DE102004017799A1 - Temperature sensor and method for adjusting such - Google Patents

Temperature sensor and method for adjusting such Download PDF

Info

Publication number
DE102004017799A1
DE102004017799A1 DE200410017799 DE102004017799A DE102004017799A1 DE 102004017799 A1 DE102004017799 A1 DE 102004017799A1 DE 200410017799 DE200410017799 DE 200410017799 DE 102004017799 A DE102004017799 A DE 102004017799A DE 102004017799 A1 DE102004017799 A1 DE 102004017799A1
Authority
DE
Germany
Prior art keywords
temperature sensor
temperature
adjusting
base substrate
ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE200410017799
Other languages
German (de)
Inventor
Wolfgang Wittenhagen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EGO Elektro Geratebau GmbH
Original Assignee
EGO Elektro Geratebau GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EGO Elektro Geratebau GmbH filed Critical EGO Elektro Geratebau GmbH
Priority to DE200410017799 priority Critical patent/DE102004017799A1/en
Priority to PCT/EP2005/003559 priority patent/WO2005098382A1/en
Publication of DE102004017799A1 publication Critical patent/DE102004017799A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K15/00—Testing or calibrating of thermometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Thermistors And Varistors (AREA)

Abstract

Erfindungsgemäß ist ein Temperatursensor vorgesehen, dessen Grundsubstrat (10a, 10b, 10c; 110a, 110b, 110c) aus LTCC (low temperature cofired ceramic)-Keramik besteht. Dieser Temperatursensor weist mehrere Substratlagen (10a, 10b, 10c; 110a, 110b, 110c) auf, zwischen denen eine sensitive Schicht (12b, 12c) aus Platin mit temperaturabhängigem Widerstand angeordnet ist. Dadurch, dass diese Schicht (12b, 12c; 112b, 112c) vollständig vom Grundsubstrat (10a, 10b, 10c; 110a, 110b, 110c) umgeben ist, wird erreicht, dass der Temperatursensor sehr verschleißfest ist und auch bei sehr hohen Temperaturen oder anderweitig widrigen Umgebungseinflüssen zuverlässig und genau arbeitet.According to the invention, a temperature sensor is provided whose base substrate (10a, 10b, 10c, 110a, 110b, 110c) consists of LTCC (low-temperature cofired ceramic) ceramic. This temperature sensor has a plurality of substrate layers (10a, 10b, 10c, 110a, 110b, 110c), between which a sensitive layer (12b, 12c) of platinum with a temperature-dependent resistor is arranged. The fact that this layer (12b, 12c; 112b, 112c) is completely surrounded by the base substrate (10a, 10b, 10c; 110a, 110b, 110c) ensures that the temperature sensor is very wear-resistant and even at very high temperatures or otherwise adverse environmental conditions works reliably and accurately.

DE200410017799 2004-04-05 2004-04-05 Temperature sensor and method for adjusting such Withdrawn DE102004017799A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE200410017799 DE102004017799A1 (en) 2004-04-05 2004-04-05 Temperature sensor and method for adjusting such
PCT/EP2005/003559 WO2005098382A1 (en) 2004-04-05 2005-04-05 Temperature sensor and method for adjusting said type of temperature sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200410017799 DE102004017799A1 (en) 2004-04-05 2004-04-05 Temperature sensor and method for adjusting such

Publications (1)

Publication Number Publication Date
DE102004017799A1 true DE102004017799A1 (en) 2005-10-20

Family

ID=34962710

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200410017799 Withdrawn DE102004017799A1 (en) 2004-04-05 2004-04-05 Temperature sensor and method for adjusting such

Country Status (2)

Country Link
DE (1) DE102004017799A1 (en)
WO (1) WO2005098382A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005014106B4 (en) * 2005-03-22 2014-02-13 E.G.O. Elektro-Gerätebau GmbH Temperature sensor and method of manufacture

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0814452D0 (en) 2008-08-07 2008-09-10 Melexis Nv Laminated temperature sensor
CN113567828B (en) * 2021-06-15 2024-06-21 中国电子科技集团公司第十三研究所 Nondestructive failure detection method for multilayer low-temperature co-fired ceramic substrate

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4037135A1 (en) * 1990-11-22 1992-05-27 Friedrich Schwibbe ELECTRIC DRIVE
DE19812690C1 (en) * 1998-03-23 1999-11-18 Siemens Ag Support for a temperature-dependent resistor
WO2002016897A2 (en) * 2000-08-24 2002-02-28 Heetronix High temperature circuit structures

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2564845B2 (en) * 1987-09-04 1996-12-18 株式会社村田製作所 Platinum temperature sensor
JPH0833327B2 (en) * 1990-06-11 1996-03-29 株式会社村田製作所 Temperature sensor
DE19851966A1 (en) * 1998-11-11 2000-05-18 Bosch Gmbh Robert Ceramic layer system and method for producing a ceramic heating device
US6759940B2 (en) * 2002-01-10 2004-07-06 Lamina Ceramics, Inc. Temperature compensating device with integral sheet thermistors

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4037135A1 (en) * 1990-11-22 1992-05-27 Friedrich Schwibbe ELECTRIC DRIVE
DE19812690C1 (en) * 1998-03-23 1999-11-18 Siemens Ag Support for a temperature-dependent resistor
WO2002016897A2 (en) * 2000-08-24 2002-02-28 Heetronix High temperature circuit structures

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005014106B4 (en) * 2005-03-22 2014-02-13 E.G.O. Elektro-Gerätebau GmbH Temperature sensor and method of manufacture

Also Published As

Publication number Publication date
WO2005098382A1 (en) 2005-10-20

Similar Documents

Publication Publication Date Title
DE602006000233D1 (en) Substrate with a metallization adhesion layer
US7999211B2 (en) Heating element structure with isothermal and localized output
EP1868241A4 (en) Submount and method for manufacturing same
DE102004017799A1 (en) Temperature sensor and method for adjusting such
WO2004085064A3 (en) Methods and apparata for precisely dispensing microvolumes of fluids
TW200721327A (en) Semiconductor device and method of manufacturing the same
DE602004009763D1 (en) METHOD FOR THE PRODUCTION OF OPTICAL ELEMENTS WITH CHOLESTERIC LIQUID CRYSTALS
ATE450042T1 (en) VARIABLE RESISTANCE MEMORY COMPONENT AND PRODUCTION METHOD
DE112005000249T5 (en) Thin film gas sensor configuration
WO2008094208A3 (en) Protein kinase targeted therapeutics
TW200601881A (en) Method for manufacturing an organic electroluminescent element, system for manufacturing an organic electroluminescent element, and elemtronice equipment
TW200801867A (en) Micro-mechanical part made of insulating material and method of manufacturing the same
ES2453390B1 (en) COMPOSITION OF METAL INK FOR DECORATION OF NON-POROUS SUBSTRATES
ATE527326T1 (en) METHOD FOR TREATING SUBSTRATES
BRPI0510481A (en) nucleotide and polypeptide sequences encoded by them useful for modifying plant characteristics
DE4324040A1 (en) Mass flow meter, e.g. for air flow - has sensor element carrying heater and thermal sensors, and heater temp. controller.
ATE502129T1 (en) COMPONENT WITH A SUBSTRATE AND A PROTECTIVE LAYER
DK1144968T3 (en) Platinum temperature sensor and method for making it
EP1436607B1 (en) Ion-sensitive field effect transistor and a method for producing a transistor of this type
EP1345019B1 (en) Temperature sensor
ATE463837T1 (en) INLINE HEATING ELEMENT FOR USE IN SEMICONDUCTOR CHEMICAL WET MACHINING AND PRODUCTION PROCESS THEREOF
EP2304392A1 (en) Device for thermal mass flow measurement, particularly for measuring an air mass being supplied to an internal combustion engine
ATE360055T1 (en) DRYING METHOD AND SOLVENTS FOR CHOLESTERIC LIQUID CRYSTALS
EP3132144B1 (en) Sensor element, sensor module, measuring assembly and exhaust-gas re-circulation system comprising a sensor element of this type, and production method
DE102005051182A1 (en) Flow sensor unit cleaning method, involves arranging temperature measuring unit and heat unit on carrier unit, and heating temperature measuring unit with additional platinum thin-film resistor

Legal Events

Date Code Title Description
OM8 Search report available as to paragraph 43 lit. 1 sentence 1 patent law
8139 Disposal/non-payment of the annual fee