CS246579B1 - Photosensitive dielectric compound - Google Patents
Photosensitive dielectric compound Download PDFInfo
- Publication number
- CS246579B1 CS246579B1 CS831314A CS131483A CS246579B1 CS 246579 B1 CS246579 B1 CS 246579B1 CS 831314 A CS831314 A CS 831314A CS 131483 A CS131483 A CS 131483A CS 246579 B1 CS246579 B1 CS 246579B1
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- CS
- Czechoslovakia
- Prior art keywords
- solution
- positive photoresist
- quinondiazide
- photosensitive dielectric
- dielectric compound
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- 239000003989 dielectric material Substances 0.000 title claims 2
- 229920002120 photoresistant polymer Polymers 0.000 claims 4
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 claims 2
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 claims 2
- 239000001856 Ethyl cellulose Substances 0.000 claims 2
- 150000002148 esters Chemical class 0.000 claims 2
- 235000019325 ethyl cellulose Nutrition 0.000 claims 2
- 229920001249 ethyl cellulose Polymers 0.000 claims 2
- 239000005355 lead glass Substances 0.000 claims 2
- 239000003960 organic solvent Substances 0.000 claims 2
- RBNWAMSGVWEHFP-UHFFFAOYSA-N trans-p-Menthane-1,8-diol Chemical compound CC(C)(O)C1CCC(C)(O)CC1 RBNWAMSGVWEHFP-UHFFFAOYSA-N 0.000 claims 2
- 230000002708 enhancing effect Effects 0.000 claims 1
- 125000000020 sulfo group Chemical group O=S(=O)([*])O[H] 0.000 claims 1
- UGTJLJZQQFGTJD-UHFFFAOYSA-N Carbonylcyanide-3-chlorophenylhydrazone Chemical compound ClC1=CC=CC(NN=C(C#N)C#N)=C1 UGTJLJZQQFGTJD-UHFFFAOYSA-N 0.000 description 1
- 241001057362 Cyra Species 0.000 description 1
- 241000207439 Myra Species 0.000 description 1
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- Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Nitrogen And Oxygen Or Sulfur-Condensed Heterocyclic Ring Systems (AREA)
Description
Haasamie H3o6peTemw: ΦΟΤΟΗΥΒΟΤΒΗΤΕΠΒΗΑΑ #H3JIEKTPÍWECKAH Κ0ΜΠ03ΗΠΗΗ
Hso6pe'reHHe OTHOCHTCH K 3JieKTpOT6XHHK0 H MO7K6T HařÍTH ΠρΗΜΘΗβΗΗΘ, BMaCTHOCTH, flJIH Η3ΓΟΤΟΒΗβΗΗΗ TOJICTOIUieHOHHblX MHKpoCXeM.
HaBecTíia fhoTO^yBCTBHTejibHaa ,E(H3JieKTpHHecKaíi κομποβηβηβ noJiHMepHaaipioH**ΗΟΓΟ THna B BHfle naCTbl flJIH TOJICTOnJieHOHHblX MHKpOCXeM [1] . OHa COflepJKHTCBHHeBCOflep»aui;ee οτβκπο, nomiMepnoe cBHsyiomee Ha ochobo nojinaKpmiaTOB iuihnojiHMeTaicpujiaToB, nonHMepH3anHOHHO-cnoco6nbie ΜοιιοΜβρω aKpwnaTHoro ρΗηβ,φο-TOHHHHHaTOP - MeTHJIOBblň 3φΗρ 6eH3OHHa, ΗΗΓΗ0ΗΤΟΡ “ HHTp030flHMepH0e COéflH“HeHHe,. oKHCHoe coefínnenne xpoMa h pacTBopHT&n&.
