DE102008049069B8 - Optoelektronisches Modul mit einem Trägersubstrat, zumindest einem strahlungsemittierenden Halbleiterbauelement und mindestens einem elektrischen Bauelement und Verfahren zu dessen Herstellung - Google Patents

Optoelektronisches Modul mit einem Trägersubstrat, zumindest einem strahlungsemittierenden Halbleiterbauelement und mindestens einem elektrischen Bauelement und Verfahren zu dessen Herstellung Download PDF

Info

Publication number
DE102008049069B8
DE102008049069B8 DE102008049069.5A DE102008049069A DE102008049069B8 DE 102008049069 B8 DE102008049069 B8 DE 102008049069B8 DE 102008049069 A DE102008049069 A DE 102008049069A DE 102008049069 B8 DE102008049069 B8 DE 102008049069B8
Authority
DE
Germany
Prior art keywords
radiation
production
carrier substrate
emitting semiconductor
optoelectronic module
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE102008049069.5A
Other languages
English (en)
Other versions
DE102008049069A1 (de
DE102008049069B4 (de
Inventor
Jörg Sorg
Walter Wegleiter
Oliver Wutz
Karl Weidner
Bert Braune
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ams Osram International GmbH
Original Assignee
Osram Opto Semiconductors GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osram Opto Semiconductors GmbH filed Critical Osram Opto Semiconductors GmbH
Priority to DE102008049069.5A priority Critical patent/DE102008049069B8/de
Publication of DE102008049069A1 publication Critical patent/DE102008049069A1/de
Application granted granted Critical
Publication of DE102008049069B4 publication Critical patent/DE102008049069B4/de
Publication of DE102008049069B8 publication Critical patent/DE102008049069B8/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/16Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits
    • H01L25/167Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits comprising optoelectronic devices, e.g. LED, photodiodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/18High density interconnect [HDI] connectors; Manufacturing methods related thereto
    • H01L24/23Structure, shape, material or disposition of the high density interconnect connectors after the connecting process
    • H01L24/24Structure, shape, material or disposition of the high density interconnect connectors after the connecting process of an individual high density interconnect connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/82Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected by forming build-up interconnects at chip-level, e.g. for high density interconnects [HDI]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/18High density interconnect [HDI] connectors; Manufacturing methods related thereto
    • H01L2224/23Structure, shape, material or disposition of the high density interconnect connectors after the connecting process
    • H01L2224/24Structure, shape, material or disposition of the high density interconnect connectors after the connecting process of an individual high density interconnect connector
    • H01L2224/241Disposition
    • H01L2224/24135Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/24137Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/18High density interconnect [HDI] connectors; Manufacturing methods related thereto
    • H01L2224/23Structure, shape, material or disposition of the high density interconnect connectors after the connecting process
    • H01L2224/24Structure, shape, material or disposition of the high density interconnect connectors after the connecting process of an individual high density interconnect connector
    • H01L2224/241Disposition
    • H01L2224/24151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/24153Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being arranged next to each other, e.g. on a common substrate
    • H01L2224/24195Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being arranged next to each other, e.g. on a common substrate the item being a discrete passive component
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/075Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00
    • H01L25/0753Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00 the devices being arranged next to each other
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/12Passive devices, e.g. 2 terminal devices
    • H01L2924/1203Rectifying Diode
    • H01L2924/12036PN diode
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/12Passive devices, e.g. 2 terminal devices
    • H01L2924/1204Optical Diode
    • H01L2924/12041LED
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/44Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/50Wavelength conversion elements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/52Encapsulations
    • H01L33/54Encapsulations having a particular shape
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/62Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
DE102008049069.5A 2008-09-26 2008-09-26 Optoelektronisches Modul mit einem Trägersubstrat, zumindest einem strahlungsemittierenden Halbleiterbauelement und mindestens einem elektrischen Bauelement und Verfahren zu dessen Herstellung Active DE102008049069B8 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE102008049069.5A DE102008049069B8 (de) 2008-09-26 2008-09-26 Optoelektronisches Modul mit einem Trägersubstrat, zumindest einem strahlungsemittierenden Halbleiterbauelement und mindestens einem elektrischen Bauelement und Verfahren zu dessen Herstellung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102008049069.5A DE102008049069B8 (de) 2008-09-26 2008-09-26 Optoelektronisches Modul mit einem Trägersubstrat, zumindest einem strahlungsemittierenden Halbleiterbauelement und mindestens einem elektrischen Bauelement und Verfahren zu dessen Herstellung

Publications (3)

Publication Number Publication Date
DE102008049069A1 DE102008049069A1 (de) 2010-04-01
DE102008049069B4 DE102008049069B4 (de) 2020-07-16
DE102008049069B8 true DE102008049069B8 (de) 2020-10-15

Family

ID=41719784

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102008049069.5A Active DE102008049069B8 (de) 2008-09-26 2008-09-26 Optoelektronisches Modul mit einem Trägersubstrat, zumindest einem strahlungsemittierenden Halbleiterbauelement und mindestens einem elektrischen Bauelement und Verfahren zu dessen Herstellung

Country Status (1)

Country Link
DE (1) DE102008049069B8 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010044560A1 (de) * 2010-09-07 2012-03-08 Osram Opto Semiconductors Gmbh Verfahren zur Herstellung eines optoelektronischen Halbleiterbauelements
DE102010046963A1 (de) * 2010-09-29 2012-03-29 Infineon Technologies Ag Multi-Chip Package
DE102014102184A1 (de) * 2014-02-20 2015-08-20 Osram Opto Semiconductors Gmbh Herstellung eines optoelektronischen Bauelements
DE102015104185A1 (de) * 2015-03-20 2016-09-22 Osram Opto Semiconductors Gmbh Optoelektronisches Bauelement und Verfahren zu seiner Herstellung

