CS264848B1

CS264848B1 - Vacuum Thatch Valve

Info

Publication number: CS264848B1
Application number: CS876790A
Authority: CS
Inventors: Dusan Ing Liska; Ladislav Ing Semsey; Milan Rndr Ferdinandy; Jozef Ing Krao; Ivan Prom Fyz Pecar
Original assignee: Liska Dusan; Ladislav Ing Semsey; Ferdinandy Milan; Jozef Ing Krao; Ivan Prom Fyz Pecar
Priority date: 1987-09-21
Filing date: 1987-09-21
Publication date: 1989-09-12
Also published as: CS679087A1

Abstract

Riešenie sa týká zariadenia na uzavretie, otvorenie a škrtenie prietoku média prierezom ventilu a pozostáva z telesa, púzdra, príruby, v ktorej je posuvné tiahlo uložené druhýn) koncom vo vodiacom telese opatřené čapom posuvné uloženým v drážke kulisy přítlačného rámu, ktorá je opatřená čapom zasahujúcim do otvoru vo vodiacom telese, ktoré je spojené s telesom, pričom koniec posuvného tiahla je opatřený kolíkom odpruženým pružinou vedeným druhým koncom v drážke došky, otočnéj okolo čapu, pevne spojeného s telesom, s ktorým je pevne spojený držiak, v ktorom je kyvné uložená kulisa přítlačného rámu, ktorá je kyvné spojená prostredníctvom čapov s přítlačným prstencom, pričom medzi telesom a doskou je uložené vákuové tesnenie a tesnenie uložené medzi přírubami a pevne spojenou pružným těsněním s posuvným tiahlom, pričom doska je odpružená pružinou uloženou v otvore vodiaceho telesa, a jej pohyb je obmedzený dorazom.The solution refers to a device for closing, opening and throttling the flow of the medium through the cross-section of the valve and consists of a body, a casing, a flange in which the sliding rod is placed second) with its end in the guide body equipped with a sliding pin located in the groove of the slide of the pressure frame, which is equipped with a pin extending into the hole in the guide body, which is connected to the body, while the end of the sliding rod is equipped with a pin spring-suspended, guided by the other end in the groove of the straw, rotatable around a pin, fixedly connected to the body, to which is fixedly connected a holder, in which the slide of the pressure frame is pivotally mounted, which is pivotally connected by means of pins to the pressure ring, with a vacuum seal placed between the body and the plate, and a seal placed between the flanges and rigidly connected by an elastic seal with a sliding rod, while the plate it is sprung by a spring placed in the opening of the guide body, and its movement is limited by a stop.

Description

264848 2264848 2

Vynález sa týká vákuového doškového ventilu, zariadenia na uzatváranie, otvorenie a škrte-nie média vo vákupvých komponentov.BACKGROUND OF THE INVENTION The present invention relates to a vacuum thatch valve, a device for sealing, opening and throttling a fluid in a component.

Doteraz známe vákuové ventily sú bud rohové alebo doškové s doskou otočnou okolo osiumiestnenej v priereze ventilu těsněné na vonkajšom obvode došky, alebo doškové ovládané tiah-lom, ktoré sa odklápajú a aj v otvorenej polohe časť došky s tiahlom ostává v priestore otvoruventilu, dalej doškové vrátové, u ktorých sa doska ventilu pri ot.váraní vysunie z prierezuotvoru ventilu do plášťa telesa ventilu alebo doškové s kývavým pohybom došky otočnéj okoločapu, u ktorých sa doska v případe otvorenie ventilu zasúva do telesa ventilu, ktorá musí bytzvaešená o rozměr došky ventilu.Vacuum valves known to date are either corner or thatched with a plate rotatable about an axially positioned valve cross section sealed to the outer perimeter of a thatch or thatch actuated by a rod that is tilted and, even in an open position, a part of the dowel remains in the opening of the valve. in which the valve plate is pulled out of the valve cross section into the valve body shell or thatch with a rocking motion of the pivot around which the plate is inserted into the valve body when the valve is opened, which must be considered to be the size of the valve flap.

Nevýhodou rohových ventilov, doškových ventilov a doskou otočné uloženou, alebo odklopnou,ktorá celá alebo jej část ostává v priereze ventilu je, že nevyhovuji! v případe, že vo vákuovýchkomponentoch je potřebné viest zvSzok částic elektrónov alebo iónov, pretože ich konštrukcianedovoluje využitie celého prierezu ventilu a zvázok šastic by narážal na došku alebo konštruk-ciu otočného a odklápacieho mechanizmu.The disadvantage of the corner valves, thatch valves and the swivel plate, or hinged, which remain in or out of the valve is that it does not fit! in the case where the electron or ion particle size is required in the vacuum components, since their construction permits the use of the entire valve cross-section and the shackle bundle would impinge on thatch or the construction of the rotary and hinged mechanism.

Nevýhodou vratových ventilov a ventilov s kývavým pohybom došky je velký rozměr talesa,ktoré musí byt zvačšené o rozměr vysúvnej došky, daný svetlostou ventilu a z toho vyplývajúcavelká hmotnost.The disadvantage of door valves and valves with rocking movement of the thatch is the large size of the tales, which must be weighed up by the dimension of the extension dock, given the valve clearance and the resulting mass.

