DE10024701A1 - Piezo actuator - Google Patents

Piezo actuator

Info

Publication number
DE10024701A1
DE10024701A1 DE2000124701 DE10024701A DE10024701A1 DE 10024701 A1 DE10024701 A1 DE 10024701A1 DE 2000124701 DE2000124701 DE 2000124701 DE 10024701 A DE10024701 A DE 10024701A DE 10024701 A1 DE10024701 A1 DE 10024701A1
Authority
DE
Germany
Prior art keywords
piezo actuator
piezo
layers
arranged
characterized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE2000124701
Other languages
German (de)
Inventor
Thomas Biesinger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE2000124701 priority Critical patent/DE10024701A1/en
Publication of DE10024701A1 publication Critical patent/DE10024701A1/en
Ceased legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/08Piezo-electric or electrostrictive devices
    • H01L41/083Piezo-electric or electrostrictive devices having a stacked or multilayer structure
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/02Details
    • H01L41/04Details of piezo-electric or electrostrictive devices
    • H01L41/047Electrodes or electrical connection arrangements
    • H01L41/0472Connection electrodes of multilayer piezo-electric or electrostrictive devices, e.g. external electrodes
    • H01L41/0474Connection electrodes of multilayer piezo-electric or electrostrictive devices, e.g. external electrodes embedded within piezo-electric or electrostrictive material, e.g. via connections
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/08Piezo-electric or electrostrictive devices
    • H01L41/083Piezo-electric or electrostrictive devices having a stacked or multilayer structure
    • H01L41/0833Piezo-electric or electrostrictive devices having a stacked or multilayer structure with non-rectangular cross-section orthogonal to the stacking direction, e.g. polygonal, circular

Abstract

A piezo actuator, for example for actuating a mechanical component, is proposed, in which the piezo actuator has a multilayer structure of piezo layers (2), internal electrodes (10, 11) arranged between the layers, which can be acted upon by an electrical voltage and with mutual contact the internal electrodes (10, 11) are provided by means of external connection contacts (3, 4) via which an electrical voltage can be supplied. The inner electrodes (10, 11), which are contacted together, are electrically connected to one another via plated-through holes (5, 6) in the piezo layers (2), which are mutually insulated from the other inner electrodes (10, 11).

Description

State of the art

The invention relates to a piezo actuator, for example for actuating a mechanical component like a valve or the like, according to the generic characteristics of Main claim.

It is generally known that using the so-called called piezo effect a piezo element made of one material with a suitable crystal structure can. When an external electrical voltage is applied follows a mechanical reaction of the piezo element, which in Dependence on the crystal structure and the plant range of electrical tension a push or pull in represents a predeterminable direction.

Since the required electrical field strengths for Betä the piezo actuator lies in the range of several kV / mm conditions and usually moderate electrical voltages  Control is desired, this is done Piezo actuator here in several layers from one another stacked metallized piezoceramics to a so-called Multilayer actuator. For this purpose, between the Layers of internal electrodes available, the z. B. with a Printing processes are applied and it's outside electrodes available, through which the electrical voltage is created. Because of this extremely fast and accurate Adjustable stroke effect can be used to build such piezo actuators of actuators, for example for driving switching valves in fuel injection systems in motor vehicles conditions are provided. Here the voltage or Charge-controlled deflection of the piezo actuator to the position used a control valve, which in turn the stroke regulates a nozzle needle.

EP 0 844 678 A1, for example, is one such Piezo actuator known, in which two, each opposite attached sides of the piezo actuator block, outside electrodes of different polarity are present. With a contact that changes from layer to layer tion of the internal electrodes with the lateral external electrodes The respective contacting takes place in the area in which there is no interior in the adjacent layer electrode is brought up to the outside.

Advantages of the invention

The generic actuator described above is with a multi-layer structure of piezo layers and in one Piezoelectrically active area between the layers arranged internal electrodes and with one of Layer-to-layer contacting of the inside electrodes, for the application of an electrical Tension, provided. According to the characteristic features  are advantageously associated with each other contacted internal electrodes alternately to the each other internal electrodes arranged insulated in Nine vias, e.g. B. in a so-called via technology, electrically interconnected in the piezo layers connected. The inner electrodes are except for the outer Outer connection contacts covered by sintering.

