CZ713089A3 - three-component objective - Google Patents

Abstract

A three-member pancratic lens is formed in the first member (1) a two-edged diffusing lens, to which a double-convex lens is bonded a connecting lens, the second member (2) being a negative meniscus, to which is bonded a double-bulging continuous lens and the third member (3) is again a negative meniscus to which it is bonded double-breasted continuous lens. Three (1,2,3) lens members they are divided into two optical groups (I, II), z wherein the first optical group (I) is identical to the first member (I) and has a negative refraction, while the other optical group (II) is a second and a third member (2,3) and has a positive member lámavost. Axial distance (d3) between the two optical the groups (I and II) of the member (1, 2, 3) are pancratic effect. The lens is designed for use in microelectronics

Description

The invention relates to a pancratic lens composed of three cemented members.

Previously known pancratic lenses are primarily intended for photographic, cinematographic and television purposes and cannot be used successfully in imaging that is part of microelectronics manufacturing technology and where it is required to position the image at a predetermined distance from the object being displayed.

For this purpose, a three-member pancratic objective lens of the present invention has been constructed. A double convex lens is bonded, and the third member is again formed by a negative meniscus to which the double convex lens is bonded. and has a negative refraction, while the second syrup is formed by the second and third members and has a positive refraction, wherein zz x-z0 & theta / j-jMll · the axial distance between two groups of members is variable.

The effect of this arrangement of the pancratic lens lies in the quality of imaging in microelectronic applications.

In the drawing, a three-member pancratic objective lens according to the invention is shown in axial section

The first member 1 is formed by a double-convex lens, to which a double-convex lens is bonded. The second member 2 is formed by a negative meniscus to which a double convex lens is bonded and the third member 3 is again formed by a negative meniscus to which a double convex lens is bonded. The lens is divided into two optical groups I and II, the first group I being identical to the prime lens member 1 and having a negative refraction, while the second group Mipina II is formed by the second and third members 2 and 6 and has a positive refraction. To achieve a pancratic effect, it is necessary to

axially displacing the second) ^/ spherin II as celery?, as opposed to the first group I. The axial distance dg between the two and the members 6, 2 and 3 is, as a result, toKo variable. In the drawing, the geometric and material quantities important for determining the design characteristics of the objective are indicated, namely the radii of curvature r ^, where i = 1, 2 ... 9, the axial thicknesses dg, d ₂ , d ^, dg, dy and dg axial distances dg and dg of wages by members ^- T, 2, and T, further refractive indices n ^, where j = 1,274,5,7 and 8, and Abbe numbers where k = 1,2,4,5,7 and 8, regarding the optical glasses used, the distance a of the first member 3 from the object as well as the distance L of the object y from the image y * ₀

The optical construction of a three-member pancratic objective lens according to the invention is determined by the following geometric and material quantities and the relationships between them. ...

The focal lengths fg, fgg of both groups I and II of members 1, 2, 2 are bound by the relation fg / fg ^^ -1,

radii of curvature r ^, kd e i e 1,2 ... 9 are bound by the following relations: first term 1 -rg / r ₂ = 0.581 ^r 1 ^{/ r} 3 ⁼ 0.092 second member 2 r./rg = 2,045 • ^r 4 ^{/ r} 6 ' 0,929 third member 2 ry / r _Q " 1,918 - ^r 7 ^{/ r} 9 = 0,665, d ₁ , d ₂ , d ₄ , d ₅ , dya , dg lenses are bound relationships first member 1 ~ 0.6 - -0.06 the second term? d ^ / dg ⁼ 0.5 ^d 4 ^{/ f} II ⁼ 0.06 third member 2 dy / dg ⁼ 0.5 ^d 7 ^{/ f} Il ' 0,06 ₀

For distances dga dg between members 1,2,2 ^and P ^{ro the} distance s of the first member JL from the object y applies the following formulas:

^'D 6 ^/ ° ^F II ^{= '02}

m b - 1 ^d 3 ^{/ f} II = 0.525 s / f-j- = 1.651 m = - 0,3 ^d 3 ^{/ f} II = 0.927 s / fj = 2.751 m s - 0,2 ^d 3 ^ ^f II »1,422 s / fj = 2.618

For the distance L of the object y from the image y ´, L / f-j- = -6.19.

