DE102009049445A1 - Micro valve for use as switch in e.g. medical application areas, has actuator embedded in carrier material, where carrier material exhibits radiation permeability on one side and actuator adopts stable condition by radiation - Google Patents
Micro valve for use as switch in e.g. medical application areas, has actuator embedded in carrier material, where carrier material exhibits radiation permeability on one side and actuator adopts stable condition by radiation Download PDFInfo
- Publication number
- DE102009049445A1 DE102009049445A1 DE200910049445 DE102009049445A DE102009049445A1 DE 102009049445 A1 DE102009049445 A1 DE 102009049445A1 DE 200910049445 DE200910049445 DE 200910049445 DE 102009049445 A DE102009049445 A DE 102009049445A DE 102009049445 A1 DE102009049445 A1 DE 102009049445A1
- Authority
- DE
- Germany
- Prior art keywords
- microvalve
- radiation
- actuator
- carrier material
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0036—Operating means specially adapted for microvalves operated by temperature variations
- F16K99/0038—Operating means specially adapted for microvalves operated by temperature variations using shape memory alloys
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0036—Operating means specially adapted for microvalves operated by temperature variations
- F16K99/004—Operating means specially adapted for microvalves operated by temperature variations using radiation
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Mechanical Engineering (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Metallurgy (AREA)
- Temperature-Responsive Valves (AREA)
Abstract
Description
Die Erfindung betrifft ein strahlungsaktiviertes minimalmechanisches Mikroventil oder Mikroschalter für fluidische Mikrosysteme. Stromlos und potentialfrei erfolgt die Betätigung des Aktors durch ein strahlungspermeables Trägermaterial. Der Ventilzustand oder Schalterzustand ist über Reflexionsmessung stromlos und potentialfrei feststellbar. Als Strahlungsassimilator werden Bimetallschnappscheiben, Formgedächtnismaterialien oder Polymorphe verwendet.The invention relates to a radiation-activated minimal mechanical microvalve or microswitch for fluidic microsystems. Powerless and potential-free actuation of the actuator by a radiation-permeable carrier material. The valve state or switch state can be detected via reflectance measurement without current and potential-free. As a radiation assimilator Bimetallschnappscheiben, shape memory materials or polymorphs are used.
Stand der TechnikState of the art
Es ist bekannt, dass Mikroventile mit Hilfe von Schnappscheiben und deren elektrische Beheizung realisiert werden (
Es ist weiterhin bekannt, dass Mikroventile in Siliziumtechnologie hergestellt werden. Die Herstellung erfordert jedoch hohe technologische Investitionen und ist selbst in hohen Stückzahlen teurer.It is also known that microvalves are manufactured in silicon technology. However, manufacturing requires high technological investment and is more expensive even in high volumes.
Es ist weiterhin bekannt, dass Mikroventile realisiert wurden, deren Funktionsprinzip auf Materialien mit unterschiedlichen Wärmeausdehnungs-Koeffizienten, die miteinander stoffschlüssig oder formschlüssig verbunden sind, beruht (
Der Erfindung liegt daher die Aufgabe zugrunde ein verbessertes Mikroventil zur Verfügung zu stellen, dass zumindest einen der oben genannten Nachteile überwindet.The invention is therefore based on the object to provide an improved microvalve that overcomes at least one of the above-mentioned disadvantages.
Detaillierte Beschreibung der ErfindungDetailed description of the invention
In einem ersten Aspekt ist die Erfindung auf ein Mikroventil oder Mikroschalter gerichtet, der im Gegensatz zum Stand der Technik kostengünstig, mit dem Fluid elektrisch keinen Kontakt bildend, einfach in vielfältige Trägermaterialien integrierbar und kontaktfrei steuerbar einsetzbar ist. Dieses Ventil soll durch eine punktgenaue Erwärmung, keine signifikante Erwärmung der Umgebungsmaterialien erzeugen und damit die Schaltzeiten derartiger Ventile verbessern. Zudem soll das Ventil eine kontaktfreie Zustandsbestimmung ermöglichen damit Sicherheitsabfragen und Ansteuerungen (Haltestrahlung) zu ermöglichen. Erfindungsgemäß werden alle Aspekte der Aufgabenstellung durch die im Anspruch formulierten Merkmale erfüllt.In a first aspect, the invention is directed to a microvalve or microswitch which, in contrast to the prior art, is cost-effective, electrically noncontacting with the fluid, easily integrated into a variety of substrates, and controllably employable without contact. This valve is intended to produce no significant heating of the surrounding materials by a pinpoint heating, and thus improve the switching times of such valves. In addition, the valve should enable a non-contact state determination so that security queries and controls (holding radiation) to allow. According to the invention, all aspects of the task are fulfilled by the features formulated in the claim.
