DE102008036573B3 - Optical device, has support structures for supporting optical elements, and trapezoidal shaped housing substantially surrounding optical elements with sealing material, where support structures are fixed in penetration point - Google Patents

Abstract

The device has a support structure (36) and other support structures supporting optical elements. A trapezoidal shaped housing (50) is passed through a penetration point in which the support structures are fixed. The support structures are connected to the housing in a compression type. The penetration point reduces force transmission between the housing and the support structures. The housing surrounds the optical elements with sealing material, where the housing is made of aluminum, stainless steel or plastic. An opening is formed on the housing. An independent claim is also included for a layer welding machine.

Description

The The invention relates to an optical device having at least one optical element, having a support structure for supporting the opposite optical element a foundation and with a substantially the optical element tightly surrounding housing, wherein the support structure is the housing at predetermined puncture points penetrates and force-transmitting in the area of the puncture points with the housing connected is.

A device of the aforementioned type is known from EP 1 533 832 A1 known

The The invention further relates to a device for melting Layers on a substrate, in which a laser beam by means of a Passed plurality of optical elements and to a in cross section essentially linear Laser beam is formed, with a support structure for supporting the opposite optical elements a foundation and a housing.

A device of this kind is from the DE 10 2006 018 801 A1 known.

For the melting of layers on a substrate, for example for melting of silicon layers in the manufacture of electronic displays, One uses a laser beam as a very narrow line beam falls onto the layer to be melted. The layer and the laser beam are formed relative to each other transversely to the laser beam Line shifted so that the laser beam is flat over the substrate, the so-called "panel", guided. A panel typically has a size of 940 × 730 mm and the incident laser beam a length of up to 730 mm. Furthermore but are also other sizes of Panels are known in which the width is 1,500 mm. One can while also pulsing the laser beam. By melting the silicon layer the previously disordered crystal layer is ordered and thus the electron mobility, d. H. the electrical conductivity increased.

at this and in other applications, for example in semiconductor lithography, it is necessary to use those used for beam guidance and shaping optical elements, so essentially lenses and mirrors, too encapsulate. The encapsulation is expedient, in particular as protection against contamination such as dust and the like, but also for the protection of with the devices in question working people from excessive radiation with UV laser light and the generated ozone.

Out the above reasons It is usually appropriate, the encapsulate pressure-tight optical elements in question. This has the Another advantage that the optical elements in a protective gas atmosphere, for example a nitrogen atmosphere, can be operated. Furthermore, are highly accurate and big Optics as they are of interest in the context of the present invention are from the optics designer for a certain ambient atmosphere Calculated, and here, too, a nitrogen atmosphere at the Calculation required.

It in this context is known in the art, the optical Each individual elements umhausen and then the various Umhausungen by means of a sealing system of pipes and bellows that control the light beam surrounded between the optical elements to connect.

These However, known approach has the disadvantage that the structure is relatively complex. Due to the large number of pipe connections the danger of leaks. Furthermore, the optical elements are included such a complex structure not at all or very difficult to access, which hinders maintenance and repair work. In addition, the Sealing devices for large Beam cross sections with a beam length of up to 1 m and more very complex and expensive.

In front In the state of the art, however, all of them are the housed optical elements rigidly connected to their respective housing. This will transfer Vibrations and deformations from one optical element to another. In particular, this applies to Sound vibrations and deformations and for thermally induced deformations the enclosures, but also the optical elements and their supporting structures. The resulting optical errors are in view of the demanded high precision not insignificant and require costly countermeasures. For example, one uses resilient suspensions of the optical elements, the however, difficult to adjust permanently. To the thermal To counter the problem, it is known for the housings the material Invar to use, but it is very expensive.

That from the aforementioned EP 1 533 832 A1 known optical system is used for exposure by means of X-rays. The x-ray beam is directed within a closed housing over several non-planar mirrors. The mirrors are secured to a support structure located in the housing which projects through openings in the housing and is connected outside the housing to an outer support structure. The passage of the support structure is elastically and sealingly connected to the housing via a bellows arrangement. The housing has a substantially cubic shape and has a relatively large volume.

From the EP 1 339 099 A1 For example, an optical device is known which has similar support structures with low-power connection at the piercing points of the support structure through the housing. This known device is provided with a device which allows to flush the housing by means of a purge gas.

Of the Invention is therefore based on the object, a device of to develop the aforementioned type such that the aforementioned disadvantages be avoided. In particular, a more compact structure is achieved become.

at a device of the type mentioned as the first is this Task according to the invention thereby solved, that the case has a trapezoidal shape in at least one view.

at a device of the type mentioned as second is this Task according to the invention thereby solved, that the case encloses only a predetermined part of the optical elements, that the part supporting the predetermined part of the optical elements the support structure the housing penetrates at predetermined puncture points and in the area of puncture points with the housing power transmission arm is connected and that the housing has a trapezoidal shape in at least one view.

