DD241500B5 - Arrangement for generating a shaping jet in particle beam devices - Google Patents

Arrangement for generating a shaping jet in particle beam devices

Info

Publication number
DD241500B5
DD241500B5 DD28132585A DD28132585A DD241500B5 DD 241500 B5 DD241500 B5 DD 241500B5 DD 28132585 A DD28132585 A DD 28132585A DD 28132585 A DD28132585 A DD 28132585A DD 241500 B5 DD241500 B5 DD 241500B5
Authority
DD
German Democratic Republic
Prior art keywords
generating
arrangement
particle beam
beam devices
shaping jet
Prior art date
Application number
DD28132585A
Other languages
German (de)
Other versions
DD241500A1 (en
Inventor
Thomas Dipl-Phys Elster
Peter Dipl-Phys Hahmann
Original Assignee
Jenoptik Jena Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jenoptik Jena Gmbh filed Critical Jenoptik Jena Gmbh
Priority to DD28132585A priority Critical patent/DD241500B5/en
Publication of DD241500A1 publication Critical patent/DD241500A1/en
Publication of DD241500B5 publication Critical patent/DD241500B5/en

Links

DD28132585A 1985-10-02 1985-10-02 Arrangement for generating a shaping jet in particle beam devices DD241500B5 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DD28132585A DD241500B5 (en) 1985-10-02 1985-10-02 Arrangement for generating a shaping jet in particle beam devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD28132585A DD241500B5 (en) 1985-10-02 1985-10-02 Arrangement for generating a shaping jet in particle beam devices

Publications (2)

Publication Number Publication Date
DD241500A1 DD241500A1 (en) 1986-12-10
DD241500B5 true DD241500B5 (en) 1996-06-13

Family

ID=5571832

Family Applications (1)

Application Number Title Priority Date Filing Date
DD28132585A DD241500B5 (en) 1985-10-02 1985-10-02 Arrangement for generating a shaping jet in particle beam devices

Country Status (1)

Country Link
DD (1) DD241500B5 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008062450B4 (en) 2008-12-13 2012-05-03 Vistec Electron Beam Gmbh Arrangement for illuminating a substrate with a plurality of individually shaped particle beams for high-resolution lithography of structural patterns

Also Published As

Publication number Publication date
DD241500A1 (en) 1986-12-10

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Legal Events

Date Code Title Description
ASS Change of applicant or owner

Owner name: LEICA MICROSYSTEMS LITHOGRAPHY GMBH

Effective date: 20000915

IF04 In force in the year 2004

Expiry date: 20051003