CS247136B1

CS247136B1 - Photosensitive dielectric composition

Info

Publication number: CS247136B1
Application number: CS831657A
Authority: CS
Inventors: Irina P Stepanova; Vladimir A Sichanov; Natalja A Tichonova
Original assignee: Irina P Stepanova; Vladimir A Sichanov; Natalja A Tichonova
Priority date: 1983-03-10
Filing date: 1983-03-10
Publication date: 1986-11-13
Also published as: CS165783A1

Abstract

Řešeni se týká kompozic citlivých na světlo pro výrobu dielektriokých vrstev, mikroobvodů na silných vrstvách a na keramických podložkách při použiti sítotisku. Cílem řešeni je zvýšení rozlišovací schopnosti kompozice citlivé na světlo a zlepšeni jejích reologických charakteristik. Kompozice citlivá na světlo zahrnuje: olovnaté sklo 0 rozměru částic 0,2 až 2,5 um, 1,2-naftochinondiazid citlivý na světlo, fenolformaldehydóvou pryskyřici, organické rozpouštědlo a butadiennltrilovy kaučuk strukturního vzorce: I Γ-βΗ2 - CH = CH - CH2“]m “ E“ CH2 “ CN 6 střední molekulové hmotnosti 200 000 až 900 000, přičemž je jako organická , rozpouštědlo použit aioxaThe solution relates to compositions sensitive to light for the production of dielectric layers, microcircuits on thick layers and on ceramic pads when using screen printing. The aim of the solution is to increase the distinctive the ability of the light sensitive composition to a improving its rheological characteristics. Light sensitive composition includes: lead glass 0 particle size 0.2 up to 2.5 µm, 1,2-naphthoquinone thiazide sensitive light, phenol formaldehyde resin, organic solvent and butadiene nitrile rubber of the structural formula: AND Γ-βΗ2 - CH = CH - CH2 "] m" E "CH2" CN 6 average molecular weight 200,000 up to 900,000, being organic, the solvent used aioxa

Description

1 H9o6peTeH> te othochtch ΚΜΗκρο3πεκτροΗΗκβ and ημθηηο to cBeTouyBCTBHTeJih-WUH ΚΟΜΠΟ3ΗΒΗΒΜ flJIH Η3ΓΟΤΟΒΠβΗΗΗ AHSJíekTpHMeCKHX CJIOeB TOJICTOnneHOHHblXMHKpocxeM Ha xepaMHHecKHx noAJioxxax c Hcnojib3OBaHHeM μθτοακ ceTKorpagmii.

HsBecTHa CBeTonyBCTBHTejibHaH κομπο3ΗΗηη Fína HaroTOBJíeHHH gHaneicTpHBec-khx cnoeB TOJiCTonneHoqMbK MHKpocxeM, BKJHonatomaH CBHHeucoAepxaiqee CTex.no, NO / iHMepHoe CBaayromee Ha ocHOBe noJiHaxpunaTOB, nonHMepHaauHoHHocnocoCHbieMOHOMepbl aKpHnaTHOrO pflA, φΟΤΟΗΗΗΑΗβΤΟΡΜβΤΗΠΟΒΜή 3φκρ 6eH3OHHa, ΗΗΓΗ βΗΤΟΡΗΗΤρΟΒΟΑΗΜβρΗΟβ Coe ~ ^ HHeHHe, OKHCHOe COeflHHeHHe XpOMa paCTBOpHTeJIb • H O).

HeflocTaTKOM Taxoň komiioshhhh ΗΒΠΗβτοΗ cpaBHHTenbHo Hnaxaa paapemaioqaacnocoCnocTb, C noMoqbio Taxon ComoHiQiH ynaeTCH nonywHTb pa3Mep

HanCoJiee ÓJinaxoň NPE x ^ jipxeHHoň ΗΒΠΗβτοη CBeTonyBCTBHTejibHan χομπο3ηηηηΑΠΗ nojiyqeHHfl ρβπΒβφΗΟΓΟ HsoCpaxeHHH b cnoe rjia3ypH, BKJHonawmaa cBHHeuco-Aepxantee cTexno pasMepoM nacTHii 0.43 to 4.0 mkm, CBeToqyBCTBHTenbHbift Ι, ζ-Ηβφ-TOXHHOHAHarHA, HOBOJianHyiO φβΗΟΠφοΡΜβΠΒΑβΓΗΑΗν »CMOJiy H OpraHHtjeCKHň pac-TBopHTenb (2)

HeflocTaTkoM H3BecTHoň κομπο3Ηβηη ηββηθτοη HeBbicoxaa paspemamkaa cnocoC-HOCTb (6onee 125mkm). KpOMe roro, HSBecTHaa κομπο3ηαηη ΗΜββτ itnoxHe pe- - onorHnecxHe CBoňTBa, hto He nosBOJineT HcnojtbsoBaTb ee απη HarieceHHH Me-OflOM τρβφβρβτΗοή nettaTH.

