DD280840A1 - METHOD FOR COMPENSATING FOCUS DEVIATIONS IN DIGITAL IMAGE PROCESSING OF TWO-DIMENSIONAL STRUCTURES - Google Patents
METHOD FOR COMPENSATING FOCUS DEVIATIONS IN DIGITAL IMAGE PROCESSING OF TWO-DIMENSIONAL STRUCTURES Download PDFInfo
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- DD280840A1 DD280840A1 DD30333287A DD30333287A DD280840A1 DD 280840 A1 DD280840 A1 DD 280840A1 DD 30333287 A DD30333287 A DD 30333287A DD 30333287 A DD30333287 A DD 30333287A DD 280840 A1 DD280840 A1 DD 280840A1
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- German Democratic Republic
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- image
- raster image
- optical system
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Abstract
Bei der Ueberpruefung einer zweidimensionalen Struktur durch Vergleich des durch optoelektronische Abtastung dieser Struktur gewonnenen Bildes mit einem entsprechend den zur Herstellung dieser Struktur dienenden Daten und der Uebertragungsfunktion der Abtasteinrichtung generierten Bildes, wirken sich Abweichungen vom idealen Fokussierzustand der Abtasteinrichtung negativ auf die Pruefergebnisse aus. Erfindungsgemaess laesst sich die Defokussierung des optischen Systems im Bildgenerierungsteil kompensieren, indem entsprechend der Defokusierung eine bestimmte Uebertragungsfunktion angewendet wird. Die Erfindung kommt in Geraeten zur hochgenauen Schablonenkontrolle zur Anwendung. FigurWhen a two-dimensional structure is examined by comparing the image obtained by optoelectronic scanning of this structure with an image generated in accordance with the data used to produce this structure and the scanning function of the scanning device, deviations from the ideal focusing state of the scanning device have a negative effect on the test results. According to the invention, the defocusing of the optical system in the image generation part can be compensated for by applying a specific transfer function in accordance with the defocusing. The invention is used in devices for highly accurate template control. figure
Description
Die Erfindung ist anhand eines Ausführungsbeispieles näher erläutert. In der Zeichnung wird eine Anordnung zur Prüfung zweidimensionaler Strukturen bezüglich dsr zur Herstellung dieser Strukturen dienenden Daten unter Berücksichtigung der Kompensation des Defokussierungsfehlors des optischen Systems dargestellt.The invention is explained in more detail with reference to an embodiment. In the drawing, an arrangement for examining two-dimensional structures with respect to the data used to produce these structures is shown taking into consideration the compensation of the defocusing error of the optical system.
Die zu prüfende zweidimensional Struktur 1 wird durch ein optisches System 3 und einen optoelektronischen Empfänger 4 optoelektronisch abgetastet. Dabei befindet sich die Struktur 1 in der Nähe der Fokusebene 2 des optischen Systems 3.The two-dimensional structure 1 to be tested is opto-electronically scanned by an optical system 3 and an optoelectronic receiver 4. In this case, the structure 1 is located near the focal plane 2 of the optical system 3.
Der optoelektronische Empfänger 4 liefert ein digitales Rasterbild 5, dessen Werte die Struktur 1 repräsentieren. Durch Veränderung des Fokussierzustandes des optischen Systems 3, die durch eine Veränderung der Lage der Struktur 1 zur Lage der idealen Objektebene 2 des optischen Systems 3 verursacht wird, wird eine gesetzmäßige Variation der Werte des digitalen Rasterbildes 5 hervorgerufen.The optoelectronic receiver 4 supplies a digital raster image 5 whose values represent the structure 1. By changing the focusing state of the optical system 3, which is caused by a change in the position of the structure 1 to the position of the ideal object plane 2 of the optical system 3, a lawful variation of the values of the digital raster image 5 is caused.
Ein weiteres digitales Rasterbild 9, das dem digitalen Rasterbild 5 gleichwertig ist, wird entsprechend den Daten 7, die zur Herstellung der Struktur 1 als Vorlage dienten, mittels einer Einrichtung 8 generiert, um die Prüfung der Struktur 1 auf der Basis eines Soll-/Istbildverg!eiches mittels einer Vergleichseinrichtung 6 durchführen zu können.A further digital raster image 9, which is equivalent to the digital raster image 5, is generated by means of a device 8 in accordance with the data 7, which were used to produce the structure 1, in order to test the structure 1 on the basis of a desired / actual image convergent To be able to carry out eiches by means of a comparator 6.
Die Generierung des digitalen Rasterbildes 9 durch die Einrichtung 8 erfolgt, indem die resultierende Übertragungsfunktion des optischon Systems 3 und des optoelektronischen Empfängers 4 auf die Eingangsdaten 7 angewendet wird.The generation of the digital raster image 9 by the device 8 takes place by applying the resulting transfer function of the optical system 3 and of the optoelectronic receiver 4 to the input data 7.
Entsprechend der möglichen und signifikant unterschiedlichen Fokussierzustände des optischen Systems 3 werden in einem Speicher 11 unterschiedliche Übertragungsfunktionen gespeichert. Durch eine Meßeinrichtung 10 wird die relative Lage der Struktur 1 zur idealen Objektebene 2 ermittelt, wodurch die Auswahl der zutreffenden Übertragungsfunktion aus dem Speicher 11 erfolgen kann, um diese der Einrichtung 8 bereitstellen zu können.In accordance with the possible and significantly different focusing states of the optical system 3, different transfer functions are stored in a memory 11. By a measuring device 10, the relative position of the structure 1 is determined to the ideal object plane 2, whereby the selection of the appropriate transfer function can be made from the memory 11 in order to provide the device 8 can.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DD30333287A DD280840A1 (en) | 1987-06-01 | 1987-06-01 | METHOD FOR COMPENSATING FOCUS DEVIATIONS IN DIGITAL IMAGE PROCESSING OF TWO-DIMENSIONAL STRUCTURES |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DD30333287A DD280840A1 (en) | 1987-06-01 | 1987-06-01 | METHOD FOR COMPENSATING FOCUS DEVIATIONS IN DIGITAL IMAGE PROCESSING OF TWO-DIMENSIONAL STRUCTURES |
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Publication Number | Publication Date |
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DD280840A1 true DD280840A1 (en) | 1990-07-18 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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DD30333287A DD280840A1 (en) | 1987-06-01 | 1987-06-01 | METHOD FOR COMPENSATING FOCUS DEVIATIONS IN DIGITAL IMAGE PROCESSING OF TWO-DIMENSIONAL STRUCTURES |
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DD (1) | DD280840A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19726696A1 (en) * | 1997-06-24 | 1999-01-07 | Jenoptik Jena Gmbh | Process for focusing when imaging structured surfaces of disc-shaped objects |
-
1987
- 1987-06-01 DD DD30333287A patent/DD280840A1/en unknown
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19726696A1 (en) * | 1997-06-24 | 1999-01-07 | Jenoptik Jena Gmbh | Process for focusing when imaging structured surfaces of disc-shaped objects |
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