CS189938B1 - Method of justifying the epitax boards,particularly in the photolithography - Google Patents

Method of justifying the epitax boards,particularly in the photolithography

Info

Publication number
CS189938B1
CS189938B1 CS756672A CS667275A CS189938B1 CS 189938 B1 CS189938 B1 CS 189938B1 CS 756672 A CS756672 A CS 756672A CS 667275 A CS667275 A CS 667275A CS 189938 B1 CS189938 B1 CS 189938B1
Authority
CS
Czechoslovakia
Prior art keywords
epitax
justifying
photolithography
boards
epitax boards
Prior art date
Application number
CS756672A
Other languages
Czech (cs)
Inventor
Guenter Heine
Juergen Sellrie
Original Assignee
Guenter Heine
Juergen Sellrie
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Guenter Heine, Juergen Sellrie filed Critical Guenter Heine
Publication of CS189938B1 publication Critical patent/CS189938B1/en

Links

CS756672A 1974-10-02 1975-10-02 Method of justifying the epitax boards,particularly in the photolithography CS189938B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD181447A DD119314A1 (en) 1974-10-02 1974-10-02

Publications (1)

Publication Number Publication Date
CS189938B1 true CS189938B1 (en) 1979-05-31

Family

ID=5497507

Family Applications (1)

Application Number Title Priority Date Filing Date
CS756672A CS189938B1 (en) 1974-10-02 1975-10-02 Method of justifying the epitax boards,particularly in the photolithography

Country Status (2)

Country Link
CS (1) CS189938B1 (en)
DD (1) DD119314A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008080602A1 (en) * 2006-12-29 2008-07-10 Isam Aktiengesellschaft Method for analyzing the surface of a work piece, especially of a lay of fibers and/or woven fibers

Also Published As

Publication number Publication date
DD119314A1 (en) 1976-04-12

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