DD220509A1 - DEVICE FOR HEATING AND COOLING DISK MOLDED OBJECTS - Google Patents

Abstract

The invention relates to a suitable temperature control device for heating and cooling of scheibenfoermigen objects, in particular for highly sensitive electrical parameter measurement of semiconductor devices in the disk assembly, in a temperature range of about 77 K to about 650 K. The aim is to improve the device to the effect that the effort the temperature control system is reduced and measurements with higher sensitivities are possible. The task is to improve the thermal properties for the temperature control and to reduce the interference from the heater circuit to the DUT. The inventive device consists of a metallic disc support within a measuring chamber, wherein below the disc support a temperature radiator is arranged and located directly in the disc support cooling ducts. The disc support is electrically and thermally isolated from the metering chamber and a coolant passage system. The isolation from the measuring chamber is effected by three radially-symmetrically arranged ceramic elements, the isolation of the Kühlmitteldurchlaufsystem by insulating Schlauchstuecke, which are arranged to prevent the formation of ice in the coughing through the Küeldmitteldaempfen coaxial pipes.

Description

Field of application of the invention

The invention relates to a device suitable for temperature control device for heating and cooling of disc-shaped objects for highly sensitive electrical parameter measurement of semiconductors and devices, preferably contacted by Tastsonden semiconductor structures in the disc group, in a temperature range of about 77 K to 650K with electrically isolated Objektauf hunting in dry atmosphere.

Characterization of the known technical solutions -

It is known that disk-shaped objects are tempered by thermal contact with a flat object support {Koyama, R. Y .; Buehler, M.G .; Review of Scientific Instruments Vol.50 (8) August 1979, pp. 983-987).

The object support is heated or cooled by an electrically insulating intermediate layer of a heating and cooling system by heat conduction, wherein the heating is done by isolated mounted electric heater or cooling by means of cavities directed coolant.

It is also known that the temperature control of the object recording by means of an electronic control system with two temperature sensors. These are arranged on the object support and in the heating and cooling system. A disadvantage of the known solution is the economically complex control system with two feedback devices to improve the control properties due to the delayed heat transfer between the heating and cooling system and the object overlay on the insulating liner. Another disadvantage of the known solution is the capacitive electrical coupling between the electric heater and disc support. Disturbing electrical influences from the heater circuit on the DUT limit the measuring sensitivity.

Ztai of the invention

It is an object of the invention to improve the device so that it is suitable for a low-cost realizable temperature control system and that measurements with higher sensitivities are possible.

Explanation of the essence of the invention

The invention has for its object to make the device for heating and cooling so that both the thermal properties for the temperature control improved as well as the interference from the heater circuit to the DUT

be reduced. , ,

According to the invention, the object to provide a device for heating and cooling of disc-shaped objects with a metallic disc support within a measuring chamber, achieved in that below the disc support a temperature radiator is arranged that directly in the disc support electrically and thermally from the measuring chamber and a coolant passage system is isolated.

It is expedient that the disc support with three radially symmetrically arranged ceramic elements is electrically and thermally insulated attached to the measuring chamber, that the cooling channels of the disc support are connected via electrically insulating Schlaudhstücke to a coolant inlet and connected to the cooling channels drain pipes for the coolant coaxially by Isolierbuchsen into collecting containers.

It is also appropriate that the insulating tube pieces lead through coaxially arranged and riser pipes connected to the collecting rinses and that pipe between the drain and the insulating bushes each have an annular gap is present. As a result of these arrangements, the vaporized coolant rising from the collecting vessels flushes both the pieces of hose and the insulating bushes dry, so that they remain free of ice.

Compared with the known solutions, the electrical and at the same time thermal insulating elements of the disc support outside of the control properties affecting heat transfer path between the heating and cooling source and the disc support are arranged in the inventive solution. This simplifies the technical and economic effort, especially for the electronic control system with only one temperature sensor. The inventive solution measurements with high sensitivity are possible because the heating of the disc support by

Heat radiation occurs and thus interference from the circuit of the electrically powered radiation source are negligibly low.

An advantage of the solution according to the invention is the attachment of the disc support with the three coaxial Körarnikelementen, whereby the impact on the mechanical stability minimized by high temperature loads

.Become.- ... . - ^: '-.... · ^; . ' , , , '.,. '^Λ;

-2- 258 065

embodiment The invention will be explained in more detail below using an exemplary embodiment. The accompanying drawings show 1 shows a device according to the invention in the front view (section) Fig. 2: a disc support according to the invention and a coolant passage system in plan view. The device consists of a disc support 1, an electrically powered temperature radiator 2, a Coolant passage system 3 and a measuring chamber. 4 The disc support 1 is by means of three radially symmetrically arranged ceramic elements 5; 6 and 7 electric and thermal

attached to the measuring chamber 4 isolated. Below the disc support 1 is in a Strahlerabschirmgehäuse 8 of

Temperature radiator 2 is arranged. ·, Two similar, directly through the disc support 1 leading cooling channels 9 and 10 are connected to the Coolant passage system 3 connected. The latter consists on the input side of a coolant inlet 11, a Manifold 12, two electrically insulating tube pieces 13 and 14 and two feed tubes 15 and 16 and

on the output side of two drain pipes 17 and 18 and two collecting vessels 19 and 20.

Each drain pipe 17 and 18 leads coaxially through an insulating bushing 21 and 22 into the collecting vessel 19 and 20. Zwischen Drain pipe 17 and 18 and insulating bushing 21 and 22 is an annular gap. The collecting vessels 19 and 20 each have

a connected by a riser 23 and 24, flushing pipe 25 and 26, which surrounds the hose piece 13 and 14 coaxially.

The sealed with a removable lid 27 measuring chamber 4 has a flushing connection 28 for drying gas to form

a dry atmosphere in the measuring chamber 4. In the disc support 1 is a to a suitable electronic

Temperature control connected temperature sensor 29 attached. To hold the test object 30, the disc support 1 has a terminal 31 for vacuum. The measuring chamber 4 has around the

entire disc support 1 an annular footprint for a suitable number Tastsonden 32 for contacting the

DUT 30.

Claims (5)

-1- 258 065 4 Invention claims: 1. A device for heating and cooling of disc-shaped objects for electrical parameter measurement with a metallic disc support within a measuring chamber, characterized in that below the disc support (1) a Temperaturstrahier (2) is arranged, that directly in the disc support (1) cooling channels ( 9, 10) and that the disc support (1) is electrically and thermally isolated from the measuring chamber (4) and a coolant passage system (3). 2. Device according to item!, Characterized in that the disc support (1) with three radially-symmetrically arranged ceramic elements (5; 6; 7) is electrically and thermally isolated on the measuring chamber (4). 3. Device according to item 1 and 2, characterized in that the cooling channels (9; 10) of the disc support (D over electrically insulating hose pieces (13; 14) are connected to a coolant inlet (11). 4. Device according to items 1 to 3, characterized in that with the cooling channels (9; 10) connected to the drain pipes (17; 18) for the coolant coaxially through insulating bushings (21; 22) in collecting vessels (19; 20) lead. 5. Apparatus according to items 1 to 4, characterized in that the hose pieces (13; 14) lead through coaxially arranged and via riser pipes (23; 24) with the collecting vessels (19; 20) connected rinsing pipes (25; 26). For this 2 pages drawings