DD114726A1 - - Google Patents
Info
- Publication number
- DD114726A1 DD114726A1 DD18006174A DD18006174A DD114726A1 DD 114726 A1 DD114726 A1 DD 114726A1 DD 18006174 A DD18006174 A DD 18006174A DD 18006174 A DD18006174 A DD 18006174A DD 114726 A1 DD114726 A1 DD 114726A1
- Authority
- DD
- German Democratic Republic
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD18006174A DD114726A1 (US06559137-20030506-C00071.png) | 1974-07-23 | 1974-07-23 | |
| DE19752527938 DE2527938A1 (de) | 1974-07-23 | 1975-06-23 | Anordnung zur gewinnung eines lichtsignales aus dem belichtungsstrahlengang einer positionier- und belichtungsvorrichtung |
| CS513675A CS184959B1 (en) | 1974-07-23 | 1975-07-21 | Device for receiving the light signal from the current of exposure beams of the adjusting and exposure device |
| FR7522885A FR2280095A1 (fr) | 1974-07-23 | 1975-07-22 | Dispositif d'obtention d'un signal lumineux, a partir du faisceau lumineux d'un dispositif de positionnement et d'exposition |
| GB3052675A GB1513433A (en) | 1974-07-23 | 1975-07-22 | Photoprinting apparatus including a light sensing arrangement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD18006174A DD114726A1 (US06559137-20030506-C00071.png) | 1974-07-23 | 1974-07-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DD114726A1 true DD114726A1 (US06559137-20030506-C00071.png) | 1975-08-12 |
Family
ID=5496668
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DD18006174A DD114726A1 (US06559137-20030506-C00071.png) | 1974-07-23 | 1974-07-23 |
Country Status (5)
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5928337A (ja) * | 1982-08-09 | 1984-02-15 | Hitachi Ltd | プロジエクシヨンアライナ |
-
1974
- 1974-07-23 DD DD18006174A patent/DD114726A1/xx unknown
-
1975
- 1975-06-23 DE DE19752527938 patent/DE2527938A1/de not_active Withdrawn
- 1975-07-21 CS CS513675A patent/CS184959B1/cs unknown
- 1975-07-22 FR FR7522885A patent/FR2280095A1/fr active Granted
- 1975-07-22 GB GB3052675A patent/GB1513433A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CS184959B1 (en) | 1978-09-15 |
| FR2280095A1 (fr) | 1976-02-20 |
| GB1513433A (en) | 1978-06-07 |
| DE2527938A1 (de) | 1976-02-12 |
| FR2280095B3 (US06559137-20030506-C00071.png) | 1979-04-27 |
