DE102008054429A1 - Component e.g. optical element, storage system for microlithography projection exposure system, has decoupling element atmospherically separated from another element by partition, and sealing element provided between rod and partition - Google Patents

Abstract

The device has a decoupling element (9) e.g. pneumatically operating spring element, acting in a spatial direction and enabling movement of a supported component e.g. cargo (1), in the direction. Another decoupling element acting in another spatial direction enables movement of the component in the latter direction. The former element is atmospherically separated from the latter element by a partition and has a connecting rod (7). An elastic sealing element (11) is provided between the connecting rod and the partition. The latter element is formed as pendular insulation. An independent claim is also included for a projection exposure system for microlithography.

Description

BACKGROUND OF THE INVENTION

FIELD OF THE INVENTION

The The present invention relates to a device for vibration decoupled Storage of a component in a vacuum chamber with at least one first, acting in a first spatial direction decoupling element, which movements of the stored component in the first spatial direction allows, and at least a second, in at least a second spatial direction acting decoupling element, which Movements of the stored component in the second spatial direction allows.

STATE OF THE ART

Vibration isolation systems, ie systems which make it possible to avoid or reduce the transmission of vibrations to a component or the like, are known from the prior art. An example is through the US 4,796,873 A given. One type of vibration isolators that use pendulums is in the US 5,779,010 A described. Such vibration isolation systems usually allow movements of the corresponding component in different directions or around different axes, in order to enable the inertia of the component to decouple excitations from the environment.

Out The prior art also includes vibration isolation systems for Components are known which are in a vacuum or operated there become. For example, the company offers Integrated Dynamics Engineering, Karl-Liebknecht-Straße 30, 65479 Raunheim such vibration isolation systems at. However, this results in the problem that by the Vibration isolation systems are provided movable components, which must also be sealed against the vacuum. Due to the vacuum seal, however, the free mobility of the moving components of the vibration isolation systems, because by appropriate sealing elements due to the sealing forces influences the free mobility of the moving components becomes.

Corresponding are used for vibration isolation systems for components in a vacuum usually bellows or membrane elements used for sealing the moving components, since the mobility corresponding bellows or elastic membranes only one little influence on the free mobility of the moving components enable.

Indeed require the usual vibration isolation systems that are known in the art, bellows or elastic Membranes with large dimensions, especially with one big diameter, so by the necessary Dimensioning of the membranes or bellows these a relative have high rigidity, which in turn negative on the free Mobility of the moving components of the vibration isolation systems acts. This is especially true when the bellows and membranes unfavorable, problematic movements, such as Torsionsbewegungen must compensate. Especially at Torsional movements can damage bellows.

DISCLOSURE OF THE INVENTION

OBJECT OF THE INVENTION

It is therefore an object of the present invention, a vibration isolation system or a device for vibration-decoupled storage of a Component in particular for use in a vacuum, in which the above problems with the influence of Vibration decoupling or vibration isolation by vacuum sealing elements be corrected or improved.

Especially is intended to provide a device with the present invention which is simple and easy to use and at the same time the diverging properties in terms of a good vacuum seal and a vibration decoupling best possible solves.

TECHNICAL SOLUTION

These Task is solved by a device with the features of claim 1. Advantageous embodiments are the subject of depend claims.

The inventive solution provides that for a vibration isolation system or a device for the vibration-decoupled storage of a component, in which at least two decoupling elements for decoupling in a first and are provided in a second spatial direction, the first and the second decoupling element atmospherically separated or are sealed. This will cause a small sized seal and in particular a seal for just a simple, possible 1-dimensional movement can be used. Such a seal can be dimensioned so that hardly influences on the free mobility of the corresponding moving component is exercised.

For example can a corresponding device for vibration decoupled Storage have a first decoupling element which movements the stored component in the first spatial direction allows so for example in a vertical direction. Such a thing vertical first decoupling decouples the component to be stored from corresponding vibrations, resulting in a vertical linear Translational movement of the component would lead.

One second decoupling element can, for example, for the Decoupling of movements of the component to be stored in horizontal Directions and / or rotational movements, torsional movements or other be provided complicated movements. By an atmospheric Separation or sealing between the first and second decoupling element may be a corresponding sealing element on the movable component of the first decoupling element, which is a simple linear translatory element Movement executes, be provided and thus executed and dimensioned that minimally affects this freedom of movement becomes.

