DD28262A1 - Device for producing resistors by vapor deposition of layers in a vacuum on carrier body - Google Patents

Device for producing resistors by vapor deposition of layers in a vacuum on carrier body

Info

Publication number
DD28262A1
DD28262A1 DD6904260A DD6904260A DD28262A1 DD 28262 A1 DD28262 A1 DD 28262A1 DD 6904260 A DD6904260 A DD 6904260A DD 6904260 A DD6904260 A DD 6904260A DD 28262 A1 DD28262 A1 DD 28262A1
Authority
DD
German Democratic Republic
Prior art keywords
vacuum
layers
vapor deposition
carrier body
producing resistors
Prior art date
Application number
DD6904260A
Other languages
German (de)
Inventor
Herbert Henniger
Curt Biebach
Erhard Schippel
Original Assignee
Herbert Henniger
Curt Biebach
Erhard Schippel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Herbert Henniger, Curt Biebach, Erhard Schippel filed Critical Herbert Henniger
Priority to DD6904260A priority Critical patent/DD28262A1/en
Priority to CH1104560A priority patent/CH381941A/en
Publication of DD28262A1 publication Critical patent/DD28262A1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DD6904260A 1960-08-02 1960-08-02 Device for producing resistors by vapor deposition of layers in a vacuum on carrier body DD28262A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DD6904260A DD28262A1 (en) 1960-08-02 1960-08-02 Device for producing resistors by vapor deposition of layers in a vacuum on carrier body
CH1104560A CH381941A (en) 1960-08-02 1960-09-30 Device for the production of resistors by vapor deposition of layers in a vacuum on a carrier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD6904260A DD28262A1 (en) 1960-08-02 1960-08-02 Device for producing resistors by vapor deposition of layers in a vacuum on carrier body

Publications (1)

Publication Number Publication Date
DD28262A1 true DD28262A1 (en) 1964-04-25

Family

ID=5477526

Family Applications (1)

Application Number Title Priority Date Filing Date
DD6904260A DD28262A1 (en) 1960-08-02 1960-08-02 Device for producing resistors by vapor deposition of layers in a vacuum on carrier body

Country Status (2)

Country Link
CH (1) CH381941A (en)
DD (1) DD28262A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10340703A1 (en) * 2003-09-04 2005-03-31 Schott Ag Device for vacuum coating substrates used in the production of optoelectronic components comprises a falling and ejecting path for the substrates, and a unit for vacuum coating the substrates during falling and ejecting along the path

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10340703A1 (en) * 2003-09-04 2005-03-31 Schott Ag Device for vacuum coating substrates used in the production of optoelectronic components comprises a falling and ejecting path for the substrates, and a unit for vacuum coating the substrates during falling and ejecting along the path
DE10340703B4 (en) * 2003-09-04 2005-12-01 Schott Ag Apparatus and method for seamless coating of substrates and coated substrate

Also Published As

Publication number Publication date
CH381941A (en) 1964-09-15

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