DE10140533B4 - Method for micromachining a workpiece with laser radiation - Google Patents

Method for micromachining a workpiece with laser radiation Download PDF

Info

Publication number
DE10140533B4
DE10140533B4 DE10140533A DE10140533A DE10140533B4 DE 10140533 B4 DE10140533 B4 DE 10140533B4 DE 10140533 A DE10140533 A DE 10140533A DE 10140533 A DE10140533 A DE 10140533A DE 10140533 B4 DE10140533 B4 DE 10140533B4
Authority
DE
Germany
Prior art keywords
micromachining
workpiece
laser radiation
radiation
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE10140533A
Other languages
German (de)
Other versions
DE10140533A1 (en
Inventor
Henning Hanebuth
Guenter Kamlage
Eberhard Kull
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Continental Automotive GmbH
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE10140533A priority Critical patent/DE10140533B4/en
Priority to EP02769865A priority patent/EP1420917A1/en
Priority to PCT/DE2002/002958 priority patent/WO2003018248A1/en
Publication of DE10140533A1 publication Critical patent/DE10140533A1/en
Application granted granted Critical
Publication of DE10140533B4 publication Critical patent/DE10140533B4/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot
    • B23K26/0734—Shaping the laser spot into an annular shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/18—Working by laser beam, e.g. welding, cutting or boring using absorbing layers on the workpiece, e.g. for marking or protecting purposes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B23K26/389—Removing material by boring or cutting by boring of fluid openings, e.g. nozzles, jets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/02—Iron or ferrous alloys
    • B23K2103/04—Steel or steel alloys
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/02—Iron or ferrous alloys
    • B23K2103/04—Steel or steel alloys
    • B23K2103/05—Stainless steel
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/08—Non-ferrous metals or alloys
    • B23K2103/12—Copper or alloys thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
DE10140533A 2001-08-17 2001-08-17 Method for micromachining a workpiece with laser radiation Expired - Fee Related DE10140533B4 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE10140533A DE10140533B4 (en) 2001-08-17 2001-08-17 Method for micromachining a workpiece with laser radiation
EP02769865A EP1420917A1 (en) 2001-08-17 2002-08-12 Method and device for micromachining a workpiece by means of laser radiation
PCT/DE2002/002958 WO2003018248A1 (en) 2001-08-17 2002-08-12 Method and device for micromachining a workpiece by means of laser radiation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10140533A DE10140533B4 (en) 2001-08-17 2001-08-17 Method for micromachining a workpiece with laser radiation

Publications (2)

Publication Number Publication Date
DE10140533A1 DE10140533A1 (en) 2003-03-06
DE10140533B4 true DE10140533B4 (en) 2005-04-28

Family

ID=7695855

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10140533A Expired - Fee Related DE10140533B4 (en) 2001-08-17 2001-08-17 Method for micromachining a workpiece with laser radiation

Country Status (3)

Country Link
EP (1) EP1420917A1 (en)
DE (1) DE10140533B4 (en)
WO (1) WO2003018248A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007051408A1 (en) 2007-10-25 2009-05-28 Prelatec Gmbh Method for drilling holes of defined geometries by means of laser radiation
EP3296054A1 (en) 2016-09-19 2018-03-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method for producing a micro-machined workpiece by means of laser ablation

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112004000921D2 (en) * 2003-06-06 2006-08-17 Siemens Ag Method for producing through holes in metallic materials
DE10340931A1 (en) * 2003-09-05 2005-03-31 Herbert Walter Method and device for drilling the finest holes
JP2006150433A (en) * 2004-12-01 2006-06-15 Fanuc Ltd Laser beam machining apparatus
DE102007024700A1 (en) * 2007-05-25 2008-12-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method for processing materials with laser radiation and apparatus for carrying out the method
DE102007024701A1 (en) 2007-05-25 2008-11-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Material removal method and apparatus for carrying out the method
NL2009642C2 (en) * 2012-10-16 2014-04-22 Climate Invest B V METHOD FOR EDITING A SURFACE AND EDITED SURFACE.

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4224282A1 (en) * 1992-07-23 1994-01-27 Kristina Dipl Ing Schmidt Glass structuring, engraving or cutting removes glass - uses a laser beam with a given wavelength to give very small widths in min. working time
DE19744368A1 (en) * 1997-10-08 1999-05-20 Lzh Laserzentrum Hannover Ev Ultra-short pulse laser beam micro-engineering for drilling symmetrical recess
GB2349106A (en) * 1999-04-17 2000-10-25 Rolls Royce Plc Laser drilling

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5933091A (en) * 1982-08-18 1984-02-22 Hitachi Ltd Laser working method
US4948941A (en) * 1989-02-27 1990-08-14 Motorola, Inc. Method of laser drilling a substrate
GB8921040D0 (en) * 1989-09-16 1989-11-01 Rolls Royce Plc Laser barrier material
US5158645A (en) * 1991-09-03 1992-10-27 International Business Machines, Inc. Method of external circuitization of a circuit panel
AUPP681198A0 (en) * 1998-10-30 1998-11-19 Breville Pty Ltd Sandwich toaster
JP2000202667A (en) * 1999-01-19 2000-07-25 Toyota Motor Corp Method for machining fine hole of injector nozzle
AT408589B (en) * 1999-07-07 2002-01-25 Femtolasers Produktions Gmbh LASER DEVICE
AU7091500A (en) * 1999-08-30 2001-03-26 Board Of Regents University Of Nebraska Lincoln Three-dimensional electrical interconnects
US6552301B2 (en) * 2000-01-25 2003-04-22 Peter R. Herman Burst-ultrafast laser machining method
US6433303B1 (en) * 2000-03-31 2002-08-13 Matsushita Electric Industrial Co., Ltd. Method and apparatus using laser pulses to make an array of microcavity holes

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4224282A1 (en) * 1992-07-23 1994-01-27 Kristina Dipl Ing Schmidt Glass structuring, engraving or cutting removes glass - uses a laser beam with a given wavelength to give very small widths in min. working time
DE19744368A1 (en) * 1997-10-08 1999-05-20 Lzh Laserzentrum Hannover Ev Ultra-short pulse laser beam micro-engineering for drilling symmetrical recess
GB2349106A (en) * 1999-04-17 2000-10-25 Rolls Royce Plc Laser drilling

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
MOMMA,C., (u.a.): Präzise Mikro-Bearbeitung mit Femtosekunden-Laserpulsen. In: Laser und Opto- elektronik, 1997, Vol. 29, Nr. 3, S. 82-89 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007051408A1 (en) 2007-10-25 2009-05-28 Prelatec Gmbh Method for drilling holes of defined geometries by means of laser radiation
EP3296054A1 (en) 2016-09-19 2018-03-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method for producing a micro-machined workpiece by means of laser ablation

Also Published As

Publication number Publication date
EP1420917A1 (en) 2004-05-26
WO2003018248A1 (en) 2003-03-06
DE10140533A1 (en) 2003-03-06

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: CONTINENTAL AUTOMOTIVE GMBH, 30165 HANNOVER, DE

R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee