CS239969B1 - Working chamber of the zonal apparatus for processing of highly pure material - Google Patents

Abstract

The purpose of the solution is to simplify production, facilitate assembly of the working chamber and reduce power loss. The stated purpose is achieved by a working chamber in the shape of a monolithic metal prism, in which a working space and a system of cooling channels with grooves are created. The working space is provided with through holes along the vertical axis and the outer walls of the prism form contact surfaces for other parts of the working chamber.

Description

(54)

PETRŽELA JAN; PETRÁŠEK JOSEF, PRAGUE

Working zone of the zone equipment for processing of highly pure material

The purpose of the solution is to simplify production, facilitate assembly of the working chamber and reduce the power loss.

This is achieved by a working chamber in the form of a monolithic metal prism in which a working space and a system of cooling channels with grooves are formed. The working space is provided with through holes according to the vertical axis and the outer walls of the prism form contact surfaces for other parts of the working chamber.

239 969

BACKGROUND OF THE INVENTION 1. Field of the Invention

The working chambers of the zone devices are basically of two types. The single-shell, cylindrical or prismatic working chambers are the simplest. They are usually made of stainless steel and fitted with flanges for connecting sight glasses, doors, grommets etc. They are cooled by means of metal tubes through which the coolant flows, soldered to the working chamber surface. The manufacture of these chambers requires a great deal of handicraft.

more often two-shell working chambers are used, where the coolant flows through the space between the outer and inner shell.

This working chamber is superior but its construction requires a large number of tight welds when connecting the necks and connecting the jackets. The flange socket for connecting the RF source adversely extends the distance between the RF source and the inductor.

The above-mentioned disadvantages are overcome by the working chamber of the zonal apparatus according to the invention, which is based on the fact that the working chamber consists of a monolithic metal block in the shape of a prism. A working space is created in the block, for example in the form of a sphere intersection

239 969 prism® The walls of the block are designed as a contact surface for direct connection of the upper and lower lids, sight glass and bushing » block · located around the through holes, interconnecting ducts with vertical cooling ducts, which are located along the edges of the block® The outer circular cooling grooves are closed by the upper and lower lids®

The advantage of the working chamber according to the invention is that it is easy to manufacture because there is no need for a number of tight welds. Its assembly is simple * because other parts such as visors, bushings and the like are connected directly to the outer walls of the working chamber. The way of connecting the other parts of the working chamber to its walls allows for wider possibilities in the selection of material for its production and greatly reduces production costs®

In the accompanying drawing, FIG. 1 shows a working chamber according to the invention in a side projection with the lids removed, and FIG. 2 shows a working chamber with a set of cooling channels in section.

The basic part of the working chamber is a block 1 of prismatic shape, made of dural®. In block 1, a working space 2 is created in the shape of a prismatic spherical surface. The interior walls of the working space 2 are polished. The side walls of the block 1 provided with an opening 4 for the grommet and the aperture opening J for the window are finely machined. Further, the block 1 is provided with external circular cooling grooves 8 located around the through openings χ. In the corners of the block 1, vertical cooling ducts J are formed along its edges, which are connected via external ducts 10 to the outer circular cooling grooves 8 In the vertical ducting ducts, pins 12 are inserted, provided with rubber seals 11 and threaded holes at both ends. ® The central part of the pins 12 is tapered to about one half of their diameter. ® To the upper and lower walls of the block 1, the pins 12 and screws 15 are fastened to the lids 13 and 14 with rubber gaskets 13 and 14 and necked on the outside.

The inner walls of the working space 2 are polished for good reflection of the infrared rays. The outer walls of the block 1 are finely machined as they serve as mounting and sealing surfaces for connecting other parts, for example visors, grommets and the like. These parts are also connected to the block by any mechanical means with gasket ·

As a material for the production of block 1, dural is most suitable for its easy machinability, low weight, good thermal conductivity and reflectivity in the area of thermal radiation. The outer circular cooling grooves 8 are closed by sealed lids 13 and 14 thereby forming circular cooling channels.

The upper and lower sealed portions of the pins 12 serve as a closure of the vertical cooling ducts 6 and at the same time as nuts for the screws 15 connecting the lids 13 and 14 to the block 1. The middle portion of the pins 12 is weakened to prevent the vertical cooling ducts completely closing. The lids 13 and 14 may optionally be replaced directly by the connecting flanges of the handling chambers.

Claims (4)

Object of the invention 239 969 Working zone of a zone apparatus for processing high purity material, characterized in that it consists of a block (1) in the form of a monolithic metal prism in which the working space (2) is formed and the walls of the block (1) are formed as a contact surface for straight connecting an upper lid (13), a lower lid (14), a grommet and a visor provided with an opening (5) for the sight glass and an opening (4) for the grommet, the working space (2) having through holes (7) along the vertical axis and the block (1) is provided with a set of cooling channels * Working chamber according to claim 1, characterized in that the working space (2) is in the form of a ball or prism penetration. Working chamber according to claim 1 or 2, characterized in that the cooling channel assembly is formed by external circular cooling grooves (8) located around the through holes (7), interconnected by connecting channels (10) with vertical cooling channels (9) arranged along the side. The outer circular cooling grooves (8) are closed by covers (13) and (14). Working chamber according to Claims 1, 2 and 3, characterized in that sealed bolts (12), which are weakened in the central part, are inserted into the vertical cooling channels (9).