Uejib HsoCpéTeHHH - noBbHHe paspemama citocoChocth cBeTouyBCTBHTejib-HOft Κ0ΜΠ03ΗΑΗΗ PflU H3rOTOBJieHHH flH3JieXTpHneCXHX CJIOeB TOJICTOnJieHOHHbK MH-KpocxeM h yjiyqmeHHe ee peojiorHqecxnx xapaKTepHCTHK. IIocTaBJíeHHafl uenb AocTHraeTcn τθμ, HTO CBeTonyBCTBHTejibHaH komiioshahhΑΠΗ Η3ΓΟΤΟΒΠβΗΗΗ ΑΗ3ΠβΚΤρΗΗβΟΚΗΧ CJIOeB TOJICTOIUieHOHHbK MHKpocxeM, BKJHOHa-iomaH CBHHeucoflepxamee CTex.no pa3MepoM nacTHij 0,5-2,5 mkm h noaHTHBHbift (froTopeaHCT, cocTOHnpiň H3 CBeTonyBCTBHTejibHoro KOMnoHeHTa, mero-luieHkooSpasyio ΚΟΜΠΟΗβΗΤβ HOBOnaHHOň φβΗΟΠφορΜβΗΒΑβΓΗΑΗΟΑ CMOJIbl ΜΟΠ. Μ. 700 H OpraHH "necxoro pacTBopHTejw, conepatHT b xanecTBe CBeTonyBCTBHTejibHoro κομποηθη Τβ-1,2-Η8φΤ0ΧΗΗ0ΗΑΗΒ3ΗΑ- (2) -5-0νΠΒφ03φΗρ6ρ0ΜΗρ0ΒβΗΗ0ή HOBOJiaMHoň φβΗΟΠ- <J> opMan bfle γη qHoň CMonbi b xanecTBe opraHHnecxoro pacTBopuTenn - p noxcaHh AotiojiHHTejibHo CyTaflHeH-HHTpujibHbi xaynyx CTpyKTypHoft ýopMyjibi 247136, 2 ·

[-ch-ch = ch-ch -] - [- ch -ΗΗ-ίκ2 7 '"CN cpeflHen my.free 200000-300000, coflepxamnn 19,5-41 Mac.Z HHTpHJia axpHJioBooKHCJioTbi, 59-80,5 Mac .OrTaaneHa h apoMaTHnecKHn yrjieBOflopofl, Bbi6paHHbHH pafla Tojiyoji, o-kchjioji, m.kchjioji npn cnenyromeM cooTHomeHHH κομποηθητοβ, Mac, Z: CBiiHeiíCOflepxamee CTexno 40,4-60,0 1,2-Ha $ TOXHHOHflHa3Hfl (2) -5- —CyjII>4> O3 <l> HP 6pOMHpOB3HHOft HOBOJiaqHoň cmojiw 4,5-r8,6

HoBOJiaqHaa φβΗοπφορΜβΛί »-

AeraAHaa cMOJia1 moji.m. 700

JlHOKcaH

ByTaflHeH-HHTpHJibHbiň xaywyKApoMaTriqecKHn yrjieBOflopoflH3 yKa3aHHoro pafla 7.5-14.4 14.2-27.8 1.0-2.5 7.8-12.2

KpoMe Toro, κ0ΜΠ03Ηΐρ Tarase μοχθτ coflepxaTb 0.1-5.0 Mac.q. ot-TH-H-Heojia hjih CMecH oL -TepnuHeona ch-SythahoJioM b bgcobom οοοοτιοοιπθηηη 1: 0,1 — 1: 1 '. '. Be ef ef TH TH TH TH TH TH TH TH TH TH TH TH TH TH B B B B B B B B B 50 50 50 50 50 50 50 200000-300000 o6men φορΜγιιω.

í-chq-ch = CH - ch2 -] ^ - [- ch2- ch -] hCN coflepxamHn 19.5—41 Mac.Z HHTpHjia axpHjioBofi khcjiotm, 59-80.5 Mac.Z 6yTa-flHeHa. B KaqeCTBe ΠΟ3ΗΤΗΒΗΟΓΟ .φοΤΟρββΗΟΤβ KOMnO3HflHH COflepXHT φθΤθρβ3Η0Τ, ΗΜβΚ) -nraň cneayiomHH eoCTaB, Mac.Z: 1,2-Η3φτοχΗΗθΗΑΗβ3ΗΑ- (2) -5-ονιπ> φθ3φΗρ βροΜκροήBaHHaa HOBOJianHaa φβΗοιιφορΜαπΒΑβΓΗΑΗβΗ cMOJia 8.63; HOBOJianHaa φβΗοπφορΜβιΐΒ '*' flerHflHaa CMOJia moji.m. , 700, 14.37; flHOKcaH 77.0. B npHMepax η φορΜνιιβ H3o6peTeHHH coflepxaHHe ^ oTopeancra npHBefleHo nocyxoMy ocTaTKy, nocxojibxy KOHfleHTpaflHH φοτορββκοτβ b pacTBope He HBJiaeTcanOCTOHHHOH. B xaqecTBe apoMaTHnecKoro yrjiesoflopofla b KOMflosHqHH HcnoJibayioT OJOJiyoJl, O — OKCHJIOJI HJIH M-KCHJIOJI.

Bbi6op cTexjia b komiioshuhh onpefleJiflteTCH TeMnepaTypoň βχηγηηηη h Tpe6ye-MbJMH 3JieKTpOTeXHmeCKHMH napaMeTpaMH ΟφορΜΗρΟΒβΗΗΗΧ flH3JieKTpHMeCKHX ΐυίβΗΟΚ.CymecTBeHHoro bjihhhhh Ha paspemaiímtyio cnocobnocTb coctsb cTeicna oxa3biBa Ile-βτ. IIpuMeHaeMbie CTexjia ημθιοτ cjieflywinHn cocTaB, Mac.Z: cocTaB I PbO 45.5 SiO 2 ZnO 29.5 18.5 TiO, 4.0 ai, o3 2.5 cocTaB II • PbO 62.0 b2o3 5.0 MgO 2.5 247136 3

SiO2 cocTae III 30.5 PbO 26.3 SiO2 30.7 AI2Oj 0.6 b4o3 5.2 MgO 1.3 BaO 24.2 CaO 5.8 SiO 3.1 ZrO2 2.8

PaaMep MacTHU HcnoJibayeMoro b -KoMoCo CBHHeucoAepMamero CTexna coc-τβΒΠΗβτ 0.5-2.5 mkm. PasAejiHTb qacTHiyd Ha oTflejibHbie φρβκμΗΗ HeeoaMoxHo. HHTerpanbHyw xpHByio pacnpenejiennH gHcnepcHocTH πρκΜβΗαβΜΟΓο CTexjia on-peflenHMT MeřoAOM ceRHMeHTauHK Ha πΗπβτοπΗοή ιχβΗτρΗφγΓβ.

