DE102010004390B4 - Test contactor and use - Google Patents

Abstract

Test contactor (1) for an integrated circuit component (3) comprising: - a receiving device (7) adapted to receive the integrated circuit component (3), and - a pressure element (29) having - a fluid line (51) and - a fluid outlet portion (91), wherein by means of the fluid outlet portion (91) of the pressure element (29) in an operating position a pressing force along an insertion direction (E) on the circuit component (3) can be applied, wherein in the operating position by the integrated circuit component (3) and the fluid outlet section (91) of the pressure element (29) arranged thereon can be formed with at least one fluid line opening (53) and wherein the integrated circuit component (3) is thermally contactable at least in regions by a fluid which flows through the fluid line opening (53); Andruckelementhalter (85), with a Andruckelementverbindungseinrichtung (93), wherein the pressure element (29) has a com plementary Andruckelementverbindungseinrichtung (95) which is designed to be in the operating position with the Andruckelementverbindungseinrichtung (93) of the Andruckelementhalters (85) into engagement to connect the Andruckelementhalter (85) rotatably mounted with the pressure element (29).

Description

The present invention relates to a test contactor for an integrated circuit device (IC) and a use.

The abbreviation "IC" stands for "integrated circuit". An IC may be a single transistor or an array of transistors or an electronic circuit, each within a package. An IC can be part of a microprocessor, for example. An IC can also be part of another electronic or electrical device. In particular, an IC can comprise or be part of any type of so-called "embedded electronic".

Conventionally, ICs are tested after manufacture for operability. For this purpose, an IC is connected to a printed circuit board and checked whether predetermined electrical contacts of the IC are present. The IC can also be operated as a test, for example to check the behavior of the IC under operating conditions, in particular at operating temperature. In order to avoid a time-consuming soldering of the IC to the printed circuit board or, if the IC can not be soldered, the IC is connected to the printed circuit board by means of a test socket.

Conventionally, especially when testing the IC under various operating conditions, such as operating the IC at the specified minimum or maximum operating temperature, long test cycles are necessary to successively achieve the different operating conditions to be tested. Sometimes the testing of ICs takes place automatically in testing machines, so that the individual operating conditions should be produced by the testing machine.

The publication US 6,445,203 B1 (D1) discloses a test contactor for an integrated circuit component, wherein the circuit component can be arranged in a receptacle and is subjected to a pressing force for testing by means of a punch. The punch is provided with a bore to supply cold or warm air to it during testing of the integrated circuit component.

It is therefore an object of the present invention to provide a test contactor as well as a use of the test contactor which enables the testing of integrated circuit components under various operating conditions in a simple and IC-preserving manner.

This object is achieved by the test contactor according to claim 1 and the use of the test contactor according to claim 8. Preferred embodiments are subject of the dependent claims.

Test contactor according to one aspect

• – eine Aufnahmevorrichtung, die ausgelegt ist, das integrierte Schaltkreisbauteil aufzunehmen, und
• – ein Andruckelement mit -- einer Fluidleitung und -- einem Fluidaustrittsabschnitt, wobei mittels des Fluidaustrittsabschnitts des Andruckelements in einer Betriebsposition eine Andruckkraft entlang einer Einführrichtung auf das Schaltkreisbauteil anlegbar ist, wobei in der Betriebsposition durch das integrierte Schaltkreisbauteil und den daran angeordneten Fluidaustrittsabschnitt des Andruckelements zumindest eine Fluidleitungsöffnung ausbildbar ist und wobei das integrierte Schaltkreisbauteil durch ein Fluid, welches durch die Fluidleitungsöffnung strömt, zumindest bereichsweise thermisch kontaktierbar ist, und
• – einen Andruckelementhalter, mit einer Andruckelementverbindungseinrichtung, wobei das Andruckelement eine komplementäre Andruckelementverbindungseinrichtung aufweist, die ausgelegt ist in der Betriebsposition mit der Andruckelementverbindungseinrichtung des Andruckelementhalters in Eingriff zu sein, um den Andruckelementhalter mit dem Andruckelement drehbar gelagert zu verbinden.

One aspect of the present invention relates to a test contactor for an integrated circuit device (IC) comprising:

• A pickup device configured to receive the integrated circuit device, and
• - A pressure element with - a fluid line and - a fluid outlet portion, wherein by means of the fluid outlet portion of the pressure element in an operating position a pressing force along an insertion on the circuit component can be applied, wherein in the operating position by the integrated circuit component and the fluid outlet portion of the pressure element arranged thereon at least a fluid line opening can be formed, and wherein the integrated circuit component is thermally contactable at least in regions by a fluid which flows through the fluid line opening, and
• - A Andruckelementhalter, with a Andruckelementverbindungseinrichtung, wherein the pressure element has a complementary Andruckelementverbindseinrichtung which is adapted to be in the operating position with the Andruckelementverbindungseinrichtung of the Andruckelementhalters to engage to connect the Andruckelementhalter with the pressure element rotatably mounted.

Advantageously, in the operating position, the integrated circuit device may be in direct thermal contact with a fluid (ie, a gas or a liquid), wherein the circuit device may be cooled or heated by the fluid. Further advantageously, it is possible by a suitable, interchangeable supply of fluid to the fluid outlet portion of the test contact in the operating position of a cooling to a heating of the circuit component or from a heating to a cooling of the circuit component to switch easily. Since the fluid can at least partially enter into direct thermal contact with the circuit component, the transfer of thermal energy from the circuit component into the fluid or out of the fluid into the circuit component is advantageously particularly efficient. Advantageously, the integrated circuit component can be brought in a simple and fast manner in the operating position of an operating temperature to another operating temperature, whereby test cycles of temperature-dependent tests at a predetermined or can be advantageously perform predeterminable temperature in a shorter time.

The receiving device is designed to receive the integrated circuit component along an insertion direction E. In the operating position of the test contactor, the insertion direction E can be perpendicular to a plane which is spanned by a printed circuit board which is arranged on the test contactor or which makes electrical contact with the integrated circuit component.

The term "operating position" describes a state of the test contactor, wherein an integrated circuit component or an IC is accommodated in the receiving device and acted upon by the pressing element with a pressing force K along the insertion direction E or is fixed in the receiving device. In other words, the term "operating position" describes the state of the test contactor during normal operational use. The term "fixed" describes that the IC may be movable within the receptacle by a small path length of less than about 0.1 mm, preferably less than about 0.01 mm, or preferably less than about 0.005 mm.

The pressure element has a fluid outlet section, wherein the fluid outlet section mechanically contacts the integrated circuit component in the operating position in order to apply the predetermined pressure force K along the insertion direction E to the integrated circuit component. The circuit component forms a fluid outlet opening together with the fluid outlet section of the pressure element arranged thereon in the operating position. In the operating position, a fluid can pass through or flow through the fluid outlet opening, whereby the fluid can be supplied to the fluid outlet opening or removed from the fluid outlet opening by means of the fluid line. Particularly preferably, the fluid outlet section is structured in such a way, for example by grooves, beads, grooves or a rough surface in order to be able to form a fluid outlet opening together with the IC.

Preferably, the fluid line is conically formed in the region of an externally accessible fluid connection region of the test contact, so that a conical connection piece can be arranged on the fluid connection region in order to supply the fluid line with fluid. Thus, in the operating position, the fluid line can be continuously supplied with fluid which flows through the fluid line opening in order to contact the integrated circuit component at least regionally thermally. Advantageously, in the operating position, the fluid supply, for example, by changing the connection piece with another connection piece, which supplies another fluid, be changed so that the integrated circuit component in the operating position, for example, instead of a cool compared to the integrated circuit component fluid after the change of Connecting piece can be acted upon with a warm fluid. Advantageously, the thermal state of the integrated circuit component can be controlled or regulated by a different fluid supply in a simple manner. For example, a cool fluid may have a temperature of from about 0 ° C to about 30 ° C. For example, a warm fluid may have a temperature of about 70 ° C to about 200 ° C.

Preferred embodiments of the test socket

Preferably, the test contactor comprises a Andruckelementhalter with a Andruckelementverbindungseinrichtung, wherein the pressure element comprises a complementary Andruckelementverbindungseinrichtung which is designed to be in the operating position with the Andruckelementverbindungseinrichtung of the Andruckelementhalters to engage to connect the Andruckelementhalter with the pressure element. Advantageously, the test contactor can be equipped with pressure elements adapted to the individual ICs to be tested, while the same pressure element holder can be used for a plurality of different ICs in order to hold the selected pressure element.

Preferably, the complementary pressure element connecting device of the pressure element has at least one resilient latching hook. Advantageously, the pressure element can be fastened by means of the at least one latching hook releasably or permanently to the Andruckelementhalter. The complementary Andruckelementverbindungseinrichtung may comprise a plurality of resilient latching hooks, in particular 2, 3, 4, 5, 6, 7, 8, etc. Preferably, the at least one latching hook is formed of an elastically resilient material. The at least one latching hook can therefore deform substantially elastically during assembly to the Andruckelementhalter, wherein the at least one latching hook assumes due to the resilience substantially its original shape when it has come into engagement with the Andruckelementverbindungseinrichtung. The term "resilient" in this context describes a plastic and / or elastic deformability of the material such that the geometric deformation of the resilient material or the latching hook by an applied force, is substantially completely reversible. In other words, a resilient or resilient deformable snap hook takes the original again Shape or position when the deforming force no longer acts on the latching hook.

Preferably, the complementary Andruckelementverbindungseinrichtung is integrally formed with the pressure element. Particularly preferably, the Andruckelementverbindungseinrichtung and the pressure element can be integrally formed of a polymer or an elastomer.

Preferably, the Andruckelementhalter comprises a cylindrical cavity which is hydraulically connected in the operating position with the fluid line. In this case, the cylindrical cavity may be formed as a fluid line or as a continuation of the fluid line within the Andruckelementhalters.

More preferably, the Andruckelementverbindungseinrichtung is formed as a reduced diameter portion of the cylindrical cavity of the Andruckelementhalters. In other words, the Andruckelementhalter may have a collar which is formed in the region of the cylindrical cavity of Andruckelementhalters to at least partially reduce the inner diameter of the cylindrical cavity.

Preferably, the Andruckelementhalter may have an accessible from outside the test contact fluid port region, which may be formed as a conical region and is in hydraulic communication with the fluid line or is formed as a continuation of the fluid line. Advantageously, a conical connecting piece can be arranged in a simple manner at the fluid connection region in order to supply or supply fluid to the fluid line or to remove or suck off fluid located in the fluid line. Thus, the fluid line can be continuously supplied in the operating position with fluid or disposed of fluid.

Preferably, the pressure element has a substantially flat pressure surface, which is designed to be arranged on the integrated circuit component. Advantageously, to a flat surface of the integrated circuit component, the pressing force applied by means of the pressure element can be distributed uniformly, so that the resulting pressure is uniformly distributed over the surface of the circuit component.

At least one groove, in particular with a rectangular or circular-arc-shaped cross section, is preferably formed in the pressure surface. Particularly preferably, two intersecting grooves are formed in the pressure surface.

Preferably, the cross-sectional area of the fluid conduit is substantially equal to the cross-sectional area of the fluid conduit opening.

Use according to one aspect

One aspect of the present invention relates to a use of a test contactor according to the invention for connecting an integrated circuit component to a printed circuit board, wherein in the operating position the electrical connection of each terminal of the integrated circuit component takes place with a contacting region of the printed circuit board, wherein in the operating position, the integrated circuit component at least partially by is cooled or heated by an application of a fluid via the fluid line.

Method according to one aspect

• – Anordnen des integrierten Schaltkreisbauteils an einer Leiterplatte, wobei eine elektrische Verbindung eines jeden Kontaktelements des integrierten Schaltkreisbauteils mit einem zugeordneten Kontaktierungsbereich der Leiterplatte erfolgt,
• – Anlegen einer Andruckkraft K an das integrierte Schlatkreisbauteil mittels eines Andruckelements, wobei das Andruckelement eine Fluidleitung aufweist,
• – Zuführen eines Fluids zu der Fluidleitung oder Abführen eines Fluids aus der Fluidleitung,
• – Beaufschlagen des integrierten Schaltkreisbauteils mit dem zugeführten oder abgeführten Fluid, um das integrierte Schaltkreisbauteil zumindest bereichsweise zu kühlen oder zu erwärmen.

One aspect of the present invention relates to a method of testing an integrated circuit device comprising the steps of:

• Arranging the integrated circuit component on a printed circuit board, wherein an electrical connection of each contact element of the integrated circuit component takes place with an associated contacting region of the printed circuit board,
• Applying a pressing force K to the integrated Schlatkreisbauteil means of a pressure element, wherein the pressure element comprises a fluid line,
• Supplying a fluid to the fluid conduit or discharging a fluid from the fluid conduit,
• - Applying the integrated circuit component with the supplied or discharged fluid to cool or heat the integrated circuit component at least partially.

Advantageously, integrated circuit components can be tested in a simple manner under different or variable operating states, in particular operating temperatures.

figure description

Preferred embodiments of a test contactor are described below by way of example with reference to accompanying figures. It shows:

1 an exploded sectional view of a test contactor,

2 a section through the in 1 shown Testkontaktor in the operating position,

3 a perspective sectional view through an embodiment of the receiving device of the test contact,

4 a perspective view of another embodiment of the receiving device of the test contact,

3 a perspective sectional view through the receiving device in the operating position,

6 a section through another embodiment of the test contactor,

7 a section through the in 5 shown Testkontaktor in the operating position, and

8th a perspective view of an embodiment of the pressure element.

