage detecting elements arranged behind one another and connected by dead volume, where volume is connected with atmosphere via adjusted opening

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DE201010014377 DE102010014377A1 (en) 2010-04-01 2010-04-01 Leakage test structure for use in testing gas leakage in measuring system, has leakage detecting elements arranged behind one another and connected by dead volume, where volume is connected with atmosphere via adjusted opening

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012220108A1 (en) * 2012-11-05 2014-05-22 Inficon Gmbh Method for testing a leak test system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012220108A1 (en) * 2012-11-05 2014-05-22 Inficon Gmbh Method for testing a leak test system
US9733147B2 (en) 2012-11-05 2017-08-15 Inficon Gmbh Method for testing a leakage detection system

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R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee

Effective date: 20121101