The The object underlying the invention is complete in this way solved.

The The invention actually looks a housing shape which is adapted to the beam shape and thus a compact Construction possible.

at a preferred embodiment the invention, the support structure is pressure-tightly connected to the housing.

These measure has the advantage that within the housing in a conventional manner can be operated with negative pressure or with a protective gas.

Further is preferred when the housing across from supported by the foundation is.

These measure has the advantage that a simple support of the housing is possible.

at a preferred embodiment of the invention, the housing to the Puncture points with the support structure over Bellows connected.

These measure has the advantage of having a proven, with a typical axial spring rate of 1 to 10 N / mm force transmitting Element can be used, which on the one hand enables a pressure tightness and on the other hand represents a mechanical decoupling. Bellows act about that In addition, due to their low wall thickness as a thermal decoupling, so that changes in temperature also not transferred from the support structure to the housing or vice versa.

at a practical embodiment According to the invention, the support structure has an inner support structure inside of the housing and an outer support structure outside of the housing on, and the inner support structure is connected to the outer support structure via rods connected to the housing at the puncture points penetrate.

These measure has the advantage that the bushings on the housing structurally simple and can be formed simultaneously and outside of the housing proven load-bearing structures can be used.

at the aforementioned embodiment furthermore preferred if the rods are spatially differently aligned are.

These measure has the advantage of giving rigidity in all directions is.

in this respect is further advantageous if the outer support structure an outer framework and that the outer truss exterior optical components wearing.

These measure has the advantage of having optical elements or assemblies outside of the housing are arranged, on proven Support structures can be arranged.

alternative but can also be the outer support structure have at least one node, at each of which at least two Rods are attached.

These Variant is beneficial if the rods outside of the housing be struck a place that does not support structure for more optical Must form elements or assemblies.

Farther is preferred if the inner support structure as an inner framework and preferably the inner framework of cut-outs Sheet metal is formed. These sheets are preferably made of a Material with a low thermal expansion coefficient such as Invar.

As already mentioned, in the context of the present invention, it is no longer necessary to produce the housing from a high-quality material. It is therefore preferable if the housing of egg nem material from the group: aluminum, stainless steel, plastic is formed.

A preferred application of the invention relates to the case that a in the housing by means of the at least one optical element guided light beam from a substantially square cross-section in one in the Essentially linear cross-section is converted.

there The substantially square cross section has a width between 10 and 50 mm and one length between 10 and 50 mm and the substantially linear cross-section a length between 50 mm and 1,500 mm. The length / width ratio can between 5: 1 and over 1.00: 1 lie.

One Another advantage arises when the at least one optical Element in the housing detachable, in particular is fastened adjustable.

These measure has the advantage of facilitating maintenance and repair work become.

To For this purpose, preferably the housing in the region of at least an optical element on a closable opening through which the at least one optical element accessible, in particular interchangeable is.

As already mentioned, can preferably means for evacuating the housing and / or for flushing the housing be provided with a protective gas.

at the device according to the invention is in the case at least one window for entry or exit of one in the housing by means provided the at least one optical element guided light beam, alternatively, as optically inactive or as optically active Element can be formed.

Further Advantages will be apparent from the description and the accompanying drawings.

embodiments The invention are illustrated in the drawings and in the following description explained. Show it:

1 a highly schematic front view of a first embodiment of an apparatus for melting layers according to the invention;

2 a side view of a second, practical embodiment of a device according to the invention;

3 a plan view of the device of 2 ;

4 on a larger scale details of low-force connection of a housing to a support structure.

In 1 designated 10 as a whole a device for melting layers, in particular for melting a silicon layer 12 on a substrate 14 , a so-called panel. Such panels, for example, 940 × 730 mm in size are needed in particular for the production of semiconductor displays, as they are needed in electronic devices of various kinds.

To melt the layer 12 becomes a laser beam 16 used, in the form of a line of for example 730 mm in length on the layer 12 incident. The substrate 14 lies on a mobile support 18 who is at the in 1 illustrated front view in one direction 19 perpendicular to the plane of the 1 transverse to the length of the laser beam 16 is movable. The laser beam is preferably pulsed, with a frequency of, for example, 1 kHz or higher. For each pulse, therefore, a strip-shaped surface of 730 mm in length is melted, and the feed in the direction 19 is set so that the molten strips merge homogeneously.

