DD120400A1 - - Google Patents

Info

Publication number
DD120400A1
DD120400A1 DD18398575A DD18398575A DD120400A1 DD 120400 A1 DD120400 A1 DD 120400A1 DD 18398575 A DD18398575 A DD 18398575A DD 18398575 A DD18398575 A DD 18398575A DD 120400 A1 DD120400 A1 DD 120400A1
Authority
DD
German Democratic Republic
Application number
DD18398575A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to DD18398575A priority Critical patent/DD120400A1/xx
Priority to DE19752557273 priority patent/DE2557273A1/de
Priority to FR7600863A priority patent/FR2300025A1/fr
Priority to SU762322601A priority patent/SU618331A1/ru
Priority to CS67576A priority patent/CS181534B1/cs
Priority to GB434876A priority patent/GB1508748A/en
Publication of DD120400A1 publication Critical patent/DD120400A1/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90Devices for picking-up and depositing articles or materials
    • B65G47/91Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Specific Conveyance Elements (AREA)
  • Manipulator (AREA)
DD18398575A 1975-02-04 1975-02-04 DD120400A1 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DD18398575A DD120400A1 (de) 1975-02-04 1975-02-04
DE19752557273 DE2557273A1 (de) 1975-02-04 1975-12-19 Einrichtung zur uebernahme, zum transport und zur uebergabe von scheiben, insbesondere von halbleiterscheiben
FR7600863A FR2300025A1 (fr) 1975-02-04 1976-01-14 Dispositif pou
SU762322601A SU618331A1 (ru) 1975-02-04 1976-01-26 Устройство дл перемещени изделий
CS67576A CS181534B1 (en) 1975-02-04 1976-02-03 Transporting and transfering equipment for plates esp.for semiconducting ones
GB434876A GB1508748A (en) 1975-02-04 1976-02-04 Arrangement for picking up transferring and delivering disc-shaped objects

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD18398575A DD120400A1 (de) 1975-02-04 1975-02-04

Publications (1)

Publication Number Publication Date
DD120400A1 true DD120400A1 (de) 1976-06-12

Family

ID=5499041

Family Applications (1)

Application Number Title Priority Date Filing Date
DD18398575A DD120400A1 (de) 1975-02-04 1975-02-04

Country Status (6)

Country Link
CS (1) CS181534B1 (de)
DD (1) DD120400A1 (de)
DE (1) DE2557273A1 (de)
FR (1) FR2300025A1 (de)
GB (1) GB1508748A (de)
SU (1) SU618331A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4603897A (en) * 1983-05-20 1986-08-05 Poconics International, Inc. Vacuum pickup apparatus
GB2194500B (en) * 1986-07-04 1991-01-23 Canon Kk A wafer handling apparatus
DE19907210A1 (de) * 1999-02-23 2000-08-31 Krauss Maffei Kunststofftech Vorrichtung zum Transportieren und gleichzeitigen Kühlen von Substraten für Informationsträgerscheiben wie CD, DVD oder dergleichen

Also Published As

Publication number Publication date
FR2300025A1 (fr) 1976-09-03
GB1508748A (en) 1978-04-26
CS181534B1 (en) 1978-03-31
SU618331A1 (ru) 1978-08-05
DE2557273A1 (de) 1976-08-05
FR2300025B3 (de) 1978-10-06

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