Uvedené nevýhody odstraňuje doškový vákuový ventil podlá vynálezu, ktorého podstata spo-čívá v tom, že teleso ventilu je opatřené púzdrom, ktorého rozměr odpovedá rozměru došky danejsvetlostou prierezu ventilu, oproti ktorému je príruba, v ktorej je uložené posuvné tiahlovykonávajíce vratný posuvný pohyb odvodený bud od rotačného ručného alebo motorického pohybusez skrutku a pohyboví maticu alebo odvodený od pneumatického alebo hydraulického posúvača,pričom tiahlo je vedené vo vodiacom telese, ktoré je spojené s čapom vedeným v kulis.e přítlač-ného rámu pričom kulisa přítlačného rámu je spojená s vodiacim telesom čapom, zachytávajícím posívacie sily odtiahla, ktoré je na svojom druhem konci opatřené koiíkom odpruženým pružinou a zapadajícím svojim druhýmkoncom do drážky došky, ktorá je pósobením posuvného pohybu kolíka v drážke otočná okolo čapuspojeného telesom, delej ventil pozostáva z pevného držiaka, okolo ktorého je kulisa přítlač-ného rámu odklopné! a kyvné spojená cez čapy s přítlačným prstencom, ktorý pósobí na došku pouzavretí prierezu ventilu, pričom medzi doskou a telesom ventilu je vákuové tesnenie, dalšietesnenie je medzi přírubou, v ktorej je uložené posuvné tiahlo, ktoré je utěsněné medzi pří-rubou a telesom posuvného tiahla pružným posuvným vákuovým těsněním. Otvorenie ventilu jeodvodené od posuvného pohybu tiehla, ktoré pósobí cez odpružený kolík vedený v drážke doškya súčasne cez čap vedený v drážke kulisy přítlačného rámu sa odklopí kulisa přítlačného rámu,čím uvolní přítlačný prstenec došku, ktorá sa potom otáčaním okolo otočného čapu odklápa dopúzdra a odkrývá prierez ventilu. Uzavretie ventilu, ktoré je odvodené od spatného posuvnéhopohybu tiahla, je dosiahnuté odklopením došky spal púzdra do prierezu telesa ventilu, pričomdosadnutiu došky napomáhá lažná pružina. Geometria drážky v kulise přítlačného rámu zabezpečujepritlačenie došky přítlačným prstencom až po dosadnutí došky na doraz, pričom translačný pohybtiahla je kompenzovaný odpruženým koiíkom a pritlačenie došky prítlečným prstencom zabezpečujevákuovo těsné uzatvorenie ventilu·Usporiadaním ventilu podlá vynálezu sa dosahuje 2níženiehmotnosti a rozměru ventilu.The disadvantages are eliminated by the thatched vacuum valve according to the invention, wherein the valve body is provided with a sleeve the size of which corresponds to the size of the valve cross-section, opposite to which the flange in which the slide-pulling reciprocating displacement is disposed is derived from a rotary hand or motor drive bolt and a movement nut or derived from a pneumatic or hydraulic slide, the rod being guided in a guide body which is connected to a pin guided in the frame of the pressing frame and the slide frame is connected to the pin guide body capturing the pulling forces of the towing member, which at its second end is provided with a cushion spring-loaded spring and engaging its other end in a notch groove which is rotatable about the pin-body by the sliding movement of the pin in the groove; the bracket around which the thrust frame is tilted! and swingingly coupled via pins with a thrust ring which causes the valve to close the cross section of the valve, wherein there is a vacuum seal between the plate and the valve body, the further sealing being between the flange in which the sliding rod is housed, which is sealed between the lip and the sliding rod body flexible sliding vacuum seal. The opening of the valve is derived from the sliding movement of the valve, which acts through the spring pin guided in the slotted groove simultaneously through the bolt guided in the groove of the sliding frame groove, thereby releasing the thrust ring, thereby releasing the thrust ring, which is then swiveled away by the pivoting bolt and exposes the cross section valve. The closing of the valve, which is derived from the wrong sliding movement of the rod, is achieved by tilting the dowel sleeve into the cross-section of the valve body, while the spring is assisted by the dowel spring. The geometry of the groove in the thrust frame ensures that the thrust ring is pushed down by the thrust ring until the thrust is abutted, while the translation thrust is compensated by the sprung trunnion and the thrust ring presses the valve tightly closed.

Na pripojenom obr. č. 1 je znázorněný nárys v čiastočnom řeze vákuového doškového vevtilupodlá vynálezu v uzavretom stave. Obr. 2 znázorňuje bokorys v řeze. Obr. 3 zobrazuje rez B-B aobr. 4 rez A-A.1 is a partial cross-sectional view of the vacuum thatch according to the invention in a closed state; FIG. FIG. 2 is a cross-sectional side view. FIG. 3 shows section B-B and FIG. 4 section A-A.