HeflocTaTKaMH 4i3BecTnoň κομπο3Ηηηη hbjíhiotch ee μηογοκομποηθητηοοτι,, yBe-JiHUHBaioinaíi τρυλοθμκοοϊβ πριιγοτοβλοηηη nacTbi, h cpaBHHTenbHo HusKan pa3pe-iitaidínaa cnocofínocTb. B nyHHiHx npHMepax yp;aeTCH nonyqHTb pa3Mep KanajioB bcnoe flH3JiexTpHKa loupnHoň 75 mkm h Sonee. IIpOTOTHHOM Η3θβρεΤβΗΗΗ HBJWeTCH φθΤΟ^ΒΟΤΒΗΤ6ΛΒΗ3Β flHSJíeKTpHHeCKaB KOM“Π03ΗΗΗΗ flJIH ΠΟΠΥΗβΗΗΗ ρβΗΒθφΗΟΓΟ H3O0pa5KeHHÍÍ B CJIoe ma3ypH, BKJlIOHaiOiriaH31-49 BecoBbix Hacrefl CBnnencoftepacaiuero CTeKJia h 51-69 Becosbix nacTeft pacT*Bopa ΠΟ3ΗΤΗΒΗΟΓΟ (Ha OCHOB6 3φΐΐρθΒ O~XHHOH~p;Ha3Hp,OB) HJIH ΗΘΓΗΤΗΒΗΟΓΟ Φθ“Tope3HCTa [2.] .
HeflocTaTxaMH H3BecTHoň κομπο3Ηφ»ι bbjibjotcb ee nnoxne peonoruHecKiie xa-paKTepHCTHKH (ηΗ3Κ3Β BH3KOCTb) ,.· HCKJIiOHaiomHe HCnOJIb3OBaHHe βΠΗ HaneCeHHH9Toň κομπο3Ηιβ·πϊ nanSonee y«o6Horo MeTó,n,a τραφΗρετΗοή nena-ra, h HeflocTaToH-Haa paapemaioinaa cnocoČnocTb ρβΛΒβφΗοΓο HaoSpaxcertHH b cjioe rjia3ypH(125 mkm). Iíejib H3o6peTeHHB “ noBbDseHHe pa3pentawmeň cnocoĎHocTH Φοτο^βοτβμτθλβ-Hoň ΚΟΜΠΟ3ΗΗΗΗ. nocTaBJíeHHaH nejit nocTHraeTca τβΜ,ητο H3BecTHaa Φοτο^βοτβητθλβηηη ρ,κ-3JieKTpHHecKan komho3hhhh, conepacamaa CBunenconepacamee cTeKJio h pacTsopΠΟ3ΗΤΗΒΗΟΓΟ φ0Τ0ΡΘ3Η0Τ0Ρ3 Ha OCHOBe 3φκρθΒ O"XHHOHflHa3Hp;OB B OpraHHHeCKOMpacTBopirre,ne, flononnnTeJibno coflepraT pacTBop 3τηπβ&πβιοπο3Μ b ob-Tepnu-Heone, a b KanecTse pacrnopa πο3Ητηβηογο φοτορβ3Ηοτα na ocHose 3φκροΒo-xnHOHflna3naoB b opraunnecKOM pacTsopHTejie ohb cofleputr pacTBop no3H~ 246579 ΤΗΒΗΟΓΟ (t>OTOpe3HCTa Ha OCHOBe 0γΠΒφ03φΗΡ0Β “ o-XHHOHflHa3HflOB B flHOKCaHenpH cneflyiomeM coflepxaHHH κομποηθητοβ, Bec.n.: CBHHeucoflepxamee CTeicno 33,5-65,3
PaCTBOP ΠΟ3ΗΤΗΒΗΟΓΟ φθΤΟρθ3ΗΟΤΗ Ha OCHOBe ΟγίϊΒφοΒφΗρΟΒ O-XHHOHflHa3HflOBb onoKcaHe (b nepecneTe Ha cyxoňocTaTox) 5,0-30,0 3Tnnuejuiiono3a 0,6-3,0 o6 -TepnHHeoň 10,9-28,2 CBHHeucoflepacamee cTex.no HMeeT cneflyioiUHň cocTaB: 45,5% PbO, 29,5% Si0218,5% ZňO, 4,0% TiO, 2,5% Ali09. B xanecTBe pacTBopa πο3Ητηβηογο φοτορεεποτθ Ha ocnoBe cynbφo^φnρoBO“XHHOHflHa3HflOB B flHOKCaHe HCnonb3yiOT φθΤθρβ3Η0Τ, COCTOHH(Hň H3 1,2-ΗεφΤΟ-XHHOHflHa3Hfl-(2)-5-cynbφo^φHpa 6poMHpoBaHHoň HOBonanHoň φεΗοηφορΜΗηΒΑετΗΑ—Hoň CMonbi, 8 r HOBonanHoň φεκοηφορΜΗηΒΑθΓΗΑΗοή CMonbi h flHoxcaHa.