It is particularly advantageous if the connection contacts for supplying the electrical voltage to the forehead sides of the piezo actuator are arranged, the An final contacts are preferably metallized surfaces that be contacted by means of terminals. Through the front Ge contact can be made with different actuator shapes, e.g. B. cuboid, any polygon, cylindrical or hollow cylindrical, the installation space can be minimized. An even Tension force required when installing the piezo actuator tors in an aggregate can be used simultaneously as a contact animal power can be used.

It is also advantageous if the layer structure areas at the end one or more piezoelect risch neutral foils are arranged, the outer Connection contacts are attached to these foils. There through that the connectors are not in the active area the piezo actuator are arranged, no mechani occur tensions caused by the actuator stroke in the connection con clock up.

In order to mechanically weaken the piezo actuator by e through-holes that may be superimposed to the right can reduce the vias on simple Way in layer build-up from layer to layer on one Pitch circle diameter offset from each other who the.

These and other features of preferred training gene of the invention go out not only from the claims  the description and the drawings, the individual characteristics individually or for more ren in the form of sub-combinations in the execution form of the invention and realized in other fields his and advantageous as well as protectable execution represent representations for which protection is claimed here becomes.

drawing

Embodiments of the piezo actuator according to the invention are explained using the drawing. Show it:

Figure 1 is a view of a cylindrical piezo actuator with a multilayer structure of layers of Piezokera mic.

Fig. 2 is a view of a cuboid piezo actuator with a multi-layer structure of layers from Piezokera mik . Fig. 3 is a view of a hollow cylindrical Piezoak gate with a multi-layer structure of layers of piezo ceramic and

Fig. 4 shows a section through a piezo actuator with egg ner detailed view of internal electrodes and through contacts in the piezo layers.

Description of the embodiments

In Fig. 1, a piezo actuator 1 is shown, which is constructed in a manner known per se from layers 2 of a piezoelectric or electrostrictive ceramic material with a suitable crystal structure, so that, for example, using the so-called piezo effect when an external electrical voltage is applied to here in the tail between the layers 2 not recognizable internal electrical a mechanical reaction of the piezo actuator 1 takes place. The electrical voltage is applied to the end contacts 3 and 4 and passed through only matically recognizable plated-through holes 5 and 6 to the internal electrodes.

When creating an electrical field on the indoor electric z. B. a change in length in the range of about 0.1 -0.3% of the length of the piezo actuator 1 . The field strengths required for this must be several kV / mm, so that in order to use moderate control voltages of approx. 100-300 V, the so-called multilayer structure with the alternating ceramic and inner electrode layers was selected.

From Fig. 2, an alternative design of a Piezoak gate 7 can be removed as a cuboid, which accordingly has adapted piezo layers 2 and contacts 3 and 4 . Fig. 3 shows a further variant of a Pie zoaktors 8 with a hollow cylindrical structure.

FIG. 4 shows an enlarged section through one of the piezo actuators 1 , 7 or 8 . For example, on the left side of the connection contact 3 for the positive pole of the voltage via the via 5 through the piezoelectric layer 2 is connected to an inner electrode 10 . With further plated-through holes 5 , an electrical connection to the other inner electrodes of the same polarity is produced during assembly, each with an insulation to inner electrodes 11 of the other polarity.

For the other negative pole of the voltage at the connection contact 4 with the vias 6, the adequate arrangement applies. The upper piezo layer 2 , which carries the connection contacts 3 and 4 , is here a non-active layer, since no field strength occurs between the layer sides due to differently polarized internal electrodes 10 and 11 . A lower ceramic layer 12 is here also constructed passively and can support the mechanical attachment of the piezo actuator 1 , 7 or 8 as a foot part.

The plated-through holes 5 and 6 can not be arranged directly one above the other, as can be seen from FIG. 4, but advantageously also in the construction of the layers 2 from layer to layer with a pitch circle diameter offset from one another in order to increase the mechanical stability of the piezo actuator 1 , 7 or 8 increase.