1 shows an exploded sectional view of a test contactor 1 for an integrated circuit component 3 , The test contactor 1 is designed to be the integrated circuit component 3 with a circuit board 5 to contact electrically. The test contactor 1 includes a receiving device 7 , which is designed to be the integrated circuit component 3 along a direction of insertion E record. In the cradle 7 is a component holder 9 formed, which the integrated circuit component 3 absorbs and holds. The cradle 7 can relative to the circuit board 5 be positioned so that a contact element 11 of the integrated circuit device 3 with an associated contact area 13 the circuit board 5 is contacted when the integrated circuit component 3 along the insertion direction E in the component holder 9 is included and the test contactor 1 is in an operating position. In the operating position, a direct electrical contact between the at least one contact element preferably takes place 11 of the integrated circuit device 3 and the associated contact area 13 the circuit board 5 , Alternatively, the electrical contact in the operating position between the at least one contact element 11 and the associated contact area 13 by means of an associated contacting element (not shown).

Preferably, the component holder 9 a recess 89 which is substantially congruent or complementary to the shape of the integrated circuit component to be accommodated 3 can be. The integrated circuit component 3 can essentially along the insertion direction E in the component holder 9 the cradle 7 be introduced at least in certain areas. The insertion direction E is substantially perpendicular to the extension directions X and Y of the circuit board 5 , By means of the congruent to the shape of the integrated circuit component 3 trained recess 89 may be a relative displacement of the integrated circuit device 3 along a displacement direction parallel to the extension directions X and Y of the printed circuit board 5 , ie substantially perpendicular to the insertion direction E, are prevented. In particular, the component holder 9 parallel to the circuit board 5 be arranged. In other words, component pickup can 9 and the circuit board 5 which each extend substantially flat, having mutually parallel surfaces or surfaces.

The cradle 7 further comprises a straightening element 15 at which the component holder 9 is releasably attached. The cradle 7 can have at least two through holes 17 having as a Richtelementbefestigungseinrichtung 17 serve to the straightening element 15 on the circuit board 5 to fix. In the in 1 shown preferred embodiment, the through holes 17 Also designed as a fixing device fixing means to a fixing device 20 on the alignment element 15 or the recording device 7 to attach, with the fixing device 20 the integrated circuit component 3 can fix in a spatial position. The fixing device 20 includes a fixing device 21 to the fixing device 20 on the straightening element 15 to fix. The attachment of the fixing device 20 or the fixing device 21 can do this by means of screws 23 respectively. Here, each of the screws 23 by an associated through bore (not shown) of the fixing device 21 , an associated through hole 17 of the straightening element 15 and an associated hole 18 the circuit board 5 as a preferred complementary Richtelementbefestigungseinrichtung 18 be guided to a mother 25 to be countered. This allows the fixing device 21 , the cradle 7 and the circuit board 5 connected to each other. The component holder 9 can between the straightening element 15 and the fixing device 21 be arranged such that the component receiving 9 between these two is set. This can be the straightening element 15 a component receiving recess 27a have, in which the component receiving 9 at least in some areas can be included. The fixing device preferably also has 21 a complementary component receiving recess 27b which is preferably congruent or complementary to the component holder 9 is formed, so that the component holder 9 at least partially by the complementary Bauteilaufnahmeausnehmung 27b can be included.

In particular, the straightening element 15 parallel to the component holder 9 and / or to the circuit board 5 be arranged. In other words, the straightening element 15 , the component pickup 9 and / or the circuit board 5 , which are each in the extend substantially flat, having mutually parallel surfaces or surfaces.

It is understood that the component holder 9 completely through the component receiving recess 27a of the straightening element 15 can be included, especially if the fixing device 21 no complementary component receiving recess 27b having.

Next, it is understood that the component holder 9 completely through the complementary component receiving recess 27b the fixing device 21 can be included, especially if the straightening element 15 no component receiving recess 27a having.

The component holder 9 can by further fastening means, such as adhesives, screws, locking means, etc., in the Bauteilaufnahmeausnehmung 27a and / or the complementary component receiving recess 27b be attached. Preference is given to the component holder 9 only by clamping between the straightening element 15 and the fixing device 21 fixed in its position, that is, without further fastening means, especially in operational use or in the operating position of the test contactor 1 ,

The fixing device 20 is designed to be the integrated circuit component 3 to fix in the operating position and a predeterminable pressing force K along the insertion direction E on the circuit component 3 to apply. This is the integrated circuit component 3 by means of a pressure element 29 acted upon by a predetermined pressing force K. The preferred pressure force K is dependent on the number of contact elements 11 of the integrated circuit device 3 , preferably each contact 11 of the integrated circuit device 3 is applied with a force of about 0.1 Newton to about 0.5 Newton, so that the pressing force K from the sum of the pressing forces for each contact element 11 results. The means of the pressure element 29 to the integrated circuit device 3 To be applied pressing force K may be in a range between about 1 Newton and about 500 Newton. The pressure element 29 can be displaced along the insertion direction E to the pressing force K on the circuit component 3 to apply. In the embodiment shown, the pressure element is 29 in a Andruckelementaufnahme 31 a locking device 33 stored, wherein the pressure element 29 both about a rotation axis D of the pressure element 29 rotatable and parallel to the axis of rotation D linearly displaceable in the Andruckelementaufnahme 31 the locking device 33 is stored. In the embodiment shown, the Andruckelementaufnahme 31 as a continuous bore in the locking device 33 educated. The pressure element 29 can as a rotationally symmetric stamp 29 be educated. In the preferred embodiment shown, the pressure element 29 a lower stop 35 on, so that the pressure element 29 maximum up to the lower limit stop 35 through the opening of the Andruckelementaufnahme 31 can be passed.

To the pressure element 29 in the Andruckelementaufnahme 31 to attach, ie a complete removal of the pressure element 29 from the Andruckelementaufnahme 31 To prevent, the pressure element 29 by means of a C-ring 37 be secured, which in a complementary C-ring groove 39 of the pressure element 29 intervenes. The pressure element 29 is within the Andruckelementaufnahme 31 about the rotation axis D rotatable and parallel to the rotation axis D linearly displaceable. In the embodiment shown is between the lower stop 35 of the pressure element 29 and an upper stop opposite thereto 41 the locking device 33 a coil spring 43 as a preferred biasing element 43 arranged. The spiral spring 43 can be concentric with the pressure element 29 be arranged, that is, that the winding axis of the coil spring coincides with the axis of rotation D of the pressure element.

The pressure element 29 can be solid or partially hollow. Preferably, the pressure element 29 a through opening parallel to the axis of rotation D on.

That in the locking device 33 mounted pressure element 29 The embodiment shown is designed, along the insertion direction E at least partially into the fixing device 21 and at least partially in the receiving device 7 to be introduced and locked in the operating position. The fixing device 21 includes an engaging device 45 , which is designed with a complementary engagement device 47 the locking device 33 to get in touch. The intervention device 45 may be two substantially L-shaped grooves 45 include, in each of which an associated pin 47 as a preferred embodiment of a complementary engagement device 47 can be introduced. The cones 47 the complementary engagement device 47 are each in a pin holder designed as a blind bore 49 the locking device 33 held. Preferably, the pins 47 by an adhesive in each case a blind hole 49 be attached. More preferably, the pins 47 have an external thread, which is designed in a complementary internal thread of the blind bore 49 intervene. Alternatively, the pins 47 also in the blind holes 49 the locking device 33 shrunk. It is understood that the intervention device 45 may also be formed as a pin, while the complementary engagement means 47 may be formed as a preferred embodiment as L-shaped grooves. The cones 47 the locking device 33 can start from an open position of the test contactor 1 along the insertion direction E in the respectively associated L-shaped groove 45 the fixing device 21 introduced to move the test contactor from the open position to a closed position.