KoMnosHipiio HaHocHT Ha KepaMHuecKHe ποαποχκη K3 BaKyyMHo-nJioTHoň KepaMH — kh Ha ocHOBe okhch ainoMHHHH 'qepéa KanpoHoeyw cexxy pasMepoM ηηθΗκη58x58 mkm. . flna HaHeceHHH μθτοαομ οβτκοΓρΠφΗΗ κομπο3Ηηηη flojEKHa oCnanaTb saaaHHMMHpeoJiorHwecKHMH CBoňcTBaMH (cBoňCTBaMH reKýqecTH) - onpeflejieHHoň-33bhchmoc Tbk> Mexfly ΑβφορΜβιριβΰ ee CKopocTbw η πρηποχβηημμ MexaHHwecKHM HanpnxeHHeM.IlacTa He AonxHa προτβκβΤΒ qepes «qeňKH έβτκκ τρβφβρβτβ, pacTexaTbea the NPE-pentaene OTTHcxa Ha noflnoxKe, ofipaaoBbiBaTb ηητθΗ ("τηχθΗ") πρκ οτκβηβΗΗΗ τρβ-φβρβτβ. IIpefljiaraeMaH κομπο3ηι | ηη ygOBJIeTBopMeT BceM sthm τρβδοΒβΗΗΗΜ. Πρκ-ΜβΗβΗΗβ npeffjiaraeMoň κοΜπο3ΗΐξΗΗ Ha KepaMHuecKHx noRnoxKax c HcnojibsoBaHHeMΜβτοΑβ οβτκοτρβφΗΗ nosBOJiHer nonyqHTb paspemeHHe 50-65 mkm. Π p η mep 1. B φβρφοροΒοϋ qanme CMeniHBawT 2.64 r 11.4% -ηογο pacTBopa b Tonyojie 6yTa-AHeH-HHTpanhHoro KaynyKa cpeaHeft μοπ.μ. 300000 cTpyKTypHoň φορΜγηΜ (1) 41% coflepxamero HHTpmia axpHJioBoň khcjioTm h 6yTanneHa 59%, 15.24% r45,3 -Horo pacTBopa (b nepecqeTe cyxoň οοτβτοκ Ha) b AHOKcaHe πο3Ητηβηογοφοτορββκςτβ h floGaBjuiioT 12 -12 r CBHHeueoAepxamero cTenna, conepxamero% :

PbO 45.5; SiO2 29.5; ZnO 18.5; TiO2 4.0 h Al203 2.5 pasMepoM qacTHH 0.5 -2.5.MKM. 9οτορββΗοτ conepxHT 2.59 r 1,2-ηβΦτοχηηοηΛη33ΗΑ (2) -5-cyjH ^ Q3 <«ipa 6pomh-pOBaHHOft HOBOJiaqHOň (JeHOJBjjOpMaJIhflerHflHOň CMOHbl, 4,31 HOBOJiaqHO φβΗΟ-Π-φορΜβΛΒΑβΓΗΑΗοή cmojdu moji.m. 700 h 8,34 r AHOKcaHa. CMecb TinaTejihHo neperapaioT c qenbw roMoreHHsaumi h ycpenHeHHH cocTaBaCHanajia b φβρφοροΒοϋ Hanmi b TeneHtie 5 MHH and sare Ha nacTOTepxe c xanpo-HOBblMH BaJIKaMH b ΤβΗβΗΗβ 30 MHH. IIOJiyqaWT CBeTOqyBCTBHTeJIhHyiO ΚΟΜΠΟ3ΗΗΗΗ) c BHsKocTbio, oGecneqHBawmett xoponme peojiornqecKHe xapaKTepHCTHKH ajih Hahei-ceHHH MeToflOM τρβφβρβτΗοϋ newaTH, cneflywmero cocTaea, Mac.%: CBHHeucoAepxaniee οτβκπο 40.4 CBeTOHyBCTBHteJIbHUft ΚΟΜΠΟΗβΗΤ 8.6 HOBOJiaHHaH φβΗΟηφορΜΗΠΒΑβΓΗΑΗβΗCMOJia moji.m. 700 14.4 flHoxcaH 27.8

