CS246578B1 - Photosensitive dielectric compound - Google Patents

Photosensitive dielectric compound Download PDF

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CS246578B1
CS246578B1 CS831312A CS131283A CS246578B1 CS 246578 B1 CS246578 B1 CS 246578B1 CS 831312 A CS831312 A CS 831312A CS 131283 A CS131283 A CS 131283A CS 246578 B1 CS246578 B1 CS 246578B1
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solution
positive photoresist
quinondiazide
esters
dielectric compound
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CS831312A
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Czech (cs)
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CS131283A1 (en
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Irina P Stepanova
Vladimir A Sichanov
Natalja A Tichonova
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Irina P Stepanova
Vladimir A Sichanov
Natalja A Tichonova
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Application filed by Irina P Stepanova, Vladimir A Sichanov, Natalja A Tichonova filed Critical Irina P Stepanova
Priority to CS831312A priority patent/CS246578B1/en
Publication of CS131283A1 publication Critical patent/CS131283A1/en
Publication of CS246578B1 publication Critical patent/CS246578B1/en

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  • Crystals, And After-Treatments Of Crystals (AREA)
  • Securing Of Glass Panes Or The Like (AREA)

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Ha3BaHne Η3ο6ρβτβΗΗΗί ΦΟΤΟΗΥΒϋΤΒΗΤΕΠΒΗΑΗ Í1H3J1EKTPHHECKAH ΚΟΜΠΟ3HUHH Η3θ6ρβΤβΗΗβ OTHOCHTCH Κ 3ΠΘΚΤρθΤΘΧΗΗΚΘ Η ΜΟΪΚβΤ HaňTH ΠρΗΜβΗθΗΗΘ Β HaCT-HOCTH flJIH Η3Γ0Τ0ΒίΐεΗΗΗ TOJICTOnJieHOHHblX cxeM. H3BecTHa ýoTo^yBCTBHTenbHaH HHSJíeKTpHnecKaH κομπο3Ηηηη noJiHMepH3aiíHOH-ΗΟΓΟ THna B BHfle naCTbl flJIH TOJICTOruieHOHHblX MHKpoCXeM. OHa COflepJKHT CBHHeu;-coflepTKamee CTeK.no, noJiHMepHoe CBH3ywmee Ha ochobc noJiHaKpHJiaTOB hjih ijo-jiHMeTaKpmiaTOB, noJiHMepH3aHHOHHo-cnoco6Hbie MOHOMepbi aKpunaTHoro pana,(frOTOHHHIJHaTOp - ΜβΤΗΗΟΒΜΗ 3φκρ 6eH3OHHa, , ΗΗΓΗ6ΗΤΟΡ - HHTpO3OflHMepHOe COefíH-HeHHe, oKHCHoe coep;HHeHne xpoMa h pacTBopHTejib [i],Ha3BaHne Η3ο6ρβτβΗΗΗί ΦΟΤΟΗΥΒϋΤΒΗΤΕΠΒΗΑΗ Í1H3J1EKTPHHECKAH ΚΟΜΠΟ3HUHH Η3θ6ρβΤβΗΗβ OTHOCHTCH Κ 3ΠΘΚΤρθΤΘΧΗΗΚΘ ΜΟΪΚβΤ HANTH ΠρΗΜβΗθΗΗΘ Β HaCT-HOCTH flJIH Η3Γ0Τ0ΒίΐεΗΗΗ TOJICTOnJieHOHHblX cxeM. H3BecTHa ýoTo ^ yBCTBHTenbHaH HHSJ KT p nec H nec ο na na na na na na na na na na na na na na na na na na B B B B B H H H H H. OH and COflepJKHT CBHHeu; -coflepTKamee CTeK.no, noJiHMepHoe CBH3ywmee Ha ochobc noJiHaKpHJiaTOB hjih Ijo-jiHMeTaKpmiaTOB, noJiHMepH3aHHOHHo-cnoco6Hbie MOHOMepbi aKpunaTHoro Mr (frOTOHHHIJHaTOp - ΜβΤΗΗΟΒΜΗ 3φκρ 6eH3OHHa,, ΗΗΓΗ6ΗΤΟΡ - HHTpO3OflHMepHOe COefíH-hehhe, oKHCHoe COEP; HHeHne xpoMa h pacTBopHTejib [ and],

Hep;ocTaTKaMH η3βθοτηοη κομπο3ηηηη hbjihiotch' ee MHoroKOMnoHeHTHocTb,yBejiHHHBaromaH TpyflOEMKocTb. πρηγοτοβπθημη nacTbi, h cpaBHHTejibHo HH3Kaa pa3-peuiaiomaH cnocoČHocTb. B JiyniuHX npHMepax ynaeTCH noJiynHTh pa3Mep KaHaJioBb cjioe flH3JieKTpHKa ihhphhoh 75 mkm h 6oJiee.Hep; ocTaTKaMH η3βθοτηοη κομπο3ηηηη hbjihiotch 'ee MHoroKOMnoHeHTHocTb, yBejiHHHBaromaH TpyflOEMKocTb. nacTbi, h cpaBHHTejibHo HH3Kaa pa3-peuiaiomaH cnococHocTb. B JiyniuHX npHMepax ynaeTCH noJiynHTh pa3Mep KaHaJioBb cjioe flH3JieKTpHKa ihhphhoh 75mkm h 6oJiee.

HanBoJiee 6jih3koh no TexHHnecKoň cymHocTH κ npeflJioaceHHOH HBJíaeTCH H3BecTnaa (JjoTonyBCTBnTejibHaH HHSJíeKTpHnecKaa κομπο3Ηηηη hjih noJiyneHHa penbeijmoroH3o6paaceHHH b cnoe rnasypn, BKJironaiomaa 31-49 BecoBbix nacTeň CBHHen;coflep-ačamero CTeKJia h 51-69 BecoBbix nacTeň pacTBopa πο3Ητηβηογο (Ha ocnoBe 3φκ-ΡΟΒ o-XHH0HflHa3Hfl0B) HJIH ΗβΓΒΤΗΒΗΟΓΟ <|)OTOpe3HCTa [Ž] .HanBoJiee 6jih3koh no TexHHnecKoň cymHocTH κ npeflJioaceHHOH HBJíaeTCH H3BecTnaa (JjoTonyBCTBnTejibHaH HHSJíeKTpHnecKaa κομπο3Ηηηη hjih noJiyneHHa penbeijmoroH3o6paaceHHH b cnoe rnasypn, BKJironaiomaa 31-49 BecoBbix loaded CBHHen; coflep-ačamero CTeKJia 51-69 h BecoBbix loaded pacTBopa πο3Ητηβηογο (IIa ocnoBe 3φκ ΡΟΒ-o-XHH0HflHa3Hfl0B) HJIH ΗβΓΒΤΗΒΗΟΓΟ <|) OTOpe3HCTa [F].

