DE102005024554A1 - Production of a junction of optical components comprises measuring the connecting surfaces of individual elements and/or component groups using digital interferometry and acquiring zonal molding accuracies and further processing - Google Patents

Production of a junction of optical components comprises measuring the connecting surfaces of individual elements and/or component groups using digital interferometry and acquiring zonal molding accuracies and further processing Download PDF

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Publication number
DE102005024554A1
DE102005024554A1 DE200510024554 DE102005024554A DE102005024554A1 DE 102005024554 A1 DE102005024554 A1 DE 102005024554A1 DE 200510024554 DE200510024554 DE 200510024554 DE 102005024554 A DE102005024554 A DE 102005024554A DE 102005024554 A1 DE102005024554 A1 DE 102005024554A1
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Prior art keywords
zonal
individual elements
component groups
optical components
accuracies
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German (de)
Inventor
Volkmar Dr.-Ing. Giggel
Gregor Dipl.-Ing. Müller
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Jenoptik AG
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Carl Zeiss Jena GmbH
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Abstract

Production of a junction of optical components comprises measuring the connecting surfaces of individual elements and/or component groups using digital interferometry and acquiring zonal molding accuracies, correcting the molding accuracies of the composite surfaces, joining two individual elements and/or component groups, measuring the composite surfaces of individual elements and/or component groups using digital interferometry and acquiring zonal molding accuracies and correcting the molding accuracies of the composite surfaces. Preferred Features: The zonal correction of the molding accuracies is carried out by ion beam figuring.

Description

Die Erfindung betrifft ein Verfahren zum Herstellen einer Verbindung von optischen Bauelementen, bevorzugt zur Fertigung komplexer optischer Bauelementgruppen aus planparallelen Platten, bestehend aus einer Vielzahl von Einzelelementen, wobei die Verbundflächen der Einzelelemente hinsichtlich Formgebung und Rauheit bearbeitet werden und die Verbindung zweier Einzelelemente und/oder Bauelementgruppen durch Ansprengen realisiert wird.The The invention relates to a method for producing a compound of optical components, preferably for the production of complex optical component groups from plane-parallel plates, consisting of a large number of individual elements, the composite surfaces the individual elements processed in terms of shaping and roughness be and the connection of two individual elements and / or component groups is realized by wringing.

Das Ansprengen von Elementen ist in der Feinmechanik und Optik allgemein bekannt. Um derartige Verbindungen herzustellen müssen die Bauelemente hinsichtlich ihrer Oberflächenqualität sehr präzise und hinsichtlich ihrer Oberflächenform absolut formschlüssig ausgebildet sein. Durch das Aneinandersetzen der Verbundflächen kommt es zur Ausbildung von Kräften zwischen den Atomen oder Molekülen der einzelnen Elemente und somit zu einer festen Verbindung.The Wringing of elements is common in precision mechanics and optics known. In order to produce such compounds must Components very precise in terms of their surface quality and in terms of their surface shape absolutely positive be educated. By putting together the composite surfaces comes it for the training of forces between the atoms or molecules the individual elements and thus to a solid connection.

Sofern mehrere Bauelemente auf diese Art und Weise verbunden werden kann es Deformationen in den Bauelementen kommen, die sich negativ auf die Festigkeit der Verbindungen auswirken.Provided several components can be connected in this way There are deformations in the components that are negative affect the strength of the joints.

In der Veröffentlichung von Florence Laurent u.a. „Design, prototypes and performance of an image sliver System for integral field spectroscopy", (SPIE Vol. 5252, 2004, S. 443–4453 und in der Veröffentlichung von Christopher Bonneville u.a. „Optical Design, Fabrication and Testing a prototype of the NIR-Spec IFU", (SPIE Vol. 4842, 2003, 5.168) wird beschrieben, dass sich die Oberflächen angesprengter, plattenförmiger Bauelemente durch Addition von Einzelfehlern sehr stark deformieren. Diese Deformationen führen dazu, dass nach dem Verbinden von 15 Einzelelementen, die eine Oberflächenebenheit von p-V Lambda/4 (bezogen auf die Messwellenlänge des Interferometers von 633 nm) aufwiesen, kein weiteres Element mehr angesprengt werden konnte. P-v (peak-valley) ist dabei der Abstand vom höchsten bis zum niedrigsten Punkt des Oberflächenfehlergebirges.In the publication by Florence Laurent et al. "Design, prototypes and performance of an image field spectroscopy ", (SPIE Vol. 5252, 2004, pp. 443-4453 and in the publication by Christopher Bonneville et al. "Optical Design, Fabrication and Testing a prototype of the NIR-Spec IFU ", (SPIE Vol. 4842, 2003, 5.168) is described, that the surfaces are sprung, plate-shaped Deform components by addition of single errors very strong. These deformations lead to that, after joining 15 individual elements, which has a surface flatness of p-V lambda / 4 (related to the measuring wavelength of the interferometer of 633 nm), no further element is blasted could. P-v (peak-valley) is the distance from the highest to the highest to the lowest point of the surface error mountain.