With 20 is in 1 a laser indicated the laser beam 16 generated. The laser beam 16 has a wavelength that is preferably in the UV range. The laser beam 16 has at the exit 22 the laser 20 a cross section of substantially square shape with a length typically between 10 and 50 mm and a width between 10 and 50 mm. This laser beam 16 is in an optical unit 30 deformed until it has the aforementioned line-shaped cross section, for example, 730 mm in length. For this purpose are within the optical unit 30 optical elements 32a . 32b provided in 1 indicated only schematically and are preferably formed in practical embodiments as a mirror, as shown 2 and 3 will be explained.

The optical elements 32a . 32b be from an inner support structure 36 held. An external support structure 38a . 38b is with the inner support structure 36 over bars 40a . 40b connected. The external support structure 38a . 38b relies on a foundation 42 from. The connections between the elements 32 . 36 . 40 and 38 are preferably rigid. The support structures, in particular the inner support structure 36 , preferably consist of Invar, ie an iron-nickel alloy (FeNi36), which is characterized by a particularly low distinguishes thermal expansion coefficient.

The optical unit 30 is located in a housing 50 , The housing 50 is preferably formed pressure-tight. It protects the optical elements on the one hand 32a . 32b before contamination z. As by dust, on the other hand, it also protects people with the device 10 work against the UV laser light. The housing 50 is preferably made of aluminum, stainless steel or plastic, so relatively simple and inexpensive materials.

The bars 40a . 40b run at puncture points 51a . 51b through the wall of the housing 50 therethrough. The connection between the bars 40a . 40b and the wall is over bellows 56a . 56b produced. The connection is therefore force transmission, so compliant, and transmits vibrations and deformations only in a negligible for the present purpose dimensions. Because the bellows 56a . 56b thin-walled, they also represent a thermal insulation. As an alternative to bellows, other suitable elements, such as membranes can of course be used.

In the case 50 are also windows 52 for the entry of the laser beam 16 such as 54 provided for its exit. The window 52 and 54 are in size to the respective cross-sectional shape of the laser beam 16 customized. They can not be optically effective, so as a plane-parallel glass plate, or optically effective, so be designed as a lens.

The housing 50 can against a foundation 58 be supported with the foundation 42 is related or coincides, as in 1 indicated.

To the case 50 if necessary to operate in the interior with negative pressure, can with a 60 be schematically indicated Evakuiereinheit be provided. Do you want the interior of the case 50 operate with inert gas or flush, is a flushing unit 62 intended. The units 60 . 62 are with appropriate piping to the interior of the housing 50 connected, as is known in the art.

The 2 and 3 show a practical embodiment of a device 110 , In the 2 and 3 are elements that those in 1 match, with one order 100 denoted by reference numerals.

The device 110 thus serves to melt a layer 112 , in particular silicon layer, on a substrate 114 by means of a laser beam 116 , The substrate 114 is on a mobile carrier 118 that in one direction 119 is displaceable. There 2 shows a side view, the carrier moves 118 in the drawing plane from right to left or vice versa.

A laser 120 generates the laser beam 116 which runs in one direction up here. The laser beam 116 is from a mirror 124 deflected and passes through only schematically indicated first optical unit 126 in which the laser beam 116 shaped, but in its cross-section is not significantly changed. The laser beam 116 leaves the first optical unit 126 with the already mentioned, about stamp-sized cross-section. The first optical unit 126 is encapsulated in a conventional manner. In the same way, the laser beam can pass through several optical units in front of the second optical unit 130 are arranged.

The first optical unit 126 is directly to a second optical unit 130 coupled, in principle, the optical unit 30 from 1 equivalent. The second optical unit 130 contains two optical elements in the example shown 132a . 132b , which are designed as mirrors. Some of the mirrors are designed to be flat as pure deflecting mirrors or arched as beam-shaping mirrors. They have a substantially rectangular mirror surface. The four times reflection on the mirrors turns the laser beam 116 from its stamp-shaped cross-section at the entrance to the second optical unit 130 formed in the above-mentioned line-shaped cross-section at the outlet.

The optical elements 130a . 130b are each on an inner support structure 136 attached, preferably releasably or adjustable. An outer support structure is divided into a first outer support structure 138a , in the 2 to the left of the second optical unit 130 is arranged and the first optical unit 126 carries, as well as in a second outer support structure 138b , in the 2 to the right of the second optical unit 130 is arranged. The first outer support structure 128a is over bars 140a . 140b . 140c and 140d , and the second outer support structure 138b is over bars 140e . 140f . 140g and 140h with the inner support structure 136 connected. The bars 140a - 140d and 140h are individually on the outer support structures 138a and 138b struck while the rods 140e -G in a node 141 on the second outer support structure 138b are attached. Both outer support structures 138a and 138b are on a common foundation 142 , namely the machine bed, supported.