HeflocTaTKaMH H3BecTHoň κομπο3Ηη;ηη hbjihiotch ee njioxHe peoJiorHnecKHe xa-paKTepncTHKH (HH3Kaa BH3K0CTb), HCKjnonaiomHe HcnoJib3OBaHHe hjih HaHeceHHH3Toň κομπο3Ηη,ηη HaH6anee yflo&amp;Horo MeTofla TpatfcapeTHoň nena™, h HenocTa-TOHHaa pa3pemawmaH cnocoÓHocTb. pejibetJíHoro H3o6paxceHHH b cnoe rjia3ypH(125 mkm).HeflocTaTKaMH H3BecTHoň κομπο3Ηη; ηη hbjihiotch ee njioxHe peoJiorHnecKHe XA paKTepncTHKH (HH3Kaa BH3K0CTb) HCKjnonaiomHe HcnoJib3OBaHHe hjih HaHeceHHH3Toň κομπο3Ηη, ηη HaH6anee yflo &amp; Horo MeTofla TpatfcapeTHoň unsaturated ™ H-HenocTa TOHHaa pa3pemawmaH cnocoÓHocTb. heyH3o6paxceHHH b cnoe rjia3ypH (125mkm).

Uejib Η3ο6ρετβΗΗΗ - noBbímeHHe pa3peniaiomeň chocoBhocth κομπο3Ηηηη h ynynuieHHe ee peoJiorHnecKHX xapaKTepHCTHK.Uejib ο3ο6ρετβΗΗΗ - noBbímeHHe pa3peniaiomeň chocoBhocth κομπο3Ηηηη h ynynuieHHe ee peoJiorHnecKHX xapaKTepHCTHK.

rio,CTaBJieHHaH pejib nocTHraeTca τεΜ, ητο H3BecTHan ýoTonyBCTBHTeJibHaH hh-3JieKTpHHecKan κομπο3ηηηη, BKJironaiomaH CBHHeHCoflepacamée οτεκπο h pacTBopΠΟ3ΗΤΗΒΗΟΓΟ <})OTOpe3HCTa Ha OCHOBe 3φΗΡθΒ O“XHHOHflHa3HflOB B. OpraHHHeCKOMpacTBópHTejie, HonoJiHHTejibHo conepsKHT pacTBop conoJiHMepa H3o6yTHJieHa c πη-nepHJieHOM H HHTPHJIOM aKpHJIOBOH KHCJlOTbl o6njeň φopMyJIbI 246578 2rio, CTaBJieHHaH pejib nocTHraeTca τεΜ, ητο H3BecTHan ýoTonyBCTBHTeJibHaH HH-3JieKTpHHecKan κομπο3ηηηη, BKJironaiomaH CBHHeHCoflepacamée οτεκπο pacTBopΠΟ3ΗΤΗΒΗΟΓΟ h <}) OTOpe3HCTa Ha OCHOBe 3φΗΡθΒ O "XHHOHflHa3HflOB B. OpraHHHeCKOMpacTBópHTejie, HonoJiHHTejibHo conepsKHT pacTBop conoJiHMepa H3o6yTHJieHa πη C-H nepHJieHOM HHTPHJIOM aKpHJIOBOH KHCJlOTbl o6njeň φopMyJIbI 246578 2

CH., I - ch2 - Ο- - - ch-ch=chch2 - - - CH, - CH -| Ι ch3 tn I . ch3 h · I CN cpeflHHH MOJieKyjiHpHHH Macca 800000 b ΑΗΜετκπφορΜΒΜΗ,ηβ, a b KauecTBe pacTBopaΠΟ3ΗΤΗΒΗΟΓΟ <£>OTOpe3HCTa Ha OCHOBe 3φΗρθΒ O~XHHOHflHa3HflOB B opraHHHeCKOMpaCTBOpHT&amp;Jie COflepXHT paCTBOp ΠΟ3ΗΤΗΒΗΟΓΟ φθΤθρ63Μ0Τ3 Ha OCHOBe εγΗΒφοΒφΗ-POB o-XHHOH9Ha3HflOB B flHOKCaHe ΠρΗ CJieflytOmeM COflepjHaHHH ΚΟΜΠΟΗΘΗΤΟΒ,BecoBbix nacTeň: CBHHeu,coflep»amee CTewioCH., I - ch2 - - - - - - ch - chch2 - - - CH, - CH - | 3 ch3 tn I. CH3 H · I CN cpeflHHH MOJieKyjiHpHHH Macca 800000 b ΑΗΜετκπφορΜΒΜΗ, ηβ ab KauecTBe pacTBopaΠΟ3ΗΤΗΒΗΟΓΟ <£> OTOpe3HCTa Ha OCHOBe 3φΗρθΒ O ~ XHHOHflHa3HflOB B opraHHHeCKOMpaCTBOpHT &amp; Jie COflepXHT paCTBOp ΠΟ3ΗΤΗΒΗΟΓΟ φθΤθρ63Μ0Τ3 Ha OCHOBe εγΗΒφοΒφΗ-POB on-XHHOH9Ha3HflOB B flHOKCaHe ΠρΗ CJieflytOmeM COflepjHaHHH ΚΟΜΠΟΗΘΗΤΟΒ, BecoBbix NacTen: CBHHeu, coflep »amee CTewio