Corresponding a first decoupling element can have a push rod, which passed through an opening in the partition which is the first decoupling element and the second decoupling element separated atmospherically, being between the push rod and the separation may be provided a sealing element, which the gap between push rod and the separation in the for the push rod provided opening seals.

The Separation can be directly the vacuum chamber wall, so that the first decoupling element outside the vacuum chamber and the second decoupling element provided within the vacuum chamber are. Alternatively, an additional shielding or housing within the vacuum chamber as a separation be provided.

When Sealing element come an elastic membrane or a bellows in question or a corresponding element comprising such components. Especially metallic diaphragms or bellows may be provided. By the sealing of only a small dimensionable Push rod, the sealing element itself can be small in size, so that due to the low rigidity of the sealing element low Influences on the mobility of the decoupling element be exercised.

Corresponding the push rod torsionally rigid in the first decoupling element be received or the first decoupling element torsionally rigid be formed, so that the sealing element no complicated Movements and in particular no torsional movements must perform.

The first decoupling element may be a pneumatic, hydropneumatic, be electromechanically or mechanically operating spring element while the second decoupling element designed as pendulum isolation can be.

at This embodiment, the second decoupling element comprise a pendulum element on which the component to be stored or a corresponding recording stored hanging is. The pendulum element can have two suspension points at its ends have, which are designed so that the pendulum element with respect to at least one of its suspension points, but preferably both Suspension points rotatable about three independent spatial axes or at least limited pivotally arranged. alternative or additionally, the suspension points rotatable relative to each other and / or in the at least second spatial direction be displaced, so in particular in a plane transverse to the first Spaced spatial direction of the first decoupling element.

The Pendulum elements used for this purpose can be flexible and in particular be elastically deformable to the corresponding twists or displacements to ensure by deformation of the pendulum element itself. Additionally or alternatively, the pendulum elements also stored with ball joints in the suspension points be, so that through the ball joints an at least limited twistability or pivotability is given.

Corresponding The shuttle can also be designed as a pendulum rod be, which in particular rotatable about the longitudinal axis is.

The pendulum elements can be designed so that they record the component to be stored or a receptacle for this or a holding element or a holding rod of the component to be stored with one of its ends, while at its other end to the first decoupling element and in particular a push rod of a first Decoupling element are arranged. For this purpose, the push rod may for example have a top plate. Overall, the second decoupling element may have an S-shaped or meandering loop-shaped structure, wherein a holding element of the component to be stored or a receptacle for this and a pendulum element and a push rod of a first decoupling element are arranged parallel to each other and holding element and pendulum element of a On the other hand, as well as pendulum element and push rod on the other hand via transversely arranged connecting element at opposite ends of the pendulum element are interconnected.

at In another embodiment, the second decoupling element have a U-shaped structure, wherein a holding element the component to be stored or a receptacle for this and a pendulum element are arranged parallel to each other and holding element and pendulum element via a transversely arranged connecting element connected to each other.

Especially The device for vibration-decoupled storage of a Component in a vacuum chamber a plurality of first decoupling elements and / or have a plurality of second decoupling elements, wherein in particular at the second decoupling elements with a pendulum suspension one or more pendulum elements provided in the second decoupling element could be.

The first decoupling element can both standing and hanging be arranged. Accordingly, the first spatial direction, ie the direction of action of the first decoupling element vertically and the second spatial direction, ie the effective direction of the second decoupling element to be horizontal. However, the invention is not limited to but the first and second space direction can be arbitrary however, the first spatial direction is preferred is aligned transversely to the second spatial direction.

The corresponding device for vibration-decoupled storage can In addition, at least one or more damping devices and / or at least one or more motion or vibration sensors and at least one or more control devices, in addition to possible occurring vibrations to be able to dampen. These are all suitable Damping devices, sensors and control devices conceivable.

The present invention with a corresponding storage device can in particular for projection exposure systems for use microlithography. In particular, a corresponding Storage device in the context of a vacuum chamber a appropriate projection exposure system can be used, such they are used for example in projection exposure systems can find which with electromagnetic radiation or light in the ultraviolet range and in particular in the extreme ultraviolet Work area. A possible wavelength of the used light can be in the range of 13.5 nm or in the range from 10 to 15 nm.

The Storage device according to the present invention can vary from single optical element to different Assemble assemblies of various objects. In particular It is possible to use optical elements within a vacuum chamber or assemblies which themselves have a vacuum housing can store.

