DE102009040837A1 - Vorrichtungen und Verfahren zur Positionsbestimmung und Oberflächenvermessung - Google Patents

Vorrichtungen und Verfahren zur Positionsbestimmung und Oberflächenvermessung Download PDF

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Publication number
DE102009040837A1
DE102009040837A1 DE102009040837A DE102009040837A DE102009040837A1 DE 102009040837 A1 DE102009040837 A1 DE 102009040837A1 DE 102009040837 A DE102009040837 A DE 102009040837A DE 102009040837 A DE102009040837 A DE 102009040837A DE 102009040837 A1 DE102009040837 A1 DE 102009040837A1
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DE
Germany
Prior art keywords
light beam
light
detector
determining
reflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102009040837A
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German (de)
English (en)
Inventor
Bernd Spruck
Christina Dr. Alvarez Diez
Simon Dr. Brattke
Lars-Christian Dr. Wittig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss AG
Original Assignee
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss AG filed Critical Carl Zeiss AG
Priority to DE102009040837A priority Critical patent/DE102009040837A1/de
Priority to IN1443DEN2012 priority patent/IN2012DN01443A/en
Priority to EP10747056.9A priority patent/EP2475953B1/de
Priority to US13/394,916 priority patent/US8681344B2/en
Priority to PCT/EP2010/062637 priority patent/WO2011029740A2/de
Priority to CN201080040371.2A priority patent/CN102575926B/zh
Publication of DE102009040837A1 publication Critical patent/DE102009040837A1/de
Withdrawn legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/10—Systems determining position data of a target for measuring distance only using transmission of interrupted, pulse-modulated waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S5/00—Position-fixing by co-ordinating two or more direction or position line determinations; Position-fixing by co-ordinating two or more distance determinations
    • G01S5/16—Position-fixing by co-ordinating two or more direction or position line determinations; Position-fixing by co-ordinating two or more distance determinations using electromagnetic waves other than radio waves

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Measuring Cells (AREA)
DE102009040837A 2009-09-10 2009-09-10 Vorrichtungen und Verfahren zur Positionsbestimmung und Oberflächenvermessung Withdrawn DE102009040837A1 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE102009040837A DE102009040837A1 (de) 2009-09-10 2009-09-10 Vorrichtungen und Verfahren zur Positionsbestimmung und Oberflächenvermessung
IN1443DEN2012 IN2012DN01443A (https=) 2009-09-10 2010-08-30
EP10747056.9A EP2475953B1 (de) 2009-09-10 2010-08-30 Vorrichtungen und verfahren zur positionsbestimmung und oberflächenvermessung
US13/394,916 US8681344B2 (en) 2009-09-10 2010-08-30 Devices and methods for position determination and surface measurement
PCT/EP2010/062637 WO2011029740A2 (de) 2009-09-10 2010-08-30 Vorrichtungen und verfahren zur positionsbestimmung und oberflächenvermessung
CN201080040371.2A CN102575926B (zh) 2009-09-10 2010-08-30 用于位置确定和表面测量的设备和方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102009040837A DE102009040837A1 (de) 2009-09-10 2009-09-10 Vorrichtungen und Verfahren zur Positionsbestimmung und Oberflächenvermessung

Publications (1)

Publication Number Publication Date
DE102009040837A1 true DE102009040837A1 (de) 2011-03-17

Family

ID=43063954

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102009040837A Withdrawn DE102009040837A1 (de) 2009-09-10 2009-09-10 Vorrichtungen und Verfahren zur Positionsbestimmung und Oberflächenvermessung

Country Status (6)

Country Link
US (1) US8681344B2 (https=)
EP (1) EP2475953B1 (https=)
CN (1) CN102575926B (https=)
DE (1) DE102009040837A1 (https=)
IN (1) IN2012DN01443A (https=)
WO (1) WO2011029740A2 (https=)

Cited By (11)