Claims (5)

1. Piezo actuator, with
  • - A multilayer structure of piezo layers ( 2 ) and between the layers rule arranged internal electrodes ( 10 , 11 ) which can be acted upon with an electrical voltage and with
  • - Mutual contacting of the inner electrodes ( 10 , 11 ) by means of external connection contacts (3, 4 <, via which an electrical voltage can be supplied, as characterized in that
  • - each belonging together contacted Innenelekt clearing (10, 11) mutually at the respective walls ren inner electrodes (10, 11) isolated arranged through-holes (5, 6) (2) s are lectric connected to each other in the piezoelectric layers.
2. Piezo actuator according to claim 1, characterized in that
  • - The connection contacts ( 3 , 4 ) for the supply of the electrical voltage at the end faces of the Piezoak gate ( 1 ; 7 ; 8 ) are arranged.
3. Piezo actuator according to claim 2, characterized in that
  • - The connection contacts ( 3 , 4 ) are metallized surfaces that can be contacted by means of terminals.
4. Piezo actuator according to one of the preceding claims, characterized in that
  • - Piezoelectrically neutral areas ( 2 , 12 ) are arranged on the areas lying at the end of the layer structure, the outer connection contacts ( 3 , 4 ) being attached to the neutral areas.
5. Piezo actuator according to one of the preceding claims, characterized in that the plated-through holes ( 5 , 6 ) in the layer structure from layer to layer on a bolt circle diameter are arranged ver to one another.
DE2000124701 2000-05-18 2000-05-18 Piezo actuator Ceased DE10024701A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE2000124701 DE10024701A1 (en) 2000-05-18 2000-05-18 Piezo actuator

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2000124701 DE10024701A1 (en) 2000-05-18 2000-05-18 Piezo actuator
PCT/DE2001/001160 WO2001089002A1 (en) 2000-05-18 2001-03-24 Piezo actuator

Publications (1)

Publication Number Publication Date
DE10024701A1 true DE10024701A1 (en) 2001-11-29

Family

ID=7642736

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2000124701 Ceased DE10024701A1 (en) 2000-05-18 2000-05-18 Piezo actuator

Country Status (2)

Country Link
DE (1) DE10024701A1 (en)
WO (1) WO2001089002A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005069393A1 (en) * 2004-01-15 2005-07-28 Robert Bosch Gmbh Piezo actuator and method for the production thereof
JP2006187067A (en) * 2004-12-27 2006-07-13 Nec Tokin Corp Stacked piezoelectric vibrator and its manufacturing method, and piezoelectric actuator
US7304414B2 (en) 2002-05-06 2007-12-04 Epcos Ag Piezoactuator and method for the production thereof

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6515403B1 (en) * 2001-07-23 2003-02-04 Honeywell International Inc. Co-fired piezo driver and method of making for a ring laser gyroscope

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4633120A (en) * 1983-10-19 1986-12-30 Nec Corporation Electrostriction transducer comprising electrostriction layers of axially varied thicknesses
JPH03151677A (en) * 1989-11-09 1991-06-27 Toyota Motor Corp Laminate type piezoelectric actuator

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3378393D1 (en) * 1982-05-11 1988-12-08 Nec Corp Multilayer electrostrictive element which withstands repeated application of pulses
JPS62115788A (en) * 1985-11-14 1987-05-27 Nec Corp Manufacture of electrostrictive effect element
JPH0794796A (en) * 1993-09-24 1995-04-07 Fuji Elelctrochem Co Ltd Multilayered electrostrictive/piezoelectric device
JPH08316542A (en) * 1995-05-19 1996-11-29 Nippon Cement Co Ltd Manufacture of laminated piezoelectric actuator
DE19757877A1 (en) * 1997-12-24 1999-07-01 Bosch Gmbh Robert Method of manufacturing piezoelectric actuators and piezoelectric actuator

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4633120A (en) * 1983-10-19 1986-12-30 Nec Corporation Electrostriction transducer comprising electrostriction layers of axially varied thicknesses
JPH03151677A (en) * 1989-11-09 1991-06-27 Toyota Motor Corp Laminate type piezoelectric actuator

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7304414B2 (en) 2002-05-06 2007-12-04 Epcos Ag Piezoactuator and method for the production thereof
WO2005069393A1 (en) * 2004-01-15 2005-07-28 Robert Bosch Gmbh Piezo actuator and method for the production thereof
JP2006187067A (en) * 2004-12-27 2006-07-13 Nec Tokin Corp Stacked piezoelectric vibrator and its manufacturing method, and piezoelectric actuator
JP4667036B2 (en) * 2004-12-27 2011-04-06 Necトーキン株式会社 Multilayer piezoelectric vibrator, manufacturing method thereof, and piezoelectric actuator

Also Published As

Publication number Publication date
WO2001089002A1 (en) 2001-11-22

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