DE102009061071B3 - Method for producing semiconductor component used for laser-fired contact solar cell module, involves producing electrically conductive contact between contact layer made of easily solderable metal, and semiconductor substrate - Google Patents
Method for producing semiconductor component used for laser-fired contact solar cell module, involves producing electrically conductive contact between contact layer made of easily solderable metal, and semiconductor substrate Download PDFInfo
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- DE102009061071B3 DE102009061071B3 DE200910061071 DE102009061071A DE102009061071B3 DE 102009061071 B3 DE102009061071 B3 DE 102009061071B3 DE 200910061071 DE200910061071 DE 200910061071 DE 102009061071 A DE102009061071 A DE 102009061071A DE 102009061071 B3 DE102009061071 B3 DE 102009061071B3
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- contact layer
- contact
- layer
- semiconductor substrate
- semiconductor device
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 43
- 239000000758 substrate Substances 0.000 title claims abstract description 22
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 15
- 239000002184 metal Substances 0.000 title claims abstract description 15
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 238000000034 method Methods 0.000 claims abstract description 19
- 238000002161 passivation Methods 0.000 claims abstract description 12
- 238000009792 diffusion process Methods 0.000 claims abstract description 6
- 230000004888 barrier function Effects 0.000 claims abstract description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 4
- 239000010936 titanium Substances 0.000 claims abstract description 4
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 4
- 150000003609 titanium compounds Chemical class 0.000 claims abstract description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 8
- 229910052709 silver Inorganic materials 0.000 claims description 5
- 239000004332 silver Substances 0.000 claims description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 4
- 229910001092 metal group alloy Inorganic materials 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 239000010410 layer Substances 0.000 description 65
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 239000012790 adhesive layer Substances 0.000 description 3
- 238000000137 annealing Methods 0.000 description 3
- 238000005476 soldering Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007717 exclusion Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/03—Manufacturing methods
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/03—Manufacturing methods
- H01L2224/033—Manufacturing methods by local deposition of the material of the bonding area
- H01L2224/0333—Manufacturing methods by local deposition of the material of the bonding area in solid form
- H01L2224/03334—Manufacturing methods by local deposition of the material of the bonding area in solid form using a preform
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/03—Manufacturing methods
- H01L2224/035—Manufacturing methods by chemical or physical modification of a pre-existing or pre-deposited material
- H01L2224/0355—Selective modification
- H01L2224/03552—Selective modification using a laser or a focussed ion beam [FIB]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/05001—Internal layers
- H01L2224/05099—Material
- H01L2224/051—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05117—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
- H01L2224/05118—Zinc [Zn] as principal constituent
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/05001—Internal layers
- H01L2224/05099—Material
- H01L2224/051—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/05139—Silver [Ag] as principal constituent
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/05001—Internal layers
- H01L2224/05099—Material
- H01L2224/051—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/05155—Nickel [Ni] as principal constituent
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Abstract
Description
Die Erfindung betrifft ein Verfahren zur Herstellung eines Halbleiter-Bauelements. Die Erfindung betrifft weiterhin ein Halbleiter-Bauelement mit einer lötbaren Kontakt-Struktur. Aus der
Verfahren zur Herstellung von Halbleiter-Bauelementen sind aus der
Der Erfindung liegt daher die Aufgabe zugrunde, ein Verfahren zur Herstellung eines Halbleiter-Bauelements mit einer Kontakt-Struktur, welche gut lötbar ist, zu schaffen.The invention is therefore based on the object to provide a method for producing a semiconductor device having a contact structure, which is easy solderable.
Diese Aufgabe wird durch das Verfahren des Anspruchs 1 und das Halbleiterbauelement des Abspruchs 8 gelöst. Der Oberbegriff der unabhängigen Ansprüche ist aus der
Zur Herstellung einer elektrisch leitenden Verbindung zwischen der gut lötbaren, zweiten Kontakt-Schicht und dem Halbleiter-Substrat ist vorzugsweise ein Laser-Verfahren vorgesehen.To produce an electrically conductive connection between the readily solderable, second contact layer and the semiconductor substrate, a laser method is preferably provided.
Die zweite Kontakt-Schicht kann ganzflächig auf die erste Kontakt-Schicht aufgebracht werden. Hierdurch wird insbesondere die Querleitfähigkeit der Kontakt-Schicht erhöht, sodass die Dicke der ersten Kontakt-Schicht deutlich reduziert werden kann.The second contact layer can be applied over the whole area to the first contact layer. As a result, in particular the transverse conductivity of the contact layer is increased, so that the thickness of the first contact layer can be significantly reduced.
Es ist jedoch ebenso möglich, die zweite Kontakt-Schicht in einem unterbrochenen Muster, das heißt in voneinander getrennten Teilbereichen, auf die erste Kontakt-Schicht aufzubringen. Dies hat den Vorteil, dass Schichtspannungen im Schichtstapel reduziert werden und somit einer Verbiegung des Substrates entgegengewirkt werden kann.However, it is also possible to apply the second contact layer in an interrupted pattern, that is to say in mutually separated partial regions, to the first contact layer. This has the advantage that layer stresses in the layer stack can be reduced and thus a bending of the substrate can be counteracted.
Die zweite Kontakt-Schicht wird erfindungsgemäß in Form einer Folie auf die erste Kontakt-Schicht aufgebracht. Dies ist besonders einfach durchführbar. Die Folie weist vorzugsweise eine Klebschicht, insbesondere aus leitfähigem Klebstoff auf. Hierdurch wird eine besonders gute elektrische Anbindung der Folie an die erste Kontakt-Schicht hergestellt.The second contact layer is applied according to the invention in the form of a film on the first contact layer. This is particularly easy to carry out. The film preferably has an adhesive layer, in particular of conductive adhesive. As a result, a particularly good electrical connection of the film to the first contact layer is produced.
