DE102005053324A1 - Target für eine Mikrofocus- oder Nanofocus-Röntgenröhre - Google Patents

Target für eine Mikrofocus- oder Nanofocus-Röntgenröhre Download PDF

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Publication number
DE102005053324A1
DE102005053324A1 DE102005053324A DE102005053324A DE102005053324A1 DE 102005053324 A1 DE102005053324 A1 DE 102005053324A1 DE 102005053324 A DE102005053324 A DE 102005053324A DE 102005053324 A DE102005053324 A DE 102005053324A DE 102005053324 A1 DE102005053324 A1 DE 102005053324A1
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DE
Germany
Prior art keywords
target
support
radiation
nanofocus
microfocus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE102005053324A
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English (en)
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DE102005053324B4 (de
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Diamond Materials 79108 Freiburg De GmbH
Diamond Materials De GmbH
Yxlon International GmbH
Original Assignee
Comet GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Comet GmbH filed Critical Comet GmbH
Priority to DE102005053324A priority Critical patent/DE102005053324B4/de
Publication of DE102005053324A1 publication Critical patent/DE102005053324A1/de
Application granted granted Critical
Publication of DE102005053324B4 publication Critical patent/DE102005053324B4/de
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/12—Cooling non-rotary anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/081—Target material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H01J35/116—Transmissive anodes

Landscapes

  • X-Ray Techniques (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

Ein erfindungsgemäßes Target 2 für eine Mikrofocus- oder Nanofocus-Röntgenröhre weist ein Trägerelement 4 und wenigstens ein an dem Trägerelement 4 angeordnetes, aus einem Targetmaterial bestehendes Targetelement 6 zur Emission von Röntgenstrahlung auf, wobei das Targetelement 6 das Trägerelement 4 nur teilweise bedeckt. Erfindungsgemäß besteht das Trägerelement 4 wenigstens teilweise aus einem Trägermaterial, dessen Wärmeleitkoeffizient >= 10 W/(cm x K) ist, wobei das Trägermaterial zur Erhöhung der elektrischen Leitfähigkeit dotiert ist.
DE102005053324A 2005-11-07 2005-11-07 Target für eine Mikrofocus- oder Nanofocus-Röntgenröhre Expired - Fee Related DE102005053324B4 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE102005053324A DE102005053324B4 (de) 2005-11-07 2005-11-07 Target für eine Mikrofocus- oder Nanofocus-Röntgenröhre

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102005053324A DE102005053324B4 (de) 2005-11-07 2005-11-07 Target für eine Mikrofocus- oder Nanofocus-Röntgenröhre

Publications (2)

Publication Number Publication Date
DE102005053324A1 true DE102005053324A1 (de) 2007-05-16
DE102005053324B4 DE102005053324B4 (de) 2012-08-02

Family

ID=37982551

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102005053324A Expired - Fee Related DE102005053324B4 (de) 2005-11-07 2005-11-07 Target für eine Mikrofocus- oder Nanofocus-Röntgenröhre

Country Status (1)

Country Link
DE (1) DE102005053324B4 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2570646A (en) * 2018-01-24 2019-08-07 Smiths Heimann Sas Radiation Source
EP3579664A1 (de) * 2018-06-08 2019-12-11 Excillum AB Verfahren zur steuerung einer röntgenquelle

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0697712A1 (de) * 1994-08-20 1996-02-21 Sumitomo Electric Industries, Ltd. Eine Vorrichtung zur Röntgenstrahlerzeugung
US6289079B1 (en) * 1999-03-23 2001-09-11 Medtronic Ave, Inc. X-ray device and deposition process for manufacture
WO2002021564A1 (en) * 2000-09-07 2002-03-14 Radi Medical Technologies Ab X-ray tube electrodes
US6477233B1 (en) * 1999-06-04 2002-11-05 Radi Medical Technologies Ab Miniature x-ray source
WO2003081631A1 (de) * 2002-03-26 2003-10-02 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Roentgenstrahlquelle mit einer kleinen brennfleckgroesse

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0697712A1 (de) * 1994-08-20 1996-02-21 Sumitomo Electric Industries, Ltd. Eine Vorrichtung zur Röntgenstrahlerzeugung
US6289079B1 (en) * 1999-03-23 2001-09-11 Medtronic Ave, Inc. X-ray device and deposition process for manufacture
US6477233B1 (en) * 1999-06-04 2002-11-05 Radi Medical Technologies Ab Miniature x-ray source
WO2002021564A1 (en) * 2000-09-07 2002-03-14 Radi Medical Technologies Ab X-ray tube electrodes
WO2003081631A1 (de) * 2002-03-26 2003-10-02 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Roentgenstrahlquelle mit einer kleinen brennfleckgroesse

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2570646A (en) * 2018-01-24 2019-08-07 Smiths Heimann Sas Radiation Source
EP3579664A1 (de) * 2018-06-08 2019-12-11 Excillum AB Verfahren zur steuerung einer röntgenquelle

Also Published As

Publication number Publication date
DE102005053324B4 (de) 2012-08-02

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8127 New person/name/address of the applicant

Owner name: YXLON INTERNATIONAL FEINFOCUS GMBH, 30827 GARB, DE

Owner name: DIAMOND MATERIALS GMBH, 79108 FREIBURG, DE

8181 Inventor (new situation)

Inventor name: FROEBA, THORSTEN, 31535 NEUSTADT, DE

Inventor name: REINHOLD, ALFRED, 31515 WUNSTORF, DE

Inventor name: WILD, CHRISTOPH, DR., 79211 DENZLINGEN, DE

8127 New person/name/address of the applicant

Owner name: DIAMOND MATERIALS GMBH, 79108 FREIBURG, DE

Owner name: YXLON INTERNATIONAL GMBH, 22419 HAMBURG, DE

R081 Change of applicant/patentee

Owner name: YXLON INTERNATIONAL GMBH, DE

Free format text: FORMER OWNER: DIAMOND MATERIALS GMBH, YXLON INTERNATIONAL FEINFOCUS G, , DE

Effective date: 20110318

Owner name: DIAMOND MATERIALS GMBH, DE

Free format text: FORMER OWNER: DIAMOND MATERIALS GMBH, YXLON INTERNATIONAL FEINFOCUS G, , DE

Effective date: 20110318

Owner name: DIAMOND MATERIALS GMBH, DE

Free format text: FORMER OWNERS: DIAMOND MATERIALS GMBH, 79108 FREIBURG, DE; YXLON INTERNATIONAL FEINFOCUS GMBH, 30827 GARBSEN, DE

Effective date: 20110318

Owner name: YXLON INTERNATIONAL GMBH, DE

Free format text: FORMER OWNERS: DIAMOND MATERIALS GMBH, 79108 FREIBURG, DE; YXLON INTERNATIONAL FEINFOCUS GMBH, 30827 GARBSEN, DE

Effective date: 20110318

R016 Response to examination communication
R018 Grant decision by examination section/examining division
R020 Patent grant now final

Effective date: 20121103

R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee