CS165252B1 - - Google Patents
Info
- Publication number
- CS165252B1 CS165252B1 CS771969A CS771969A CS165252B1 CS 165252 B1 CS165252 B1 CS 165252B1 CS 771969 A CS771969 A CS 771969A CS 771969 A CS771969 A CS 771969A CS 165252 B1 CS165252 B1 CS 165252B1
- Authority
- CS
- Czechoslovakia
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD13616168 | 1968-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CS165252B1 true CS165252B1 (cs) | 1975-12-22 |
Family
ID=5480594
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CS771969A CS165252B1 (cs) | 1968-11-22 | 1969-11-24 |
Country Status (2)
| Country | Link |
|---|---|
| CS (1) | CS165252B1 (cs) |
| DE (1) | DE1934327A1 (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6064686A (en) * | 1999-03-30 | 2000-05-16 | Tfi Telemark | Arc-free electron gun |
-
1969
- 1969-07-07 DE DE19691934327 patent/DE1934327A1/de active Pending
- 1969-11-24 CS CS771969A patent/CS165252B1/cs unknown
Also Published As
| Publication number | Publication date |
|---|---|
| DE1934327A1 (de) | 1970-06-04 |