Die Folie umfasst eine Schicht aus einem Metall oder einer Metalllegierung. Als besonders brauchbar haben sich Folien mit einer Bimetall-Schicht erwiesen.The film comprises a layer of a metal or a metal alloy. Particularly useful films have proven with a bimetallic layer.
Das erfindungsgemäße Halbleiter-Bauelement ist besonders wirtschaftlich herstellbar und aufgrund der Eigenschaften der zweiten Kontakt-Struktur auf besonders einfache Weise in einem Solar-Modul verschaltbar.The semiconductor device according to the invention is particularly economical to produce and due to the properties of the second contact structure in a particularly simple manner in a solar module interconnected.
Weitere Vorteile und Einzelheiten der Erfindung ergeben sich aus der Beschreibung mehrerer Ausführungsbeispiele anhand der Zeichnungen. Es zeigen:Further advantages and details of the invention will become apparent from the description of several embodiments with reference to the drawings. Show it:
Im Folgenden wird ein erfindungsgemäßes Verfahren zur Herstellung eines Halbleiter-Bauelements
Als Halbleiter-Substrat
Auf der zweiten Seite
Auf der Passivierungs-Schicht
Im Vergleich zu üblichen Halbleiter-Bauelementen ist die Dicke der ersten Kontakt-Schicht
Auf das Halbleiter-Substrat
Die zweite Kontakt-Schicht
Nach dem Aufbringen der zweiten Kontakt-Schicht
Nach dem Laser-Verfahren zur Herstellung der elektrisch leitenden Kontaktierung zwischen den Kontakt-Schichten
Bei diesem Temperschritt wird das Halbleiter-Bauelement
In einem weiteren, nicht dargestellten Ausführungsbeispiel ist die zweite Kontakt-Schicht
Erfindungsgemäß ist es vorgesehen, die zweite Kontakt-Schicht
Vorteilhafterweise ist die Folie zumindest einseitig, insbesondere beidseitig beschichtet.Advantageously, the film is coated on at least one side, in particular on both sides.
Vorzugsweise weist die Folie eine Kleb-Schicht auf. Die Folie kann mittels der Klebschicht auf besonders einfache Weise auf der ersten Kontakt-Schicht
Gemäß einem weiteren, in den
Claims (14)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE200910061071 DE102009061071B3 (en) | 2009-02-27 | 2009-02-27 | Method for producing semiconductor component used for laser-fired contact solar cell module, involves producing electrically conductive contact between contact layer made of easily solderable metal, and semiconductor substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE200910061071 DE102009061071B3 (en) | 2009-02-27 | 2009-02-27 | Method for producing semiconductor component used for laser-fired contact solar cell module, involves producing electrically conductive contact between contact layer made of easily solderable metal, and semiconductor substrate |
Publications (1)
Publication Number | Publication Date |
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DE102009061071B3 true DE102009061071B3 (en) | 2013-01-17 |
Family
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DE200910061071 Expired - Fee Related DE102009061071B3 (en) | 2009-02-27 | 2009-02-27 | Method for producing semiconductor component used for laser-fired contact solar cell module, involves producing electrically conductive contact between contact layer made of easily solderable metal, and semiconductor substrate |
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DE (1) | DE102009061071B3 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102012214253A1 (en) * | 2012-08-10 | 2014-06-12 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Laser-based method and processing table for metallizing the rear side of a semiconductor device |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005040871A1 (en) * | 2005-04-16 | 2006-10-19 | Institut Für Solarenergieforschung Gmbh | Back contacted solar cell and process for its production |
DE102006046726A1 (en) * | 2006-10-02 | 2008-04-03 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Silicon-based solar cell comprises front-end contacts that are placed on a front-end doped surface layer and a passivation layer with backside contacts that is placed on the backside doped layer |
DE102006044936B4 (en) * | 2006-09-22 | 2008-08-07 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Process for the metallization of solar cells and its use |
US20090050202A1 (en) * | 2007-08-24 | 2009-02-26 | Industrial Technology Research Institute | Solar cell and method for forming the same |
EP2031659A1 (en) * | 2007-08-30 | 2009-03-04 | Applied Materials, Inc. | Method for creating a metal backing pin for a semiconductor element, in particular a solar cell |
-
2009
- 2009-02-27 DE DE200910061071 patent/DE102009061071B3/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005040871A1 (en) * | 2005-04-16 | 2006-10-19 | Institut Für Solarenergieforschung Gmbh | Back contacted solar cell and process for its production |
DE102006044936B4 (en) * | 2006-09-22 | 2008-08-07 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Process for the metallization of solar cells and its use |
DE102006046726A1 (en) * | 2006-10-02 | 2008-04-03 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Silicon-based solar cell comprises front-end contacts that are placed on a front-end doped surface layer and a passivation layer with backside contacts that is placed on the backside doped layer |
US20090050202A1 (en) * | 2007-08-24 | 2009-02-26 | Industrial Technology Research Institute | Solar cell and method for forming the same |
EP2031659A1 (en) * | 2007-08-30 | 2009-03-04 | Applied Materials, Inc. | Method for creating a metal backing pin for a semiconductor element, in particular a solar cell |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102012214253A1 (en) * | 2012-08-10 | 2014-06-12 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Laser-based method and processing table for metallizing the rear side of a semiconductor device |
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