DE102007058802B3 - Thermodenvorrichtung - Google Patents

Abstract

A thermode device for connecting electronic components, in particular semiconductor components, with a substrate (11) under application of pressure and temperature has two pressure pistons (3, 5), at least one of which is attached to a support arm (2) designed as a pincer-like movable arm by a pivoting movement of the pivot arm relative to the opposing plunger (5) is movable.

Description

The The invention relates to a thermode device for connecting electronic Components, in particular semiconductor devices, with a substrate under application of pressure and temperature, according to the preamble of the claim 1.

Semiconductor devices such as RFID chips are known to be automated placement machine on a substrate, such as a film, placed on and by means of an adhesive bonded to the substrate. The substrate may, for example carry electrically conductive structures that in the case of RFID systems act as antennas and together with the chip a transponder form. For pressing the components and for rapid curing of the adhesive are here Plunger inserted from the opposite sides on the intervening substrate / device package be placed, wherein at least one plunger formed heatable is. Such heatable plunger are also called thermodes.

It is known for every single component to use a separate pair of pressure stamps, the thermodes for every single component in terms of force, displacement, temperature and Duration of the load can be individually controlled or regulated.

One fundamental problem is that the components of which are usually a variety can be arranged on the substrate with as possible even pressure and uniform temperature as well as plane-parallel pressed onto the substrate. Be the components with different powers or in an inclined position pressed on the substrate or is the adhesive curing not evenly due greater temperature fluctuations, can in particular also electrical properties in unacceptably high Measure vary. For example, this may cause the electrical performance of Change RFID antennas.

Usual thermodes are moved by means of pneumatic cylinders in the axial direction and of opposite Side to the intermediate substrate / component package placed. However, it often causes problems that, especially at very small semiconductor devices the Andrückkräfte often only very small (few Newton), for that but have to be very accurate. This can often not be achieved with known thermode devices in the desired Measure reached become. Furthermore, it is common in known thermode devices relatively high impact forces the thermode on the device, which does not damage the components can be excluded. Known Thermode devices that work with pneumatic cylinders are about that often complicated set up and need relatively much space.

From the US 4,013,209 a thermode device according to the preamble of claim 1 is known in which a thermode plunger is mounted on one end of an elongated, pivotable support arm. The support arm is pivotally mounted at the opposite end by means of a conventional pivot bearing.

From the DE 41 19 401 A1 For example, a device for positioning semiconductor devices with a forceps-type pivoting arm and an anvil is known, wherein optional soldering devices with different soldering heads can be provided.

From the US 5,150,827 is a heating head for reflow of solders known, this being made possible by two axes of rotation, which are each realized as a cross spring pair. The thermode is moved there without pivoting linearly to an anvil.

Of the Invention is based on the object, a thermode device of the type mentioned above, which is simple in construction, a gentle, accurate pressing the components according to predetermined Pressure and temperature conditions allows and a compact design allows.

These The object is achieved by a Thermode device solved with the features of claim 1. advantageous Embodiments of Invention are described in the further claims.

at the thermode device according to the invention is the swivel arm by means of a crossed spring plates Cross spring on the opposite Support arm or a stationary console pivoted.

By attaching the movable plunger to a pincer-like movable arm, the thermode device according to the invention can be formed in a simple manner and space-saving. In particular, space-saving, kurzhubige drive means for moving the pivot arm and thus for the axial delivery of the plunger can be used, as multiplied by appropriate design of the lever length of the pivot arm of the distance traveled by the plunger path compared to the path that the drive device must travel vervielfäl let it go. Furthermore, the force with which the pressure stamp is pressed onto the component and / or substrate can be adjusted very precisely by the lever principle.

The Cross spring according to the invention consists of two crossed, in particular at an angle of 90 ° with each other coupled spring plates, on the one hand to the stationary arm or the stationary one Console and on the other hand are attached to the pivot arm. The pivoting movement the swing arm is characterized by an elastic deformation of the Spring plates in the crossing area causes. Such a cross spring has the advantage that the swivel arm is very accurate in all directions, d. H. is guided in the x-, y- and z-direction and frictional forces in the storage area be minimized. This carries likewise to the fact that the pressure forces of the pressure punches on very accurate way can be repeated.