By means of a rotation of the locking device 33 and thus by means of a rotation of the pin 47 around the axis of rotation D, the pins 47 with the L-shaped grooves 45 be locked so that the locking device 33 can not be displaced counter to the insertion direction E. Preferably, the rotation of the locking device takes place 33 about the rotation axis D relative to the fixing device 21 and relative to the pressure element 29 in particular, no relative rotation between the pressure element 29 and the fixing device 21 or the recording device 7 he follows. During the rotation of the locking device 33 about the axis of rotation D, wherein the locking device 33 with the fixing device 21 can be locked, a linear displacement of the pressure element 29 take place along the insertion direction E. A shift of the pressure element 29 along the insertion direction E or parallel to the axis of rotation D takes place in particular when the L-shaped grooves 45 are formed with a slope, so that the pins 47 be moved or displaced by rotation about the axis of rotation D corresponding to the pitch of the L-shaped grooves during the rotational movement along the insertion direction. By means of the biasing element 43 becomes the displacement movement of the pins 47 and thus the displacement of the locking device 33 as such along the insertion direction E on the pressure element 29 transfer.

The longitudinal extent of the pressure element 29 along the insertion direction E is designed such that the pressure element 29 one in the component holder 9 integrated integrated circuit component 3 contacted mechanically when the locking device 33 with the fixing device 21 is locked. The length of the pressure element is preferred 29 designed such that the pressure element 29 that in the component holder 9 located integrated circuit component 3 already contacted mechanically before the locking device 33 is locked by a rotation about the rotation axis D. More preferably, a displacement of the pressure element takes place 29 along the insertion direction E or parallel to the rotation axis D during the rotation of the locking device 33 about the axis of rotation D, so that by the on the locking device 33 Torque applied a pressing force K by means of the pressure element 29 on the integrated circuit component 3 can be applied. Preferably, the insertion direction E and the rotation axis D are oriented parallel to each other at least in the operating position.

2 shows a section through the test contactor 1 according to the in the 1 shown embodiment in the operating position. In the operating position are the straightening element 15 as well as the fixing device 21 by means of the fastening screws 23 and the locknuts 25 on the circuit board 5 fastened, with the component holder 9 between the straightening element 15 and the fixing device 21 is set so that the component holder 9 along the directions X and Y parallel to the longitudinal extent of the circuit board 5 as well as along and against the insertion direction E, that is perpendicular to the circuit board 5 , is spatially fixed. The along the insertion direction E in the component holder 9 recorded integrated circuit component 3 has a plurality of N electrical contact elements 11 on, wherein each of the N contact elements 11 an associated contact area (not shown) of the circuit board 5 can contact electrically. To a sufficiently good electrical contact between the contact elements 11 and the contact areas of the circuit board 5 to ensure, by means of the pressure element 29 a predetermined pressing force K along the insertion direction E on the integrated circuit component 3 created. In the operating position is the engagement device 45 the fixing device 21 with the complementary engagement device 47 the locking device 33 locked, so that a displacement of the locking device 33 along or against the insertion direction E relative to the fixing device or relative to the component receiving 9 is inhibited. In the operating position, the pressure element contacts 29 the integrated circuit component 3 to a predetermined pressing force K on the integrated circuit component 3 along the insertion direction E create. That of the integrated circuit component 3 outgoing and on the pressure element 29 acting counterforce causes a mechanical stress of the biasing member 43 ,

The in the 2 shown preferred embodiment has a coil spring 43 trained biasing element 43 on which between the lower stop 35 of the pressure element 29 and the top stop 41 the prelocking device 33 is arranged. In the operating position, the distance between the lower stop 35 and the top stop 41 opposite the open position of the test contactor 1 shortened. The shortening occurs because the pressure element 29 opposite the locking device 33 within the pressure element receptacle 31 is displaced counter to the insertion direction E and that due to the through the integrated circuit component 3 applied counterforce. The on the integrated circuit component 3 Acting contact pressure K is dependent on the spring constant of biasing member 43 or the spiral spring 43 and the distance between the lower stop 35 of the pressure element 29 and the top stop 41 the locking device 33 ,

2 also shows the C-ring 37 , the falling out of the pressure element 29 from the locking device 33 prevented in the open position. The pressure element 29 can continue a fluid line 51 which, as a continuous opening extending along the axis of rotation D, within the pressure element 29 can be trained. In particular, the fluid line 51 be formed rotationally symmetrical to the axis of rotation D. In the operating position, a fluid line opening 53 the fluid line 51 on the integrated circuit device 3 be arranged so that the surface of the integrated circuit component 3 at least partially hydraulically with one in the fluid line 51 contacted fluid located. The fluid line 51 can at least partially as a cylindrical cavity 55 be educated. Alternatively, the pressure element 29 also be designed as a solid body, in particular of a metal. The pressure element is preferred 29 formed in one piece or monolithic.

Furthermore, the in 2 shown embodiment of in 1 shown embodiment, wherein the identical components are designated by the same reference numerals.

3 shows a further embodiment of the receiving device 7 with a component holder 9 and a straightening element 15 , Analogous to the in 1 the embodiment shown is the component holder 9 designed, an integrated circuit component 3 take along the insertion direction E, wherein the component receiving 9 in turn in a component receiving recess 27a of the straightening element 15 can be included. In addition to the in the 1 and 2 The embodiment shown comprises the alignment element 15 a contacting element 57 , which in the operating position between the contact elements 11 of the integrated circuit device 3 and the associated contact areas 13 the circuit board 5 is arranged. The contacting element 57 may comprise an anisotropically electroconductive elastomer such that each contact element 11 of the integrated circuit device 3 over the contacting element 57 with an associated contact area 13 the circuit board 5 electrically contacted. The anisotropically electrically conductive elastomer of the contacting element preferably has 57 embedded metal particles, so that at a predetermined pressing force K of the integrated circuit component 3 along the insertion direction E on the contacting element 57 the contacting element 57 in the direction of insertion E becomes electrically conductive. This is especially true when in the contacting element 57 embedded electrically conductive particles due to the pressing force K electrically contact each other. It is understood that the anisotropically electrically conductive elastomer of the contacting element 57 along a direction perpendicular to the insertion direction E, ie, parallel to a longitudinal direction K or Y of the circuit board 5 is electrically insulating, so that the individual contact elements 11 of the integrated circuit device 3 not with each other via the contacting element 57 electrically contacted.