TexHonoran πρΗΓοτοΒηεΗΗΗ npeflfloHceHHoň φοτο^ΒετΒΗτεπι>ΗοετΗ flHsnexTpu-necxoň κομπο3ηαηη flnn npHMepoe 1-8 oflHHaxoBa h coctoht b cneflytómeM. B φηρφοροΒοκ naiuxe CMewnBaroT npeflBapHTenbHo npHroTOBneHHbiň pacreop3THnflennrano3bi b ού-TepnHHeone c pacTBopoM (b nepecneTe Ha cyxoň ocTaTox) no-3HTHBHoro φοτορβ3ΗθΤ8 b flHoxcaHe h floĎaBnnioT CBHHeflCoflep»amee CTexno cnpeHMymecTBeHHbíM paswepoM nacrafl 0,5-2,5 mkm. CMecb TmaTenbHo neperaparaTc flenbio roMoreHH3au;HH h ycpeflHeHHH cocTaBa CHanana b φβρφοροΒοή nanixe bTeneHHe 5 MHHyT, a 3aTeM Ha nacTOTepxe c xanponoHOBbíMH BanxaMH b Teneroie30 MHHyT. ITonynaioT nacTy c BH3xocTbio, oSecnenHBatomeň xopóniHe peonornnecxnexapaxTepHCTHKH flnn HaHeceHHH MeTofloM τρεφβρετΗοή nenaTH. ílacTy HaHocHT Ha xepaMHHecxHe noflnoacKH nepe3 xanpoHOByto ceTxy Ha ycTa-HOBxe HaHeceHHH h cymaT Ha B03flyxe npH 100°C b TeneHHe 30 MHHyT. OnepaflHHHaHeceHHH h cynixn πρΒΤορπιοτ flBaacflbí h nonyqaioT o6myro TonmHHy BbicyraeHHoroΠΟΚρωΤΗΗ 40 MKM.
BbicyiueHHbiň cnoň ýoTonyBCTBHTenhHoň κομποβηαηη SKcnoHHpyioT b TeneHHe2 MHHyT Ha ycTaHOBKe c pTyTHoň naMnoň Μοπριοοτωο 375 Βτ nepe3 φοτοηιεβηοΗc TpxHonorHnecKHM pncyHKOM flflH onpefleneHHH pasperaaromeň cnoco6HocTH, b ko-Topbiň ΒκηωηβΗΜ πηηηη ιπηρηηοη 25-200 mkm h paccTOHHHeM Meacfly hhmh 25-300 mkm.Ilocne BKCnOHHpoeaHHH cnoň ΠρΟΗΒηΗΙΟΤ 0,5%-HblM pacTBopoM ΤρΗΗΗΤρΗήφΟΟφΗΤΘ,npH 3Tom očnyneHHbie ynacTKH choh BWMHBaioTCH, φopMHpyH pHcyHOK cxeMbi, προ-MbipaioT flHCTHnnnpoBaHHoň Bofloň, cyraaT npH 250°C b Tenenne 30 MHHyT h bjkh-raioT b KOHBeňepHoň πθηη πρκ MaKCHManbHoň TeMnepaType 750 C. Πρκ stom b ah-aneKTpHnecKoM cnoe o6pa3yroTCH KaHanbi mHpnHoň, H3MepeHHoň Ha ΜΗκροεκοπε honpeflenHKHueň paspeinawmyio cnocoĎHocTh npeflnaraeMoň φοτοηνΒΟΤΒΗτβηΒΗΟΗ kom-ΠΟ3ΗΑΗΗ. B Ta6nHfle 1 flami cocTaBM CMecn no npHMepaM 1-8 ajih npnroTOBneHHH npefl-ηοκεΗΗοή κομπο3Ηιι;ηη . 246579