Die Vorteile hinsichtlich zum Stand der Technik bestehen darin, dass
- – mit der Verwendung eines Schnappscheibenelementes oder eines Formgedächtnismaterials oder eines Polymorphs, ohne elektrischer Kontaktierung, die Realisierung eines Ventils im Vergleich zu ähnlichen Konzepten deutlich günstiger ist.
- – der Aktor aus einem thermosensitiven Material besteht, welches sich, gemäß der Bezeichnung, mit einer induzierten Temperaturveränderung in eine geometrisch unterschiedliche Form wandelt
- – keine elektrischen Ableitungen zur Steuerung des Aktors im Trägermaterial notwendig sind, welches den Preis des Ventils deutlich vermindert.
- – keine elektrischen Ableitungen zur Zustandsbestimmung Aktors im Trägermaterial notwendig sind.
- – die Auswahl an Trägermaterialien und die Varianten der Aufbau- und Verbindungstechniken zunehmen.
- – kein Risikopotential durch eine elektrische Kontaktierung zu erwarten ist.
- – die Wärmeenergie direkt aufgenommen werden kann und nicht durch z. B. Heizelemente oder Widerstände übertragen werden muss.
- – die Erwärmung der Umgebungsmaterialien als auch des Fluids auf ein Minimum reduziert wird, da punktuell nur die Schnappscheibe erwärmt wird (bei optimaler Transparenz des Trägers oder bei direkter Schnappscheibenbestrahlung).
- – mit Integration des Ventils in ein Disposable, die Ansteuerung des Ventils kontaktlos über LED, Laser oder Induktion erfolgt und keine Verbindung (z. B. Kontaktstifte) zur Hardware besteht
- – Das Mikroventil kann, zur Verhinderung von physikalischen und chemischen Reaktionen, mit Chemikalien oder Gasen mit Gefahrenpotential in Kontakt kommen
- - With the use of a snap disk element or a shape memory material or a polymorph, without electrical contacting, the realization of a valve compared to similar concepts is much cheaper.
- - The actuator consists of a thermosensitive material, which, according to the name, with an induced temperature change converts into a geometrically different shape
- - No electrical leads for controlling the actuator in the carrier material are necessary, which significantly reduces the price of the valve.
- - No electrical derivatives for determining the state Aktors in the carrier material are necessary.
- - the choice of support materials and the variants of the assembly and joining techniques increase.
- - No risk potential is to be expected by an electrical contact.
- - The heat energy can be absorbed directly and not by z. B. heating elements or resistors must be transmitted.
- - The heating of the surrounding materials as well as the fluid is reduced to a minimum, since selectively only the snap disc is heated (with optimal transparency of the wearer or with direct Schnappscheibenbestrahlung).
- - With integration of the valve into a disposable, the control of the valve is contactless via LED, laser or induction and there is no connection (eg pins) to the hardware
- - The microvalve may come into contact with hazardous chemicals or gases to prevent physical and chemical reactions
Eine Ausführungsform der Erfindung ist, dass das Mikroventil Bestandteil einer mit chemischer oder physikalischer Sensorik versehner Fluidik sein kann.One embodiment of the invention is that the microvalve can be part of a fluidics provided with chemical or physical sensors.
Das Trägermaterial und dessen Aufbau- und Verbindungstechnik muss nur hinsichtlich der Fixierung des Aktors und der Strahlungspermeabilität hin gewählt werden.The carrier material and its construction and connection technology must be selected only with regard to the fixation of the actuator and the radiation permeability out.
Eine Ausführungsform der Erfindung wird anhand einer Schnittskizze (
BezugszeichenlisteLIST OF REFERENCE NUMBERS
Fig. 1
- 1
- Schnappscheibe
- 1b
- Schnappscheibe ausgelenkt
- 2a
- Fluidkanal Einlass
- 2b
- Fluidkanal Auslass
- 3
- Trägermaterial Folienschichten z. B. laminiert
- 4
- Dichtung
- 5
- Reflektierte Strahlung ausgelenkt
- 6
- Photodiode
- 7
- Emitter
- 8
- Ventilhohlraum
- 1
- snap disk
- 1b
- Deflected snap disc
- 2a
- Fluid channel inlet
- 2 B
- Fluid channel outlet
- 3
- Carrier material film layers z. B. laminated
- 4
- poetry
- 5
- Deflected reflected radiation
- 6
- photodiode
- 7
- emitter
- 8th
- valve cavity
Fig. 1 Allgemeiner AufbauFig. 1 General structure
Beschreibung des allgemeinen AufbausDescription of the general structure
Ein emissionsinduziertes Mikroventil, wobei das Mikroventil umfasst:
- – ein Trägermaterial,
- – einen Einlasskanal,
- – einen Auslasskanal,
- – eine Schnappscheibe, die in einer Kammer angeordnet ist, wobei die Kammer in einen oberen Abschnitt und einen unteren Abschnitt unterteilt ist und wobei der obere Abschnitt einen Zugang zu dem Einlasskanal und einen Zugang zu dem Auslasskanal aufweist,
- – eine Dichtung,
- A carrier material,
- An inlet channel,
- An outlet channel,
- A snap-action disc arranged in a chamber, the chamber being divided into an upper portion and a lower portion and the upper portion having access to the inlet channel and access to the outlet channel,
- - a seal,
ZITATE ENTHALTEN IN DER BESCHREIBUNG QUOTES INCLUDE IN THE DESCRIPTION
Diese Liste der vom Anmelder aufgeführten Dokumente wurde automatisiert erzeugt und ist ausschließlich zur besseren Information des Lesers aufgenommen. Die Liste ist nicht Bestandteil der deutschen Patent- bzw. Gebrauchsmusteranmeldung. Das DPMA übernimmt keinerlei Haftung für etwaige Fehler oder Auslassungen.This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.
Zitierte PatentliteraturCited patent literature
- DE 10250758 A1 [0002] DE 10250758 A1 [0002]
- DE 20116898 U1 [0004] DE 20116898 U1 [0004]
Claims (25)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE200910049445 DE102009049445A1 (en) | 2009-10-14 | 2009-10-14 | Micro valve for use as switch in e.g. medical application areas, has actuator embedded in carrier material, where carrier material exhibits radiation permeability on one side and actuator adopts stable condition by radiation |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE200910049445 DE102009049445A1 (en) | 2009-10-14 | 2009-10-14 | Micro valve for use as switch in e.g. medical application areas, has actuator embedded in carrier material, where carrier material exhibits radiation permeability on one side and actuator adopts stable condition by radiation |
Publications (1)
Publication Number | Publication Date |
---|---|
DE102009049445A1 true DE102009049445A1 (en) | 2011-05-26 |
Family
ID=43901899
Family Applications (1)
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DE200910049445 Withdrawn DE102009049445A1 (en) | 2009-10-14 | 2009-10-14 | Micro valve for use as switch in e.g. medical application areas, has actuator embedded in carrier material, where carrier material exhibits radiation permeability on one side and actuator adopts stable condition by radiation |
Country Status (1)
Country | Link |
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DE (1) | DE102009049445A1 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20140205863A1 (en) * | 2013-01-23 | 2014-07-24 | Robert Bosch Gmbh | Rechargeable battery |
JPWO2013153912A1 (en) * | 2012-04-12 | 2015-12-17 | 国立大学法人 東京大学 | Valve, microfluidic device, microstructure, valve seat, valve seat manufacturing method, and microfluidic device manufacturing method |