According to one advantageous embodiment the two plungers attached to frame-shaped complementary, elongated support arms, one support arm as a swivel arm and the other support arm as a stationary support arm is trained. The fixed on the stationary support arm plunger forms thus a kind of stationary Ambos while the opposite Plunger performs the delivery movement. This is possible form the thermode device in a particularly simple manner. Especially Is it possible, the stationary one Plunger on the side of the substrate and the movable plunger to arrange on the side of the component. Alternatively, it is However, it is also conceivable, both opposite support arms as pivot arms form, so that both plunger to the substrate / component package be moved towards and away from this.

Even though it is advantageous in terms of rapid curing of the adhesive is when both are opposite Plunger designed as thermodes, d. H. are heated, is it also possible only one of the two plungers as Thermode and the other without training own heating device.

According to one advantageous embodiment at least one of the two pressure pistons by means of a tilt adjustment in the form of a slot / screw connection having stamping console tilt-adjustable attachable to the associated support arm. Such Tilt adjustment has the advantage that the orientation of the Printing stamp additionally to that alignment already by the positioning the storage, in particular the cross spring is achieved, again very fine relative to the support arm can be adjusted, so that the Pressure stamp exactly in the desired Location can be placed on the device or the substrate.

According to one advantageous embodiment the pressure can be adjusted variably by means of a weight that varies in different ways intervals to the pivot axis on the pivot arm can be fastened. This is possible in a simple way by a corresponding change in position Adjust the weight of the contact pressure of the plunger. It is readily possible, to provide several weights at different locations.

A particularly simple embodiment itself when the swivel arm is a straight-line sliding guide for the weight having.

The The invention further relates to a thermode arrangement with a plurality of thermode devices of the aforementioned type, wherein the two support arms of the thermode devices arranged in planes are the ones at an angle to the longitudinal axis of Substrate run. By means of such a thermode arrangement The number of components that can be used simultaneously with thermodes can be charged duplicated as it is possible At the same time to act on components placed in several juxtaposed, parallel to the longitudinal axis of the substrate extending rows are arranged.

According to one advantageous embodiment the thermode arrangement comprises a plurality of thermode device groups, the in the x and y directions offset from one another. hereby can be a big one Variety of components to be processed simultaneously, and indeed even if the components are arranged close to each other on the substrate are. In particular, it is possible to arrange the thermode devices such that of a thermode device group for example, only every second or next processed every third component of a transverse row of components and of subsequent Thermodenvorrich processing groups those Components processed by the previous thermode device groups have been omitted.

The Invention will be explained in more detail by way of example with reference to the drawings. It demonstrate:

1 FIG. 2: a perspective view of a thermode device according to the invention, FIG.

2 a side view of the thermode device of 1 with the weight shown in a different position,

3 a side view of the thermode device of 1 with closed thermo the,

4 : a view according to 3 with opened thermodes,

5 FIG. 2: a schematic plan view of a substrate with components mounted thereon and a thermode arrangement shown in a shortened form, FIG.

6 FIG. 2 shows an alternative embodiment of a thermode arrangement with a plurality of thermode device groups arranged offset from one another, FIG.

7 : a perspective view of a cross spring in isolation,

8th a second embodiment of a cross spring, and

9 A second embodiment of a thermode device.

In the 1 to 4 is a thermode device 1 shown, which is essentially an upper support arm 2 with an upper plunger 3 and a lower support arm 4 with a lower plunger 5 includes. Both printing stamps 3 . 5 are formed in the present embodiment as thermodes, ie they have in the region of their punch heads 6 . 7 ( 4 ) each have a heating unit to the stamp head 6 . 7 to heat to a predetermined temperature.

The upper support arm 2 is by means of a swivel joint 8th at the lower stationary arm 4 attached and about a pivot axis 9 pivotally, transversely to the longitudinal direction of the support arms 2 . 4 runs. The upper support arm 2 can thus relative to the lower arm 4 between an open position, in 4 is shown and in which the two plunger 3 . 5 are spaced apart, and an approximate position to be pivoted in the 1 to 3 is shown.

The thermode device 1 serves to electronic components 10 ( 5 ), which by means of an adhesive on a substrate 11 be stuck with a predetermined pressure on the substrate 1 to press and accelerate by curing the curing of the adhesive. In the in 5 illustrated embodiment, the substrate 11 from a foil strip, the case depending on the application and printed lines, for example, as RFID antennas acting cables can wear. With the electronic components 10 they can be components in the form of RFID chips, which are electrically contacted with the antennas.