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006015115A1 (de) * 2006-03-31 2007-10-04 Osram Opto Semiconductors Gmbh Elektronisches Modul und Verfahren zum Herstellen eines elektronischen Moduls
WO2008112128A2 (en) * 2007-03-08 2008-09-18 Sensors For Medicine And Science, Inc. Light emitting diode for harsh environments

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19638667C2 (de) 1996-09-20 2001-05-17 Osram Opto Semiconductors Gmbh Mischfarbiges Licht abstrahlendes Halbleiterbauelement mit Lumineszenzkonversionselement
DE10353679A1 (de) 2003-11-17 2005-06-02 Siemens Ag Kostengünstige, miniaturisierte Aufbau- und Verbindungstechnik für LEDs und andere optoelektronische Module

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006015115A1 (de) * 2006-03-31 2007-10-04 Osram Opto Semiconductors Gmbh Elektronisches Modul und Verfahren zum Herstellen eines elektronischen Moduls
WO2008112128A2 (en) * 2007-03-08 2008-09-18 Sensors For Medicine And Science, Inc. Light emitting diode for harsh environments

Also Published As

Publication number Publication date
DE102008049069A1 (de) 2010-04-01
DE102008049069B4 (de) 2020-07-16

Similar Documents

Publication Publication Date Title
EP2819190B8 (de) Lichtemittierendes Halbleitermodul und Verfahren zur Herstellung davon
DE112011100677A5 (de) Strahlungsemittierendes Bauelement mit einem Halbleiterchip und einem Konversionselement und Verfahren zu dessen Hestellung
EP2381018A4 (de) Verbundhalbleitersubstrat, halbleiterbauelement und verfahren zur herstellung des halbleiterbauelements
WO2009142391A3 (ko) 발광소자 패키지 및 그 제조방법
EP2254164A4 (de) Lichtemittierendes verbundhalbleiterbauelement und beleuchtungsvorrichtung damit sowie verfahren zur herstellung des lichtemittierenden verbundhalbleiterbauelements
WO2010013936A3 (en) Semiconductor device, light emitting device and method of manufacturing the same
EP2051304A4 (de) Halbleitersubstrat, verfahren zur bildung einer elektrode und verfahren zur herstellung einer solarzelle
EP2377976A4 (de) Gruppe-iii-nitrid-substrat, halbleitervorrichtung damit sowie verfahren zur herstellung eines oberflächenbehandelten gruppe-iii-nitrid-substrats
EP2642535A3 (de) Lichtemittierendes Halbleiterbauelement und sein Herstellungsverfahren
EP2420599A4 (de) Substrat, substrat mit einer dünnschicht, halbleiterbauelement sowie verfahren zur herstellung des halbleiterbauelements
EP2246910A4 (de) Halbleitersubstrat, halbleiterelement, lichtemittierendes element und elektronisches element
EP2273536A4 (de) Gruppe-iii-nitrid-halbleiterbauelement und verfahren zu seiner herstellung, gruppe-iii-nitrid-halbleiterleuchtbauelement und verfahren zu seiner herstellung und lampe
EP1986217A4 (de) Verfahren zum herstellen eines halbleitersubstrats
EP2346071A4 (de) Verbund-halbleiteranordnung und verfahren zu ihrer herstellung
WO2012057512A3 (ko) 화합물 반도체 장치 및 그 제조 방법
EP2290710A4 (de) Verbundhalbleiter-leuchtelement, beleuchtungsvorrichtung mit dem verbundhalbleiter-leuchtelement und verfahren zur herstellung eines verbundhalbleiter-leuchtelements
EP2477234A4 (de) Gruppe-iii-v-verbundhalbleiter-lichtaufnahmeelement, verfahren zur herstellung des gruppe-iii-v-verbundhalbleiter-lichtaufnahmeelements, lichtaufnahmeelement und epitaktischer wafer damit
WO2011100647A3 (en) Double-sided reusable template for fabrication of semiconductor substrates for photovoltaic cell and microelectronics device manufacturing
TWI339883B (en) Substrate structure for semiconductor package and manufacturing method thereof
IL208734A (en) A coating compound and a method for coating a semiconductor substrate with the same compound
EP2600394A4 (de) Epitaktisches substrat für ein halbleiterbauelement, halbleiterbauelement, pn-übergangsdiode und verfahren zur herstellung eines epitaktischen substrats für ein halbleiterbauelement
EP2584621A4 (de) Leiterplatine für ein optisches halbleiterbauelement, verfahren zur herstellung der leiterplatine für ein optisches halbleiterbauelement und optisches halbleiterbauelement
WO2010044642A3 (en) Semiconductor light emitting device and method for manufacturing the same
EP2631940A4 (de) Halbleiterchippaket, halbleitermodul und herstellungsverfahren dafür
EP2360746A4 (de) Verfahren zur herstellung eines galliumoxidsubstrats, leuchtbauelement und verfahren zur herstellung des leuchtbauelements

Legal Events

Date Code Title Description
OM8 Search report available as to paragraph 43 lit. 1 sentence 1 patent law
R012 Request for examination validly filed
R016 Response to examination communication
R016 Response to examination communication
R018 Grant decision by examination section/examining division
R020 Patent grant now final