ByraAHeH-HHTpHJibHuň xayqyK 1.0

Tonyoi 7,8 nonyqeHHyio CBeToqyecTBHTenbHyw κομπο3ηαη »ηηηοοητ Ha xepaMHqecKHe nofl-jioxkh qepes KanpoHOByn cerKy Ha yDaHOBKe HaHeceHHH h cyniaT Ha BO3flyxenpn 80 ° CB TeqeHHe 20 mhh. Ónepaunn HaneceHHH h cynmH ποβτορηιοτ flBaxAbi h 247136 BbicynienHoe ποκρωτκβ, HMeromee TOJiupiHy cjioh 35mkm. BbicyroeHHbiň cnoňCBeToqyBCTBHTejihHoň κομπο3ηιι, ηη 3KcnoHHpyroT b τβκβΗΗβ 1.5 MHH pTyTHoň JiaM non-Bt 375 MÓiuHOCTbio nepe3 ýoTomaĎjiOH c TonojiorHnecKHM pHcyHKOM, hjih online pefleneHHH pa3pemaroqeň cnoco6riocTH what «epxamnM jihhhh mupHHoft 25-200 mcm hpaccTOHHHeM Mexfly hhmh 25-300. mkm. Ilocjie 3KcnoHHpoBaHHH cjioň npoHBJlHWT0,5% hmmm paCTBOpOM ΤρΗΗβΤρΗβφΟΟφβΤβ, npOMblBaWT BHCTHJIJIHpOBaHHOň BOflOH, cymaT npn 150C b Tewemie 60 h MHH BMHraroT b KOHBeňepHoň newn NPH 750 ° C.ToJinpiHa ΒΟ3Χ6ΗΗΟΓ0 cjioh cocTaBJíHeT 21 mkm. B peKybTaTeT TaKoN o6pa6oTKHb flH3JieKTpHqecKOM cjioe o6pa3yioTCH KaHajibi. lUnpHHa khhjjiob, HSMepeHHan c no-Mombro MHKpocKona, cocTaBJíHeT 60 mkm. ΠρΗΜβρ second CBeTOHyBCTBHTeJibHyro κομπο3ηιρ «ο γοτοβητ aHaJiorHHHo npHMepy first BepyT'4,14 r 11.6% -ηογο pacTBOpa bo-Kcroiojie SyTanijieH-ηητρκπβηογο KaynyKa, ana-ιιογηηηογο npHMepy jcMenwBawT 1 c r 10.86 45.3% -ηογο pacTišopa (b nepecneTeHa cyxoň ocTatok) b AHoxcaHe π03Ητηβηογο φοτορββκοτβ, cocTonmero H3 .1,84 r-1,2-HaφτoxHHOH flHa3H1 ^ - (2) -5-cyJIbφo ^ φHpa 6poMHpoBaHHoň HanojianHoň φεΗοπφορ-MaJIbnerHflHOH CMOJIbl 3.08 T HOBOJiaHHOft φβΗΟηφορΜβΠΒηβΓΗηΗΟή CMOJIbl H 5,94 HOAHOKcaHa, nocjie nero noSaBJiHWT 15,0 r CBHHenconepmamero CTeKJia pa3MepoMnacTHn 0,5-2,5 mkm.

CocTae κοΜπο3ΗΐχΗΗ cJienyromHň, Mac.Z: CBHHeitconepjKamee CTeKJio 50.0 CBeTOHyBCTBHTejIbHMň ΚΟΜΠΟΗβΗΤ 6.2

HoBOnaHHflH φθΗΟΙίφορΜΗΙΙΒΑβΓΗΗΗΗΗ CMOJia moji.m. 700 10.3 flnoKcaH '19.7

ByTaflHeH-HHTpHJibHbiťi KayuyK 1.6 o-Kchjioji 12.2.

Cojoh cocTaBJiHeT 35 mkm, TOJimHHa sosxeHHoro cjioh21, -2 mkm.

Pa3pemawntyio cnóCoóHOCTb κομπο3ηπηη onpenejinioT aHanorHHHo npHMepy 1, honpH ΒρΒΜβΗΗ 3ΚΟΠΟΗΗΡΟΒ8ΗΗη'2 ΜΗΗ. 0-3 COCTaBJlHeT 65 MKM. ΠρΗΜβρ 3.

BepyT 4.14 r 18.1Ζ-ηογο pacTBOpa b o-KCHJioJie 6yTaflHeH-HHTpHJibHoro Kay-nyKa, aHajiorHHHoro npHMepy 1, him what cpeflHen my. m. 200000, CMenwBaroTC7,86 r 45,3Ζ-ηογο pacTBOpa (b unseen Ha cyxoon oct3tok) b nHOKcane no-3ΗΤΗΒΗΟΓΟ φθΤθρβ3ΗΟΤβ, ΟΟΟΤΟΗΒξβΓΟ H3 1,35 Γ Ί, 2-Η3φΤΟΧΗΗΟΗηΗ33ΗΠ “(2) -5 ~ ΟνίΙΒφΟΘφΗρβ CMOJIbl, 2.25 ojHosojianHoň φβΗοπφορΜΗΐι & πθΓΗΗΗθΗ cmoji ^ i η 4.26 r flHOKcaHa. no6aBJiHK> T 18,0 rcBHHencoflepMamero CTexjia pa3MepoM nacTHn 0,5-2,5 mkm.

CojTaB nojiyneHHoň CBeToqyBCTBHTéJibHoň κομποβηηηη CJienyrómHň, Mac.Z: CBHHencoflepxamee cTeKJio 60,0 CBeTonyBCTBonTejibHBin κομποηθητ 4,5 HOBOJiaHHan φβΗΟΙΐφθρΜ3ΠΒΗβΓΗΠΗ3Η CMOJia moji.m. 700 7.5 AHOKcaH '14.2

ByTaflHeH-HHTpHjibHbiň KaynyK 2,5 o-Kchjioji -11,3

TojinpiHa BbicyineHHoro cjioh 35.3 mkm, TOJinpiHa BoaaceHHoro cjioh 21.0 mkm.Pa3pemaromaH cnocoCHOCTb κομπο3ηηηη cocTaBJiHeT 65 mkm πρκ βρθμθηη skcoo-HHP0B3HHH 2.5 MHH. 5 247 136 ΠρΗΜβρ fourth CBeToqyBCTBHTejibHyio κομπο3Ηαηκ> γοτοβητ βηβποτημηο npHMepy 1 h with 2.1% r7,1 -ηογο pacTBopa Tojiyojie 6yTaAHeH β-HHTpHJibHoro KayqyKa, aHajiorHHHo- · 'ro npHMepy 3 12.0 r-41,2Ζ ηογο pacTBopa (b nepecqeTe cyxoň οετβτοκ Ha ^ .Β AHOKCaHe ΠΟ3ΗΤΗΒΗΟΓΟ φθΤθρβ3ΗΟΤβ, H3 1.85 ΟΟΟΤΟΗΠξβΓΟ Γ-1,2-ΗβφΤΟΧΗ ΗΟΗΛΗβ3ΗΑ- (2) -5-θνηΒφθ3φΗρΒ CpOMHpOBaHHOň HOBOJiaMHOft φβΗΟΠφορΜΒΠΒΑβΓΗΑ-Hoft CMOJIM 3.09 Γ HOBOJIdHHOft φβΗΟΠφορΜβΛΒΑβΓΗΑΗΟή CMOJlbl H 7.06 HO flHOKCa * Ha, 15.9 r cBHHeucoAepMaiuero cTeKJia paaMepoM uacTHy 0.5-2.5 mkm.

CocTaB κομπο3Ηαηη cJienywqHfl, Mac.Z: CBHHeucoflepxamee cTeKJio 53,0CBeTOHyBCTBHTeJIbHMft ΚΟΜΠΟΗβΗΤ 6,2HoBOJiaHHaH φβΗΟΠφορΜβηΒΑβΓΗΑΗΒΗ CMona moji.m. 700 10,3flHoiccaH 23,5ByTaflHeH-HHTpHJibHbiň KaynyK 0,5TojiyoJi 6,5

TojinpiHa BbicymeHHoro cjioh 35 mkm, cojo 21, mojo. ΠρΗΜβρ fifth CBeTOHyBCTBHTenbHyio κομπο3ηαηκ> γοτοβητ aHanorHHHO npHMepy 1 h with 5.1% r18,8 -ηογο pacTBopa b Tojiyojie 6yTaflHeH-HHTpHJibHoro KayqyKa, aHaJiorHq ηογο npHMepy-1 50.0% 9.9 r -ηογο pacTBopa (b nepecqeTe Ha cyxoft οοτβτοκ) B AHOKCaHe ΠΟ3ΗΤΗΒΗΟΓΌ φθΤθρβ3ΗΟΤβ ΟΟΟΤΟΗΠξβΓΟ H3 1.86 Γ-1,2-ΗβφΤΟΧΗΗΟΗ ΑΗβ3ΗΑ- (2) -5 'θνΠΒφθ3φΗρ3 CpOMHpOBaHHOň HOBOJiaHHOft φβΗΟΠφθρΜ3ΠΒΑβΓΗΑΗθΑCMonbi 3.10 r ^ HOBona Hoft φβΗοηφορΜβηΒΑβΓΗΑΗοϋ cmojim 4.94 AHoxca h15,0 r r CBHHeucoAepxantero CTexjia paaMepoM nacTHA 0.5-2.5 mkm.

CocTaB κομπο3Ηιι; ηη cjiegyiantHft, Mac.Z: CBHHeijcoflepjKamee cTeKJto 50.0 CBeTOHyBCTBHTeJIbHblň ΚΟΜΠΟΗβΗΤ 6.2

HOBOJIAMHaH (JieHOJHjlOpMaJIbflerHflHaH MY MY 700 700 10.3 ΠΗοκοβΗ 16.5

ByTaflHeH-HHTpHJibHbti KayqyK 3.2

Tojiyoji 13.8 IIoJiyHeHHaH cBeTonyBCTBHTejtbHaH κομποβηαηη ΗΜββτ ιυιοχκβ peojioruvecKuexapaxTepHCTHKH: NPH HaHeceHHH Ha nofljioxxy ΜβτοβοΜ τράφβρβτΗοΰ neqaTHOHa saSHBaeT τρβφβρβτβ trinkets, κροΜβ τογο, HaHeceHHbift cjioň ΗΜββτ nepoB-HYW KpaTepooSpasHyio noBepxHocTb, sixth ΠρΗΜβρ 'CBeToqyBCTBHTejibHyn KOMnosHipno γοτοβητ aHajiomuHo npHMepy 1 hs2,64 r Γ1, 4Ζ-ηογο pacTBopa b Tojiyojie 6yTaflHeH ηητρκπβηογο xayqyxa-AHA-ηογηηηο npHMepy 1 10.86-r 45,3Ζ ηογο pacTBopa (b nepecqeTe cyxoftocTaTOx Ha) b AHoxcaHe πο3ητηβηογο φοτορββκοτβ, cocTóHnero H3 1.84 r1,2-HaφTOXHHOHAHa3Hfl- ( 2) -5-CyJIbφO φHpa GpOMHPOBaHHOft HOBOJiaHHOft φβΗΟΠ- ^ opMaJibnerHAHoft cmojim, 3,08 r HOBOJiaqHo φβΗοιιφορΜβιίΒηεΓΗΑΗοή cmojim, 5,94 r AHoxcaHa h 15,0 r CBHHencoflepxamero cTeic 1 pasMepoM qacTHix0,5-2,5 mkm. AonoJiHHTejibHO β κομπο3ηπηκ) bboaht 1,5 rd - TepnHHeojia.

KoMnosHUHH ΗΜββτ cjieflywmHň cocTaB, Mac.Z: CBHHeuconepxanieé cTéxjio 50.0

CeeToqyBCTBHTejibHMft κομποηθητ 6.2 247136 '6

HoBonaMHaa (J) enonýopMajibflerHflHaH CMona my.700 10.3 flHokcaH 19.7

EyTajiněH-HHTpanbHyny KaynyK 1.0

Tojiyoji 7,8

Ol-TepHHeoJi 5.0

TojimHHa BMcymeHHoro cjioh cocTaBJinT 35 mkm, TOJimHHa BosxeHHoro cjioh21 mkm. Pa3pemawmyio cnocoÏHocTb κομπο3ηιιηη onpeAeJiH »T aHiJiorjiHHO npHMe-py 1. OH and cocTaBjíaeT 50 mkm. 7. CBeTOHyBCTBHTejihHyro κομπο3ηιιη »γοτοβητ aHajiorwiHo npHMepy 6, ho hc-n0JiB9y» T CMecb H3 0.75 rdl-TepnHHeoJia h 0.75 r H-CyraHOJia.