Especially can several in such projection exposure systems Vacuum chambers with different vacuum or atmospheric conditions be arranged one inside the other, so that the corresponding storage device can also store a corresponding vacuum chamber.

BRIEF DESCRIPTION OF THE FIGURES

Further Advantages, characteristics and features of the present invention in the following detailed description of embodiments clearly with reference to the attached drawings. The painting show here in a purely schematic way in

1 a 2-dimensional schematic diagram of a vacuum vibration isolation system according to the invention with two insulators in a sectional view;

2 a sectional view of another embodiment with an isolator with active vibration damping;

3 a third embodiment of an isolator disposed within a vacuum chamber;

four a representation of a projection exposure system;

5 a representation of a projection lens; and in

6 a representation of a lighting optical system.

The 1 shows in a purely schematic schematic diagram of the basic structure of a device according to the invention for the vibration-decoupled mounting of a component in a vacuum chamber, which can also be referred to as a vacuum vibration isolation system.

In the picture of the 1 is a component to be stored 1 , also referred to as payload, housed in a vacuum chamber, part of which is the vacuum chamber wall 2 is shown. The payload 1 is standing on a floor above two vibration isolation systems 10 stored.

Outside the vacuum chamber, ie in the area between the floor 10 and the vacuum chamber wall 2 , is a first decoupling element 9 provided, which is a movement of the payload 1 allows in the vertical direction and can cause a corresponding vibration isolation. The first decoupling element 9 can be realized for example by a mechanical spring element or a compressed air storage or the like. The first decoupling element 9 includes a push rod 7 , which at its lower end over the crosspoint 8th on the movement or spring element 41 is provided and through an opening 40 the vacuum chamber wall 2 guided into the interior of the vacuum space.

The push rod 7 has at its top a head plate 6 on, at which over a ball joint 5 a pendulum rod four is mounted. At the lower end of the pendulum rod four this is with a holding bar 42 the payload 1 also via a ball joint 3 connected. Through the ball joints 3 . 5 at the suspension points of the pendulum rod four is a movement of the payload 1 in Lateralbewegungen, ie movements in the direction of the horizontal, as well as rotational movements in the vertical axis of the top plate 6 and thus from the push rod 7 or the first decoupling element as well as the ground 10 , on which the first decoupling element is arranged, decoupled. This is a pendulum suspension of the payload 1 over the pendulum rods four the vibration isolation systems formed.

By providing two (or three in three-dimensional space) vibration isolation systems, pitching and roll motions of the payload can also be accommodated 1 regarding the soil 10 be decoupled, since these movements can be absorbed by composite movements of the first two decoupling elements and the two second decoupling elements. Through the ball joints 3 and 5 The second decoupling element can also be corresponding rotational movements of the payload 1 from the ground 10 be decoupled.

Because of the chosen construction and arrangement only a vacuum feedthrough for a translationally moving push rod 7 must be made, is the sealing of the opening 40 in the vacuum chamber wall 2 opposite the push rod 7 in a simple manner by a bellows or a membrane of elastic material, in particular by a metal bellows or a metal membrane 11 possible. The sealing element 11 This can be dimensioned very small, so that a simple seal of high quality is possible. By the decoupling of torsional and in particular torsional movements through the ball joints 3 and 5 the second decoupling element and a torsionally rigid formation of the first decoupling element and in particular a torsionally rigid receiving the push rod 7 in the first decoupling element 9 can in particular torsional loads for the sealing element 11 be avoided.

Overall, the rigidity of the sealing element 11 be kept very low due to the small dimensions and the avoidance of torsional loads, which is the decoupling of the payload from the environment, so the bottom and the vacuum chamber wall 2 clearly improved.

Instead of in 1 featured embodiment, wherein the first decoupling element 9 standing on the floor 10 is arranged, is also an arrangement of the first decoupling element 9 hanging on a ceiling (not shown) conceivable. In this case, the push rod is 7 only from the top plate 6 leading up through an upper vacuum chamber wall (not shown) and attaching it to the ceiling via a first decoupling element.

The 2 shows a further embodiment of a vibration isolator with an active vibration damping and level control. In this embodiment, the payload rests 12 on a so-called load ring 13 who with the support staff 42 the embodiment of the 1 is comparable. The load ring 13 Coaxially surrounds the push rod 16 of the first decoupling element 20 , which can also be referred to as a push rod.