4 shows a further embodiment of a receiving device 7 with a straightening element 15 , on which a component holder 9 is releasably attached. The straightening element 15 comprises a straightening element fastening device 17 which in the embodiment shown four through holes 17 includes the straightening element 15 by means of four screw on a circuit board (not shown) to attach. The straightening element 15 can be a positioning element 59 which is adapted to engage with a complementary positioning member of the printed circuit board (not shown) when the straightening element 15 has reached the predetermined or desired position relative to the circuit board. The straightening element 15 further comprises a component receiving recess 27a which is designed, the component holder 9 at least in some areas. The straightening element 15 , in particular the component receiving recess 27a , a component receiving fixture 61 have, with which the component receiving 9 in the component receiving recess 27a or on the straightening element 15 can be releasably attached. The component receiving recess is preferred 27a conforming to the component holder 9 educated. This allows the component mount 9 positively in the Bauteilaufnahmeausnehmung 27a along an insertion direction E can be added. In this case, the component holder 9 In particular, not be displaced along a direction of displacement perpendicular to the insertion direction E, when the component receiving 9 in the component receiving recess 27a is arranged. The straightening element 15 At least one fixing device fixing device 19 which is adapted to the fixing device (not shown) with the straightening element 15 releasably connect. In a preferred embodiment, the fixture attachment means 19 four blind holes 19 include, which are preferably provided with an internal thread. The internal threads of the blind holes 19 are preferably adapted to engage with a fixing screw (not shown) of the fixing device of the fixing device, when the fixing device to the straightening element 15 is attached.

The in the 4 shown component holder 9 includes a plurality of complementary component receiving fixtures 63 which may be formed as captive screws, wherein the complementary component receiving fasteners 63 are designed in the component receiving fixture 61 of the straightening element 15 intervene so that the component receiving 9 on the straightening element 15 can be attached. It is understood that the component holder 9 also with only a complementary component receiving fixture 63 on the straightening element 15 can be attached. It is further understood that the plurality of complementary component receiving fixtures 63 in particular 2, 3, 4, 5, 6, etc. component receiving fixtures 63 may include.

Preferably, the component holder 9 at least one contacting element holder 65 exhibit. The contacting element holder 65 can at a Kontaktierungselementhalteraufnahme 67 be arranged. The contacting element holder is preferred 65 - In particular releasably - at the Kontaktierungselementhalteraufnahme 67 attached. The contacting element holder 65 can by means of at least one Kontaktierungselementhalterbefestigungseinrichtung 69 at the contacting element holder receptacle 67 be attached. In this case, the Kontaktierungselementhalterbefestigungseinrichtung 69 in engagement with the complementary contacting element holder fastening device 71 the contacting element holder receptacle 67 arrive to the contacting element holder 65 with the contacting element holder receptacle 67 to fix. In particular, the at least one contacting element holder fastening device 69 have a thread, which is designed in a complementary thread of the complementary contacting element holder fastening means 71 to engage, preferably a releasable connection between the Kontaktierungselementhalter 65 and the contacting element holder receptacle 67 train. Preferably, the contacting element holder receptacle 67 and the contacting element holder 65 be formed integrally.

The contacting element holder 65 can at least one contacting element 57 record or hold. Preferably, the Kontaktierungselementhalter a plurality of contacting elements 57 receive or hold, wherein the plurality of contacting elements 57 in a substantially regular or regular arrangement within the contacting element holder 65 are arranged. In particular, the contacting elements 57 be arranged in rows. The contacting elements 57 are designed to be in the operating position of the receiving device 7 the contact elements of the integrated circuit component (not shown), which in the component receiving 9 is included, with an associated contact area 13 the circuit board 5 to contact electrically.

5 shows the in 4 Shown recording device 7 in the operating position. The contacting element holder 65 the component holder 9 is at the Kontaktierungselementhalteraufnahme 67 arranged, wherein the contacting element holder 65 by means of at least one contacting element holder fastening device 69 at the contacting element holder receptacle 67 can be attached. The contacting element holder fastening device 69 may be formed as a screw, wherein the thread of the screw in the operating position in the formed as a complementary thread complementary Kontaktierungselementhalterbefestigungseinrichtung 71 can intervene.

A handling section 69a the contacting element holder fixing device 69 may be arranged facing in the operating position of the circuit board. By means of the handling section 69a the contacting element holder fastening device 69 this can be operated or handled to the Kontaktierungselementhalterbefestigungseinrichtung 69 with the complementary contacting element holder fastening device 71 connect to. The handling section 69a may preferably be designed as a screw head with hexagon socket. Since the handling section 69a directed in the operating position towards the circuit board, the handling section 69a the contacting element holder fastening device 69 in the operating position at least partially by the straightening element 15 be covered and is thus inaccessible in the operating position.

The contacting element holder 65 can a plurality of contacting elements 57 have or hold, wherein the contacting elements 57 preferably in a regular arrangement, for example in rows or in staggered rows, on the contacting element holder 65 are arranged.

The component holder 9 can at least partially, but in particular completely, in the Bauteilaufnahmeausnehmung 27a of the straightening element 15 be included. In this case, the component holder 9 substantially conforming to the component receiving recess 27a be educated. The component holder 9 can thus be in positive engagement with the straightening element. Preferably, the component holder 9 , in particular the contacting element holder receptacle 67 the component holder 9 , by means of at least one complementary component receiving fastening device 63 on the straightening element 15 attached. Preferably, the Attachment made detachable. In particular, the at least one complementary component receiving fastening device 63 be formed as a screw, which in the operating position in a formed as a threaded component receiving fixture 61 of the straightening element 15 intervenes. Preferably, the complementary component receiving fixture 63 be designed as a captive screw.

The straightening element 15 with the component holder arranged thereon 9 is in the operating position on the circuit board 5 arranged. In this case, the straightening element 15 by means of the at least one straightening element fastening device 17 on the circuit board 5 be attached. The straightening element 15 is relative to the PCB 5 positioned such that each of the contacting elements 57 an associated contact area 13 the circuit board 5 electrically contacted.

In the operating position is an integrated circuit component 3 along the insertion direction E at least partially in the receiving device 7 added. In this case, each of the contact elements 11 of the integrated circuit device 3 an associated contacting element 57 the component holder 9 contact electrically. Thus, an indirect electrical contact between each of the contact elements 11 of the integrated circuit device 3 and an associated contact area 13 the circuit board 5 be prepared. To the integrated circuit component 3 in the cradle 7 To fix, a fixing device (not shown) by means of at least one Fixiervorrichtungsbefestigungseinrichtung 19 such on the straightening element 15 be fixed, that by means of the fixing a predetermined pressure force along the insertion direction E on the integrated circuit component 3 can be exercised.

6 shows a further embodiment of the test contactor 1 , wherein the receiving device 7 in the 4 and 5 described embodiment, so that in 6 the to the 4 and 5 identical components are designated by identical reference numerals.