In 5 is a plan view of the substrate 11 and the electronic components 10 shown, wherein the substrate 11 a variety of components 10 carries in several, parallel to the longitudinal direction of the substrate 11 arranged rows are arranged.

After placing the components 10 on the substrate 11 by means of a mounting device, not shown, are the components 10 initially only prefixed by means of the initially liquid adhesive. The substrate 11 Therefore, together with the prefixed components 10 between a plurality of thermode device 1 introduced, with the upper plunger 3 each thermode device 1 above the components 10 and the lower plunger 5 each thermode device 1 below the substrate 11 located. The substrate 11 lies on the lower plunger 5 on, between the lower punch head 7 and the substrate 11 and / or between the upper punch head 6 and the device 10 a protective film may be arranged. Subsequently, the upper support arm 2 together with the upper plunger 3 pivoted down, leaving the device 10 and the substrate 11 be compressed with a predetermined compressive force, which may be only a few Newton depending on the application. At the same time it will be out of the substrate 11 and the device 10 existing package by means of the plunger 3 . 5 heated so that the adhesive can cure in a rapid and predetermined manner. After the curing time, the plunger 3 . 5 moved apart again, the substrate 11 forwarded until further components 10 between the plunger 3 . 5 arrive, and the Andrückvorgang repeated.

Like from the 1 to 4 can be seen, there is the upper arm 2 from a straight Tragarmschenkel 2a and a support arm leg arranged perpendicular thereto 2 B extending between the two end portions of the Tragarmschenkels 2a extends downwards. The Tragarmschenkel 2a has at its top a guide for a weight 12 on, along the Tragarmschenkels 2a can be moved. Alternatively or additionally, a weight on the underside of Tragarmschenkels 2a be slidably attached. Furthermore, several weights at the top and / or bottom of Tragarmschenkels 2a be arranged. The positioning of the weight 12 determines the pressing force with which the upper plunger 3 on a component 10 is put on. It can be seen that the further the weight, the lower the pressure force 12 relative to the Tragarmschenkel 2 B is moved to the right. In the 1 . 3 . 4 is the weight 12 shown in the outermost end position, in which the pressing force of the plunger 3 is minimal. In 2 is the weight 12 moved further to the left, whereby the pressing force is increased.

The lower arm 4 is formed substantially L-shaped and has a horizontal Tragarmschenkel 4a and a vertical support arm leg 4b on.

The two vertical support arm legs 2 B . 4b are by means of a 7 apparent cross spring 13 hinged together. This cross spring 13 consists of two flat spring plates 14 . 15 , which are each provided centrally with a transverse slot, which expediently over half the width of each spring plate 14 . 15 extends. In the area of these transverse slots, the spring plates 14 . 15 in the in 7 shown, cross-shaped manner are plugged together, wherein adjacent spring plate halves can be arranged at an angle of about 90 °. In the illustrated embodiment, the spring plate half 14a on the free end face of Tragarmschenkels 4b and the spring plate half 15b on a thereto adjacent vertical surface of Tragarmschenkels 4b attached. The spring plate half 14b is at the free end of the Tragarmschenkels 2 B fastened while the spring plate half 15a on a thereto adjacent vertical surface of Tragarmschenkels 2 B is attached. Each support arm is thus simultaneously on the associated halves of both spring plates 14 . 15 attached. The attachment is usually by means of screws, which pass through corresponding holes 16 the spring plates 14 . 15 extend through. The holes 16 can be designed as oblong holes to the support arms 2 . 4 relative to the spring plates 14 . 15 to be able to align. This allows the support arms 2 . 4 already set such that the two plunger 3 . 5 exactly or at least relatively exactly opposite each other in the predetermined manner.

The two spring plates 14 . 15 form in their intersection a swivel joint for the two support arms 2 . 4 by the spring plates 14 . 15 deform elastically in this crossing area when the upper arm 2 relative to the lower arm 4 is pivoted. The required elastic deformation is relatively low, since due to the large lever length between the hinge 8th and the stamps 3 . 5 already relatively small changes in angle relatively large distances in the z-direction at the punches 3 . 5 result. The cross spring 13 thus forms a simple, inexpensive, accurate and low-friction swivel, the two support arms 2 . 4 Fixed in the x, y and z directions relative to each other.