Doškový vákuový ventil znázorněný na připojených obrázkoch pozostáva z telesa J., ktoréje z boku opatřené púzdrom 2, ktorého rozměr odpovedá rozměru došky 9 danej svetlosťou priere-zu ventilu, oproti ktorému je príruba 20, v ktorej je uložené posuvné tiahlo 2 vykonávájúcevratný posuvný pohyb odvodený bud od ručného alebo motorického pohybu cez skrutku a pohybovámaticu alebo odvodený od pneumatického alebo hydraulického posúvača, pričom posuvné tiahlo2 je svojim druhým koncom uložené vo vodiacom telese 4, pevne spojenom s telesom 2ř pričomThe thatched vacuum valve illustrated in the accompanying figures consists of a body 11, which is provided with a sleeve 2 in a lateral direction, the size of which corresponds to the dimension of the valve 9 given by the clearance of the valve against which the flange 20 in which the sliding rod 2 is executed is derived. either from a manual or motorized movement through a screw and a movable nut, or derived from a pneumatic or hydraulic slide, the slide rod 2 being supported by the second end thereof in the guide body 4, rigidly connected to the housing 2, wherein

Claims

3, 264848 a sliding rod 2 provided with a pin 5 slidable in the groove 22 of the thrust frame a, and a sliding frame 16 is provided with a pin 6 with its one end extending into the aperture 23 in the thrust frame 7 and the second end fixedly connected to the guiding body with the displacement end a rod 2 with a pin 2 sprung by a spring 19 and engaging with its other end into a groove 24 of the rocker 2 mounted on a pin 10 fixedly connected to the body 2 / with which the bracket 13 is fixed, in which the rocker of the pressing frame 1 is mounted; which is connected by a pin 12 with a pressure ring 21 *, wherein a vacuum seal 17 is placed between the body 11 and the plate 2 and a vacuum seal 2 is placed between the flange 20 and the flange 15, wherein the flange 15 is rigidly connected by a vacuum flexible slide seal 14 s with a sliding rod 2 / wherein the plate 2 is connected by a tension spring 18 disposed in the guide hole 25 Tielesa 4 · The opening of the valve is derived from the sliding movement of the sliding rod 2, which acts by the spring 16 ' sprung by the spring 19 and engaging with its second end into the groove 24 of the slider 2 and simultaneously through the stud 2 guided in the groove 22 of the sliding frame 12 which is the hinged ring 12 is unlocked by means of the pins 22 and the holder 13 to release the thrust ring 12 which is rotated about the pin 10 of the housing 2 and exposes the valve cross-section. The valve closure is derived from the poor movement of the sliding rod 2 by the pin 2 * spring-loaded by the spring 19 and engaging with its second end into the groove 24 of the slider 9, which rotates about the pin 10 and tilts away from the housing 2 into the valve body space 2 * whereby the spring 22 * is assisted in reaching the stop 2 by the stop 21, wherein the geometry of the groove 22 in the cantilever frame 2 secures via the pin 2 the pressing of the pressing ring 11 via the cantilever 2 to the seal 17, which ensures a vacuum-tight closing of the valve, The vacuum-tamper valve according to the invention also makes it possible to perform a throttle function, since it allows a continuous opening and closing of the flow cross-section, hence it is separate. suitable for vacuum devices with the required variable pumping speed controlled throttling, resp. for ion cladding, sputtering or vapor deposition devices, for vacuum space closures of vacuum devices where the opening of a full beam is required, for example, for ion implantation devices or welding electron beams where, for example, electromagnetic valves affect and deflect accelerated ion or electron particles. Compared with other thatched valves of the same light, it is smaller in size and smaller in weight with respect to the design of the thatch shell with a thickness corresponding to the thatch and the casing width. OBJECT OF THE INVENTION Vacuum thatch valve device for closing, opening and throttling a fluid flow through a valve body consisting of a body in which a plate is actuated either by pulling or pivoting about the pin, the plate being diverted when the valve is opened into the body of the valve, characterized in that the body (1) ) is provided with a sleeve (2) on the side, with the body (1) provided with a flange (20) opposite the sleeve (2) from the opposite side, in which the sleeve (3) is mounted in the guide body (4) fixedly connected to the body by its second end (1), wherein the sliding rod (3) is provided with a pivot (5) displaceable in the groove (22) of the sliding frame (7) and the sliding frame of the pressing frame (7) is provided with a pivot (6) in its one end extending into the opening (23) in a thrust frame (7) and a second end fixedly connected to the guide body (4), the end of the thrust rod (3) being provided with a pin (8) spring-loaded u (19) and engaging with its other end into a groove (24) of the dock (9) swiveled on a pin (10) fixedly connected to the body (1) with which the holder (13) is fixedly fixed, in which the pendulum of the pressing a frame (7) which is connected by pins (12) with a pressure ring (11), wherein a vacuum seal (17) is placed between the body (1) and the plate (9) and between the flange (20) and the flange (15) a vacuum seal (16) is provided, wherein the flange (15) is fixedly connected by a vacuum flexible sliding seal (14) to a sliding rod (3), and the plate (9) is connected to a tension spring (18) located in the guide hole (25) body (4). 1 drawing