The in 6 shown test contactor 1 comprises a receiving device-side fixing device 21a and a lock device side fixing device 21b , which are pivotally mounted against each other about a first pivot axis S1. The take-up device-side fixing device 21a is by means of the fastening screws 23 at the receiving device 7 attached. In this case, the receiving device-side fixing 21a essentially flat on the straightening element 15 the cradle 7 be arranged. The take-up device-side fixing device 21a has an opening area 73 through which an integrated circuit component 3 along the insertion direction E can be performed to at least partially in the receiving device 7 to be included. The 6 shows the test contactor 1 in an open position, so that the component receiving 9 along the insertion direction E is accessible, so that an integrated circuit component can be introduced. In this case, the receiving device-side fixing 21a and the lock device side fixing device 21b in the open position enclose a substantially right angle with each other. On the locking device side fixing 21b is a locking device 33 arranged. The locking device side fixing device 21b can be an intervention device 45 which is designed with a complementary engagement means 47 the locking device 33 to be engaged. The at least one intervention device 45 may be preferred as a pin 45 be educated. The at least one complementary intervention device 47 the locking device 33 is preferred as a guide groove 47 educated. The pin 45 can with the guide groove 47 be engaged, the pin 45 through the guide groove 47 guided or determined in his position. In particular, the locking device 33 by means of the at least one engagement device 45 which is associated with an associated one of the at least one complementary engagement means 47 engages, relative to the locking device side fixing 21b be relocated. In particular, the displacement of the locking device 33 by a rotation about a rotation axis D relative to the locking device side fixing device 21b take place, wherein the displacement is preferably carried out exclusively linear.

The locking device side fixing device 21b can continue a locking device 75 exhibit. The locking device 75 can a pivotable about a pivot axis S2 mounted locking element 77 exhibit. In particular, the locking element 77 pivotable on the locking device side fixing 21b be stored. By pivoting the locking element 77 about the pivot axis S2, the locking device 75 be transferred from a detent position to a Entrastposition and vice versa. In this case, the locking device 75 by means of a detent biasing element 79 be held in the locked position or in the unlatched position. In the in 6 shown preferred embodiment, the locking device 75 by means of as a spiral spring 79 formed latching device biasing element 79 held in the locking position, provided no external forces on the locking device 75 act. The locking device 75 or the locking element 77 may be a latch actuator 81 have, with which the locking device 75 operated, ie, transferred from the locking position to the unlatched position or vice versa can be. The locking device is preferred 75 through the locking device 33 actuated. For this purpose, the locking device 33 a latch actuator guide groove 83 in which the latch actuating element 81 at least partially intervenes and is guided by it. In particular, the actuation of the locking device 75 by turning the locking device 33 relative to the locking device side fixing device 21b take place about the axis of rotation D. The latch actuator guide groove 83 can be substantially circular arc around the axis of rotation D in the locking device 33 be educated. By a variable distance of the Rastvorrichtungsbetätigungsführungsnut 83 from the rotation axis D, the locking device actuating element 81 be actuated such that the locking element 77 can be pivoted about the second pivot axis S2.

The in the 6 shown embodiment of the test contactor 1 has a pressure element 29 on, which on a Andruckelementhalter 85 arranged or attached thereto. The pressure element holder 85 or the pressure element 29 may be movable in the lock device side fixing device 21b and / or the locking device 33 be stored. In particular, the pressure element 29 or the Andruckelementhalter 85 relative to the locking device side fixing device 21b rotatably supported about the rotation axis D. Next, the pressure element 29 and / or the Andruckelementhalter 85 be linearly mounted along the axis of rotation D slidably. Alternatively or additionally, the pressure element 29 relative to the Andruckelementhalter 85 be rotatably mounted.

By pivoting the locking device side fixing 21b around the first pivot axis S1, the Testkontaktor 1 be transferred from the open position to a closed position. In the closed position, the locking element 77 with a complementary locking element 87 the receiving device side fixing 21a be locked. The latching can by snapping the locking element 77 at least partially in the complementary locking element 87 respectively. The latching can also by an operation of the locking device 75 , ie a pivoting of the locking element 77 by means of the latch actuating element 81 respectively. In the closed position can by the pressure element 29 to the integrated circuit device 3 applied pressure force be zero. In particular, in the closed position, a gap between the integrated circuit component 3 and the pressure element 29 be formed so that the pressure element 29 the integrated circuit component 3 not mechanically contacted.

7 shows a sectional view of the test contactor 1 in the operating position. In the operating position, the locking device side fixing device 21b so pivoted about the first pivot axis S1, so that a contact surface of the locking device side fixing 21b substantially flat on a complementary contact surface of the receiving device side fixing 21a is applied. The axis of rotation D of the locking device 33 is by the pivoting of the locking device side fixing 21b pivoted about the first pivot axis S1 such that the axis of rotation D is substantially parallel to the insertion direction E. The take-up device-side fixing device 21a and the lock device side fixing device 21b can each other by means of the locking device 75 be locked. In the operating position, the locking element 77 with the complementary locking element 87 be engaged to a pivoting of the receiving device side fixing 21a to inhibit the first pivot axis S1. The locking element 77 can by setting the locking device actuating element 81 in the latch actuator guide groove 83 the locking device 33 be prevented from pivoting about the second pivot axis S2, so that a pivoting of the locking element 77 is inhibited about the second pivot axis S2 and thereby accidental actuation of the locking device 75 is excluded.

The locking device 33 of the test contactor 1 is in the operating position by means of the complementary engagement device 47 with the locking device side fixing 21b or with its intervention device 45 locked. By locking, a displacement of the locking device 33 be inhibited along or against the insertion direction E.

The locking can proceed from the in 6 shown closed position of the test contactor 1 in particular by a rotation of the locking device 33 take place about the axis of rotation D, wherein the complementary engagement means 47 the locking device 33 in engagement with the intervention device 45 the locking device side fixing device 21b arrives and locks with this.

Alternatively, the lock by a displacement of the locking device 33 along the insertion direction E to a latching point, wherein upon reaching the detent point, the complementary engagement means 47 with the intervention device 45 locked. In particular, the displacement of the locking device 33 along the insertion direction E without rotation of the locking device 33 take place about the axis of rotation D, that is, the locking device 33 only translationally along the insertion direction E is linearly moved.

Particularly preferred are the engagement device 45 and / or the complementary engagement device 47 formed elastically resilient, so that the latching by an elastic voltage or deformation of the engagement device 45 and / or the complementary engagement device 47 can take place with subsequent relaxation or recovery.

Alternatively, the engagement device 45 the locking device side fixing device 21b and the complementary engagement device 47 the locking device 33 be designed as a blind bore or as a continuous bore, wherein a displacement of the locking device 33 relative to the locking device side fixing device 21b is prevented in the operating position by a splint or the like, which is guided through both holes. It is understood that one or more interventional devices 45 on the lock device side fixing device 21b may be formed and each associated with a complementary engagement device 47 in the locking device 33 is trained.