An alternative embodiment of a cross spring 13 ' is in 8th their structure is very similar to that in 7 illustrated cross spring 13 is. At the cross spring 13 However, one of the two spring plates, in the present case, the spring plate 15 , a smaller width than the other spring plate 14 on. The spring plate 14 has a central transverse slot 21 on, through which the spring plate 15 can be inserted. The transverse slot 21 is dimensioned such that the spring plate 15 with only negligible or little play in the transverse slot 21 can be inserted. Also in this embodiment of the cross spring 13 the two spring plates intersect 14 . 15 expediently in the middle.

The two printing stamps 3 . 5 are substantially perpendicular to the Tragarmschenkeln 2a . 4a and are directed towards each other. To the two printing stamps 3 . 5 extending at the free end of the support arms 2 . 4 be able to align exactly so that the punch heads 6 . 7 then, if they pinch the substrate / package between them, exactly opposite each other without skew, the two plungers 3 . 5 each on a stamp console 17 fastened, whose inclination transverse and in the longitudinal direction to the longitudinal extension of the support arms 2 . 4 can be changed. This is done by means of vertical slots, in vertical side panels 19 the stamp console 17 are provided so that the stamp console 17 with screws 18 tilt-adjustable on the support arms 2 . 4 is screwed.

Furthermore, it is possible to provide a laser pointer, not shown, with which the individual plunger 3 . 5 in the overall arrangement can be adjusted. This happens for every single printing stamp 3 . 5 so that the laser pointer with open thermode device 1 from the top to the target position of the lower plunger 5 shows. The plunger can then be adjusted accordingly, so that the laser pointer hits the lower plunger at the intended location, usually in the middle.

The two support arms 2 . 4 have a relatively small width and are arranged in the same vertical plane. In this way, it is possible to have a plurality of thermode devices 1 to combine to form a thermode, as for example 5 is apparent. The individual thermode devices 1 are here obliquely to the longitudinal axis of the substrate 11 arranged to simultaneously multiple components 10 to contact, in several adjacent, parallel to the longitudinal axis of the substrate 11 extending rows are arranged. In 5 is the angle that the thermode devices 1 to the transverse direction of the substrate 11 occupy, designated α. This angle α is in the illustrated embodiment about 45 °. Depending on the distance of the components 10 in the y-direction it will be useful in most cases be when this angle α is between 5 ° and 60 °. Here, the thermode devices can 1 from the two opposite side regions of the substrate 11 over the substrate 11 extend. In the illustrated embodiment, six thermode devices 1 provided that work synchronously.

Depending on the application, the thermode arrangement one of 5 different number and arrangement of thermode devices 1 exhibit. While in the in 5 illustrated embodiment, the two from opposite sides on the substrate 11 and the components 10 extending groups of thermode devices 1 are arranged at an angle of about 90 ° to each other, it is also possible to vary this angle to a large extent or a plurality of thermode devices 1 only on one side of the substrate 11 to arrange.

In 6 an alternative embodiment of a thermode arrangement is shown. In this embodiment, a portion of the substrate 11 shown on the 24 juxtaposed longitudinal rows of components 10 are arranged. Every second transverse row of components 10 becomes simultaneously by means of thermode device groups 20a - 20i processed, each four adjacent thermode devices 1 include. The skew angle α is about 16 ° in this embodiment. Furthermore, only that half of the thermode arrangement is shown with which the lower half of in 6 drawn components 10 to be edited. The upper half of the components 10 is processed by a non-illustrated half of the thermode arrangement, which in a similar manner as in 5 also obliquely ge put thermode devices 1 having.

As can be seen, of the first three sets of thermode device 20a - 20c only every third longitudinal row of components 10 processed, ie, the first, fourth, seventh and tenth longitudinal row. From the next three thermode device groups 20d - 20f the second, fifth, eighth and eleventh longitudinal rows are processed while by the thermode device groups 20g - 20i the third, sixth, ninth and twelfth longitudinal series is processed. After the processing, the substrate becomes 11 Moved by three transverse rows distances in or against the x-direction, causing the between the already processed components 10 lying components can be processed in the next step.