The bars 140a -H are differently oriented in space to accommodate all degrees of freedom of deformation (three Cartesian axes and three moments of bending around these axes).

As already too 1 explained, penetrate the rods 140a -H a case 150 , which is the second optical unit 130 encases. Details will be provided below 4 be explained where the corresponding puncture points as examples 151c and 151d for the bars 140c and 140d are shown.

2 still shows an entrance window 152 as well as an exit window 154 for the laser beam 116 , The entrance window 152 is, as already mentioned, preferably directly to the outlet of the first optical unit 126 connected, but can also be at the entrance of the first optical unit 126 be appropriate if the two units are connected to each other gas-tight.

In the 2 and 3 are also closable openings 164a . 164b and 164c in the case 150 located. Through these openings 164a -D can be on the optical elements 132a . 132b be accessed, be it for maintenance or repair.

One recognizes 3 furthermore, that the housing 150 is trapezoidal in plan view at least. This is followed by the shape of the housing 150 the cross-sectional shape of the in the second optical unit 130 linearly expanding laser beam 116 ,

4 finally shows details of the connection between the housing 150 and the bars, illustrated by the example of the bars 140c and 140d ,

The pole 140d is with an outer, flat flange 166 to the first outer support structure 138 screwed. An inner, also flat flange 168 is in the same way to the inner support structure 136 bolted, creating the desired rigid and stable connection between the support structures 138a and 136 is reached.

A metal bellows 170 is by means of a first annular flange 172 to an annular shoulder 174 the pole 140d and by means of a second annular flange 176 to an annular shoulder 178 a neck 180 of the housing 150 screwed. The metal bellows 170 thus forms a low-force transmission connection between the rod 140d and the housing 150 ,

One recognizes 4 furthermore, that the inner support structure 136 as an inner framework 182 and the first outer support structure 138a as an external framework 184 are formed. The trusses 182 and 184 can be designed as a classic beam grid. In the example shown, however, they are formed by sheets, preferably invar sheets, which have cutouts 186 are provided, which also creates a spatial grid structure.

10

Pulse Stretcher

12

first mirror

13

plane of symmetry

14

second mirror

15

intersection

16

Center of curvature of 12

17

Center of curvature of 14

18

semi-transparent mirror

19

room

20

incoming Light beam (laser)

22

input pulse

24

first partial beam

26

first output pulse

27

output

28

second partial beam

29-32

radiate

38

second output pulse

39

outgoing beam of light

40

Pulse Stretcher

41

first mirror

42

second mirror

43

third mirror

44

fourth mirror

45

Center of curvature of 41

46

Center of curvature of 42

47

Center of curvature of 43

48

Center of curvature of 44

49a, b

intersection

50

second partial beam

51-62

radiate

60; 60a

Pulse Stretcher

62 62 '; 62a, 62a '

first mirror

64 64 '; 64a

second mirror

66

third mirror

68; 68a

fourth mirror

70

first axis

72

second axis

74

double arrow

76

double arrow

79

first partial beam

80

second partial beam

82-92

radiate

100

Pulse Stretcher

102

first mirror

104

second mirror

105

axis

106

third mirror

108

fourth mirror

110

fifth mirror

112

sixth mirror

120

second partial beam

122-140

radiate

Claims (23)