Ausgehend von diesem Nachteil, liegt der Erfindung die Aufgabe zu Grunde, ein Verfahren zum Herstellen einer Verbindung von optischen Bauelementen dahingehend weiter zu entwickeln, dass eine nahezu unbegrenzte Anzahl von Einzelelementen verbunden werden kann und die Bauelementgruppe höchsten mechanischen und thermischen Beanspruchungen standhält.outgoing from this disadvantage, the invention is based on the object, a method for making a connection of optical components to further develop that an almost unlimited number can be connected by individual elements and the component group highest mechanical and withstand thermal stresses.

Diese Aufgabe wird durch ein Verfahren der eingangs beschriebenen Art, erfindungsgemäß durch folgende Verfahrensschritte gelöst:

  • – digitalinterferometrisches Vermessen der bearbeiteten Verbundflächen der Einzelelemente und/oder der Bauelementgruppen und Ermittlung zonaler Formungenauigkeiten,
  • – zonale Korrektur der Formungenauigkeiten der Verbundflächen,
  • – Verbinden zweier Einzelelemente und/oder Bauelementgruppen durch Ansprengen,
  • – digitalinterferometrisches Vermessen der Verbundfläche der gefügten Bauelementgruppe und Ermittlung zonaler Formungenauigkeiten und
  • – zonale Korrektur der Formungenauigkeiten der neuen Verbundfläche.
This object is achieved by a method of the type described above, according to the invention by the following method steps:
  • Digital interferometric measurement of the machined composite surfaces of the individual elements and / or the component groups and determination of zonal shape inaccuracies,
  • - zonal correction of the shape inaccuracies of the composite surfaces,
  • Connecting two individual elements and / or component groups by wringing,
  • - Digitalinterferometrisches measuring the composite surface of the joined component group and determination of zonal inaccuracies and
  • - Zonal correction of the shape inaccuracies of the new composite surface.

Bedingt dadurch, dass die anzusprengenden Oberflächen der Einzelelemente oder die eines bereits versprengten Plattenstapels immer vor dem Ansprengen hinsichtlich der Formabweichung vermessen und mittels eines kleinflächigen Werkzeuges zonal bearbeitet werden, lassen sich immer Oberflächenebenheiten (Planarität) von Lambda/40 p-V bis hin zum Rand der zu bearbeitenden Oberfläche erreichen. Formungenauigkeiten, die durch Spannungen in den Einzelelementen nach dem Versprengen entstehen, werden somit beseitigt. Da sich dieser Verfahrensablauf nach jedem Ansprengvorgang wiederholt können nahezu beliebig viele Einzelelemente miteinander bei gleicher Festigkeit zueinander versprengt werden. Die Bauelementgruppe ist in der Lage, höchsten mechanischen und thermischen Belastungen standzuhalten.conditioned in that the surfaces of the individual elements to be pressed or that of an already scattered plate stack always before wringing Measured in terms of shape deviation and using a small-area tool be processed zonally, can always surface flatness (Planarity) from lambda / 40 p-V to the edge of the surface to be machined. Shape inaccuracies caused by tensions in the individual elements arise after the blasting, are thus eliminated. That I This procedure can be repeated after each Ansprengvorgang almost Any number of individual elements with the same strength be scattered to each other. The component group is able to highest withstand mechanical and thermal loads.

Vorteilhafterweise erfolgt die zonale Korrektur der Formungenauigkeiten durch Ionenstrahlbearbeitung (IBF – Ion Beam Figuring). Beim Ionenstrahlbearbeiten ist es möglich, die Oberflächen für den vollflächigen Ansprengprozess bis zum Rand hin exakt zu bearbeiten.advantageously, the zonal correction of the shape inaccuracies takes place by ion beam machining (IBF ion Beam Figuring). In ion beam machining it is possible to use the surfaces for the full surface blowing process to edit exactly to the edge.

Auch andere Verfahren, wie das Computerkontrollierte Polieren (CCP – Computer Controlled Polishing) oder die zonale Korrektur der Formungenauigkeiten durch ein Materialabtragungsverfahren, bei dem eine abrasive Flüssigkeit, deren Viskosität durch ein magnetisches Feld gesteuert wird, zum Einsatz kommt (MRF – Magnetorheological Finishing), sind denkbar.Also Other methods, such as Computer Controlled Polishing (CCP Computer Controlled polishing) or the zonal correction of the shape inaccuracies by a material removal process in which an abrasive liquid, their viscosity a magnetic field is controlled, is used (MRF - Magnetorheological Finishing), are conceivable.

