DD120400A1 - - Google Patents

Info

Publication number
DD120400A1
DD120400A1 DD18398575A DD18398575A DD120400A1 DD 120400 A1 DD120400 A1 DD 120400A1 DD 18398575 A DD18398575 A DD 18398575A DD 18398575 A DD18398575 A DD 18398575A DD 120400 A1 DD120400 A1 DD 120400A1
Authority
DD
German Democratic Republic
Application number
DD18398575A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to DD18398575A priority Critical patent/DD120400A1/xx
Priority to DE19752557273 priority patent/DE2557273A1/de
Priority to FR7600863A priority patent/FR2300025A1/fr
Priority to SU762322601A priority patent/SU618331A1/ru
Priority to CS67576A priority patent/CS181534B1/cs
Priority to GB434876A priority patent/GB1508748A/en
Publication of DD120400A1 publication Critical patent/DD120400A1/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90Devices for picking-up and depositing articles or materials
    • B65G47/91Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Specific Conveyance Elements (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
DD18398575A 1975-02-04 1975-02-04 DD120400A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DD18398575A DD120400A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-02-04 1975-02-04
DE19752557273 DE2557273A1 (de) 1975-02-04 1975-12-19 Einrichtung zur uebernahme, zum transport und zur uebergabe von scheiben, insbesondere von halbleiterscheiben
FR7600863A FR2300025A1 (fr) 1975-02-04 1976-01-14 Dispositif pou
SU762322601A SU618331A1 (ru) 1975-02-04 1976-01-26 Устройство дл перемещени изделий
CS67576A CS181534B1 (en) 1975-02-04 1976-02-03 Transporting and transfering equipment for plates esp.for semiconducting ones
GB434876A GB1508748A (en) 1975-02-04 1976-02-04 Arrangement for picking up transferring and delivering disc-shaped objects

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD18398575A DD120400A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-02-04 1975-02-04

Publications (1)

Publication Number Publication Date
DD120400A1 true DD120400A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-06-12

Family

ID=5499041

Family Applications (1)

Application Number Title Priority Date Filing Date
DD18398575A DD120400A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-02-04 1975-02-04

Country Status (6)

Country Link
CS (1) CS181534B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DD (1) DD120400A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE2557273A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2300025A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB1508748A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
SU (1) SU618331A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4603897A (en) * 1983-05-20 1986-08-05 Poconics International, Inc. Vacuum pickup apparatus
GB2194500B (en) * 1986-07-04 1991-01-23 Canon Kk A wafer handling apparatus
DE19907210A1 (de) * 1999-02-23 2000-08-31 Krauss Maffei Kunststofftech Vorrichtung zum Transportieren und gleichzeitigen Kühlen von Substraten für Informationsträgerscheiben wie CD, DVD oder dergleichen

Also Published As

Publication number Publication date
FR2300025B3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-10-06
CS181534B1 (en) 1978-03-31
DE2557273A1 (de) 1976-08-05
SU618331A1 (ru) 1978-08-05
GB1508748A (en) 1978-04-26
FR2300025A1 (fr) 1976-09-03

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