At its lower end is the push rod 16 over a feather key 18 torsionally rigid in a piston plate 19 of the first decoupling element 20 added. The first decoupling element 20 is in the embodiment of the 2 executed in the form of a compressed air storage or gas storage in general. For this purpose, the first decoupling element has a printing cylinder 22 on, in which the compressed air or another suitable gas is received. About the compressed air, the piston plate 19 in which the push rod 16 is absorbed, to be moved in the vertical direction, so that a decoupling of the payload 12 regarding the environment, so the bottom plate 17 , referring to vertical movements. The movement of the piston plate 19 is up above the end stops 24 and down over the top of the impression cylinder 22 or lower end stops 45 limited.

About the distance sensor 25 can the vertical position of the piston plate 19 determined and on the gas or compressed air volume 23 be set or regulated.

Between the U-shaped or lid-like the impression cylinder 22 comprehensive piston plate 19 and the pressure cylinder outer wall is an elastomeric membrane 21 intended.

The push rod 16 or the push rod 16 is through an opening 46 in a cover element 28 led, which the installation opening 47 the vacuum chamber wall 29 closes.

Between a flange plate 27 of the lid 28 and a shoulder 48 caused by a change in cross section of the push rod 16 is formed, is a diaphragm bellows 26 for vacuum-tight sealing of the movable push rod 16 opposite the opening 46 intended.

Due to the construction according to the invention, in which only the push rod 16 with the smallest possible cross-sectional dimension through the opening 46 of the lid 28 or the vacuum chamber wall 29 is guided and in which the sealing element 26 only has to compensate for a linear translational motion, the rigidity of the sealing element 26 be set very low, so that a slight effect on the vibration isolation is given.

The push rod 16 or the push rod 16 has at its upper end a head plate 15 on, in which circumferentially around the push rod 16 pendulum rods 14 are included. The pendulum rods 14 of which in the sectional view of 2 two can be seen, are provided to each other with equal angular intervals. Overall, for example, the embodiment of the 2 three pendulum rods on.

The pendulum rods 14 are at their lower end in a carrying flange 49 of the load ring 13 recorded and thus make the connection between payload 12 and push rod 16 ago.

The pendulum rods 14 form a parallel guide, which is the push rod 16 perpendicular to the horizontal or to the bearing surface of the payload on the load ring 13 holds. The pendulum rods are flexible and designed in particular elastically deformable, so that there is a decoupling of the payload of the top plate 15 or the push rod 16 and thus the environment, so the bottom plate 17 comes.

By the second decoupling element, which is the pendulum rods 14 includes, is a decoupling of the payload 12 from the top plate 15 , the pushrod 16 and thus the environment 17 with regard to horizontal movements or rotational movements, in particular torsional movements about a vertical axis. Through the shoulder-shaped heel 31 of the lid 28 is an end stop for the horizontal movement of the load ring 13 given.

The embodiment of 2 also has damping elements 33 and sensors 32 on, which allows vibration damping via a control circuit, not shown, that is, for example, a computer-aided control. The damping can be realized for example with a so-called. Skyhook damping, wherein liquid-cooled Lorenzaktoren be used as a power actuator. With the sensors 32 which movements or vibrations of the payload 12 can be inertial sensors, for example in the form of geophones.

By the first decoupling element is a level adjustment with regard to the vertical arrangement of the payload 12 as well as a damping control possible. The regulation of the first decoupling element 20 , that is, the vertical vibration isolator, can be designed so that the dynamic stiffness of the vertical isolator is not significantly increased. The natural frequency can typically be set so that the natural frequency is in the range of 1 to 2 hertz. For the pendulum rods of the second decoupling element, a natural frequency of 1 to 3 Hertz can be set for horizontal translation movements.

The 3 shows a third embodiment of an inventive device for vibration-decoupled storage of a component in a vacuum chamber. The embodiment of the 3 is in wide range with the embodiment of the 2 identical, so that identical or similar components are provided with the same reference numerals. Accordingly, the description of these components to the comments on 2 directed and avoided a repetition.

The embodiment of the 3 differs from the embodiment of the 2 in that the first decoupling element 20 , So the vertical insulator, in the embodiment of the 3 also located within the vacuum chamber, so that in the vacuum chamber wall 29 no installation opening 47 as in the embodiment of the 2 is provided, but only a vacuum feedthrough 50 for electrical connections and the like. However, there is a case 30 for receiving the first decoupling element 20 provided, which over the lid 28 is separated from the remaining vacuum chamber, so that no contamination from the first decoupling element 20 can get into the vacuum chamber. Accordingly, the implementation of the push rod 16 through the lid 28 executed in an identical manner.

