DD52181A1 - Process for the production of thin layers on a support by means of ion beam sputtering and device for carrying out the process - Google Patents

Process for the production of thin layers on a support by means of ion beam sputtering and device for carrying out the process

Info

Publication number
DD52181A1
DD52181A1 DD11177965A DD11177965A DD52181A1 DD 52181 A1 DD52181 A1 DD 52181A1 DD 11177965 A DD11177965 A DD 11177965A DD 11177965 A DD11177965 A DD 11177965A DD 52181 A1 DD52181 A1 DD 52181A1
Authority
DD
German Democratic Republic
Prior art keywords
carrying
production
support
ion beam
thin layers
Prior art date
Application number
DD11177965A
Other languages
German (de)
Inventor
Siegfried Schiller
Ullrich Heisig
Guenther Beister
Original Assignee
Siegfried Schiller
Ullrich Heisig
Guenther Beister
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siegfried Schiller, Ullrich Heisig, Guenther Beister filed Critical Siegfried Schiller
Priority to DD11177965A priority Critical patent/DD52181A1/en
Publication of DD52181A1 publication Critical patent/DD52181A1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/46—Sputtering by ion beam produced by an external ion source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
DD11177965A 1965-07-03 1965-07-03 Process for the production of thin layers on a support by means of ion beam sputtering and device for carrying out the process DD52181A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DD11177965A DD52181A1 (en) 1965-07-03 1965-07-03 Process for the production of thin layers on a support by means of ion beam sputtering and device for carrying out the process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD11177965A DD52181A1 (en) 1965-07-03 1965-07-03 Process for the production of thin layers on a support by means of ion beam sputtering and device for carrying out the process

Publications (1)

Publication Number Publication Date
DD52181A1 true DD52181A1 (en) 1966-12-05

Family

ID=249731

Family Applications (1)

Application Number Title Priority Date Filing Date
DD11177965A DD52181A1 (en) 1965-07-03 1965-07-03 Process for the production of thin layers on a support by means of ion beam sputtering and device for carrying out the process

Country Status (1)

Country Link
DD (1) DD52181A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0019725A1 (en) * 1979-05-18 1980-12-10 International Business Machines Corporation Deposition method using an energetic particle beam
DE102006024068A1 (en) * 2006-05-23 2007-11-29 Oerlikon Leybold Vacuum Gmbh coating plant

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0019725A1 (en) * 1979-05-18 1980-12-10 International Business Machines Corporation Deposition method using an energetic particle beam
DE102006024068A1 (en) * 2006-05-23 2007-11-29 Oerlikon Leybold Vacuum Gmbh coating plant

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