DE10110310B4 - Manipulator and method for operating a submicron manipulator - Google Patents

Abstract

The invention relates to a manipulator, as well as a method for operating such a manipulator, for manipulating any objects in the micro and / or submicron range, wherein attach to the element to be adjusted at least three manipulator rods, in its axial direction of each one actuator are acted upon, and that each manipulator rod of the shape is acted upon by the actuator in the axial direction, that a controlled deflection of the manipulator rod takes place. It is preferred here that each of the three manipulator rods is also rotatable, so that a six-axis manipulator is formed. The method for operating the manipulator is used for optical alignment and attachment of particular cuboid display elements on optical deflection elements for producing digital exposures, wherein a spatial adjustment of the display elements is provided by at least three displacement axes and at least one suitable bore on the display element and / or on the display element holder initially a liquid or pasty fastener is filled, then at least one associated position pin on the display element and / or the display element holder the respective matching hole is introduced, then the spatial adjustment of the display element is performed by the manipulator and then the liquid or pasteuse fastener so in the solid phase is transferred, that the adjusted display element remains substantially in its position. Advantage of the invention is a much more accurate, backlash, faster and in particular also relatively independent of the temperature adjustment of any objects in the micro and submicron range.

Description

The invention relates to a manipulator, and a method for operating such a manipulator according to the preamble of patent claim 1.

The present invention will be described below with reference to a preferred embodiment. This embodiment relates to the fact that a display element, in particular an LCD display element is attached to a holder in a particularly accurate manner, namely in the submicron range.

However, the invention is not limited to this application. Any objects in the micro and submicron range can be manipulated with such a manipulator and possibly also mounted.

The present embodiment and the description thereof is therefore by no means intended to limit the type and design, as well as for the operation of the manipulator.

In the prior art, such manipulations for small objects are accomplished by means of mutually movable carriage units.

It is known, in each case to design a carriage movable in a spatial axis, wherein, for example, a 3-slide system is provided for the movement of the manipulator in three different spatial axes. If this three-slide arrangement can still be rotated in one axis of rotation, a total of four spatial axes can thus be manipulated.

Likewise, there are carriage drives, which allow a total of six axis adjustments, so in each case the carriages are displaceable relative to each other in three spatial axes, while each carriage can be assigned an additional rotation.

This adjustment principle is hereinafter referred to as six-axis adjustment principle.

The EP 0 511 704 A1 describes a manipulator that works in the nanometer range. The accommodated in round columns electrolyte fluids are controlled by applying a control voltage spatially changing, with a total of 6 manipulator rods are present, which are bent even under the action of deformation work.

Accordingly, at least three manipulator rods are mutually perpendicular to the object to be adjusted and acted upon by an actuator in the axial direction, that a controlled deflection of the manipulator rods takes place, the manipulator rods are connected at its opposite end in each case with an actuating unit and from this at least in the axial Direction biased and are provided with an axial biasing force, wherein at least one of the manipulator rods deflects a perpendicular thereto effective manipulator rod.

However, there is the disadvantage that a wide and expansive arrangement for the object to be moved is necessary because the aligned for the movement drive of the article in all three spatial axes manipulator rods have a large footprint.

The invention is therefore based on this document based on the object, a manipulator for the manipulation of arbitrary objects in the micro and / or submicron range so educate that he occupies a smaller footprint with his manipulator rods.

The invention is preferably based on such a six-axis manipulator, and has set itself the goal to allow a smaller space requirement. To solve the problem, the invention is characterized by the technical teaching of claim 1.

An essential feature of the invention is that a reversal of direction or reversal of motion takes place, for example, because the lateral and bottom attacking manipulator rods are deflected and are therefore arranged axially parallel to the other manipulator rods and therefore require less space.

Thus, the advantage is achieved that all manipulators can be arranged axially parallel in a single housing and thus the manipulator block is designed substantially smaller. This makes it possible for the first time, an optical display of z. B. 1/2 inch to drive.