PaCTBOP ΠΟ3ΗΤΗΒΗΟΓΟ φθΤθρβ3ΗΘΤ3Ha OCHOBe ΟγΗΒφΟΒφΗρΟΒO“XHHOHflHa3HflOB B flHOKCaHe (b Πβ~pecneTe Ha cyxoň octhtok)ConojiHMep H3o6yTHJieHa, nnnepHneHah HHTpana aKpHJioBoň KHCJioTbi oCmeňφορΜγπω flHMeΤΗπφopMaMHfl 40,5-60,0 12,2-23,8 0,8-2,06,2-11,1 Κομπο3Ηη,ηη Taiose μο&amp;θτ coflepacaTb 0,1-5,0 BecoBbix nacTeň oó -TepnHHeona.CBHHepcoflepjKainee θτθκπο ΗΜβετ cnep;yromHň cocTaB: 45,5% PbO, 29,5% Sí02, 18,5% ZnO, 4,0% Ti02, 2,5% Al203 . . B KaneCTBe ΠΟ3ΗΤΗΒΗΟΓΟ φθΤθρθ3ΗΘΤ3 HCnOJIb3yroT φθΤΟρβ3ΗΘΤ, CÓCTOHIHHň H3 1,2“Η9φΤΟΧΗΗΟΗ^Η93Η9—(2)—5“0γΗΒφθ3φΗρ3 6poMHpOB3HHOň HOBOJiaHHOň φβΗΟΠ-φορΜΒΗΒΛΘΓΗβΗΟΗ CMOJIbl, HOBOJiaHHOň φθΗΟΠφθρΜ3ΠΒΠΘΓΗΠΗθή CMOJIbl H flHOKCaHa.PaCTBOP ΠΟ3ΗΤΗΒΗΟΓΟ φθΤθρβ3ΗΘΤ3Ha OCHOBe ΟγΗΒφΟΒφΗρΟΒO "XHHOHflHa3HflOB B flHOKCaHe (b Πβ ~ Ha kiln cyxoň octhtok) ConojiHMep H3o6yTHJieHa, nnnepHneHah HHTpana aKpHJioBoň KHCJioTbi oCmeňφορΜγπω flHMeΤΗπφopMaMHfl 40.5 to 60.0 12.2 to 23.8 0,8-2,06,2 -11,1 oseομπο3Ηη, ηη Taiose μο & coflepacaTb 0,1-5,0 BecoBbix nacTen oo -TepnHHeona.CBHHepcoflepjKainee θτθκπο ΗΜβετ cnep; yromH ccTaB: 45,5% PbO, 29,5% SiO2, 18,5% ZnO , 4.0% TiO 2, 2.5% Al 2 O 3. . B KaneCTBe ΠΟ3ΗΤΗΒΗΟΓΟ φθΤθρθ3ΗΘΤ3 HCnOJIb3yroT φθΤΟρβ3ΗΘΤ, CÓCTOHIHHň H3 1.2 "Η9φΤΟΧΗΗΟΗ Η93Η9- ^ (2) -5 '0γΗΒφθ3φΗρ3 6poMHpOB3HHOň HOBOJiaHHOň φβΗΟΠ-φορΜΒΗΒΛΘΓΗβΗΟΗ CMOJIbl, HOBOJiaHHOň φθΗΟΠφθρΜ3ΠΒΠΘΓΗΠΗθή CMOJIbl H flHOKCaHa.