From the 5 and 6 It can be seen that the thermode arrangement, depending on the number and positioning of the components 10 different numbers of thermode device groups 20a - 20i and different numbers of thermode devices 1 per thermode device group 20a - 20i may have. Conveniently, the number of thermode devices 1 per thermode device group 20a - 20i between one and fifteen thermode devices 1 ,

Furthermore, it is also possible, not or not only the upper arm 2 to swing, but alternatively or additionally, the lower arm 4 , Shall both support arms 2 . 4 be pivoted, these are pivotally mounted on an additional stationary bearing bracket, which is not shown in the drawings.

Conveniently, each thermode or at least one to a thermode device 1 belonging Thermodenpaar own temperature control. As a result, the individual thermodes can be adapted in a very individual way to different temperature conditions. The pivotable support arms can be moved with different mechanisms, for example by acting on the support arms rotating cams. Such cams expediently engage from the rear end of the pivotable support arms, ie at the opposite end of the pressure stamps of the support arms.

In 9 is an alternative embodiment of a thermode device 1' seen. This thermode device 1' is in much the same way as the ones based on the 1 to 4 described thermode device 1 constructed and differs from this only in that the upper arm 2 not T-shaped, but is rectilinear. In other words, this means that the upper support arm 2 the thermode device 1' only from the upper Tragarmschenkel 2a exists while the vertical support arm leg 2 B the first embodiment is not present. The spring plate halves 14a . 15a the cross spring 13 . 13 ' are in this case right at the bottom of the upper Tragarmschenkels 2a attached.

In both embodiments of the thermode device 1 . 1' is the height of the swivel joint 8th or the pivot axis 9 at the height of the substrate and thus at least substantially at the same height as the upper end face of the lower punch head 7 ,

As can be seen, it is essential for the invention that at least one of the support arms 2 . 4 as a swivel arm is ausgebil det, the two support arms 2 . 4 that from the substrate 11 and the device 10 existing pliers overlap like a pincer and that pressure stamp 3 , which is attached to the pivot arm, on a short piece of a circular arc around the pivot axis 9 , which are laterally beside the substrate 11 is pivoted, causing the plunger on the device 10 or the substrate 11 can be placed on or removed from this.

Claims (7)

Thermode device for connecting electronic components, in particular semiconductor components, to a substrate ( 11 ) under application of pressure and temperature, with the following features: - the thermode device ( 1 . 1' ) has two cooperating, on supporting arms ( 2 . 4 ) attached plunger ( 3 . 5 ) between which an electronic component ( 10 ) and the substrate ( 11 ) are insertable, wherein at least one of the two plunger ( 3 . 5 ) on a support arm designed as a pincer-like movable arm ( 2 ) and by a pivoting movement of the pivot arm relative to the opposing plunger ( 5 . 3 ) is movable, - at least one of the two plunger ( 3 . 5 ) is designed as a thermode, - at least one of the two plunger ( 3 . 5 ) is on the opposite plunger ( 5 . 3 ) and movable away from this, characterized in that the swivel arm by means of a crossed spring plates ( 14 . 15 ) existing cross spring ( 13 . 13 ' ) on the opposite support arm ( 4 ) or a stationary console is pivotally mounted. Thermode device according to claim 1, characterized in that the two pressure stamps ( 3 . 5 ) in frame-shaped complementary, elongated support arms ( 2 . 4 ), wherein a support arm ( 2 ) as a swivel arm and the other support arm ( 4 ) is designed as a stationary support arm. Thermode device according to claim 1 or 2, characterized in that at least one of the two pressure stamps ( 3 . 5 ) by means of a tilt adjustment in the form of a slot / screw connection having stamping console ( 17 ) adjustable in angle on the associated support arm ( 2 . 4 ) is attachable. Thermode device according to one of the preceding claims, characterized in that the pressure force by means of at least one weight ( 12 ) is variably adjustable, which at different distances to the pivot axis ( 9 ) is attachable to the pivot arm. Thermode device according to claim 4, characterized in that the swivel arm is a straight-line sliding guide for the weight ( 12 ) having. Thermode arrangement with a plurality of thermode devices ( 1 ) according to one of claims 1 to 5, characterized in that the two support arms ( 2 . 4 ) of the thermode devices ( 1 . 1' ) are arranged in planes that are oblique to the longitudinal axis of the substrate ( 11 ). Thermode arrangement according to claim 6, characterized in that the thermode arrangement comprises a plurality of thermode device groups ( 20a - 20i ), which are arranged offset in the x and y directions to each other.