CS621583A1 - Planarny naprasovaci magnetron - Google Patents

Planarny naprasovaci magnetron

Info

Publication number
CS621583A1
CS621583A1 CS836215A CS621583A CS621583A1 CS 621583 A1 CS621583 A1 CS 621583A1 CS 836215 A CS836215 A CS 836215A CS 621583 A CS621583 A CS 621583A CS 621583 A1 CS621583 A1 CS 621583A1
Authority
CS
Czechoslovakia
Prior art keywords
planarny
naprasovaci
magnetron
planarny naprasovaci
naprasovaci magnetron
Prior art date
Application number
CS836215A
Other languages
Czech (cs)
Other versions
CS239163B1 (en
Inventor
Rudolf Prof Ing Csc Harman
Jozef Ing Matuska
Original Assignee
Rudolf Prof Ing Csc Harman
Jozef Ing Matuska
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rudolf Prof Ing Csc Harman, Jozef Ing Matuska filed Critical Rudolf Prof Ing Csc Harman
Priority to CS836215A priority Critical patent/CS239163B1/en
Publication of CS621583A1 publication Critical patent/CS621583A1/en
Publication of CS239163B1 publication Critical patent/CS239163B1/en

Links

CS836215A 1983-08-26 1983-08-26 Planar sputtering magnetron CS239163B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CS836215A CS239163B1 (en) 1983-08-26 1983-08-26 Planar sputtering magnetron

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS836215A CS239163B1 (en) 1983-08-26 1983-08-26 Planar sputtering magnetron

Publications (2)

Publication Number Publication Date
CS621583A1 true CS621583A1 (en) 1985-05-15
CS239163B1 CS239163B1 (en) 1985-12-16

Family

ID=5408666

Family Applications (1)

Application Number Title Priority Date Filing Date
CS836215A CS239163B1 (en) 1983-08-26 1983-08-26 Planar sputtering magnetron

Country Status (1)

Country Link
CS (1) CS239163B1 (en)

Also Published As

Publication number Publication date
CS239163B1 (en) 1985-12-16

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