TeXHOJlorHH ΠρΗΓΟΤΟΒΠΘΗΗΗ CMeCH (npHMepbl 1~6) flJlH ΠΟΠγΗβΗΗΗ φΟΤΟΗΥΒΟΤΒΗ“TejIbHOH flH3JieKTpHHeCKOH ΚΟΜΠΟ3ΗΗ,ΗΗ. B φ3ρφοροΒθΗ nauiKe CMeuiHBaroT npeflBapHTenbHo npnroToBJíeHHbiH pacTBop conoHHMepa H3o6yTHJieHa, nHnepHJieHa η ηητρηπθ aKpHJioBoň κηθποτμ b ΑΗΜετΗπφορΜθ-MHfle c pacTBopoM (b nepecneTe Ha cyxoň ocTaTox) πο3Ητηβηογο φοτορβ3ΗθΤ8 bflHOKcaHe h floSaBJíaioT CBHHeu;coflep«amee οτεκπο c pa3MepoM nacTHfl 0,5-2,5 mkmCMecb TmaTeJibHo neperaparoT c pejibio roMoreHimHHH h ycpeflHeHHH cocTaBa CHa-. Hana b φβρφοροΒοή Hanixe b TeneHňe 5 μηηυτ, a 3aTeM Ha nacTOTepxe c Kanpoňo-HOBMMH BaJIKaMH B ΤΘΗβΗΗΘ 30 MHHyT. ΠοπγΗΘΙΟΤ naCTy C BH3KOCTbK), o6eCneHHBa-ramen xopouiHe peonorHnecKHe xapaKTepncTHKH rjih HaHeceHHH μθτοαομ τραΦηρθτ-Hoň nenaTH. flacTy H3HOCHT Ha KepaMHnecKHe ποα,ποκκη nepe3 KanpoHOByra ceTKy Ha ycTa*»HoBxe HaHeceHHH h cyrnaT Ha BO3flyxe npn 80°C b TeneHHe 20 μηηυτ. OnepauHHHaHeceHHH h cyuiKH ποβτορηιοτ flBa«flbi h nonynaroT BbicyineHHoe ποκρητηθ c o6íneňTOJimHHOH 35 MKM. BblCyiUeHHblH CJIOH φοΤΟΗΥΒΟΤΒΗΤΘΗΒΗΟΗ flH3JieKTpHHeCKOň ΚΟΜΠΟ“3HflHH SKCnOHHpyiOT Ηθρθ3 φθΤΟΙΠ36ΠΟΗ C ΤΗΠΟΠΟΓΗΗβΟΚΗΜ pHCyHKOM flHH ΟΠρβ,ΑΘΠΘ“hhh pa3peuiaromeň cnocočHocTH, coflepacamHM jihhhh ιπηρηηοη 25-200 mkm c paccTO“ηηηθμ Mexfly hhmh 25-300 mkm, Ha ycTaHOBKe c ρτγτΗοή naMnoň MomnocTbio 375 BtIlocne 3KCnOHHpOBaHHH CJIOH npOHBJIJHOT 0,5%-HbIM paCTBOpOM ΤρΗΗ3ΤρΗήφθθφ3Τ3,πρΗ 3TOM oĎJiyneHHbie ynacTKH cnon BbiMbiBaraTca, φορΜπργπ pncyHOK flHsneKTpHKaCXeMbl, npOMblBaiOT flHCTHJIJIHpOBaHHOH BOflOň, CyUiaT ΠρΗ 150 C B TeneHHe 60 MHHyTh BJKHraroT B KOHBeňepHoň πθηη npn MaKCHManbHoň TeMnepaType 750 C. ΠρΗ stomb flHaneKTpHHecKOM cnoe o6pa3yroTCH KaHanbi, uihphhoh, H3MepeHHoň Ha mhkpocko-ne h onpefleJiHwmeň pa3peinawmyra cnocoÓHOCTb npennaraeMoň κομπο3Ηη;ηη. B Ta6jiHne 1 npHBefleHbí cocTaBbi CMeceň flnn npnroTOBJíeHHH npeflnoaceHHoň kom-ΠΟ3ΗΗΗΗ. 246578TeXHOJlorHH ΠρΗΓΟΤΟΒΠΘΗΗΗ CMeCH (npHMepbl 1 ~ 6) flJlH ΠΟΠγΗβΗΗΗ φΟΤΟΗΥΒΟΤΒΗ “TejIbHOH flH3JieKTpHHeCKOH ΚΟΜΠΟ3ΗΗ, ΗΗ. B φ3ρφοροΒθΗ nauiKe CMeuiHBaroT npeflBapHTenbHo npnroToBJíeHHbiH pacTBop conoHHMepa H3o6yTHJieHa, nHnepHJieHa η ηητρηπθ aKpHJioBoň κηθποτμ ΑΗΜετΗπφορΜθ b-c MHfle pacTBopoM (b nepecneTe cyxoň ocTaTox IIa) πο3Ητηβηογο φοτορβ3ΗθΤ8 bflHOKcaHe h floSaBJíaioT CBHHeu; coflep «Amee οτεκπο c pa3MepoM nacTHfl 0.5-2.5 mkmCMecb TmaTeJibHo neperaparoT c pejibio roMoreHimHHH h ycpeflHeHHH cocTaBa CHa-. Hana b eneβρφοροΒοή Hanixe b TeneHňe 5 μηηυτ, and 3aTeM Ha nacTOTepxe c Kanvomo-HOBMMH BaJIKaMH B ΤΘΗβΗΗΘ 30 MHHyT. ΠοπγΗΘΙΟΤ naCTy C BH3KOCTbK), o6eCneHHBa-ramen xopouiHe peonorHnecKHe xapaKTepncTHKH rjih HaHeceHHH μθτοαομ τραΦηρθτ-Hoň nenTH. flacTy H3HOCHT Ha KepaMHnecKHe ποα, ποκκη nepe3 KanpoHOByra ceTKy Ha ycTa * »HoBxe HaHeceHHH h cyrnaT Ha BO3flyxe npn 80 ° C b TeneHHe 20 μηηυτ. OnepauHHHaHeceHHH h cyuiKH ποβτορηιοτ flBa «flb h nonynaroT BbicyineHHoe ποκρητηθ c o6nennnTOOnHHOH 35 MKM. BblCyiUeHHblH CJIOH φοΤΟΗΥΒΟΤΒΗΤΘΗΒΗΟΗ flH3JieKTpHHeCKOň ΚΟΜΠΟ "3HflHH SKCnOHHpyiOT Ηθρθ3 φθΤΟΙΠ36ΠΟΗ C ΤΗΠΟΠΟΓΗΗβΟΚΗΜ pHCyHKOM flHH ΟΠρβ, ΑΘΠΘ" HHH pa3peuiaromeň cnocočHocTH, coflepacamHM jihhhh ιπηρηηοη 25-200 mcm c pacct "ηηηθμ Mexfly hhmh 25 to 300 mkm, Ha ycTaHOBKe c ρτγτΗοή naMnoň MomnocTbio 375 BtIlocne 3KCnOHHpOBaHHH CJIOH npOHBJIJHOT 0.5% -HbIM paCTBOpOM ΤρΗΗ3ΤρΗήφθθφ3Τ3, πρΗ 3TOM oĎJiyneHHbie ynacTKH cNon = BbiMbiBaraTca, φορΜπργπ pncyHOK flHsneKTpHKaCXeMbl, npOMblBaiOT flHCTHJIJIHpOBaHHOH BOflOň, CyUiaT ΠρΗ 150 CB TeneHHe 60 MHHyTh BJKHraroT B KOHBeňepHoň πθηη npn MaKCHManbHoň TeMnepaType 750 C. ΠρΗ one hundred megabytes flHaneKTpHHecKOM cnoe o6pa3yroTCH KaHanbi, uihphhoh , H3MepeHHoň Ha mhkpocko-ne h onpefleJiHwmeň pa3peinawmyra cnocoÓHOCTb npennaraeMoň κομπο3Ηη; ηη. B Ta6iHe1nPHBefleHc cocTaBbi CMeCnnnnnnnnnnHnHHnnpnOnHHnnnnnnPn3ΗΗΗΗ. 246578

TaSjímja 1 npHMep PaCTBOp COnOJIH-Mepa H3o6yTHJie-Ha.nunepHjieHah HHTpnna aKpn- JIOBOH KHCJIOTbl B flHMeTHJI<í>OPMa- PaCTBOp ΠΟ3ΗΤΗΒ— ΗΟΓΟ ýOTOpe3HCTab AHOKCaHe (b ne-pecqeTe na cy- C b η h e u;c op; epacaine eοτβκπο MapKH c' pa3MepoM qacraij0,5-2,5 mkm xoň eec) KOJiHne- CTBO, Γ MHfle Kpe- IIOCTb, 7. KOJ1H- necT- BO, r • ř, κρβ- nOCTb, 7» 1 11,4 2,1 45,3 15,75 12,15 2 11,4 2,64 40,0 12,36 15,0 3 15,3 3,93 45,3 8,07 • 18,0 4 8,3 1,8 40,2 12,3 15,9 5 17,1 4,38 50,0 9,9 15,72 6* 11,4 ' 2,64 45,3 10,86 15,0 * flonojiHHTejThHo BBefleHo 1,5 r oó-TepnHHeona.TaSjímja 1 npHMep PaCTBOp COnOJIH-Mepa H3o6yTHJie-Ha.nunepHjieHah HHTpnna aKpn- JIOBOH KHCJIOTbl B flHMeTHJI <í> OPMa- PaCTBOp ΠΟ3ΗΤΗΒ— ΗΟΓΟ ýOTOpe3HCTab AHOKCaHe 'pa3MepoM qacraij0,5-2,5 mkm xoň eec) KOJIHne- CTBO, f MHfle Kpe- IIOCTb, 7. KOJ1H- necT- BO, r •, κρβ- nOCTb, 7 »1 11,4 2,1 45, 3 15.75 12.15 2 11.4 2.64 40.0 12.36 15.0 3 15.3 3.93 45.3 8.07 • 18.0 4 8.3 1.8 40.2 12.3 15.9 5 17.1 4.38 50.0 9.9 15.72 6 * 11.4 '2.64 45.3 10.86 15.0 * flonojiHHTejThHo BBefleHo 1.5 r oo-TepnHHeona .

