DD91404A - - Google Patents

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Publication number
DD91404A
DD91404A DD91404DA DD91404A DD 91404 A DD91404 A DD 91404A DD 91404D A DD91404D A DD 91404DA DD 91404 A DD91404 A DD 91404A
Authority
DD
German Democratic Republic
Application number
Publication of DD91404A publication Critical patent/DD91404A/xx

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DD91404D DD91404A (en)

Publications (1)

Publication Number Publication Date
DD91404A true DD91404A (en)

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ID=274632

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Application Number Title Priority Date Filing Date
DD91404D DD91404A (en)

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DD (1) DD91404A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4312014A1 (en) * 1993-04-13 1994-10-20 Leybold Ag Device for coating and/or etching substrates in a vacuum chamber

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4312014A1 (en) * 1993-04-13 1994-10-20 Leybold Ag Device for coating and/or etching substrates in a vacuum chamber
US5468362A (en) * 1993-04-13 1995-11-21 Leybold Aktiengesellschaft Apparatus for treating substrates in a vacuum chamber

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