In the operating position, an upper stop 41 the locking device 33 relative to the locking device side fixing device 21b and thus also the receiving device-side fixing 21a , the cradle 7 and thus the integrated circuit component 3 be spatially fixed. In other words, the distance between the integrated circuit component 3 and the top stop 41 the locking device 33 in the operating position predetermined and constant. The in the locking device 33 mounted pressure element holder 85 or the pressure element 29 can a lower stop 35 have, wherein between the upper stop 41 and the lower stop 35 a biasing element 43 is arranged. Preferably, the biasing element 43 be designed as a spiral spring. The top stop 41 the locking device 33 can the edge region of a trained as a continuous opening Andruckelementaufnahme 31 correspond, wherein the Andruckelementhalter 85 or the pressure element 29 in the Andruckelementaufnahme 31 is stored. The of the biasing element 43 generated and on the Andruckelementhalter 85 or directly on the pressure element 29 transmitted mechanical stress is by means of the pressure element 29 on the integrated circuit component 3 transmitted as pressing force K.

In a preferred use of a coil spring 43 as a biasing element 43 which is between the top stop 41 and the lower stop 35 is clamped, is the on the integrated circuit component 3 applied pressure force only depending on the spring constant of the coil spring 43 and the distance along the insertion direction E between the upper stop 41 and the lower stop 35 , It is understood that this distance in dependence on the length of the pressure element 29 and / or the Andruckelementhalters 85 through the thickness of the integrated circuit device 3 along the insertion direction E is determined. In other words, the pressure element 29 and thus the bottom stop 35 by a thicker integrated circuit component 3 displaced more strongly opposite to the insertion direction E than by a comparatively thinner integrated circuit component 3 , It follows that that of the biasing element 43 generated mechanical stress is greater, wherein the on the integrated circuit component 3 applied pressure force increases to the same extent.

In the in 7 shown preferred embodiment of the test contactor 1 is the pressure element 29 by means of the pressure element holder 85 in the locking device 33 mounted rotatably about the axis of rotation D and mounted linearly displaceable along the insertion direction E. In particular, the pressure element 29 detachable on the Andruckelementhalter 85 be attached so that the pressure element 29 depending on the thickness of the integrated circuit device 3 along the insertion direction E and in dependence on the desired pressing force K, along the insertion direction E to the integrated circuit component 3 should be created, can be exchanged.

The pressure element 29 can, as in 7 shown, a fluid outlet section 91 exhibit. The fluid outlet section 91 can be the integrated circuit component 3 mechanically contact in the operating position, in particular by the predetermined pressing force K along the insertion direction E on the integrated circuit component 3 to apply. In this case, the fluid outlet section 91 of the pressure element 29 along with the integrated circuit component 3 a fluid outlet opening 53 form, through which in the operating position, a fluid (ie a gas or a liquid) can pass or flow in the operating position. The fluid passing through the fluid conduit opening 53 flows, the integrated circuit component can 3 Contact at least partially thermally. To the fluid in the operating position at the fluid line opening 53 to provide the pressure element 29 and / or the Andruckelementhalter 85 with a fluid line 51 be provided. In particular, the fluid line 51 at least partially as a cylindrical cavity 55 within the Andruckelementhalters 85 be educated. In this case, the Andruckelementhalter 85 a collar 93 which, in the region of the cylindrical cavity 55 is formed to reduce the inner diameter at least partially. Preferably, the pressure element 29 by means of one or more catch hooks 95 on the Andruckelementhalter 85 be attached. The latching hooks are preferred 95 formed of an elastically resilient material, so that the latching hook 95 deform substantially elastically when placed in the cylindrical cavity 55 of Andruckelementhalters 85 are introduced in some areas. After the complete insertion of the locking hooks 95 of the pressure element 29 in the cylindrical cavity 55 of Andruckelementhalters 85 These are relaxed elastically and return substantially to their original shape, so that the latching hook 95 the collar 93 at least partially engage behind and lock with this. This allows the pressure element 29 by means of the locking hooks 95 on the Andruckelementhalter 85 , in particular insoluble, be attached.

Furthermore, the Andruckelementhalter 85 an externally accessible fluid port region 97 on, which as a conical region of the fluid line 51 can be trained. In particular, the inner diameter of the fluid line increases 51 in the area of the fluid connection area 97 counter to the insertion direction E. Thus, a conical connecting piece (not shown) along the insertion direction E at the fluid connection region 97 be arranged to the fluid line 51 to supply with fluid. Thus, the fluid line 51 be continuously supplied in the operating position with fluid, which through the fluid line opening 53 flows and the integrated circuit component 3 at least partially thermally contacted. This allows the integrated circuit component 3 in the operating position with a compared to the integrated circuit component 3 cooled or warm fluid are applied to control the thermal state of the integrated circuit component. A cool fluid may have a temperature of about 0 ° C to about 30 ° C. A warm fluid may have a temperature of about 70 ° C to about 200 ° C.

A shift of the Andruckelementhalters 85 along the insertion direction E is through the C-ring 37 which is in the complementary C-ring groove 39 is held, inhibited.

The in the 7 Shown recording device 7 corresponds to the receiving device, which in the 5 and 6 is shown, wherein identical components are designated by identical reference numerals. This concerns the straightening element 15 at which the receiving device side fixing 21a is attached and the positioning element 59 of the straightening element 15 , which is used for positioning the recording device 7 relative to the printed circuit board (not shown). This also applies to the contact element holder 65 and the contacting element holder receptacle 67 trained component holder 9 , which by means of the component receiving fixture 61 on the straightening element 15 is attached.

8th shows a perspective section through a preferred embodiment of the Andruckelementhalters 85 and the pressure element 29 , The pressure element holder 85 can be formed at least partially rotationally symmetrical about the axis of rotation D. Furthermore, the Andruckelementhalter 85 on the outside of a trained as a collar lower stop 35 exhibit. Furthermore, the Andruckelementhalter 85 a complementary C-ring groove 39 which is adapted to receive a C-ring (not shown) to the Andruckelementhalter 85 in the locking device or in the Andruckelementaufnahme (not shown) to hold. Furthermore, the Andruckelementhalter 85 a continuous fluid line 51 which essentially as a cylindrical cavity 55 is trained. In some areas, the fluid line 51 as a conical fluid connection area 97 be formed, which is designed to receive a fluid connection. Preferably, the cylindrical cavity 55 the fluid line 51 a collar 93 which is designed, the inner diameter of the fluid line 51 to shrink so that the collar 53 by latching hook 95 of the pressure element 29 can be underrun.

The pressure element 29 can have one or more snap hooks 95 to attach it to the Andruckelementhalter 85 to fix. In this case, the pressure element 29 rotatably on the Andruckelementhalter 85 be stored. Alternatively, the rotation of the pressure element 29 relative to the Andruckelementhalter 85 by a Andruckelementfixiereinrichtung 99 of Andruckelementhalters 85 be inhibited, which in a complementary Andruckelementfixiereinrichtung 101 of the pressure element 29 engages when the pressure element 29 on the Andruckelementhalter 85 is attached. The Andruckelementfixiereinrichtung 99 For example, as a pin 99 be formed, which in a complementary recess 101 as a preferred complementary Andruckelementfixiereinrichtung 101 of the pressure element 29 engages, so that a rotation of the pressure element 29 about the axis of rotation D relative to Andruckelementhalter 85 is inhibited.