Das erfindungsgemäße Verfahren soll nachfolgend anhand eines Ausführungsbeispiels naher erläutert werden. Dazu zeigen:The inventive method will be explained in more detail using an exemplary embodiment. To show:

1: den Ablauf des erfindungsgemäßen Verfahrens und 1 : the course of the method according to the invention and

2: die Darstellung der Anordnung zur zonalen Korrektur der Formungenauigkeit. 2 : the representation of the arrangement for the zonal correction of the shape inaccuracy.

1 zeigt schematisch den Ablauf des erfindungsgemäßen Verfahrens zur Herstellung eines Plattenstapels aus Glas (Bauelementgruppe 1 nach 2), wobei die einzelnen Platten (Einzelelemente) durch Ansprengen miteinander verbunden sind. 1 schematically shows the sequence of the inventive method for producing a plate stack of glass (component group 1 to 2 ), wherein the individual plates (individual elements) are connected to each other by wringing.

Nach der Fertigung einzelner plattenförmiger Elemente auf an sich bekannte Art und Weise und der Feinbearbeitung der Oberflächenform sowie der erforderlichen Oberflächenqualität (Rautiefe) der Verbundflächen durch Polieren werden zunächst die Verbundflächen der zu einem Plattenstapel zu verbindenden Bauelementgruppe interferometrisch auf zonale Formungenauigkeiten geprüft. Anschließend erfolgt die zonale Korrektur der Formungenauigkeiten durch Ionenstrahlbearbeitung. Nach der zonalen Korrektur werden zwei Einzelelemente zur Bauelementgruppe miteinander versprengt. Die ein drittes Einzelelement aufnehmende Verbundfläche der Bauelementgruppe wird erneut auf zonale Formungenauigkeiten geprüft und entsprechend korrigiert. Entsprechend der Anzahl der zu verbindenden Einzelelemente werden die Verfahrensschritte „Interferometrisches Erfassen der Formungenauigkeiten und zonale Korrektur der Verbundflächen" ständig wiederholt. Bei Formgenauigkeiten der Verbundflächen von Lambda/40 p-v lassen sich beliebig viele Einzelelemente zu einem Plattenstapel mit hoher Verbundfestigkeit fertigen.To the production of individual plate-shaped elements in a manner known per se and the fine machining of the surface shape as well as the required surface quality (roughness) the composite surfaces By polishing, be first the composite surfaces the component group to be connected to a disk stack interferometrically checked for zonal shape inaccuracies. Then done the zonal correction of the shape inaccuracies by ion beam machining. After the zonal correction, two individual elements become the component group scattered together. The third single element receiving composite surface the component group is again on zonal shape inaccuracies checked and corrected accordingly. According to the number of connected Individual elements are the steps "Interferometric capture the shape inaccuracies and zonal correction of the composite surfaces "constantly repeated. For shape accuracies of the composite surfaces let lambda / 40 p-v Any number of individual elements to a stack of plates with high Bond strength finished.

2 zeigt beispielhaft eine Bauelementgruppe 1 aus vier plattenförmigen, miteinander versprengten Einzelelementen, die in einer Werkstückhalterung 2 aufgenommen sind. Über eine Ionenquelle 3, die in einer in drei Achsrichtungen beweglichen Aufnahme 4 fixiert wird, erfolgt die zonale Korrektur der Verbundfläche 5 der Bauelementgruppe 1. Die Verbundfläche 5 dient dabei zur Aufnahme eines fünften, nicht dargestellten, Einzelelementes. 2 shows an example of a component group 1 of four plate-shaped, scattered individual elements, which are in a workpiece holder 2 are included. Via an ion source 3 , which in a three-axis movable recording 4 is fixed, the zonal correction of the composite surface takes place 5 the component group 1 , The composite surface 5 serves to receive a fifth, not shown, single element.

11
Bauelementgruppecomponent group
22
WerkstückhalterungWorkpiece holder
33
Ionenquelleion source
44
Aufnahmeadmission
55
Verbundflächecomposite surface

Claims (4)