Refractive indices n., Where j = 1,2,4,5,7,8, have values:

first member 1 ⁿ l = 1.55115 n = 1,75520 second member 2 n ₄ = 1,80518 n ₅ = 1.53172 third member 3 n _? = 1,80518 ⁿ 8 = 1.53172 and Abbeova < numbers in _k ,] where k = 1, i first member 1 Vi = 49.65 V ₂ = 27.58 second member 2 v ₄ = 25.43 v = 48.78 third member 3 v ₇ = 25.43 ^V 8 = 48,78 " Exemplary embodiments lens by inventioniinaji first member 1 17,378

Γη = d-, = second member 2 y. »

Tr = third member 3

29,917 -189,288 ^d 2

66.203 _d 32.362 _d ⁴ - 71.240 ⁵ 66.203 _d η _χ = 1.55115 V _x = 49.65 n,

1.75520 V _Q = »27.58 ₄ 1.80518 n ₅ = 1.53172

V n ₇ = 1.80518 V

V ^'34,507 d ₈ = 6 η _θ = 1,53172 r _Q = - 99,522

25.43

48.78

£ 25.43 £ 48.7

For all dimensions the tolerance is - 10%, for the refractive indices n _{4 the} tolerance - 0,05 and for Abbe numbers of the tolerance í 3,

Claims (3)

A three-member pancratic lens, the first member of which is a double-convex lens, to which a double-convex lens is attached, the second member is a negative meniscus, to which a double-convex lens is attached, and the third member is again a negative meniscus. a double convex lens is bonded, characterized in that the three members C1, 2,3) are divided into two groups (I, II), of which the first group (I) is identical to the first member (1) and has a negative refraction, while the second ορίά £ α group (II) consists of the second and third refraction, wherein the axial distance mi (I and II) of the members (1,2,3) is variable. member (2,3) and ma k | aa (d ^) between obemargroup2. A three-member pancratic lens according to item 1 _, characterized in in that the focal lengths (1,2,3) are bound by the relation fl / f _n = radii of curvature r ^, where i = 1,2, .... first member (1) ^ 1 ^ ^r 2 ⁼ 0.581 r _x / r ^ = 0.092 a second member (2) ⁼ r./r,- 2,045 - 0,929 third member (3) ⁼ 1,918 -r _? / r ₉ = 0,665, The thicknesses (d-pdgtd ^ jd ^ dyjdg) of the lenses are bound by the following relations: ά _χ / ά ₂ = 0.6 ^d l ^{/ f} I ⁼ ° »° ⁶ first member (1) second member (2) third member (3) V ^d 5 ' ^d 4 ^ ^f Il' ^d 7 ^ ^d 8 ^{= d} 7 ^{/ f} H ' 0.5 0.06 0.5 0.06, for the distances (d ^ and d <) between the members (1,2,3) and for the distance (s) of the first member (1) from the object (s) the following formulas apply: 0.02 V ^f ir m = - 1 m = - 0.3 m - - 0.2 0.525 ^d 3 ^{/ f} II ⁼ ° » ^{927 d} 3 ^{/ f} II ^{= 1.422 d} 3 ^{/ f} II s / f _x = 1.651 s / fj = 2.751 s / f _T = 2.618 where m is the transverse magnification, and is. distance of the object plane from the vertex, the first pldch / reader (1), i-V ~ for the distance (L) of the object (y) from the image (y *): L / f-, -6.19, refractive indices η .., first member (1) where ⁿ l j = 1.2.4 1.55115 ⁿ 2 with 1,75520 second member (2) ⁿ 4 = 1,80518 IN = 1.53172 third member (3) n _? ss 1,80518 ⁿ 8 = 1.53172 and Abbe numbers V ^, where to = 1.2.4 first member (1) ^In 1 = 49.65 ^V 2 with 27.58 second member (2) Λ ss 25.43 ^V 5 = 48.78 third member (3) you = 25.43 T = s 48.78. 3. A three-member pancratic objective lens according to items 1 and 2, characterized by Oe. fl-etterter &amp;cfenff; first member (1) r _n = - 17,378 second member (2) r, ^d 4 'd, - = r ₂ = 29,917 r ₇ «—189,288 66,203 r ^ »32,362 r ₆ = -71,240 third term (3) ^Γ γ = 66,203 34,507 = - 99,522 ^r 8 = d ₇ = dg = η _τ = 1,55115 V _x »49,65 n ₂ = 1,75520 V ₂ = 27,58 n ^ = 1,80518 n ₅ = 1,53172 V, = 25.43 = 48.78 = 1.80518 V _? = 25.43 ηθ = 1.53172 V _Q = 48.78 with a tolerance of £ 10% for all dimensions, refractive indices of n. Tolerance - 0.05 and for Abbe numbers ý, tolerance of £ 3 ·