The pressure element 29 may be a fluid outlet section 91 which preferably at the contact surface of the pressure element 29 which is designed mechanically to an integrated circuit component (not shown) to contact. In this case, the fluid outlet section 91 formed such that a fluid, which via the fluid line 51 of the pressure element 29 is provided, in the region of the fluid outlet portion 91 such from the fluid line 51 emerges that the fluid in the operating position, the integrated circuit component at least partially thermally contacted. It is understood that this can be achieved in different ways. For example, the contact surface 103 of the pressure element 29 , which is designed to mechanically contact the integrated circuit component in the operating position and in particular to apply a predetermined contact pressure force to the integrated circuit component, to be designed in such a rough or relief-like pattern that in the region of this contact surface 103 no fluid-tight mechanical contact between the pressure element 29 and the integrated circuit component can be formed. One in the fluid line 51 Fluid provided with positive pressure relative to the ambient pressure then occurs in the region of the contact surface 103 on flow paths, which between the pressure element 29 and the integrated circuit device are formed by the fluid line 51 into the exterior or into the surroundings via. Alternatively, in the fluid line 51 be applied a negative pressure, so that a fluid from the environment or from the outside into the fluid line 51 flows. Next example, the pressure element 29 in the fluid outlet section 91 Having openings or nozzles, which are preferably directed in the operating position of the test contact against the integrated circuit component, so that the fluid, which from the fluid line 51 exit, the integrated circuit component at least partially covered and thus thermally contacted. Particularly preferred is the fluid outlet section 91 formed by two mutually perpendicular, intersecting grooves, which in the contact surface 103 are formed. Weather preferably connects a through hole, which may be arranged in particular at the intersection of the two grooves, as a preferred fluid line 51 of the pressure element 29 the fluid outlet section 91 with the fluid line 51 in the pressure element holder 85 ,

The pressure element is preferred 29 made of an elastically resilient polymer, that is, elastomer or plastomer. Alternatively, the pressure element may also be formed of a metallic material. The pressure element holder 85 may be made of a metal or of a polymer.

For example, the fluid from air, in particular cold air or hot air, from other gases, in particular noble gases, from a liquid, in particular water, or a liquid-gas mixture, in particular air with water vapor exist.

LIST OF REFERENCE NUMBERS

1

Testkontaktor

3

integrated circuit component

5

circuit board

7

cradle

9

component pick

11

Contact element of the integrated circuit component 3

13

Contact area of the circuit board 5

15

directional element

17

Directional element fastening device

19

Fixiervorrichtungsbefestigungseinrichtung

21

fixing

21a

receiving device-side fixing device

21b

locking device side fixing device

23

fixing screw

25

locknut

27a

Bauteilaufnahmeausnehmung

27b

complementary component receiving recess

29

presser

31

Andruckelementaufnahme

33

locking device

35

Lower stop of the pressure element 29

37

C-ring

39

complementary C-ring groove

41

Upper stop of the locking device 33

43

biasing member

45

engagement means

47

complementary engagement device, pin

49

Pin holder, blind hole

51

fluid line

53

Fluid line opening

55

cylindrical cavity of the fluid line 51

57

contacting

59

positioner

61

Component pick fastening device

63

complementary component receiving fixture

65

Kontaktierungselementhalter

67

Kontaktierungselementhalteraufnahme

69

Kontaktierungselementhalterbefestigungseinrichtung

71

complementary contacting element holder fastening device

73

opening area

75

locking device

77

locking element

79

Latching device biasing member

81

Locking device actuator

83

Rastvorrichtungsbetätigungselementführungsnut

85

Andruckelementhalter

87

complementary locking element

89

recess

91

Fluid outlet section

93

collar

95

latch hook

97

Fluid port area

99

Andruckelementfixiereinrichtung

101

Complementary Andruckelementfixiereinrichtung

103

Contact surface of the pressure element 29

D

axis of rotation

e

insertion

S1

first pivot axis

S2

second pivot axis

Claims (8)

Test contactor ( 1 ) for an integrated circuit component ( 3 ) comprising: - a receiving device ( 7 ) which is designed to enable the integrated circuit component ( 3 ), and - a pressure element ( 29 ) with - a fluid line ( 51 ) and - a fluid outlet section ( 91 ), wherein by means of the fluid outlet section ( 91 ) of the pressure element ( 29 ) in an operating position, a pressing force along an insertion direction (E) on the circuit component ( 3 ) can be applied, wherein in the operating position by the integrated circuit component ( 3 ) and the fluid outlet section arranged thereon ( 91 ) of the pressure element ( 29 ) at least one fluid line opening ( 53 ) and wherein the integrated circuit component ( 3 ) by a fluid, which through the fluid line opening ( 53 ) flows, at least partially thermally contacted, and - a Andruckelementhalter ( 85 ), with a pressure element connection device ( 93 ), wherein the pressure element ( 29 ) a complementary pressure element connection device ( 95 ) which is designed in the operating position with the Andruckelementverbindungseinrichtung ( 93 ) of the pressure element holder ( 85 ) to engage the pressure element holder ( 85 ) with the pressure element ( 29 ) rotatably connected to connect. Test contactor ( 1 ) according to claim 1, wherein the complementary pressure element connection device ( 95 ) of the pressure element ( 29 ) at least one resilient latching hook ( 95 ) having. Test contactor ( 1 ) according to claim 1 or 2, wherein the complementary pressure element connection device ( 95 ) with the pressure element ( 29 ) is integrally formed. Test contactor ( 1 ) according to one of claims 1 to 3, wherein the pressure element holder ( 85 ) a cylindrical cavity ( 55 ), which in the operating position with the fluid line ( 51 ) is hydraulically connected. Test contactor ( 1 ) according to claim 4, wherein the pressure element connection device ( 93 ) as a reduced diameter portion of the cylindrical cavity ( 55 ) of the pressure element holder ( 85 ) is trained. Test contactor ( 1 ) according to one of the preceding claims, wherein the pressure element ( 29 ) a substantially flat pressure surface ( 103 ), which is adapted to the integrated circuit component ( 3 ) to be arranged. Test contactor ( 1 ) according to one of the preceding claims, wherein the cross-sectional area of the fluid line ( 51 ) substantially equal to the cross-sectional area of the fluid conduit opening ( 53 ). Use of a test contactor ( 1 ) according to one of claims 1 to 7 for connecting an integrated circuit component ( 3 ) with a printed circuit board ( 5 ), wherein in the operating position, the electrical connection of each terminal ( 11 ) of the integrated circuit component ( 3 ) with a contacting area ( 13 ) of the printed circuit board ( 5 ), wherein in the operating position the integrated circuit component ( 3 ) at least partially by means of an application of a fluid via the fluid line ( 51 ) is cooled or heated.

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