Verfahren zum Herstellen einer Verbindung von optischen Bauelementen, bevorzugt zur Fertigung komplexer optischer Bauelementgruppen aus planparallelen Platten, bestehend aus einer Vielzahl von Einzelelementen, wobei die Verbundflächen der Einzelelemente hinsichtlich Formgebung und Rauheit bearbeitet werden und die Verbindung zweier Einzelelemente und/oder Bauelementgruppen durch Ansprengen realisiert wird, gekennzeichnet durch folgende Verfahrensschritte: – digitalinterferometrisches Vermessen der bearbeiteten Verbundflächen der Einzelelemente und/oder der Bauelementgruppen und Ermittlung zonaler Formungenauigkeiten, – zonale Korrektur der Formungenauigkeiten der Verbundflächen, – Verbinden zweier Einzelelemente und/oder Bauelementgruppen durch Ansprengen, – digitalinterferometrisches Vermessen der Verbundfläche der gefügten Bauelementgruppe und Ermittlung zonaler Formungenauigkeiten und – zonale Korrektur der Formungenauigkeiten der neuen Verbundfläche.Method for establishing a connection of optical components, preferably for the production of complex optical Component groups of plane parallel plates, consisting of a Variety of individual elements, wherein the composite surfaces of the individual elements concerning shaping and roughness and the connection two individual elements and / or component groups by wringing is realized, characterized by the following method steps: - digital interferometric Measuring the machined composite surfaces of the individual elements and / or the Component groups and determination of zonal shape inaccuracies, - zonal Correction of the shape inaccuracies of the composite surfaces, - Connecting two individual elements and / or component groups by wringing, - digital interferometric Measuring the composite surface the joined Component group and determination of zonal inaccuracies and - zonal Correction of the shape inaccuracies of the new composite surface. Verfahren zum Herstellen einer Verbindung von optischen Bauelementen nach Anspruch 1, dadurch gekennzeichnet, dass die zonale Korrektur der Formungenauigkeiten durch Ionenstrahlbearbeitung (IBF – Ion Beam Figuring) vorgenommen wird.Method for making a connection of optical Components according to claim 1, characterized in that the zonal Correction of the shape inaccuracies by ion beam processing (IBF - Ion Beam Figuring) is made. Verfahren zum Herstellen einer Verbindung von optischen Bauelementen nach Anspruch 1, dadurch gekennzeichnet, dass die zonale Korrektur der Formungenauigkeiten durch computerkontrolliertes Polieren (CCP – Computer Controlled Polishing) vorgenommen wird.Method for making a connection of optical Components according to claim 1, characterized in that the zonal Correction of shape inaccuracies by computer-controlled polishing (CCP computer Controlled Polishing) is made. Verfahren zum Herstellen einer Verbindung von optischen Elementen nach Anspruch 1, dadurch gekennzeichnet, dass die zonale Korrektur der Formungenauigkeiten durch ein Materialabtragungsverfahren erfolgt, bei dem eine abrasive Flüssigkeit, deren Viskosität durch ein magnetisches Feld gesteuert wird, zum Einsatz kommt (MRF – Magnetorheological Finishing).Method for making a connection of optical Elements according to claim 1, characterized in that the zonal Correction of the shape inaccuracies by a material removal process takes place, in which an abrasive liquid whose viscosity a magnetic field is controlled (MRF - Magnetorheological Finishing) is used.
DE200510024554 2005-05-28 2005-05-28 Production of a junction of optical components comprises measuring the connecting surfaces of individual elements and/or component groups using digital interferometry and acquiring zonal molding accuracies and further processing Withdrawn DE102005024554A1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009030124A1 (en) * 2009-06-24 2010-12-30 Carl Zeiss Sms Gmbh High-tensile optics has two optical elements, which are provided at distance from each other and are connected to unit in rigid manner

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4611883A (en) * 1981-05-01 1986-09-16 Hughes Aircraft Company Two-dimensional optics element for correcting aberrations
WO2002032825A1 (en) * 2000-10-13 2002-04-25 The Regents Of The University Of California Surface contouring by controlled application of processing fluid using marangoni effect
EP1450182A2 (en) * 2003-01-17 2004-08-25 Schott Glas Substrate for UV-lithography and fabrication process therefor
US20040240817A1 (en) * 2003-05-29 2004-12-02 Hawtof Daniel W. Method of making a photonic crystal preform
WO2005024474A1 (en) * 2003-09-09 2005-03-17 Carl Zeiss Smt Ag Phase delay element and method for producing a phase delay element

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4611883A (en) * 1981-05-01 1986-09-16 Hughes Aircraft Company Two-dimensional optics element for correcting aberrations
WO2002032825A1 (en) * 2000-10-13 2002-04-25 The Regents Of The University Of California Surface contouring by controlled application of processing fluid using marangoni effect
EP1450182A2 (en) * 2003-01-17 2004-08-25 Schott Glas Substrate for UV-lithography and fabrication process therefor
US20040240817A1 (en) * 2003-05-29 2004-12-02 Hawtof Daniel W. Method of making a photonic crystal preform
WO2005024474A1 (en) * 2003-09-09 2005-03-17 Carl Zeiss Smt Ag Phase delay element and method for producing a phase delay element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009030124A1 (en) * 2009-06-24 2010-12-30 Carl Zeiss Sms Gmbh High-tensile optics has two optical elements, which are provided at distance from each other and are connected to unit in rigid manner

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