TaGnHixa 1 ΠρΗΜβρ, PaCTBOP 3ΤΗΠΠβΛίΙΚΜΙΟ3ωb ού-τβρπΗΗβοηβ PaCTBOP ΠΟ3ΗΤΗΒΗΟΓΟ’φοτορβ3Η<:τ3 b hhok-cane (b nepecqeTe Ha cyxoň οοτβτοκ) CBHHeixcoflepacamee οτβκπο, KpenocTb, % KonntnecTeo, r Γ H-------- KpenocTh, % f KOJIHHeCTBO, Γ 1 7,1 4,23 46 10,72 15,0 2 3,5 5,1 66,7 13,5 H,4 3 18 5,01 49,5 9,99 15,0 4 8,4 3,57 63,5 7,8 18,63 5 4,7 8,88 44,7 11,07 10,05 6 7,7 7,04 44,4 3,36 19,6 7 4,7 2,55 66,7 13,5 13,95 8 (wa cpaB- ΗβΗΗίΐ) 10,3 10,2 66,7 4,8 15,0 B Ta6jimje 2 flam>i cocTaBbi nonyneHHoň ítoToqyBCTBHTeJibHoň κομπο3Ηιχηη inpHMepaM 1-8 a KOMnosmpm - npoTorana, a Tarace cpaBHHTenbHbie ceoňCTBa
BefleHHMX COCTaBOB.
TaSmiija 2 fř(č npH-Mepa CoCTaB <J)OTOHyBCTBHTeJIbHOň ΚΟΜΠΟ3ΗΠΗΗ, BeC.H. CBHHeiíCO“ flepacamee οτβκπο PaCTBOP ΠΟ3Η-ΤΗΒΗΟΓΟ φοτο- pe3HCTa 3THjmejiJiKMiO3a 1 06“ ΤβρΠΗΗβΟΠ 1 2 3 4 5 Προτο- TMI 31-49 51-69 - - 7 46,5 45,0 0,4 8,1 2 38,0 45,0 0,6 16,4 246579 4 ΠροΑΟΠΜβΗΗβ Ta6n.2 ΙΜ» npH—Mepa CoCTaB $OTOHyBCTBHTeJIbHOft ΚΟΜΠΟ3ΗΠΗΗ, BeC.H. ---------------1 CBHHeiICO- nepxanjee CTeitno PaCTBOP ΠΟ3Η-ΤΜΒΗΟΓΟ φοτο- pesHCTa dranuennionosa Λ“ΤβρΠΗΜβΟΛ 1 2 3 4 5 1 50,0 35,0 1,0 13,1 3 50,0 33,3 3,0 13,7 4 62,1 26,0 1,0. 10,9 6 65,3 11,2 1,8 21,7 5 33,5 36,9 1,4 28,2 8 50,0 16,0 3,5 30,5 IIpofloJixeHHe ŤaSjíHip»! 2 řPfP npH-Mepa BpeMH 3KCnO“HHpoBaHHH, MHH OlHpHHa KananoB b cnoe flH3JieKT-pHKa, MKM . IIpuMenamie 1 6 7 8 Προτο- ΤΗΠ 1-3 125 HfaflKaa ΚΟΜΠΟ3ΗΠΗΗ, HaHeceHne Ha Η,βΗΤρΗφγΓβ 7 1,5 75 IIacToo6pa3HaH κομπο3Ηπηη,Tpa<j)apeTHoft nenaTtio HaHeceHHe 2 1,5 65 1 2,0 50 3 2,0 60 — n — 4 2,0 50 6 8,0 50 5 2,0 50 — 8 - - . IIacToo6pa3HaH oneHb BMCOKOBaaKaa ΚΟΜΠΟ3HIJHH, πρπ HaHeceHHH 3a6HBaeTceTKy Tpa$apeTa 246579