The invention thus proposes to divert at least the laterally projecting manipulator rods so that they lie axially parallel to the other.

It is preferred if a total of at least three manipulator rods attach to the object to be adjusted, which are acted upon in its axial direction by one actuator, and that each manipulator rod is acted upon by the actuator in the axial direction, that a controlled deflection of the manipulator rod takes place.

Relatively rigid rods have been used which firmly engage at one end on the object to be adjusted or an intermediate gripper and which are each connected at their opposite end to an actuator, which actuator biases the manipulator rod at least in the axial direction.

Thus, a total of six translational movements in different axes and spatial directions are transmitted to the element to be adjusted, which thus freely tiltable in space, is rotatable and movable.

However, the invention is not limited to the arrangement of a total of six manipulator rods which engage at mutual distance and in different spatial directions of the element to be adjusted.

In another embodiment of the invention, it may be provided that the number of manipulator rods is substantially reduced and that each manipulator rod is still assigned a rotational movement in addition to its axial longitudinal adjustment.

A rotational movement can thus be exerted directly by the actuator, which only serves in the first embodiment, the purely translatory actuating movement, while in the second embodiment, this actuator can perform both a translational longitudinal movement and in addition a rotational movement.

In the last-mentioned embodiment, in which the translational actuating unit is additionally assigned a rotational movement, six manipulator rods are now provided instead of the aforementioned three.

In the following, the invention will be described with reference to an embodiment, which refers to the fact that an LCD display element is attached by means of a manipulator to an optical deflector and the attachment is fixed in such a way that it remains invariable in the adjusted state.

In particular, the invention will be described with reference to an exemplary embodiment which relates to a total of three such display elements being mounted on such an optical deflection element (eg a color subcube, a penta prism or in general a prism).

In the WO 96/22658 (Philips) describes such a penta prism, which works with LCD display elements that must be mounted with high precision on the different surfaces of this penta prism.

So far, this high-accuracy assembly has not succeeded sufficiently, so that there were adverse optical color fringes, which are avoided in the method according to the present invention.

The invention thus relates not only to the formation of a manipulator for mounting such display elements on such an optical deflecting element, but also also to a method with which it is possible to control the manipulator, in particular the actuators so that with certainty optical distortions, in particular optical color fringes are avoided.

As a result, the adjustment and calibration times are significantly reduced.

The invention relates to a device and a method for optical alignment and attachment of display elements on optical deflection elements for the production of digital projectors or generally for digital exposure. In the projection of color images by means of R (red), G (green) and B (blue) cells in the form of transmitted light LCDs, reflective LCDs, LCOS (Liquid Crystal on Silicon) and DMDs (digital micromirror). Devices; registered TM trade mark of the company Texas Instruments) must be exactly adjusted and fixed on the optical deflection elements or color splitter cubes, such as prisms, the penta-prism and the like elements relative to the light sources and various lenses.

The apparatus and method for optical alignment is realized by a six-axis manipulation linkage, wherein each linkage is coupled to a job unit. The manipulation linkage are dimensioned such that play and tensile movements on the respective coupled points on the display element grippers can be exercised and by a suitable choice of linkage length and linkage diameter, a spatial adjustment about three displacement axes and three axes of rotation is possible and the Linkage allow lateral deflections without play.

Furthermore, a method for adhesive bonding of typically four thin position pins in correspondingly large holes in the four corners of the display element holder is carried out such that a suitable adhesive is applied in advance in the holes and after positioning and adjusting the display elements to the optical deflection by means of UV Light quickly cured and thus permanently attached. In particular, thermal expansion differences and mechanically induced smallest displacements can be compensated for without damaging the connected elements and without maladjustment. In addition to the high precision and freedom from errors, an extremely short cycle time is required for assembly, thus achieving high efficiency in production.

The method for controlling the manipulator linkage is described below:
According to the display elements in display holders with adhesive holes in the outer region, usually the four corners, guided in a display element gripper to the optical deflector and then computer controlled by means of a backlash six-axis Manipulatoinsgestänges and using a CCD element 4 with optical units with extremely high resolution set to given geometric features.

A particular advantage of the device according to the invention is that with relatively thin manipulator rods of 1.5 mm diameter, a deflection of about 1 mm is achieved (by driving the corresponding actuator) and that in this case a relatively small mass is moved, so that a backlash-free adjustment of is given to be set element, in particular also by the fact that the manipulator rods are biased each spring-loaded against the respective actuators.

Important in the present invention is therefore that a defined deflection of individual manipulator rods takes place.

It is understandable if attach to the object to be adjusted in different spatial axes, the rigid manipulator rods and only a single manipulator rod is biased in its longitudinal axis, that then the object to be adjusted with a corresponding biasing force tilts or is deflected so that the rest, not Involuntarily bend manipulator bars that have not been manipulated. So it comes to a bending in the sense of a bending rod, the other actuators not even have to be acted upon by a force.

The length of the rods is in this case chosen so large with respect to the adjustment of the respective actuating unit that the length reduction of the rod in the deflection is practically negligible.

In the following the invention will be explained in more detail with reference to drawings, which represent only one embodiment.

Show it:

1 Fig. 1 schematically illustrates an exemplary embodiment of a six-axis manipulator linkage;

2 : schematizes the bending of 2 manipulator bars upon displacement of the display element gripper;

3 : the assembly of 3 display elements on an optical deflection element;

4 : an enlarged view after 3 with representation of the adhesive fixation;

5 : The top view of a manipulator according to the invention;

6 : the rotated 90 degrees side view of the manipulator after 5 ;

7 : schematized the representation of the control method for controlling the manipulator linkage.

In 1 is shown as an LCD display element 1 in a display element holder 3 is fixed, as a frame of this display element 1 encircled and attached.

In this indicator holder 3 For example, the supply cable for the electrical control of the display element 1 contain.

Part of the manipulator is now a so-called display element gripper 2 in which the display element holder 3 with the display element mounted therein 1 is included.

It is important that the display element gripper 2 is rotatable and displaceable in any spatial direction by means of the six-axis manipulator linkage, in order to consequently the display element holder 3 with the display element therein 1 to align in any spatial axis and according to the 3 and 4 on an optical deflector 8th to fix.

In the 1 is specified with the specification of the axes XYZ, that is this display element 1 is formed displaceable and rotatable in any desired manner in the 3 spatial axes.

More specifically, therefore, the display element gripper 2 adjusted in these spatial axes, wherein according to the drawing a total of 6 manipulation rods 4 which are fixed to their respective end on the display element gripper 2 attack.

The attachment is a releasable clamp connection that is maintained during operation of the manipulator.

For displacement in any spatial axis and for rotation of the display element gripper 2 each serve the respective manipulator rod 4 associated actuators 5a - 5f ,

The manipulator rods 4a . 4b are aligned parallel and spaced apart in the Z axis while the manipulator bars 4d . 4e and 4f in the X-axis are aligned parallel to each other at different distances, while the manipulator rod 4c aligned in the Y-axis.

As stated, seat at the free rear end of each manipulator rod 4a - 4f 1 setting unit each 5a - 5f at.

The actuator will be described below with reference to 5 and 6 explained in more detail. It may be sufficient to explain the schematic drawing that the actuator 5 is capable of adjusting in the directions of the arrow 11 perform. In particular, this adjusting movement is effected by a piezoelectric force element which has an adjustment path in the directions of the arrows 11 to perform a range of motion of, for example, 1 mm.

Based on 2 the adjustment principle is explained in more detail.

For example, the manipulator rod 4c in its longitudinal direction from the actuator 5c acted upon (in the arrow direction 11 to the right) become the manipulator bars 4a and 4b bent from their unobstructed basic position and get into the bent position 4a and 4b ,

The shortening of length associated with the manipulator rods 4a and 4b remains unconsidered.