CN104262652B (en) * | 2014-09-24 | 2017-02-08 | 北京航空航天大学 | Hydrogel intelligent switch with microdrop conducting function and preparation method thereof |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6239685B1 (en) * | 1999-10-14 | 2001-05-29 | International Business Machines Corporation | Bistable micromechanical switches |
DE20116898U1 (en) | 2001-10-15 | 2002-01-17 | FESTO AG & Co., 73734 Esslingen | microvalve |
DE10250758A1 (en) | 2002-10-31 | 2004-05-13 | Martin Weicker | Thermomechanical micro-valve with state signaling has dual stable state bi-metallic or shape memory alloy snap element in hollow volume between circuit boards joined e.g. by multilayering or adhesive |
DE69731369T2 (en) * | 1997-05-17 | 2005-11-10 | Samsung Electronics Co., Ltd., Suwon | Flow control valve |
US20060109309A1 (en) * | 2004-11-22 | 2006-05-25 | Eastman Kodak Company | Doubly-anchored thermal actuator having varying flexural rigidity |
US20080315099A1 (en) * | 2007-06-21 | 2008-12-25 | Lucent Technologies Inc. | Detector of infrared radiation having a bi-material transducer |
-
2009
- 2009-10-14 DE DE200910049445 patent/DE102009049445A1/en not_active Withdrawn
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69731369T2 (en) * | 1997-05-17 | 2005-11-10 | Samsung Electronics Co., Ltd., Suwon | Flow control valve |
US6239685B1 (en) * | 1999-10-14 | 2001-05-29 | International Business Machines Corporation | Bistable micromechanical switches |
DE20116898U1 (en) | 2001-10-15 | 2002-01-17 | FESTO AG & Co., 73734 Esslingen | microvalve |
DE10250758A1 (en) | 2002-10-31 | 2004-05-13 | Martin Weicker | Thermomechanical micro-valve with state signaling has dual stable state bi-metallic or shape memory alloy snap element in hollow volume between circuit boards joined e.g. by multilayering or adhesive |
US20060109309A1 (en) * | 2004-11-22 | 2006-05-25 | Eastman Kodak Company | Doubly-anchored thermal actuator having varying flexural rigidity |
US20080315099A1 (en) * | 2007-06-21 | 2008-12-25 | Lucent Technologies Inc. | Detector of infrared radiation having a bi-material transducer |
Non-Patent Citations (3)
Title |
---|
JERMAN,H.: Electrically-activated, micromachined diaphragm valves. In: IEEE Solid-State Sensor and Actuator Workshop,1990,4th Technical Digest, S.65-69 * |
KWANG,W.OH,et.al.: A review of microvalves. In: J.Micromech.Microeng.16,2006, S.R13-R39 $vgl.Fig.7,8 m.zugeh.Beschr.$ * |
KWANG,W.OH,et.al.: A review of microvalves. In: J.Micromech.Microeng.16,2006, S.R13-R39 vgl.Fig.7,8 m.zugeh.Beschr. |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2013153912A1 (en) * | 2012-04-12 | 2015-12-17 | 国立大学法人 東京大学 | Valve, microfluidic device, microstructure, valve seat, valve seat manufacturing method, and microfluidic device manufacturing method |
EP2837866A4 (en) * | 2012-04-12 | 2016-01-27 | Univ Tokyo | VALVE, MICROFLUIDIC DEVICE, MICROSTRUCTURE, VALVE SEAT, METHOD FOR MANUFACTURING VALVE SEAT, AND METHOD FOR MANUFACTURING MICROFLUIDIC DEVICE |
US20140205863A1 (en) * | 2013-01-23 | 2014-07-24 | Robert Bosch Gmbh | Rechargeable battery |
US9941549B2 (en) * | 2013-01-23 | 2018-04-10 | Samsung Sdi Co., Ltd. | Rechargeable battery |
CN104262652B (en) * | 2014-09-24 | 2017-02-08 | 北京航空航天大学 | Hydrogel intelligent switch with microdrop conducting function and preparation method thereof |
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Date | Code | Title | Description |
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OM8 | Search report available as to paragraph 43 lit. 1 sentence 1 patent law | ||
R119 | Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee |
Effective date: 20120501 |