CoCTaB ΠΟΠΥΜβΗΗού ΚΟΜΠΟ3ΗΑΗΗ CJieflyKXHHn, - $ Mac. %: CBHHeycoflepjKamee οτβκπο 50.0 CBeTonyBCTBHTejihHMft κομποηθητ 6.2

HoBOJiamiaft <freHoji <$ opMajibAerHaHaH CMOJi moji.m. 700 10.3

JfHOKcaH 19.7

ByTaAHeH-HHTpujibHhiň KaynyK 1.0

Tojiyoji 7,8 c fc-TepnnHeoji 2,5 H-ByTaHOJi 2,5

TojHtytma BMcymeHHoro η βο3χθηηογο cJioeB and HanoruHHa npHMepy 6. Paspemaio-my »cnocoóHOCTb ΚΟΜΠΟ3Η1ΧΗΗ onpeflejiaioT βηηπογηηηο npHMepy 1. She cocTae-ππβτ 50 mkm. ΠρΗΜβρ 8. CBeToqyBCTBHTejibHyio AH3JieKTpHnecKyio κομπο 3Hipoo γοτοβητ aHajiornnHO πρκ-Mepy 1 H3 4,11 r 10,9% -ηογο pacTBopa β 1,3-flHMeTnn6eH3OJie (M-Kctuiojie) 6yTaAneH-HHTpHJibHoro xayuyxa moji.m. 200000 c KOHqeBhiMH MeTaKpHjiaTHMMH rpyn-naMH, coAepxaqero 19,5% HHTpHna aKpnnoBOH khcjiotm, 80,5% 6yTaflHeHa h 10,86 r 45,3% -ηογο pacTBopa H3 1.84 r 1.2-ηβΦτοχηηοηαη33ηα- (2) -5-cyjib <t> O3 $ Hpa 6pOMHpoBaHHoo HOBOjiaMHoň $ eHOJi <t> opMaJibflerHflHoft cmojim, 3,08 rHOBOJiauHoň 4>eHOji4> opMajibflerHflHoft , 94 rH-oxa-h 15.0 r CBHHeucoAepxamero cTeiuia pMMoPoM nacTHii 0.5-2.5 mkm.Ao-nojiHHTenbHo β κομπο3ΗΙΙΗ »BBOflHT 0.03 rd.-TepnHHeona. ÍtΠΟ3ΗΙΙΗΗ ΗΜββΤ CJieflyKHGet COCTaB, Mac.%: CBHHeucoflepxamee οτθκιιο 50,0CBeTOMyBCTBHTejibHbift κομποηθητ 6,2HoBOJiawHafl φβΗΟΙίφορΜβΑΒΑβΓΗΑΗβΗ CMOJia moji.m. 700 10,3AHOKcaH 19,7ByTaAHeH-HHTpHJihHNn KaynyK 1,5m-Kchjioji 12,2d-TepnHHeoJi 0,1.

Tonnyma BMcymeHHoro h eosxeHHoro CJioeB aHaJiorHMHa npHMepy 6. Paapema »-myro cnocoSHocTb κομπο3ηιιηη οπρβηβηκιοτ aHajiorHHHo npHMepy 1. OH and cocTaBna- -βτ 55 mkm. 'ΠρΗΜβρ ninth CBeTowyBCTBHTeJibHyw κομπο3ηιιη »γοτοβητ aHanorHHHo npHMepy first r10,6 2.82% -ηογο pacTBopa b TOJiyojie 6yTaflHeH-HHTpiuibHoro KaywyKa, aHanorHWHoronpHMepy 8 CMemneaioT c r 10.86 45.3% -ηογο pacTBopa (b nepecweTe Ha cyxoň 247136

οετβτοκ) b ffHOKcaHe πο3Ητηβηογο φοτορβ3Ηοτβ, cocTonmero H3 r 1.84 1,2-ΗβφΤ0ΧΗΗ0ΗΑΗ33ΗΑ ~ (2) -5-εγΠΒφ09φΗρβ ČpOMHpOBaHHOft HOBOJiaHHOň φβΗΟΠφορΜβ ^ Β-flernflHoň CMOJibi 3.08 r HOBonauHoň φβΗοιιφορΜβίΏββΓΗΑΗοΗ cmojiu 5.94 pu r-OKCaHa h 15.0 r CBHHeuconepxamero CTexna pasMepoM nacTHU 0.5-2.5 mkm. -RononHKTenbHO b comhoshuhio ββοαλτ 1,32 r CMecHoL-TepnHHeona h H-CyTaHOJiaB BecoBOM cooTHomeHHH 1: 0,1. ,0ομποβηπηη ΗΜββτ cnenyioniHn cocrae, Mac.X: CBHHeqco, nepKaiqee 50,0CBeToqyBCTBHTejibHUii κομποηθητ 6,2HoBOJiaMHaa φεΗΟΠφορΜβΠΒ, ηβΓΗΑΗΗΗ CMona moji.m. 700 10,3AKOKcait 19,7ΒγτβΑΗβΗ-ΗΗτρΗπ & ΗΜβ KaywyK 1,0Tonyon 8,4ct-Tepranieon 4,0H-ByTaHOJ 0,4.

ToxtnpiHa BucymeHHoro h BoaxeHHoró cnoeB aHanorHHHa npiíMepy 6.

Paspemaioqyio cnocodHócŤb κοΜΠθ3ΗμιΐΗ onpeflennwT aHanorcreHo npHMepy 1.