The one end of each manipulator rod is here in a receptacle 6 on the display element gripper to be adjusted 2 admitted.

Of course, all other manipulator rods, in particular the manipulator rods, also bend 4d . 4e and 4f when the manipulator rod 4c is adjusted in its longitudinal direction.

The nature and extent of the adjustment will be determined by the controller 7 explained later. It may therefore be helpful in explaining the 3 and 4 suffice that it is determined that a total of 3 such display elements 1a . 1b , and 1c precisely aligned and positionally correct on the outer surfaces of an optical deflection element 8th be attached.

How this positional positioning is done, will be explained later.

It is important, however, if positional positioning is achieved, that this positioning is frozen, so to speak, over a hardenable adhesive.

For this purpose, the following mechanical elements are required:
The optical deflector 8th For example, a color divider cube has a frame at its outer edges 12 on, on the outwardly directed position pins 7 are arranged.

The frame 12 So it's stuck with the position pins 7 connected and firmly embraces the optical deflector 8th ,

The respective position pins 7 engage through associated holes in the area of the display element holder 3 through, like this in 3 is shown schematically.

The 4 shows an enlarged view of the corner area 3 where it can be seen that the position pin 7 firmly on the display element holder 3 is attached and through an adhesive hole 9 engages in the display element holder 3 is trained.

By the term "adhesive bore" is meant that it is an outward stamping, which forms a radially outwardly directed collar, so that this bore with the collar formed thereon very easily by an adhesive 10 can be filled, which is held there due to capillary action.

The method of positioning the respective display element holders 3 with the display elements located thereon 1 consists in the fact that one first controls the manipulator linkage so that they are correct and just on the optical deflection 8th be positioned so that each one display element holder 3 , namely 3a . 3b and 3c exactly on the outer circumference of the optical deflection element 8th is positioned and here the respective position pins 7 through the associated adhesive holes 9 in the respective display element holder 3a . 3b . 3c reach through.

It is assumed that the adhesive holes 9 already with the glue 10 are filled. So as soon as this correct and accurate adjustment has been achieved, the adhesive becomes 10 hardened.

This is preferably carried out under the action of UV light. However, other curing mechanisms may be used, such as heat or microwaves. Of course, it can also be used another fixing element, such as a hardening solder, which was previously formed correspondingly liquid and the rest may also be a laser welding or ultrasonic welding of the position pin 7 in the glue hole 9 respectively.

From the 5 and 6 arise further features of the manipulator according to the invention.

This show the 5 and 6 not just an alignment of the manipulation bars 4a - 4f in a straight line, but in one embodiment 5 and 6 is also shown a deflection, with which it is possible by a straight-aligned manipulation rod 4a a perpendicular thereto manipulating rod 24 deflect.

So it is next to the longitudinal movement of manipulation rods 4 also described an embodiment in which it is possible from a longitudinal movement of a manipulation rod 4a a perpendicular thereto movement of a manipulation rod connected thereto 24 to create.

This is done with a Federumlenkeinrichtung 23 , which are described in detail below with reference to 5 and 6 is explained.

If this spring deflection 23 deleted (as with the units 5b and 5c the case is), then this is sufficient, the corresponding manipulation rods 4b and 4c to drive in a straight line.

Based on the actuator 5a However, it explains that the longitudinal movement of the manipulation rod 4a in a corresponding transverse movement on the manipulator rod 24 is implemented.

Based on 4 is still added that the adhesive holes 9 are designed so that a lateral evasion (movement play 13 ) is possible as long as the adhesive 10 not yet cured.

That is, the glue 10 must in the uncured state sufficient movement play 13 the position pins 7 in the respective display element holder 3 enable.

The actuator 5a has at its end a hand-operated rotary spindle 14 on, with which this is also manually operated adjustable.

At its front end are the actuators 5a . 5b and 5c in a holder 15 held in which the actuator head 16 is arranged.

The holder 15 in turn is on a U-shaped profiled manipulator frame 18 attached.

The respective control head 16 The respective actuating unit thus engages in an associated recess in the manipulator frame 18 and carries a ball at its front free end 17 firmly attached to the front end of a sleeve 19 is connected, slidably in the U-shaped manipulator frame 18 is arranged.

The important thing is that the sleeve 19 spring loaded against the ball 17 is biased and a corresponding actuating movement of the actuator 5a counteracts. In this way, therefore, a play-free adjustment of the manipulator rod 4a allows.

For play-free displacement guidance of the sleeve 19 is a spring leaf 34 provided, which at its upper end in position 35 is clamped frame-fixed and which with its lower end (spring end 37 ) the sleeve 19 carries, with the aim that the sleeve does not hit in their mounting hole in the frame.

So it is a spring-loaded, free-swinging holder of the end of the sleeve 19 given so that the spring in the adjustment directions 36 can dodge.

The other end of the sleeve 19 (the right end in 5 ) is free in a receiving bore in the right frame leg of the manipulator frame 18 displaceable.

This end is fixed to one end of the manipulator rod 4a connected, the other end fixed to a receiving bore 29 on a spring deflection device 23 attaches.

It is now below a backlash-free bias of the sleeve 19 and the manipulation rod 4a described in the longitudinal direction. This is done by the spring 20 with her one end of the spring 21 at the manipulation bar 4a is fixed, with the spring end 21 ' represents the preloaded functional position.

The other end of the spring 22 the feather 20 in this case accesses the frame 18 at.

This is the entire manipulator rod 4a spring preloaded against the ball 17 pressed.

The spring deflection device 23 now has the task of adjusting the manipulator rod 4a in the direction of the arrow 32 implement in a perpendicular thereto adjusting movement 33 , The purpose of this is the manipulator rod 24 placed in one opposite the manipulator rod 4a vertical position in the Federumlenkeinrichtung 23 is clamped.

The spring deflection device 23 consists of two perpendicularly arranged springs 25 . 26 . 27 , where the springs, 26 . 27 each form part of a coherent spring.

It is therefore a cross spring, wherein the spring ends of this cross spring respectively with associated screws on the frame part 31 of the manipulator frame 18 are attached.

The respective other ends and mutually perpendicular ends are on the Federumlenkeinrichtung 23 attached.

So it is a free-swinging part, which only on the genannnten springs 25 - 27 on the frame part 31 is attached and at one end the end of the manipulator rod 4a attacks, while at the end perpendicular to the one end of the manipulator rod 24 attacks, the other end fixed to the display element holder to be adjusted 3 connected is.

The holder 28 is part of the spring deflection device 23 , these being over a white space 30 floating in front of the frame 18 is arranged.

The perpendicular to each other arranged springs 25 - 27 So should the Federumlenkeinrichtung 23 floating free of play in front of the frame part 31 hold and a defined pivot point for the Federumlenkeinrichtung 23 form.

These feathers 25 - 27 thus provide an elastic deformation of the springs during the deflection of the manipulator rod 4a in the direction of the arrow 23 so that the spring deflecting device 23 in the direction of the arrow 23 swings around and the manipulator rod 24 in the direction of the arrow 33 shifts.

The other units 5b and 5c have the said Federumlenkeinrichtung 23 not up. Here is immediately mentioned play-free preloading of the manipulator rods 4b and 4c provided, which also fixed to the display element holder 3 are connected.

The arrangement of Federumlenkeinrichtung 23 So it's out of space, to allow the actuators 5a - 5c can be arranged in a plane and parallel to each other.

Based on 7 Now, the method for controlling and controlling the driving movement of the manipulator linkage after the 1 - 5 explained in more detail.

Important here is that in front of the display element 1 a light source 38 is arranged, which preferably directs a diffused light beam in the transmitted light mode on the display element, which transmits a certain amount of light.

The display element 1 becomes in relation to the lens 40 focussed.

That from the light source 38 emitted light beam thus passes through the display element 1 through and there meets the matrix-like pixels arranged, in a conventional manner, the transmitted light window of the display element is limited by conductor tracks.

After the passage of the light beam through the display element 1 this passes through the optical deflection element 8th , which is irradiated accordingly. The optical beam 39 that the deflector 8th interspersed, enters the lens 40 one, and will be on one level 42 sharply depicted.

In this level 42 are now a series of CCD elements 43 - 46 arranged, each CCD element consists of a CCD matrix.

It is based on the schematic drawing in 7 just shown how the vertices of the lens 40 leaving beam 47 in the plane 42 be imaged.

Here's the level 42 at a distance 41 arranged in front of the exit plane of the lens.

Every CCD element 43 - 46 has a plurality of individual elements, for example 2 million picture elements, so that the screen image derived therefrom now has a total of approximately 1000 times magnification of an LCD pixel of the display element 1 compared to a corresponding visible on the screen pixel on the CCD element 43 - 46 maps.

As a result, a 1000-fold more sensitive image of a pixel on the display element 1 on a plane 42 causes.

This 1000x magnification is now used for the play-free control of the manipulator linkage.

To carry out the regulation, the following is now carried out:
First, the green element is focused and set up, that is, it is set up in the X, Y plane and focused in a Z direction.

The term "green" element is understood to mean a display element 1 , which is responsible only for the picture of the green color.

For reasons of simplification, is in 7 not shown that at the edges perpendicular thereto to the display element 1 even more display elements 1a . 1b are arranged, one of which is intended for the representation of the red color and the other opposite to the image of the blue color.

All provided 3 display elements 1a . 1b and 1c are therefore perpendicular to each other on different surfaces of the deflection 8th arranged.

For the sake of simplicity, however, only a single display element 1 although the other display elements function in the same way as the green color display element.

It will be a black and white image of the individual pixels of the display element 1 in the plane 42 generated. Reference markings are provided on the screen used for this purpose, so that it is clearly evident if a picture element arranged on the frame side is located on the display element 1 the reference mark does not hit the screen. It is then then the perpendicular thereto and on the vertical surface of the deflection 8th focussiert applying the red image responsible display element and then the pixel of the red display element is converged to the pixel of the green display element. This is done by the appropriate influence of the manipulation linkage.

It then becomes the display element responsible for mapping the blue color 1c focused and with the other pixels of the green display element 1a and the red indicator 1b also converged.

This is done fully automatically via a corresponding digital program, so that the manipulator linkage is thus controlled fully automatically by the deviation of the reference mark on the screen and by the automatic recognition of the red, green and blue pixels and their difference from the reference mark.

More specifically, it depends on the difference between the individual pixels of the different colors, and the difference between the pixels green-red and green-blue is measured.

Due to these deviations, the manipulator is controlled.

The aforementioned deviation between the reference mark and the pixel responsible for the green image is only compensated for the first time.

With the alignment of the responsible for the green image display element and its pixels on the reference mark so a rough adjustment is achieved.

Once this coarse adjustment has been made by appropriate control of the manipulator linkage, the mutual distance of the pixels of red and blue is manipulated so that the difference disappears.

The pixels are thus converged to each other.

More specifically, the method is performed as follows: G (green) - Focus focus - That's the target position R (red) - Without G (green) light - Coverage of grids / pixels / vertices B (blue) - Like red SIS Software Imaging System

Important in the entire adjustment is so that you are working with a manipulator in which only very thin manipulator rods are bent so that therefore the respective longitudinal adjustment on the manipulator rod causes a bending of the other arranged at an angle thereto manipulator rods.

Incidentally, it is not necessary to solve that according to 1 the manipulator rods are arranged exactly at right angles to each other. They can also be at an angle to each other, that is, take an angle of more or less than 90 degrees to each other, which only has an influence on the software program that the actuators 5 controls.