KaK BHflHO M3 npHBeneHHbIX npHMepOB, npe&naraeMafl <J>OTOyyBCTBHTeJIbHaH Pft-sJíeKTpHqecKafl κομπο9Ηιιηη ημθθτ Oonee Bwcoxyw no cpaBHeHHio c H3BecTHoň pas-peniaKMxyro cnocoOHocTb, o6ecneqnBaK>myro nonynenne xaHanoB b cnoe «ΗΒΠβκτ-pHjca nmpHHoň 50-65 mkm, wto noBBonaeT sHayHTenbHo yBenmiHTb nnoTHocTb pacΠΟΠΟΧβΗΗΗ 3JI6MCHTOB B TOÍICTOnJieHOUHUX MHKpOCXeMaX, ΤβΜ CaMblM nOBbnnaa CTe-neHb HHTerpaipm nocne^HHx no TpeTbero ypoBHn, flaHHaa κομποβηιιηη oBaanaeTxopomuMH peonoriraecKHMH xapaxTepHCTHKaMH, nosBonnionpiMH ncnonbsoBaTb nnaHaneceHHH komho3huhh HanOonee ynoCHbiň Μβτοη Tpa$apeTHoft nenaTH, a TaxíceTpaflHííHOHHoe oÓopyflOBaHHe «jih rionyqeHHH τοηστοπηβΗοηΗΜΧ MHxpocxeM. 246579 6 ΦΟΡΜΥΛΑ Η30ΕΡΕΤΕΗΗΗ <J>oTonyBCTBHTenbHa« flHsneKTpHqecKaH κομποβηηηη npeHMymecTBeHHo λπη Η3Γο-TOBjíeHHH ToncTonneHOHHbix MHKpocxeM, BKJHonaioiuaH CBHHeucoflepatamee οτεκπο hpacTBop no3HTHBHoro (J>oTope3HCTa na ocHoBe 3φκροΒ o~XHHoHflHa3HflOB b opra-HHuecKOM pacTBopuTene, oTJiHqaromaHca τθμ, hto, c uenbKi noBbímeHnapa3pemaioineft ciioco6hocth, ohs flononHHTenbHo coaepjKHT pacmop 3Tnnu,eíunano3bib ού -TepnHHeojie, a b KanecTBe pacTBOpa πο3ητηβηογο φοτορβΒΗετθ Ha ocHoBe3φΗρθΒ O“XHHOHjaHa3HAOB B OpraHHHeCKOM paCTB0pHT6Jie - paCTBOp ΠΟ3ΗΤΗΒΗΟΓΟφθ*Γθρβ3ΗϋΤ3 Ha OCHOBe ενΠΒφθ3φΗρθΒ O-XHHOHAHa3H«OB B flHOKCaHe npH cjieayio-meM coflepacaHHH κομποηθητοβ, bgcobmx nacTeň: CBHHeijcoflepxainee CTexJio'
PacTBop ΠΟ3ΗΤΗΒΗΟΓΟ φθΤθρβ3ΗΟΤΒHa OCHOBe εν.ΠΒφ03φΗΡ0Β O-XHHOH“«Ha3HflOB b flHOKcaHe (b nepecueTeHa cyxoň ocTaTox) 3τΗπαβηπιαπο 3 a oC -ΤβρΠΗΗβΟΠ 33,5-65,3 5,0-30,0 0,6-3,0 10,9-28,2 UCTOHHHKU ΗΗφΟρΜΒμΗΗ, ΠρΗΗΗΤΜΘ BO BHHMaHHe ΠρΗ 3KCnepTH3eí 1. ΠβτβΗΤ C1UA IP 3914128, KJiacc 96-1 15, 1974. 2. IlaTeHT CU1A fP 3573908, KJiacc 96-34, 1974. 246579 7 AHHOTAIJHfl
OoTowyBCTBHTejibHaa AHaneKTpHnecKaH κομπο3ηι#ιη othochtch npeHMymecTBeHHoK ΒΠβΚΤρΟΤβΧΗΗΚβ Η ΜΟ»βΤ HaňTH ΠΡΗΜβΗβΗΗβ flJIH Η3ΓΟΤΟΒΠΘΗΗΗ TOJICTonneHOHHblXMMKpoexeM.
UeJlblO Η3θ6ρβΤβΗΗΗ HBJIHeTCH ΠΟΒΗυίβΗΗβ pa3peBiaK3tHeň CnoCoBHOCTH ΚΟΜΠΟ3ΗΐχΗΗ.