A corresponding device for schwin Undecided storage of a component can be used according to the invention for a projection exposure, in particular for projection exposure systems that work with ultraviolet light and in particular extreme ultraviolet light, such as electromagnetic radiation having a wavelength of 13.5 nm. A representation of corresponding components of such a projection exposure apparatus can be found in the four to 6 wherein the device for vibration-decoupled storage of a component, as in the 1 to 3 has been shown, both for the storage of a corresponding housing or part of a housing Projektionsbelichtungsanlage, for example, the housing of a lighting optics or a projection lens can be used as well as for the storage of individual optical components or components in a housing of a projection exposure system. In particular, such a projection exposure apparatus can comprise a plurality of housings which are provided one inside the other and have different vacuum or atmospheric conditions.

The projection exposure system 100 includes an illumination optics 101 as well as a projection lens 102 , Between the illumination optics 101 and the projection lens 102 is a mask, the so-called reticle 105 arranged, which has the microstructures, which is reduced to the wafer 107 should be imaged to illuminate there a photosensitive layer.

A corresponding projection exposure apparatus further comprises a light source 103 that the light for imaging the reticle 105 on the wafer 107 provides.

The illumination optics 101 as well as the projection lens 102 include several (in 1 not shown) optical elements, such as lenses, mirrors, beam splitters and / or the like.

The optical elements are each in a housing of the illumination optics 101 or the projection lens 102 recorded in the four each represented by a rectangle. This is of course only a schematic representation, so that the housing can have any other suitable shape.

On the housing, which is otherwise gas-tight lockable, are suction openings 104 provided over which the housing can be pumped out accordingly.

At the suction openings 104 evacuation devices or suction devices are not shown in detail, such as vacuum pumping stations, which make it possible to pump the housing to the extent that a technical vacuum is present.

The 5 shows an example of a projection lens 120 as in the projection exposure apparatus of the four in the case 102 may be present. Although the example of the 5 a reflective reticle 105 ' and no radiographic reticle 105 as in the embodiment of four However, such a projection lens can 120 also with a radiated reticle 105 as in the schematic drawing of the four shown used.

That of the reticle 105 ' Outgoing light is reflected several times over the mirrors M1 to M6 to access the wafer 107 on the wafer stage 106 in a photosensitive layer to produce the corresponding structures.

The 6 shows an embodiment of an illumination optics, as for example in the housing 101 can be provided. The lighting system 110 of the 6 includes a light source 103 in the form of a plasma light source, the light on an EUV collector in the form of a collector mirror 111 meets. From the collector mirror 111 the light is placed on a field honeycomb panel 113 with field honeycombs 112 from where it turns into a pupil honeycomb panel 115 with pupil honeycomb 114 arrives. From there, the light is on the reticle 105 reflected. Such a lighting system is in the EP 1 202 101 A2 described in more detail.

Besides the only example in the 5 and 6 Of course, a variety of other optical systems can be used with the present invention, as illustrated optical systems with corresponding components in the form of optical elements such as mirrors and the like. The four to 6 purely exemplify a possible application of the present invention, wherein both the housing 101 and 102 for the illumination optics or the projection objective of the embodiment of FIG four as well as additional housings or components for corresponding components of the lighting system 110 of the 6 or the projection lens 120 of the 5 by appropriate storage devices, as in the 1 to 3 are shown, can be stored.

Although the present invention has been described in detail with reference to the accompanying embodiments, it will be apparent to those skilled in the art that the invention is not limited to these embodiments, but that modifications to the individual features of the embodiments omitted or other combinations of the features made can, are possible without departing from the scope of the appended claims. In particular, the present invention claims all combinations of particular features of the invention, including the combination of features of different embodiments.

QUOTES INCLUDE IN THE DESCRIPTION

This list The documents listed by the applicant have been automated generated and is solely for better information recorded by the reader. The list is not part of the German Patent or utility model application. The DPMA takes over no liability for any errors or omissions.

