CS181619B1 - Transversal scattering field compensation circuit of electromagnetic lens in electron microscope optical system - Google Patents

Transversal scattering field compensation circuit of electromagnetic lens in electron microscope optical system

Info

Publication number
CS181619B1
CS181619B1 CS402076A CS402076A CS181619B1 CS 181619 B1 CS181619 B1 CS 181619B1 CS 402076 A CS402076 A CS 402076A CS 402076 A CS402076 A CS 402076A CS 181619 B1 CS181619 B1 CS 181619B1
Authority
CS
Czechoslovakia
Prior art keywords
transversal
optical system
electron microscope
compensation circuit
electromagnetic lens
Prior art date
Application number
CS402076A
Other languages
English (en)
Inventor
Stanislav Dobes
Vladimir Drahos
Radek Lukasek
Original Assignee
Stanislav Dobes
Vladimir Drahos
Radek Lukasek
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stanislav Dobes, Vladimir Drahos, Radek Lukasek filed Critical Stanislav Dobes
Priority to CS402076A priority Critical patent/CS181619B1/cs
Publication of CS181619B1 publication Critical patent/CS181619B1/cs

Links

CS402076A 1976-06-18 1976-06-18 Transversal scattering field compensation circuit of electromagnetic lens in electron microscope optical system CS181619B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CS402076A CS181619B1 (en) 1976-06-18 1976-06-18 Transversal scattering field compensation circuit of electromagnetic lens in electron microscope optical system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS402076A CS181619B1 (en) 1976-06-18 1976-06-18 Transversal scattering field compensation circuit of electromagnetic lens in electron microscope optical system

Publications (1)

Publication Number Publication Date
CS181619B1 true CS181619B1 (en) 1978-03-31

Family

ID=5381971

Family Applications (1)

Application Number Title Priority Date Filing Date
CS402076A CS181619B1 (en) 1976-06-18 1976-06-18 Transversal scattering field compensation circuit of electromagnetic lens in electron microscope optical system

Country Status (1)

Country Link
CS (1) CS181619B1 (cs)

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