The term "actuator" is also widely understood. Although it has been described in the context of the present invention, a piezoelectric longitudinal adjustment; however, any other longitudinally adjustable units may be used, such as mechanical screw spindles, capacitive adjustments, inductive adjustments, and the like.

Likewise, temperature-dependent actuators may be used in which the actuating movement is achieved by a change in the temperature in the actuator.

The invention thus relates in summary to a manipulator, as well as a method for operating such a manipulator, for manipulating any objects in the micro and / or submicron range, wherein attach to the element to be adjusted at least three manipulator rods, in their axial direction of each an actuating unit are acted upon, and that each manipulator rod of the shape is acted upon by the actuator in the axial direction, that a controlled deflection of the manipulator rod takes place. It is preferred here that each of the three manipulator rods is also rotatable, so that a six-axis manipulator is formed. The method for operating the manipulator is used for optical alignment and attachment of particular cuboid display elements on optical deflection elements for producing digital exposures, wherein a spatial adjustment of the display elements is provided by at least three displacement axes and at least one suitable bore on the display element and / or on the display element holder initially a liquid or pasty fastener is filled, then at least one associated position pin on the display element and / or the display element holder the respective matching hole is introduced, then the spatial adjustment of the display element is performed by the manipulator and then the liquid or pasteuse fastener so in the solid phase is transferred, that the adjusted display element remains substantially in its position.

Advantage of the invention is a much more accurate, backlash, faster and in particular also relatively independent of the temperature adjustment of any objects in the micro and submicron range.

LIST OF REFERENCE NUMBERS

1

display element

2

Display element gripper

3

Display element holder 3a . 3b . 3c

4

manipulation rod 4a - 4f

5

actuator 5a - 5f

6

admission

7

positioning pin

8th

Optical deflector (color splitter cube, penta prism, prism)

9

adhesive hole

10

adhesive

11

arrow

12

frame

13

motion

14

spindle

15

bracket

16

Deputy head

17

Bullet

18

Manipulator frame

19

shell

20

feather

21

spring end 21 '

22

spring end

23

Federumlenkeinrichung

24

manipulator rod

25

feather

26

partial spring

27

partial spring

28

holder

29

location hole

30

whitespace

31

frame part

32

adjustment

33

adjustment

34

spring leaf

35

position

36

adjustment

37

spring end

38

light source

39

Optical beam

40

lens

41

distance

42

level

43

CCD

44

CCD

45

CCD element

46

CCD element

47

beam

Claims (21)