Cited patent literature

• - US 4796873 A [0002]
• US 5779010 A [0002]
• - EP 1202101 A2 [0067]

Claims (27)

Device for the vibration-decoupled mounting of a component ( 1 . 12 ) in a vacuum chamber having at least one first decoupling element acting in a first spatial direction ( 9 . 20 ), which enables movements of the mounted component in the first spatial direction, and at least one second, acting in at least one second spatial direction Entkoppelungselement ( four . 14 ), which allows movements of the mounted component in the second spatial direction, characterized in that the first decoupling element is separated atmospherically from the second decoupling element. Apparatus according to claim 1, characterized in that the first decoupling element is a push rod ( 7 . 16 ), which is guided through an opening in a partition, with which the first decoupling element is separated from the second decoupling element atmospherically, wherein between push rod and separation an elastic sealing element ( 11 . 26 ) is provided. Apparatus according to claim 2, characterized in that the separation of a vacuum chamber wall ( 2 ; 28 . 29 ) or an additional shielding ( 28 . 30 ) within the vacuum chamber. Device according to claim 2 or 3, characterized in that the elastic sealing element ( 11 . 26 ) is or comprises a membrane or a bellows, in particular of metal. Device according to one of claims 2 to 4, characterized in that the push rod ( 7 . 16 ) received torsionally rigid in the first decoupling element and / or the first decoupling element is torsionally rigid. Device according to one of the preceding claims, characterized in that the first decoupling element is a pneumatic, hydropneumatic, electromechanical or mechanical spring element includes which translational movements of the stored component in the first spatial direction allows. Device according to one of the preceding claims, characterized in that the second decoupling element at least one pendulum element ( four . 14 ), on which the component to be stored or a receptacle for it is suspended, wherein the pendulum element is mounted with its ends in two suspension points such that it is rotatable relative to at least one of its suspension points, preferably two suspension points about three independent spatial axes and / or the suspension points are rotatable relative to one another and / or are displaceable in the second spatial direction. Device according to claim 7, characterized in that that the pendulum element is flexible. Apparatus according to claim 7 or 8, characterized that the pendulum element is elastically deformable. Device according to one of claims 7 to 9, characterized in that the pendulum element with at least one of its ends via a ball joint ( 3 . 5 ) is stored in the suspension point. Device according to one of claims 7 to 10, characterized in that the pendulum element is a pendulum rod is. Device according to one of claims 7 to 11, characterized in that the pendulum element about its Longitudinal axis is rotatable. Device according to one of claims 7 to 12, characterized in that a suspension point provided on a top plate at one end of a push rod of the first decoupling element is. Device according to one of claims 7 to 13, characterized in that a suspension point on the component to be stored or a receptacle for this is provided. Device according to one of claims 7 to 14, characterized in that the second decoupling element an S-shaped or meandering loop-shaped Structure, wherein a holding element of the component to be stored or a receptacle for this and a pendulum element and a push rod of a first decoupling element parallel to each other are arranged, and holding element and shuttle on the one hand and Pendulum element and push rod on the other hand via transversely arranged fasteners connected to each other at opposite ends of the shuttle are. Device according to one of claims 7 to 14, characterized in that the second decoupling element a U-shaped structure, wherein a holding element the component to be stored or a receptacle for this and a pendulum element are arranged parallel to each other, and holding element and pendulum element via a transversely arranged connecting elements connected to each other. Device according to one of the preceding claims, characterized in that the first spatial direction transverse to the second Spatial direction is. Device according to one of the preceding claims, characterized in that the first spatial direction is vertical and the second spatial direction is horizontal. Device according to one of the preceding claims, characterized in that a plurality of first decoupling elements and / or a plurality of second decoupling elements are provided. Device according to one of the preceding claims, characterized in that the first decoupling element outside the vacuum chamber or within the vacuum chamber in a shielded Room is arranged. Device according to one of the preceding claims, characterized in that the first decoupling element standing or hanging is arranged. Device according to one of the preceding claims, characterized in that at least one damping device ( 33 ) and / or at least one motion or vibration sensor ( 32 ) and / or at least one control device is provided. Projection exposure machine for microlithography with at least one vacuum chamber and at least one storage device according to one of claims 1 to 22. Projection exposure apparatus according to claim 23, characterized characterized in that the storage device is a vacuum chamber and / or at least one component within a vacuum chamber outsourced. A projection exposure apparatus according to claim 23 or 24, characterized in that the vacuum chamber is a lighting system and / or a projection lens. Projection exposure apparatus according to one of the claims 23 to 25, characterized in that the projection exposure system for the use of a working light wavelength in the ultraviolet light range or in the EUV (extreme ultraviolet) light range or for a wavelength of light from 10 nm to 15 nm or for a light wavelength of 13.5 nm is prepared. Projection exposure apparatus according to one of the claims 23 to 26, characterized in that the storage device at least one optical element stores.