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Publication number Priority date Publication date Assignee Title
US9377885B2 (en) 2010-04-21 2016-06-28 Faro Technologies, Inc. Method and apparatus for locking onto a retroreflector with a laser tracker
US9395174B2 (en) 2014-06-27 2016-07-19 Faro Technologies, Inc. Determining retroreflector orientation by optimizing spatial fit
US9400170B2 (en) 2010-04-21 2016-07-26 Faro Technologies, Inc. Automatic measurement of dimensional data within an acceptance region by a laser tracker
US9448059B2 (en) 2011-04-15 2016-09-20 Faro Technologies, Inc. Three-dimensional scanner with external tactical probe and illuminated guidance
US9453913B2 (en) 2008-11-17 2016-09-27 Faro Technologies, Inc. Target apparatus for three-dimensional measurement system
US9482529B2 (en) 2011-04-15 2016-11-01 Faro Technologies, Inc. Three-dimensional coordinate scanner and method of operation
US9482746B2 (en) 2011-04-15 2016-11-01 Faro Technologies, Inc. Six degree-of-freedom laser tracker that cooperates with a remote sensor
US9482755B2 (en) 2008-11-17 2016-11-01 Faro Technologies, Inc. Measurement system having air temperature compensation between a target and a laser tracker
US9638507B2 (en) 2012-01-27 2017-05-02 Faro Technologies, Inc. Measurement machine utilizing a barcode to identify an inspection plan for an object
US9686532B2 (en) 2011-04-15 2017-06-20 Faro Technologies, Inc. System and method of acquiring three-dimensional coordinates using multiple coordinate measurement devices
US9772394B2 (en) 2010-04-21 2017-09-26 Faro Technologies, Inc. Method and apparatus for following an operator and locking onto a retroreflector with a laser tracker

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US8619265B2 (en) 2011-03-14 2013-12-31 Faro Technologies, Inc. Automatic measurement of dimensional data with a laser tracker
DE102010039948B4 (de) * 2010-08-30 2020-10-22 Carl Zeiss Ag Messeinheit, Messsystem und Verfahren zum Ermitteln einer Relativposition und Relativorientierung
US9164173B2 (en) 2011-04-15 2015-10-20 Faro Technologies, Inc. Laser tracker that uses a fiber-optic coupler and an achromatic launch to align and collimate two wavelengths of light
CN102853824B (zh) * 2012-07-25 2015-06-24 湘潭大学 定位机械臂上位置点的定位系统及工程机械设备
CN103901235B (zh) * 2012-12-27 2016-08-03 鸿富锦精密工业（深圳）有限公司 定位装置和定位方法
CN103235302B (zh) * 2013-02-28 2014-10-15 中国地质大学（武汉） 基于激光扫描和双探测器的距离与速度测量装置及方法
WO2016030714A1 (en) * 2014-08-25 2016-03-03 Audi Ag A method for optical position detection, optical position detection device and optical position detection system
WO2016030715A1 (en) * 2014-08-25 2016-03-03 Audi Ag A method for transmitting data and corresponding transmission device
CN104502917B (zh) * 2014-12-09 2017-03-29 中国科学院西安光学精密机械研究所 利用光子调控增强光子计数激光雷达探测灵敏度的方法和系统
TWI563240B (en) * 2015-08-06 2016-12-21 Optical inspection apparatus
WO2018176115A1 (en) * 2017-03-31 2018-10-04 Huawei Technologies Co., Ltd. Apparatus and method for scanning and ranging with eye-safe pattern
CN110892280B (zh) * 2017-07-19 2023-11-28 昕诺飞控股有限公司 用于向设备提供物体的空间信息的系统和方法
CN108931781A (zh) * 2018-05-25 2018-12-04 深圳新亮智能技术有限公司 基于vcsel激光光源的高速三维激光雷达系统
CN110017769A (zh) * 2019-03-12 2019-07-16 精诚工科汽车系统有限公司 基于工业机器人的零件检测方法及系统
WO2021023822A1 (en) * 2019-08-06 2021-02-11 Ipcom Gmbh & Co. Kg Bandwidth selection for location determination
US12455158B2 (en) * 2023-12-15 2025-10-28 Mitutoyo Corporation Metrology system with high speed position and orientation tracking mode

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GB2159271A (en) * 1984-04-27 1985-11-27 Nissan Motor Surface flaw detecting method and apparatus
US4714339A (en) * 1986-02-28 1987-12-22 The United States Of America As Represented By The Secretary Of Commerce Three and five axis laser tracking systems
US5153445A (en) * 1991-07-22 1992-10-06 General Motors Corporation Method and apparatus for measuring orange peel and texture in painted surfaces
DE19739250A1 (de) * 1996-09-13 1998-03-26 Fraunhofer Ges Forschung Optische Erfassung von Freiformflächen
EP1329690A1 (de) * 2002-01-22 2003-07-23 Leica Geosystems AG Verfahren und Vorrichtung zum automatischen Auffinden von Zielmarken
US7136172B1 (en) * 2002-01-15 2006-11-14 J.A. Woollam Co., Inc. System and method for setting and compensating errors in AOI and POI of a beam of EM radiation
DE102005054819A1 (de) * 2005-11-15 2007-05-24 Tutsch, Rainer, Prof., Dr.-Ing. Verfahren und Vorrichtung zur Messung geometrischer und nichtgeometrischer Größen an einem Werkstück
WO2007079601A1 (de) * 2006-01-13 2007-07-19 Leica Geosystems Ag Tracking-verfahren und messsystem mit laser-tracker
US20080316497A1 (en) * 2007-06-20 2008-12-25 Mitutoyo Corporation Tracking type laser interferometer and method for resetting the same
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FR2817339B1 (fr) * 2000-11-24 2004-05-14 Mensi Dispositif de relevement tridimensionnel d'une scene a emission laser
DE10118392A1 (de) * 2001-04-13 2002-11-07 Zeiss Carl System und Verfahren zum Bestimmen einer Position oder/und Orientierung zweier Objekte relativ zueinander sowie Strahlführungsanordnung, Interferometeranordnung und Vorrichtung zum Ändern einer optischen Weglänge zum Einsatz in einem solchen System und Verfahren
WO2003062744A1 (en) * 2002-01-16 2003-07-31 Faro Technologies, Inc. Laser-based coordinate measuring device and laser-based method for measuring coordinates
DE10356418A1 (de) * 2003-11-27 2005-07-07 Deutsches Zentrum für Luft- und Raumfahrt e.V. Verfahren zur Positionsverfolgung von beweglichen Objekten und Positionsverfolgungssystem
JP2008547026A (ja) * 2005-06-23 2008-12-25 ファロ テクノロジーズ インコーポレーテッド 有関節座標計測機再配置装置及び方法

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US4714339B2 (en) * 1986-02-28 2000-05-23 Us Commerce Three and five axis laser tracking systems
US5153445A (en) * 1991-07-22 1992-10-06 General Motors Corporation Method and apparatus for measuring orange peel and texture in painted surfaces
DE19739250A1 (de) * 1996-09-13 1998-03-26 Fraunhofer Ges Forschung Optische Erfassung von Freiformflächen
US7136172B1 (en) * 2002-01-15 2006-11-14 J.A. Woollam Co., Inc. System and method for setting and compensating errors in AOI and POI of a beam of EM radiation
EP1329690A1 (de) * 2002-01-22 2003-07-23 Leica Geosystems AG Verfahren und Vorrichtung zum automatischen Auffinden von Zielmarken
DE102005054819A1 (de) * 2005-11-15 2007-05-24 Tutsch, Rainer, Prof., Dr.-Ing. Verfahren und Vorrichtung zur Messung geometrischer und nichtgeometrischer Größen an einem Werkstück
WO2007079601A1 (de) * 2006-01-13 2007-07-19 Leica Geosystems Ag Tracking-verfahren und messsystem mit laser-tracker
US20080316497A1 (en) * 2007-06-20 2008-12-25 Mitutoyo Corporation Tracking type laser interferometer and method for resetting the same
DE102008045386A1 (de) 2008-09-02 2010-03-04 Carl Zeiss Ag Vorrichtung und Verfahren zum Bestimmen einer Objektposition

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Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9482755B2 (en) 2008-11-17 2016-11-01 Faro Technologies, Inc. Measurement system having air temperature compensation between a target and a laser tracker
US9453913B2 (en) 2008-11-17 2016-09-27 Faro Technologies, Inc. Target apparatus for three-dimensional measurement system
US10480929B2 (en) 2010-04-21 2019-11-19 Faro Technologies, Inc. Method and apparatus for following an operator and locking onto a retroreflector with a laser tracker
US9400170B2 (en) 2010-04-21 2016-07-26 Faro Technologies, Inc. Automatic measurement of dimensional data within an acceptance region by a laser tracker
US10209059B2 (en) 2010-04-21 2019-02-19 Faro Technologies, Inc. Method and apparatus for following an operator and locking onto a retroreflector with a laser tracker
US9377885B2 (en) 2010-04-21 2016-06-28 Faro Technologies, Inc. Method and apparatus for locking onto a retroreflector with a laser tracker
US9772394B2 (en) 2010-04-21 2017-09-26 Faro Technologies, Inc. Method and apparatus for following an operator and locking onto a retroreflector with a laser tracker
US9453717B2 (en) 2011-04-15 2016-09-27 Faro Technologies, Inc. Diagnosing multipath interference and eliminating multipath interference in 3D scanners using projection patterns
US9482746B2 (en) 2011-04-15 2016-11-01 Faro Technologies, Inc. Six degree-of-freedom laser tracker that cooperates with a remote sensor
US9482529B2 (en) 2011-04-15 2016-11-01 Faro Technologies, Inc. Three-dimensional coordinate scanner and method of operation
US9494412B2 (en) 2011-04-15 2016-11-15 Faro Technologies, Inc. Diagnosing multipath interference and eliminating multipath interference in 3D scanners using automated repositioning
US9686532B2 (en) 2011-04-15 2017-06-20 Faro Technologies, Inc. System and method of acquiring three-dimensional coordinates using multiple coordinate measurement devices
US10119805B2 (en) 2011-04-15 2018-11-06 Faro Technologies, Inc. Three-dimensional coordinate scanner and method of operation
US9448059B2 (en) 2011-04-15 2016-09-20 Faro Technologies, Inc. Three-dimensional scanner with external tactical probe and illuminated guidance
US10267619B2 (en) 2011-04-15 2019-04-23 Faro Technologies, Inc. Three-dimensional coordinate scanner and method of operation
US10302413B2 (en) 2011-04-15 2019-05-28 Faro Technologies, Inc. Six degree-of-freedom laser tracker that cooperates with a remote sensor
US10578423B2 (en) 2011-04-15 2020-03-03 Faro Technologies, Inc. Diagnosing multipath interference and eliminating multipath interference in 3D scanners using projection patterns
US9638507B2 (en) 2012-01-27 2017-05-02 Faro Technologies, Inc. Measurement machine utilizing a barcode to identify an inspection plan for an object
US9482514B2 (en) 2013-03-15 2016-11-01 Faro Technologies, Inc. Diagnosing multipath interference and eliminating multipath interference in 3D scanners by directed probing
US9395174B2 (en) 2014-06-27 2016-07-19 Faro Technologies, Inc. Determining retroreflector orientation by optimizing spatial fit

Also Published As

Publication number Publication date
WO2011029740A2 (de) 2011-03-17
CN102575926A (zh) 2012-07-11
CN102575926B (zh) 2015-08-05
IN2012DN01443A (https=) 2015-06-05
US20120218563A1 (en) 2012-08-30
US8681344B2 (en) 2014-03-25
EP2475953B1 (de) 2015-08-19
EP2475953A2 (de) 2012-07-18
WO2011029740A3 (de) 2011-10-13

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OM8 Search report available as to paragraph 43 lit. 1 sentence 1 patent law
R005 Application deemed withdrawn due to failure to request examination