She cocTasnaeT 50mkm. ΠρκΜβρ 10. · ΠρΗΓοτοΒπβΗΗβ CBeToqyBCTBHT & nbHoft KOMnosHUHH, ne coflepxameň pacTBop6yTaflHeH-HHTpHjibHoro Kaynyxa b apoMaTmecKoM yrneBonopone. B φβρφοροΒΟήqaiuKe cMewHBaíoT 12.0 r CBHHenconepxamero cTexna paeMepoM nacTHu; 0,5-2,5 mkm c 18,0 r 19,50% -ηογο páCTBopa (b non-Ha Ha cyxott οο.τβτοκ) bAHOKCaHe Π03ΗΤΗΒΗΟΓΟ φθΤθρβ3ΗΟΤβ, COCTOHMCrO H3 1,32 Γ 1,2-ΗβφΤΟΧΗΗΟΗηΗ-a3Hfl- (2) -5-Ογ, ΠΒφΟΒφΗρβ epomhpOBaHHOň HOBOJiaHHoň φβΗΟπφορΜβΗΜβΓΗΑΗΟβ CMO-Jlbl, 2,19 Γ HOBOJiaHHOň φεθθφφρΜ37ΙΒηεΓΗ £ Ηθή CMOJIbl H 14,49 Γ AHOKCaHa, HHMeiomero bh3koctb 60 clí. CMecb TmaTejibHo nepeTHpa »T c is not.» RoMoreHHsanHHh ycpeflHéHHH cocTaea b 3 ο ή e e ρ,,,,,,, ec ec ec ec ec ec ec ec ec ec ec ec ec ec o o o o o

Komhoshumh ΗΜββτ cneflywmHM cocŤae, Mac.Z: CBHHeucoflepxamee οτβκηο 40,0 CBeTOMyBCTBHTeJIbHblft ,40ΠΟΗβΗΤ 4,40

HoBOJlaMHaH φβΗΟΠφορΜβπΒΑβΓΗΑΗβά, CMona moji.m. 700 '7.30 AHOKcaH. 48,30 IIpHroTOBJíHHyn komiioshixhio ΗβΒΟΒΜΟΧΗο HaHecTH pobhum cnoeM Ha noflJioxKyΜβτοΑΟΜ ββτκοΓρβφΗΗ ,. τβκ κβκ she "οτβκββτ 'c' h paxenn páCTeKaeTCH amino-nOFL ηοχκβ. YKasaHnyto κοΜποΒΗμκιο HaHocnT Ha ιχβΗτρΗφγτβ oOpaCoTKy h. cjioh npoBo-ρατ aHanornnHo npHMepy first Paapemaioqyio cnocoCHocTb κομπο3Ηηηη onpegenflioTaHajiofHHHO npHMepy first οοοτβΒπηβτ OH and 100 mkm. IIpennaraeMaH CBeŤonyBCTBHTenbHan κομπο3ΗΙ | ηη PNA HsroTOBneHHH ηΗ3Πβκτρκ-yecKHX cnoeB ToncTonneHonHux MHKpocxeM ΗΜββτ Cone BucoKyn well cpaBHeHHWc HseecTHoň páapemanmyio cnócoCHocTb, oCecnenHBaiomyio noJiyneHHe KaHanoB bcnoe. # H3JieKŤpHKa mHpHHoft 50-65 mkm. 3to nosponneT sHanHTenbHo yBenHMHTbnnoTHocTb pacnonoxeHHH 3JieMeHTOB b ToncTonneHonHbix ΜκκροβχβΜβχ, τβΜ ohmůmnoBMCHTb βτβηβΗΒ HHTerpaiiHH MHKpocxeM after TpeTbero ypoBHH. npennaraeMaa komiioshuhh o0na # aeT χοροπζημη peonorHnecKHMH χβρβκτβρκοτκ-KaMH, mto nosBonneT HaH0CHTb.ee ΜβτοηοΜ τρβφβρβΤΗοϋ πβΗβτΗc Hcnojibsosa-. ΗΗβΜ Tpa nHnHOHHOrO oCopyflOBHHHH flJIHH3 ΓΟΤΟΒΠβΗΗΗ TOJICTOIUieHOHHblX MHKpocxeM. 247136 8 ΦΟΡΜΥΛΑ Η3ΟΒΡΕΤΕΗΗΗ

CeeToqyBCTBHTeJibHaH κομποβηήηη jjjih η3γοτοβπβηηη ΑΗ3Ηεκτρπ <ιεεκΗχ cnoeBTOJICTOnjI8HOHHbIX MHKpOCXCM Ha KepaMHHeCKHX nCWIOXKaX H3 OKHCH aJIJOMHHHH cHcnojibsoBaHHeM MeTOfla εετκοτρεφκΗ, BKJitoqaiontaH CBHHeuconepxantee ctokjio PAA MEPO naCTHU 0.5-2.5 ΜΚΜ IIO3HTHBHblň φθΤθρβ3ΗΟΤ H, H3 COCTOflmHň CBeTOMyBCT-BHTejibHoro KOMnoHGHTa, nnoHKooepaayramoro κοΜποΗβΗτβ - HOBOjtauHoň φρΗοπ -4> opMajibAorHHHoň cmojiu moji.m. 700 h opraHHnocKoro pacTBopHTena on τ η h -qaioinaHcs that HTO c kcjibw ποβειιπθηηη paspemaioqeň ciioco6hocth hyjiyqineHHH peonorHuecKHx xapaxTepHCTHK πρη HaHecenHH Ha nofljióxKy, κομπο3Η APA coflepxHT b KauecTBe CBeTOHyBCTBHTejibHoro KOMnoHeHTa 1.2 * η8Φτοχηηοηπη- 33ΗΠ- (2) -5- OJ ΐΙΒ θ OJ OJ OJ OJ OJ OJ OJ OJ OJ OJ OJ OJ OJ OJ OJ OJ OJ OJ OJ OJ OJ OJ OJ---------------