Optical device with at least one optical element ( 32 ; 132 ), with a supporting structure ( 36 . 38 . 40 ; 136 . 138 . 140 ) for supporting the optical element ( 32 ; 132 ) against a foundation ( 42 ; 142 ) and with one the optical element ( 32 ; 132 ) substantially tightly surrounding housing ( 50 ; 150 ), wherein the support structure ( 36 . 38 . 40 ; 136 . 138 . 140 ) the housing ( 50 ; 150 ) at predetermined puncture points ( 51 ; 151 ) penetrates and in the area of the puncture points ( 51 ; 151 ) with the housing ( 50 ; 150 ) is connected low-force transmission, characterized in that the housing ( 150 ) has a trapezoidal shape in at least one view. Device according to claim 1, characterized in that the supporting structure ( 36 . 38 . 40 ; 136 . 138 . 140 ) with the housing ( 50 ; 150 ) is connected pressure-tight. Device according to claim 1 or 2, characterized in that the housing ( 50 ; 150 ) opposite the foundation ( 42 ; 142 ) is supported. Device according to one or more of claims 1 to 3, characterized in that the housing ( 50 ; 150 ) the optical element ( 32 ; 132 ) pressure-tight seals. Device according to one or more of claims 1 to 4, characterized in that the housing ( 50 ; 150 ) at the puncture points ( 51 ; 151 ) with the supporting structure ( 36 . 38 . 40 ; 136 . 138 . 140 ) about bellows ( 56 ; 170 ) connected is. Device according to one or more of claims 1 to 5, characterized in that the supporting structure ( 36 . 38 . 40 ; 136 . 138 . 140 ) an inner support structure ( 36 ; 136 ) within the housing ( 50 ; 150 ) and an outer support structure ( 38 ; 138 ) outside the housing ( 50 ; 150 ), and that the inner support structure ( 36 ; 136 ) with the outer support structure ( 38 ; 138 ) over bars ( 40 ; 140 ) which connects the housing ( 50 ; 150 ) at the puncture points ( 51 ; 151 penetrate). Device according to claim 6, characterized in that the rods ( 40 ; 140 ) are spatially differently oriented. Apparatus according to claim 6 or 7, characterized in that the outer support structure ( 36 ; 136 ) an outer framework ( 184 ), and that the outer framework ( 184 ) outer optical components ( 124 . 126 ) wearing. Device according to one or more of claims 6 to 8, characterized in that the outer support structure ( 136 ) at least one node ( 141 ), on each of which at least two rods ( 140e . 140f . 140g ) are attached. Device according to one or more of claims 6 to 9, characterized in that the inner support structure ( 36 ; 136 ) as an internal framework ( 182 ) is trained. Apparatus according to claim 10, characterized in that the inner framework ( 182 ) with cutouts ( 186 ) provided Invar sheets is formed. Device according to one or more of claims 1 to 11, characterized in that the housing ( 50 ; 150 ) made of a material from the group: aluminum, stainless steel, plastic is formed. Device according to one or more of claims 1 to 12, characterized in that a in the housing ( 150 ) by means of the at least one optical element ( 132 ) guided light beam ( 116 ) is converted from a substantially square cross-section to a substantially linear cross-section. Device according to claim 13, characterized in that that the substantially square cross section is a length between 10 and 50 mm and a width between 10 and 50 mm and the substantially linear Cross section a length between 50 mm and 1,500 mm. Device according to one or more of claims 1 to 14, characterized in that the at least one optical element ( 132 ) in the housing ( 150 ) is releasably attached. Apparatus according to claim 15, characterized in that at least one optical element ( 132 ) in the housing ( 150 ) is adjustable. Apparatus according to claim 15 or 16, characterized in that the housing ( 150 ) in the region of the at least one optical element ( 132 ) a closable opening ( 164 ), through which the at least one optical element ( 132 ) is accessible. Apparatus according to claim 17, characterized in that the at least one optical element ( 132 ) through the closable opening ( 164 ) is interchangeable. Device according to one or more of claims 2 to 18, characterized in that means ( 60 ) for evacuating the housing ( 50 ) in front are seen. Device according to one or more of claims 1 to 19, characterized in that means ( 62 ) for rinsing the housing ( 50 ) are provided with a protective gas. Device according to one or more of claims 1 to 20, characterized in that in the housing ( 50 ; 150 ) at least one window ( 52 . 54 ; 152 . 154 ) to the entrance or exit of one in the housing ( 50 ; 150 ) by means of the at least one optical element ( 32 ; 132 ) guided light beam ( 16 ; 116 ) is provided. Apparatus according to claim 21, characterized that the window is designed as an optically active element. Device for melting layers ( 12 ; 112 ) on a substrate ( 14 ; 114 ), in which a laser beam ( 16 ; 116 ) by means of a plurality of optical elements ( 32 ; 124 . 126 . 132 ) and to a cross-sectionally substantially linear laser beam ( 16 ; 116 ) is formed with a support structure ( 36 . 38 . 40 ; 136 . 138 . 140 ) for supporting the optical elements ( 32 ; 132 ) against a foundation ( 42 ; 142 ) and with a housing ( 50 ; 150 ), characterized in that the housing ( 150 ) only a predetermined part ( 132 ) of the optical elements ( 124 . 126 . 132 ) enclosing that the predetermined part ( 132 ) of the optical elements ( 124 . 126 . 132 ) supporting part ( 140 ) of the supporting structure ( 136 . 138 . 140 ) the housing ( 150 ) at predetermined puncture points ( 151 ) penetrates and in the area of the puncture points ( 151 ) with the housing ( 150 ) is connected low-force transmission, and that the housing ( 150 ) has a trapezoidal shape in at least one view.