CocTaBH h cpaBHHTfijiBHaH oifeHKa npe/yiaraeMoň κομπο3Ηβ;ηη h npoTorana řípusefleHbí b Ta6nnu;e 2. ' - TaSjíHna 2 Ν’ npH-Mep a CocTaB ýoTonyBCTBHTejibHoň κομπο3Ηιιηη BecoBbix nacTeň CBHHen- co#ep3ca- mee οτβκπο pacTBop ΠΟ3ΗΤΗΒ-ΗΟΓΟ φθ~T0pe3HC- Ta COnOJlH- Μβρ H30- SyrmieHa, nnnepHJie- Ha Η HHT- pHJia ax-pHJIOBOH KHCJIOTbl flHMGTHJl- φθρΜ3ΜΗΑ ού-ΤβρΠΗ- HeoJi Προτο- ΤΗΠ 31-48 51-69 - - - 4 53,0 41,0 0,5 5,5 - 1 40,5 52,5 0,8 6,2 - 246578 h- npoflO.JDKeHHe Ta6n.2 ---—- N> npH-Mepa Coctsb <J»oTo*iyBCTBHTejibHoň κομποβηκηη aecoBbix «tacTeň CBHHeií- coflepaca- mee ετβκηο pacTBop ΠΟ3ΗΤΗΒ“ΗΟΓΟ φθ~TOpe3HC- Ta COnOJlH” Mep H3O“ ĎyTuneHa, nwiepmie- Ha H HHT“ pHJia aK- pHJlOBOň KHCJIOTbl ΗΗΜβΤΗΠ- φορΜβΜΗΑ 06-ΤβρΠΗ- ΗβΟΠ 2 50,0 41,2 1,0 7,8 3 60,0 26,9 2,0 11,1 - 5 52,4 33,0 2,5 12,1 - 6 50,0 36,2 1,0 7,8 5,0 IIpoflOJixeHHe Ta6n.2 Ν* ΠΡΗ-Mepa ΒρβΜΗ 3KC-noHHpoBa- ΗΗΗ, MHHyT UlnpHHa Ka- HaJTOB Β cjioe flH-sneKTpHKa, mkm IIpHMenaHMe Προτο- ΤΗΠ 1-3 125 JKHflKaH ΚΟΜΠΟ3ΗΐχΗΗ,HaHeceHHe Ha ueHTpH-ýyre 4 2,0 75 IIacToo6pa3HaH kom-πο3ηπηη, HaHeceHHeΤρ3φ3ρθΤΗΟΗ nenaTblO 1 1,5 65 2 2,0 60 3 3,0 65 5 IlacTooSpasHaH oneHbBbICOKOBH3KaH ΚΟΜΠΟ“ 3ΗΠΗΗ, npH HaHeCeHHH3a6HBaeT ceTKy τρπφπρβτβ 6 2,0 50 nacToo6pa3Ha« κομποβη-u;hh, HaHeceHHe τρβφπρβτ-Hoň nenaTbio 246578 Κβκ ÉMflHo H3 npHBefleHHbix npHMepoB, npeřpiaraeMaH Φοτομυβοτβητ&amp;πβη3Η ρ,η-aneKTpiraecKajt κομπο3Ηιρ«ι HMeer 6onee BbicoKyio no cpaBHeHHio c H3BecTHoň paa-petnaromyio cnocoSHocTb, oSecnenHBaiomyro nonyneHne xaHanoB b cnoe ρ,ΗΒΠβκτρηκβΠΜρΗΗοή 50-65 mkm, ητο πο3ΒοηΗβτ 3HanHTejibHo yBanHHHTb mioTHocTb pacnono-χβΗΗΗ 3JieMeHTOB b ToncTonneHonHbix MHKpocxeMax, noBbnnan creneHb HHTerpauHHnocneflHHx ho TpeTbero ypoBHH, npennaraeMaa komiio3Huhh o6naflaeT χοροπιημηpeonormiecKHMH xapaKTepHCTHKaMH, no3BonjnotHHMH HcnonbaoBaTb flnn HaHeceHHHΚΟΜΠΟ3ΗΗΗΗ HaHČonee yfloBHbiň Μβτοη Tpa^apeTHoů nenara, a Tax»e TpaflHUHOHHoeo6opynoBaHne ona nonyneHHH ToncTonneHonHbix MHxpocxeM. 246578 6 ΦΟΡΜΥΠΑ Η3ΟΒΡΕΤΕΗΗΗCocTaBH h cpaBHHTfijiBHaH oifeHKa NPE / yiaraeMoň κομπο3Ηβ; ηη h npoTorana řípusefleHbí Ta6nnu b e 2 ' - 2 TaSjíHna Ν 'NPH MEP CocTaB ýoTonyBCTBHTejibHoň κομπο3Ηιιηη BecoBbix retrieve what CBHHen- # ep3ca- mee οτβκπο pacTBop ΠΟ3ΗΤΗΒ-ΗΟΓΟ φθ ~ T0pe3HC- Ta COnOJlH- Μβρ H30- SyrmieHa, nnnepHJie- Ha HT HHT- pHJia ax-pHJIOBOH KHCJIOTbl flHMGTHJl- φθρΜ3ΜΗΑ ού-ΤβρΠΗ- HeoJi Προτο- ΤΗΠ 31-48 51-69 - - - 4 53,0 41,0 0,5 5 , 5 - 1 40,5 52,5 0,8 6,2 - 246578 h- npoflO.JDKeHHe Ta6n.2 ---—- N> npH-Mepa Coctsb <J »oTo * iyBCTBHTejibHoň κομποβηκηη aecoBbix« tacTen CBHHeií- coflepaca - mee ετβκηο pacTBop ΠΟ3ΗΤΗΒ “ep φθ ~ TOpe3HC- Ta COnOJlH” Mep H3O “DYTuneHa, nwiepmie- Ha HHT” pHJia aK- pHJlOBOn KHCJIOTbl ΗΗΜβΤΗΠ- φορΜβΜΗΑ 06-ΤβρΠΗ- ΗβΟΠ 2 50,0 41,2 1,0 7, 8 3 60.0 26.9 2.0 11.1 - 5 52.4 33.0 2.5 12.1 - 6 50.0 36.2 1.0 7.8 5.0 IIpoflOJixeHe Ta6n.2 Ν * ΠΡΗ-Mepa ΒρβΜΗ 3KC-noHHpoBa-MHHyT UlnpHHa Ka-HaJTOB j cjioe flH-sneKTpHKa, mkm IIpHMenaHMe 1-3Π 1-3 125 JKHflKaH 2,0ΠΟ3ΗΐχΗΗ, HaHeceHHe Ha ueHTpH-γyre 4 2,0 75 IIacToo6pa3HaH kom-πο3ηπηη, HaHeceHHe'ρ3φ3ρθ 65 2 2.0 60 3 3.0 65 5 IlacTooSpasHaH oneHbBbICOKOBH3KaH ΚΟΜΠΟ "3ΗΠΗΗ, NPH HaHeCeHHH3a6HBaeT spangle τρπφπρβτβ 6 2.0 50 nacToo6pa3Ha« κομποβη-u; hh HaHeceHHe τρβφπρβτ-hon nenaTbio 246578 Κβκ ÉMflHo H3 npHBefleHHbix npHMepoB, npeřpiaraeMaH Φοτομυβοτβητ &amp; πβη3Η ρ, η-aneKTpiraecKajt κομπο3Ηιρ «ι HMeer 6onee BbicoKyio well cpaBHeHHio c H3BecTHoň PAA-petnaromyio cnocoSHocTb, oSecnenHBaiomyro nonyneHne xaHanoB cnoe ρ b, ΗΒΠβκτρηκβΠΜρΗΗοή 50-65 mkm, ητο πο3ΒοηΗβτ 3HanHTejibHo yBanHHHTb mioTHocTb pacnono-χβΗΗΗ 3JieMeHTOB b ToncTonneHonHbix MHKpocxeMax, noBbnnan creneHb HHTerpauHHnocneflHHx ho TpeTbero ypoBHH, npennaraeMaa komiio3Huhh o6nafla eT χοροπιημηpeonormiecKHMH hapnbaoBaTb flnn HaHeceHHHΚΟΜΠΟ3ΗΗΗΗ HaHČonee yfloBHbiň paβτοη Tpa ^ apeTHoů nenara, ah nhhhhhhhhhhhhhhhhhhhhhhhhhhhh ... 246578 6 ΦΟΡΜΥΠΑ Η3ΟΒΡΕΤΕΗΗΗ

