DD53506A1 - Insight device for vacuum systems - Google Patents
Insight device for vacuum systemsInfo
- Publication number
- DD53506A1 DD53506A1 DD11432565A DD11432565A DD53506A1 DD 53506 A1 DD53506 A1 DD 53506A1 DD 11432565 A DD11432565 A DD 11432565A DD 11432565 A DD11432565 A DD 11432565A DD 53506 A1 DD53506 A1 DD 53506A1
- Authority
- DD
- German Democratic Republic
- Prior art keywords
- vacuum systems
- insight device
- insight
- vacuum
- systems
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DD11432565A DD53506A1 (en) | 1965-11-24 | 1965-11-24 | Insight device for vacuum systems |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DD11432565A DD53506A1 (en) | 1965-11-24 | 1965-11-24 | Insight device for vacuum systems |
Publications (1)
Publication Number | Publication Date |
---|---|
DD53506A1 true DD53506A1 (en) | 1967-01-20 |
Family
ID=42072912
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DD11432565A DD53506A1 (en) | 1965-11-24 | 1965-11-24 | Insight device for vacuum systems |
Country Status (1)
Country | Link |
---|---|
DD (1) | DD53506A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008048586A1 (en) | 2008-09-23 | 2010-04-01 | Von Ardenne Anlagentechnik Gmbh | Insight device for vacuum plant, comprises a disk movably arranged in a process chamber on interior side directly before a sight glass in an adjustable defined distance, where bristles of resilient materials are directed on the disk |
DE102013211127A1 (en) * | 2013-06-14 | 2014-12-18 | Singulus Technologies Ag | Detection of carriers for substrates in coating chambers |
-
1965
- 1965-11-24 DD DD11432565A patent/DD53506A1/en unknown
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008048586A1 (en) | 2008-09-23 | 2010-04-01 | Von Ardenne Anlagentechnik Gmbh | Insight device for vacuum plant, comprises a disk movably arranged in a process chamber on interior side directly before a sight glass in an adjustable defined distance, where bristles of resilient materials are directed on the disk |
DE102013211127A1 (en) * | 2013-06-14 | 2014-12-18 | Singulus Technologies Ag | Detection of carriers for substrates in coating chambers |
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