OoTORyBCTBHTenbHaa p,H3JieKTpHnecKaH κομπο3ηιχηη Βκπκηιββτ CBHHeijcoflepJKa-qee οτβκπο h pacTBop ποβητηβηογο φοτορβ3Ηθτβ Ha ocHoBe 3φηροΒ o—χηηοηαηη—3HAOB b opraHHHecxoM pacTBopHTene.
HoBblM B ΚΟΜΠΟ3ΗΠΗΗ HBJIHeTCH TO, HTO OHa flonOJJHHTeJIbHO COflepjKHT paCTBOp3THUiuenjiiono3bi b oi.-TepnnHeo.ne, a b xanecTBe pacTBopa πο3Ητηβηογο φοτορβ-3HCT3 Ha ocHoee 3φπροΒ o-XHHOHflHa3HflOB B opraHHnecKOM pacTBopHTene - paCT-Βορ ΠΟ3ΗΤΗΒΗΟΓΟ φθΤθρβ3ΗΟΤβ Ha OCHOBe θνΠΒφθ3φΗρθΒ O“XHHOHflHaaHflOB B flHOK-cane npH cnenyromeM coflep»aHHH κομποηθητοβ, secoBbix nacTeň: CBHHeuconepjKamee οτβκπο 33,5-65,3
PacTBop ΠΟ3ΗΤΗΒΗΟΓΟ φΟΤΟρβΒΗΟΤβ
Ha OCHOBe CyΠbφO^φHPOB O-XHHOH- AHa3HflOB b HHOKcaHe (b nepecneTe-
Ha cyxoň ocTaTox) 5,0-30,0 3THnnenniano3a 0,6-3,0 ’ oi-TepnHHeon 10,9-28,2. IIpH3HaHo Η3ο6ρετβΗΗβΜ no pe3ynbTaTaM 3KcnepTH3M, ocymecTBJíeHHoň Tocynap-CTBeHHbíM Κομητθτομ CCCP no flenaM H3o6peTeHHň h otkpwthň. 246579
Claims (1)
- 246 579 Ρ δ E D M S T VYNÁLEZU Fotocitlivá dielektrická sloučenina s výhodou používanápro výrobu mikroobvodů na silných vrstvách, zahrnující olo-vnaté sklo a roztok pozitivního fotorezistu na zákláděesterů o-chinondiazidů v organickém rozpouštědle, vyznaču-jící se tím, že pro zvýšení rozlišovací schopnosti obsahujejako doplněk roztok etylcelulózy v «< - terpinolu a roztokpozitivního fotorezistu na základě esterů o-chinondiazidův organickém rozpouštědle - roztok pozitivního fotorezistuna základě sulfoesterů o-chinondiazidů v dioxanu při násle-dujícím obsahu složek ve hmotnostních dílech s olovnaté sklo 33»5 až 65,3 roztok pozitivního fotorezistu na základě sulfoesterů o-chinondiazidů v dioxanu v přepočtu na suchý zbytek 5,0 až 30,0etylcelulóza 0,6 až 3,0 ©<- terpinol 10,9 až 28,2
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD83247832A DD236659A3 (de) | 1983-02-09 | 1983-02-09 | Fotoempfindliche dielektrische masse |
| CS831314A CS246579B1 (en) | 1983-02-09 | 1983-02-25 | Photosensitive dielectric compound |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD83247832A DD236659A3 (de) | 1983-02-09 | 1983-02-09 | Fotoempfindliche dielektrische masse |
| CS831314A CS246579B1 (en) | 1983-02-09 | 1983-02-25 | Photosensitive dielectric compound |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CS131483A1 CS131483A1 (en) | 1985-10-16 |
| CS246579B1 true CS246579B1 (en) | 1986-10-16 |
Family
ID=25745416
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CS831314A CS246579B1 (en) | 1983-02-09 | 1983-02-25 | Photosensitive dielectric compound |
Country Status (2)
| Country | Link |
|---|---|
| CS (1) | CS246579B1 (cs) |
| DD (1) | DD236659A3 (cs) |
-
1983
- 1983-02-09 DD DD83247832A patent/DD236659A3/de not_active IP Right Cessation
- 1983-02-25 CS CS831314A patent/CS246579B1/cs unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CS131483A1 (en) | 1985-10-16 |
| DD236659A3 (de) | 1986-06-18 |
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