1. «DoTOHyBCTBHTertbuaH flHSJíeKTpHqecKaa κομπο3Ηαηη npeHMymecTBeHHo απηH3r0T0BJieHHH TOJlCTOrUieHOHHblX MHKpOCXeM, BKJHOHawmaH CBHHeiJCOflepJKaníee CTeKJIOH paCTBOp ΠΟ3ΗΤΗΒΗΟΓΟ 3>OTOpe3HCTa Ha OCHOBe 3ΦΗΡΟΒ O-XHHOHAHaSHAOB B ΟΡΓ3~HHHecKOM pacTBopHTejie, oTJimiaioinaHCH τθμ, mto, c Aejibio noBbnneHHH pas-pemawmeň cnocoSHocTH n yjiynuieHHH peoJiorimecKHx cboííctb, OHa aoiiojihh-TejibHo coflepjKHT pacTBop conojiHMepa H3o6yTHJieHa c nnnepnneHOM h hhtphjiomaKpHJioBoň KHCJioTbi o6meň $OpMyjIbI CH, | 1 - CH - C -| - - CH - CH =I = CH - CH2 - - - CH, - CH I 1 L ch3 . m 1 L ch3 n CN . cpeflHHH i^oJieKyjiHpHaa Macca - 800000 b ΑΗΜβτκπφορΜβΜΜΑβ, a b xaqecTBe pacT-BOpa Π03ΗΤΗΒΗ0ΓΟ φθΤΟΡβ3ΗΟΤΗ Ha OCHOBe θφΗΡΟΒ O“XHHOHflHa3HAOB B ΟΡΓβΗΗ- necKOM pacTBopHTene co^epacaT pacTBop πο3Ητηβηογο φοτορβΒΗρτβ Ha OCHOBeCyJIbφO^φHpOB O-XHH0HflHa3HflOB B flHOKCaHe npH CJieflyiOineM COflepacaHHH ΚΟΜΠΟΗβΗtob, BecoBbiX qacTeň: CBHHeucoflepwamee CTexjio 40,5-60,01. "DoTOHyBCTBHTertbuaH flHSJíeKTpHqecKaa κομπο3Ηαηη npeHMymecTBeHHo απηH3r0T0BJieHHH TOJlCTOrUieHOHHblX MHKpOCXeM, BKJHOHawmaH CBHHeiJCOflepJKaníee CTeKJIOH paCTBOp ΠΟ3ΗΤΗΒΗΟΓΟ 3> OTOpe3HCTa Ha OCHOBe 3ΦΗΡΟΒ XHHOHAHaSHAOB O-B ~ ΟΡΓ3 HHHecKOM pacTBopHTejie, oTJimiaioinaHCH τθμ MTO c Aejibio noBbnneHHH waist-pemawmeň cnocoSHocTH n yjiynuieHHH peoJiorimecKHx cboííctb, OH and aoiiojihh -TejibHo coflepjKHT pacTBop conojiHMepa H3o6yTHJieHa c nnnepnneHOM h hhtphjiomaKpHJioBoň KHCJioTbi o6men $ OpMyjIbI CH, | 1 - CH - C - - - CH - CH = I = CH - CH 2 - - - CH, - CH 1 CH 3. m 1 L ch3 n CN. cpeflHHH oJieKyjiHpHaa Macca i ^ - b 800000 ΑΗΜβτκπφορΜβΜΜΑβ ab xaqecTBe pACT-BOPA Π03ΗΤΗΒΗ0ΓΟ φθΤΟΡβ3ΗΟΤΗ Ha OCHOBe θφΗΡΟΒ O "XHHOHflHa3HAOB B ΟΡΓβΗΗ- necKOM pacTBopHTene what ^ EPAC pacTBop πο3Ητηβηογο φοτορβΒΗρτβ Ha OCHOBeCyJIbφO φHpOB-O-B XHH0HflHa3HflOB flHOKCaHe NPH CJieflyiOineM COflepacaHHH ΚΟΜΠΟΗβΗtob, BecoBbiX qacTeň : CBHHeucoflepwamee CTexjio 40.5-60.0

PaCTBOp ΠΟ3ΗΤΗΒΗΟΓΟ φ0Τ0ρβ3Η0Τ3Ha OCHOBe CyJlbφ0^φHP0B o-xhhoh- AHa3HflOB b AHOKcaHe ν,Β nepecueTeHa cyxoň ocTaTox)PaCTBOp ΠΟ3ΗΤΗΒΗΟΓΟ φ0Τ0ρβ3Η0Τ3Ha OCHOB CyJlbφ0 ^ φHP0B o-xhhoh- AHa3HflOB b AHOKcaHe ν, Β nepecueTeHa cyxoň ocTaTox)

CononHMep H3o6yTHJieHa, nHnepHJie-Ha H HHTpHJia aKpHJIOBOň KHCJIOTbloBnjeň φορι^ΠΜΑΗΜβΤΗίίφοΡΜΗΜΗΑ 2. ΚΟΜΠΟ3ΗΑΗΗ no π.1, oTininaKMuaHca:0,1-5,0 BecoBbix nacTeň ώ -TepnHHeoJia. 12,2-23,8 0,8-2,0 6,2-11,1CononHMep H3o6yTHJieHa, nHnepHJie-Ha HHTpHJia aKpHJIOBOň KHCJIOTbloBnje φορι ^ ΠΜΑΗΜβΤΗίίφοΡΜΗΜΗΑ 2. ΚΟΜΠΟ3ΗΑΗΗ no π.1, oTininaKMuaHca: 0,1-5,0 BecoBbix nacTeň ep -TepnHHeoJia. 12.2-23.8 0.8-2.0 6.2-11.1

TeM, hto OHa βοπο,πηητθπβηο coflepscHT 246578TeM, hto OHa βοπο, πηητθπβηο coflepscHT 246578

OoTOHyBCTBHTejibHaH flHaneKTpHHecxaH κομπο3Ηηηη othochtch k 3ηβκτροτεχ-HHKe.OoTOHyBCTBHTejibHaH flHaneKTpHHecxaH κομπο3Ηηηη othochtch to 3ηβκτροτεχ-HHKe.

Uejihio Η3οδρβτθΗΗΗ HBJíHeTCH noBbiiueHHe pa3peniaromeň ciiocoShocth h ynyniue-HHe peonorimecKKx cbořctb κομποβηηηη.Uejihio Η3οδρβτθΗΗΗ HBJíHeTCH noBbiiueHHe pa3peniaromeň ciiocoShocth h ynyniue-HHe peonorimecKKx cbořctb κομποβηηηη.

OoToqyBCTBHT&amp;ribHaH flHanexTpHHecxaH κομπο3Ηι;ηη BxmonaeT CBHHeijcoflepjKaiueeCTeKJIO H paCTBOp ΠΟ3ΗΤΗΒΗΟΓΟ φθΤθρβ3Η<2Τ3 Ha OCHOBe 3φΗρθΒ O—XHHOHflHaaHflOBb opraHnweCKOM pacTBopHTene, cornacHo HaoCpeTeHHio, flononHHTejibHo coflepacHTpacTBop conoJiHMepa HaoSyraneHa c nHnepnneHoM h hhtphjiom axpHnoBoň κηοποτμo6meň φορΜγπωOoToqyBCTBHT &amp; ribHaH flHanexTpHHecxaH κομπο3Ηι; ηη BxmonaeT CBHHeijcoflepjKaiueeCTeKJIO H paCTBOp ΠΟ3ΗΤΗΒΗΟΓΟ φθΤθρβ3Η <2Τ3 Ha OCHOBe 3φΗρθΒ O XHHOHflHaaHflOBb opraHnweCKOM pacTBopHTene, cornacHo HaoCpeTeHHio, flononHHTejibHo coflepacHTpacTBop conoJiHMepa HaoSyraneHa nHnepnneHoM c h hhtphjiom axpHnoBoň κηοποτμo6meň φορΜγπω

Γ CH, ' 1 - ch, - ο-ι — - CH - CH =I = CH - CH2 - - - CH, - CH I 1 ch3 . m 1 L ch3 h 1 L CN J cpeflHHH MoneKyjiHpHas Macca - 800000 b πΗΜβτΗηφορΜβΜΗΑβ, a b xanecTBepacTBopa πο3ητηβηογο φοτορβ3Ηοτ3 Ha OCHOBe 3φπροΒ o-XHHoH,E(Ha3HflOB b opra-HHHeCKOM pacTBopHTene COflepJKHT pacTBop Π03ΗΤΗΒΗΟΓΟ φθΤθρβ3ΗΟΤ3 Ha OCHOBeΟνΠΒφΟΒφΗρΟΒ O-XHHOHAHa3HflOB B flHOKCaHe ΠρΗ CJieflyKMUeM COflepJKaHHH ΚΟΜΠΟΗβΗ-tob, BecoBbix qacTeťí: CBHHeucoflepwamee CTex.no, CH, 1 - ch, - ο-ι - - CH - CH = I = CH - CH 2 - - - CH 1 - CH 1 CH 3. m 1 S CH 3 H 1 S CN J cpeflHHH MoneKyjiHpHas Macca - 800000 b πΗΜβτΗηφορΜβΜΗΑβ ab xanecTBepacTBopa πο3ητηβηογο φοτορβ3Ηοτ3 Ha OCHOBe 3φπροΒ o XHHoH, E (Ha3HflOB b rectifying-HHHeCKOM pacTBopHTene COflepJKHT pacTBop Π03ΗΤΗΒΗΟΓΟ φθΤθρβ3ΗΟΤ3 Ha OCHOBeΟνΠΒφΟΒφΗρΟΒ O XHHOHAHa3HflOB B flHOKCaHe ΠρΗ CJieflyKMUeM COflepJKaHHH ΚΟΜΠΟΗβΗ-tob, BecoBbix qacTe: CBHHeucoflepwamee CTex.no