CN cpeflHeň moji.m. 200000-3000000, coflep «amnft 19,5-41 Mac.Z HHTpmia aKpwioBOftkhcjiotm, 59-80,5 Mac.Z 6y Ta / jne Ha η apoMaTHHOCKHn yrnesojnopofl, BbiSpaHHriI H3pafla TOJiyon, o-kchjioji, μ-kchjioji npH cjieflyiomeM cooTHomeHHH κομποηβητοβ ,

Mac.Z · CBHHeucoAepxanxee cTexjio 40.4-60.0 1.2 — Η3φΤΟΧΗΗΟΗΑΗ33ΗΑ “(2) - 5-σνΒθθp pΗΡpppppppppftftftOBOBOBOBOBOBOB ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^

HoBOJiaMHaa φβΗΟΛφορΜΗΠΒΑΘΓΗ / ΧΗΒΗ CMOJia moji.m. 700> 7.5-14.4 flnKcaH 14.2-27.8

ByHHHH-HHTpHJibHbift KaytjyK 1.0-2.5

ApoMaTHHecKHn yrjioBOflopofl H3 yicaaaHHoro pana 7,8-12,2. 2. ΚθΜΠΟ3ΗφίΗ ΠΟΠ.1, OTJIHUaiOHaHCH ΤβΜ, ΗΤΟ OHa nonOJlHH-

TeJibHo coflepxHT 0.1-5.0 Mac.q. c <-tερπΗΗεοπε hjih CMecHd - TepnHHeojia c H — 6yTaHOnoM πρκ MaccoBOM coothohibhhh 1: 0,1 — 1: 1.

AHHOTAUHJI Η3θ6ρβΤβΗΗβ OTHOCHTCH MHKpOSJíeKTpOHHKe K, and K ΗΜβΗΗΟ CBeTOHyBCTBHTejIb-HblM Κ0ΜΠΟ3ΗΙΧΗΗΜ ftJIH Η3ΓΟΤΟΒΠΘΗΗΗ AH3JIOKTpHHeCKHX CJIOOB TOJICTOrUieHOHHblXMHKpocxeM Ha KepaMHwecKHX noftnoxKax c Henojib3OBaHHeM MOTofla coTKorpagnÍH.

Uejtb Η3ο6ρετβΗΗΗ - noBbnneHHe pa3pemaK> me ciiocoGhocth CBCTOHyBCTBHTejib — Hoň ΚΟΜΠΟ3ΗΗΗΗ h ynymneHHe ee peojiorHHocKHX xapaxTopHCTHK. CBeTonyBCTBHTeJihnaH κομπο3ηηηη BKjnoqacT CBHHeijcoflepxainee ctokiio c waist-MEPO waCTHH ΜΚΜ 0.2-2.5, 1,2-CBeTOHyBCTBHTeJIbHblft ΗβφΤΟΧΗΗΟΗΑΗε3ΗΛ, φβΗΟΛ "φορΜβιίΒΛβΓΗΗΗ ^ cMOJiy, opraHHBecKuií pacTBopHTeJih and τβκχε OyTa / iHGH-HHTpHJib-Hbrií KayqyK CTpyxTypHoit φopMyJlbI [- ch2 -ch = ch - ch2 ~] ^ - [- ch2

CHI CN cpenHen MonaKyiiHpHoon Maccbi 200000 - 300000, ηρΗΗβΜ b KanecTBe opraHtraecKO-ΓΟ paCTBOpHTBJIH HCnOJIbSOBfHKKCaH. 'ΠρΗ3Η3Ηο Η3θ6ρετεΗΗβΜ no peaynbTaTaM 3KCnapTH3M ,, OCyméCTBJIBHHOtí rocyaapcT-BCHHblM CPοΜΗΤβΤΟΜ CCCP Ο J Ο M M Η θ θ ή ή 247136

Claims

SUMMARY OF THE INVENTION 247 136 1 · A photosensitive dielectric composition for producing dielectric layers of thick-layer microcircuits on ceramic alumina substrates using a screen printing method, including lead glass having particle sizes of 0.5 to 2.5 µm and a positive photoresist consisting of a component a layer of constituent, i.e. a novolak, phenol-formaldehyde resin having a molecular weight of 700 and an organic solvent, characterized in that in order to enhance the resolution and the rheological properties when applied to the contents substrate, the composition is as light sensitive component 1 , 2-naphthoquinone thiazide - "/ 2 / -5-sulfoester, pumped, novolac phenol formaldehyde resin, organic solvent such as dioxane, butadiene nitrile rubber of structural formula L C 2 - CH = CH - CH 2 CH 2 -? from 200,000 to 300,000, containing 19.5 to 41% by weight of acrylonite % ril and 59 to 80.5 wt. butadiene and an aromatic hydrocarbon selected from the group consisting of toluene, o-xylene and m-xylene, at a weight percent content of: lead glass 40.4 to 60.0 1,2-naphthoquinone thiazide - / 2 / -5-sulfoesterbromic novolac phenol formaldehyde resins 4.5 to 8.6 novolac phenol-formaldehyde resinsmolecular masses 700 7.5 to 14.4 dioxane 14.2 to 27.8 butadiene-nitrile rubber 1.0 to 2.5 aromatic hydrocarbon of the listed series 7.8 to 12.2 , 247 1 ^ 6

2. A composition according to claim 1, further comprising from about 0.1% to about 5%. ° C-terpinol with n-butanol, ratio 1: 0.1 to 1 µl.