DE102005054143A1 - Beschleunigungssensor - Google Patents

Beschleunigungssensor Download PDF

Info

Publication number
DE102005054143A1
DE102005054143A1 DE200510054143 DE102005054143A DE102005054143A1 DE 102005054143 A1 DE102005054143 A1 DE 102005054143A1 DE 200510054143 DE200510054143 DE 200510054143 DE 102005054143 A DE102005054143 A DE 102005054143A DE 102005054143 A1 DE102005054143 A1 DE 102005054143A1
Authority
DE
Germany
Prior art keywords
seismic mass
substrate
crystal substrate
projection
front side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE200510054143
Other languages
English (en)
Inventor
Hubert Benzel
Matthias Illing
Simon Armbruster
Gerhard Lammel
Christoph Schelling
Joerg Brasas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE200510054143 priority Critical patent/DE102005054143A1/de
Publication of DE102005054143A1 publication Critical patent/DE102005054143A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/02—Housings
    • G01P1/023—Housings for acceleration measuring devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)

Abstract

Die vorliegende Erfindung betrifft einen Beschleunigungssensor mit einer seismischen Masse (14), wobei die seismische Masse (14) aus einem Substrat (1) geätzt ist und mit dem Substrat (1) über einen Steg (13) verbunden ist, und ein entsprechendes Verfahren zur Herstellung eines Beschleunigungssensors. Ein Vorsprung (10), der geeignet ist, eine Auslenkung der seismischen Masse (14) unter Einwirkung einer Beschleunigungskraft in einer Richtung zu begrenzen, ist an der seismischen Masse (14) und/oder dem Substrat (1) ausgebildet. Die Begrenzung der Auslenkung der seismischen Masse (14) verhindert einen Bruch des Stegs (13).
DE200510054143 2005-11-14 2005-11-14 Beschleunigungssensor Withdrawn DE102005054143A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE200510054143 DE102005054143A1 (de) 2005-11-14 2005-11-14 Beschleunigungssensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200510054143 DE102005054143A1 (de) 2005-11-14 2005-11-14 Beschleunigungssensor

Publications (1)

Publication Number Publication Date
DE102005054143A1 true DE102005054143A1 (de) 2007-05-16

Family

ID=37982668

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200510054143 Withdrawn DE102005054143A1 (de) 2005-11-14 2005-11-14 Beschleunigungssensor

Country Status (1)

Country Link
DE (1) DE102005054143A1 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008040564A1 (de) 2008-07-21 2010-01-28 Robert Bosch Gmbh Mikromechanisches Sensorbauelement und Verfahren zur Herstellung eines mikromechanischen Sensorbauelements
EP2275825A1 (de) * 2009-07-10 2011-01-19 Yamaha Corporation Einachsiger Beschleunigungssensor
CN101786591B (zh) * 2009-01-27 2016-01-27 罗伯特·博世有限公司 微机械装置及其制造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008040564A1 (de) 2008-07-21 2010-01-28 Robert Bosch Gmbh Mikromechanisches Sensorbauelement und Verfahren zur Herstellung eines mikromechanischen Sensorbauelements
CN101786591B (zh) * 2009-01-27 2016-01-27 罗伯特·博世有限公司 微机械装置及其制造方法
EP2275825A1 (de) * 2009-07-10 2011-01-19 Yamaha Corporation Einachsiger Beschleunigungssensor
US8487389B2 (en) 2009-07-10 2013-07-16 Yamaha Corporation Uniaxial acceleration sensor

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Legal Events

Date Code Title Description
8139 Disposal/non-payment of the annual fee