Manipulator for the manipulation of any objects in the micro and / or submicron range, wherein on the object to be adjusted ( 1 ) at least three manipulator rods ( 4 ) are arranged perpendicular to each other and in such a way by an actuator ( 5 ) in the axial direction that a controlled deflection of the manipulator rods ( 4 ), wherein the manipulator rods ( 4 ) with its opposite end in each case with an actuating unit ( 5 ) and are biased by this at least in the axial direction and provided with an axial biasing force, characterized in that at least one of the manipulator rods ( 4a ) a perpendicular thereto manipulator rod ( 24 ) deflects by a longitudinal movement of the manipulator rod ( 4a ) a perpendicular thereto movement via a Federumlenkeinrichtung ( 23 ) on the manipulator rod ( 24 ) he follows Manipulator according to claim 1, characterized in that the manipulator rods ( 4 ) are formed substantially axially rigid, but allow lateral bending in the radial direction backlash and elastic. Manipulator according to one of claims 1 or 2, characterized in that the manipulator rods ( 4 ) firmly with one end directly on the object to be adjusted ( 1 ) or at least one intermediate display element gripper ( 2 attack). Manipulator according to one of claims 1 to 3, characterized in that at least one of the manipulator rods ( 4 ) rotatable about the actuator ( 5 ) is trained. Manipulator according to one of claims 1 to 3, characterized in that at least one additional manipulator rod is provided, which is rotatably formed via an additional adjusting unit. Manipulator stand according to claim 5, characterized in that the spring deflecting device ( 23 ) of two perpendicularly arranged springs ( 25 . 26 . 27 ), which are part of a cross spring. Manipulator according to claim 6, characterized in that the spring ends of the cross spring with associated screws on a frame part ( 31 ) of the manipulator frame ( 18 ) are attached. Manipulator according to claim 7, characterized in that the frame part ( 31 ) of the manipulator frame ( 18 ) is designed as a freely oscillating part, that only via the cross spring ( 25 - 27 ) on the frame part ( 31 ) is attached and at one end the end of the manipulator rod ( 24 ) attacks, the other end fixed to the display element holder ( 3 ) connected is. Manipulator according to one of claims 5 to 8, characterized in that a holder ( 28 ) Part of the spring deflection device ( 23 ), which have a white space ( 30 ) is arranged freely suspended in front of the frame. Manipulator according to one of claims 6 to 7, characterized in that the mutually perpendicular springs ( 25 - 27 ) the spring deflection device ( 23 ) floating free of play in front of the frame part ( 31 ) and a defined pivot point for the Federumlenkeinrichtung ( 23 ) form. Manipulator according to claim 6, characterized in that the springs ( 25 - 27 ) of the cross spring an elastic deformation during deflection of the manipulator rod ( 4a ) (in the direction of the arrow 23 ), wherein the Federumlenkeinrichtung pivots and the manipulation rod ( 24 ) (in the direction of the arrow 33 ) shifts. Method for operating a manipulator, according to one of Claims 1 to 11, the method for the optical alignment and attachment of in particular cuboid display elements ( 1 ) on optical deflection elements ( 8th ) for the production of digital exposures, characterized in that a spatial adjustment of the display elements ( 1 ) is provided in at least three displacement axes. Method for operating a manipulator, according to claim 12, characterized in that a spatial adjustment of the display elements ( 1 ) is additionally provided by at least three axes of rotation. Method for operating a manipulator, according to one of claims 12 or 13, characterized in that the optical alignment and mounting of the display elements ( 1 ) is performed such that at least one suitable bore ( 9 ) on the display element ( 1 ) and / or on the display element holder ( 3 ) first with a liquid or pasty fastening means ( 10 ), then at least one associated position pin ( 7 ) on the display element ( 1 ) and / or on the display element holder ( 3 ) the respective matching bore ( 9 ) is introduced, then the spatial adjustment of the display element ( 1 ) is carried out by means of the manipulator and then the liquid or pasteuse fastening means ( 10 ) is converted into the solid phase such that the adjusted display element ( 1 ) remains substantially in its spatial position. Method for operating a manipulator according to claim 14, characterized in that at least two position pins ( 7 ) and at least two associated holes ( 9 ) available. Method for operating a manipulator according to claim 15, characterized in that at least four position pins ( 7 ) and at least four associated holes ( 9 ) are present, which in the respective four corners of the cuboid display element ( 1 ) or the display element holder ( 3 ) are arranged. Method for operating a manipulator according to one of Claims 14 to 16, characterized in that the position pins ( 7 ) on the display element ( 1 ) and the associated holes ( 9 ) on the display element holder ( 3 ) are provided. Method for operating a manipulator according to one of Claims 14 to 17, characterized in that the liquid or pasty fastening means ( 10 ) includes an adhesive and / or plastic and / or at least one low melting point metal such as mercury or tin. Method for operating a manipulator according to one of Claims 14 to 18, characterized in that the liquid or pasty fastening means ( 10 ) is cured by means of UV light or other high-energy radiation, heat, cold or chemically. Method for operating a manipulator according to one of Claims 14 to 19, characterized in that the range of axial displacements of the manipulator rods ( 4 ) in the mm range and is between about 0 to 5 mm. Method for operating a manipulator according to one of Claims 14 to 20, characterized in that the range of rotations of the manipulator rods ( 4 ) in the angular minute range and is between about 0 to 300 minutes of arc.

Images