DE10194039D2 - Verfahren zur Umwandlung von Laserstrahlung in Röntgenstrahlung, insbesondere EUV-Strahlung, mittels eines von der Laserstrahlung erzeugten Plasmas - Google Patents

Verfahren zur Umwandlung von Laserstrahlung in Röntgenstrahlung, insbesondere EUV-Strahlung, mittels eines von der Laserstrahlung erzeugten Plasmas

Info

Publication number
DE10194039D2
DE10194039D2 DE10194039T DE10194039T DE10194039D2 DE 10194039 D2 DE10194039 D2 DE 10194039D2 DE 10194039 T DE10194039 T DE 10194039T DE 10194039 T DE10194039 T DE 10194039T DE 10194039 D2 DE10194039 D2 DE 10194039D2
Authority
DE
Germany
Prior art keywords
laser radiation
radiation
rays
plasma generated
converting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE10194039T
Other languages
English (en)
Inventor
Roland Sauerbrey
Thomas Feurer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Friedrich Schiller Universtaet Jena FSU
Original Assignee
Friedrich Schiller Universtaet Jena FSU
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Friedrich Schiller Universtaet Jena FSU filed Critical Friedrich Schiller Universtaet Jena FSU
Priority to DE10194039T priority Critical patent/DE10194039D2/de
Application granted granted Critical
Publication of DE10194039D2 publication Critical patent/DE10194039D2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70033—Production of exposure light, i.e. light sources by plasma extreme ultraviolet [EUV] sources

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • X-Ray Techniques (AREA)
DE10194039T 2000-09-20 2001-09-19 Verfahren zur Umwandlung von Laserstrahlung in Röntgenstrahlung, insbesondere EUV-Strahlung, mittels eines von der Laserstrahlung erzeugten Plasmas Expired - Fee Related DE10194039D2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE10194039T DE10194039D2 (de) 2000-09-20 2001-09-19 Verfahren zur Umwandlung von Laserstrahlung in Röntgenstrahlung, insbesondere EUV-Strahlung, mittels eines von der Laserstrahlung erzeugten Plasmas

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE2000147779 DE10047779A1 (de) 2000-09-20 2000-09-20 Verfahren zur Umwandlung von Laserstrahlung in Röntgenstrahlung, insbesondere EUV-Strahlung mittels eines von der Laserstrahlung erzeugten Plasmas
PCT/DE2001/003635 WO2002026003A1 (de) 2000-09-20 2001-09-19 Verfahren zur umwandlung von laserstrahlung in röntgenstrahlung, insbesondere euv-strahlung, mittels eines von der laserstrahlung erzeugten plasmas
DE10194039T DE10194039D2 (de) 2000-09-20 2001-09-19 Verfahren zur Umwandlung von Laserstrahlung in Röntgenstrahlung, insbesondere EUV-Strahlung, mittels eines von der Laserstrahlung erzeugten Plasmas

Publications (1)

Publication Number Publication Date
DE10194039D2 true DE10194039D2 (de) 2003-09-11

Family

ID=7657774

Family Applications (2)

Application Number Title Priority Date Filing Date
DE2000147779 Withdrawn DE10047779A1 (de) 2000-09-20 2000-09-20 Verfahren zur Umwandlung von Laserstrahlung in Röntgenstrahlung, insbesondere EUV-Strahlung mittels eines von der Laserstrahlung erzeugten Plasmas
DE10194039T Expired - Fee Related DE10194039D2 (de) 2000-09-20 2001-09-19 Verfahren zur Umwandlung von Laserstrahlung in Röntgenstrahlung, insbesondere EUV-Strahlung, mittels eines von der Laserstrahlung erzeugten Plasmas

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE2000147779 Withdrawn DE10047779A1 (de) 2000-09-20 2000-09-20 Verfahren zur Umwandlung von Laserstrahlung in Röntgenstrahlung, insbesondere EUV-Strahlung mittels eines von der Laserstrahlung erzeugten Plasmas

Country Status (4)

Country Link
EP (1) EP1410696A1 (de)
AU (1) AU2002210368A1 (de)
DE (2) DE10047779A1 (de)
WO (1) WO2002026003A1 (de)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4058486A (en) * 1972-12-29 1977-11-15 Battelle Memorial Institute Producing X-rays

Also Published As

Publication number Publication date
WO2002026003A1 (de) 2002-03-28
EP1410696A1 (de) 2004-04-21
AU2002210368A1 (en) 2002-04-02
DE10047779A1 (de) 2002-03-28

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Legal Events

Date Code Title Description
8139 Disposal/non-payment of the annual fee