PacTBop ΠΟ3ΗΤΗΒΗΟΓΟ (J)OTOpe3HCTaHa OCHOBe 0^ΠΒφ03φΗρ0Β O“XHHOH“nna3HfloB b nHoxcaHe (b nepecneTeHa cyxoň οοτβτοκ)PacTBop ΠΟ3ΗΤΗΒΗΟΓΟ (J) OTOpe3HCTaHa OCHOB 0 ^ ΠΒφ03φΗρ0Β O “XHHOH” nna3HfloB b nHoxcaHe (b unecneTeHa cyxo οοτβτοκ)

CononHMep H3o6y™neHa, nHnepHneHah HHTpHna axpanoBOH KHcnoTbi oSmeňφορΝΓ/ίΙΗ ΑΗΜΘΤΗηφορΜΒΜΗη 40,5-60,0 12,2-23,8 0,8-2,0 6,2-11,1 ΠρΗ3Η3Ηο H3o6peTeHHeM no pe3ynbTaTaM 3KcnepTH3bi, ocyiuecTBneHHoň Tocyflap-CTBeHHbíM ΚοΜΗτβτΟΜ CCCP no nenaM Η3ο6ρετβΗΗή η οτκρητηΑ. 246578CononHMep H3o6y ™ neHa, nHnepHneHah HHTpHna axpanoBOH KHcnoTbi oSmeňφορΝΓ / ίΙΗ ΑΗΜΘΤΗηφορΜΒΜΗη 40,5-60,0 12,2-23,8 0,8-2,0 6,2-11,1 3KcnepTH3bi, ocyiuecTBn CTBeHHbíM ΚοΜΗτβτΟΜ CCCP no NenaM Η3ο6ρετβΗΗή η οτκρητηΑ. 246578

Claims (2)

246 578 Ρ β E D Μ 5 T VYNÁLEZU 1« Potocitlivá dielektrická sloučenina a výhodou používanápro výrobu mikroobvodů na silných vrstvách, zahrnujícíolovnaté sklo a roztok pozitivního fotorezistu na základěesterů o-chinondiazidů v organickém rozpouštědle, vyznaču-jící se tím, že pro zvýšení rozlišovací schopnosti a zlep-šení reologických vlastností, obsahuje jako doplněk roztokkopolymeru izobutylenu s piperilenem a nitrilem kyselinyakrylové o střední molekulové hmotě 800 000 obecného vzorce CH-, 5 — — " — f 1 - CH2 - c - rá3J m -CH - CH - CH - CEL - 1 CHX - 5 J »í - CH2 - CN I CN » Á6 v dimetylformamidu a jako roztok pozitivního fotorezistuna základě esterů o-chinondiazidů v organickém rozpouštědleobsahuje roztok pozitivního fotorezistu na základě sulfo-eSterů o-chinondiazidů v dioxanu při následujícím obsahu slo-žek. v hmotnostních dílech ; . olovnaté sklo roztok pozitivního fotorezistu nazákladě sulfoesterů o-chinondiazidův dioxanu - v přepočtu na suchýzbytek kopolymer izobutylenu, piperilenu anitrilu kyseliny akrylovéobecného vzorce dimetyformamid 40,5 až 60,0 12,2 až 25,8 0,8 až 2,06,2 až 11,1BACKGROUND OF THE INVENTION 1 A flowable dielectric compound and preferably used for the production of microcircuits on thick layers, comprising lead glass and a solution of a positive photoresist based on o-quinondiazide esters in an organic solvent, characterized in that to improve rheological properties, it contains, in addition to a solution of a copolymer of isobutylene with piperilene and acrylic acid nitrile having an average molecular weight of 800,000 of the general formula CH-, 5 - - - - CH - CH - CEL - 1 CHX - 5 J 2 - CH 2 - CN 1 CN 6 6 6 in dimethylformamide and as a positive photoresist solution based on o-quinondiazide esters in organic solvent contains a solution of a positive photoresist based on sulfo-esters of o-quinondiazides in dioxane with the following component content. Leaded glass solution of positive photoresist based on sulfoesters o-quinondiazide dioxane - a dry-copolymer of isobutylene, an acrylic acid piperilene of the general formula dimethylformamide 40.5 to 60.0 12.2 to 25.8 0.8 to 2.06.2 to 11.1 2. Fotocitlivá dielektrická sloučenina podle bodu 1, vyzna-čující se tím, že obsahuje jako doplněk 0,1 až 5»θ hmotnostníchdílůoC - terpinolu.2. A photosensitive dielectric compound as claimed in claim 1, comprising from 0.1 to 5% by weight of C-terpinol.
CS831312A 1983-02-09 1983-02-25 Photosensitive dielectric compound CS246578B1 (en)

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DD83247830A DD234196A3 (en) 1983-02-09 1983-02-09 PHOTO-SENSITIVE DIELECTRIC MIXTURE
CS831312A CS246578B1 (en) 1983-02-09 1983-02-25 Photosensitive dielectric compound

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Application Number Priority Date Filing Date Title
DD83247830A DD234196A3 (en) 1983-02-09 1983-02-09 PHOTO-SENSITIVE DIELECTRIC MIXTURE
CS831312A CS246578B1 (en) 1983-02-09 1983-02-25 Photosensitive dielectric compound

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DE3823463C1 (en) * 1988-07-11 1990-02-01 Du Pont De Nemours (Deutschland) Gmbh, 4000 Duesseldorf, De
US20040170925A1 (en) * 2002-12-06 2004-09-02 Roach David Herbert Positive imageable thick film compositions
US7402373B2 (en) 2004-02-05 2008-07-22 E.I. Du Pont De Nemours And Company UV radiation blocking protective layers compatible with thick film pastes

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