CS141985A1 - Zarizeni pro jednodeskove plazmochemicke leptani tenk.ych vrstev mikroelektronickych materialu - Google Patents

Zarizeni pro jednodeskove plazmochemicke leptani tenk.ych vrstev mikroelektronickych materialu

Info

Publication number
CS141985A1
CS141985A1 CS851419A CS141985A CS141985A1 CS 141985 A1 CS141985 A1 CS 141985A1 CS 851419 A CS851419 A CS 851419A CS 141985 A CS141985 A CS 141985A CS 141985 A1 CS141985 A1 CS 141985A1
Authority
CS
Czechoslovakia
Prior art keywords
vrstev
plazmochemicke
mikroelektronickych
leptani
jednodeskove
Prior art date
Application number
CS851419A
Other languages
Czech (cs)
Other versions
CS244071B1 (en
Inventor
Boris Ing Skrivan
Leos Hajek
Vaclav Vesely
Jiri Kucirek
Original Assignee
Boris Ing Skrivan
Leos Hajek
Vaclav Vesely
Jiri Kucirek
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boris Ing Skrivan, Leos Hajek, Vaclav Vesely, Jiri Kucirek filed Critical Boris Ing Skrivan
Priority to CS851419A priority Critical patent/CS244071B1/en
Publication of CS141985A1 publication Critical patent/CS141985A1/en
Publication of CS244071B1 publication Critical patent/CS244071B1/en

Links

CS851419A 1985-02-28 1985-02-28 Microelectronic materials' thin layers single-plate plasma-chemical etching device CS244071B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CS851419A CS244071B1 (en) 1985-02-28 1985-02-28 Microelectronic materials' thin layers single-plate plasma-chemical etching device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS851419A CS244071B1 (en) 1985-02-28 1985-02-28 Microelectronic materials' thin layers single-plate plasma-chemical etching device

Publications (2)

Publication Number Publication Date
CS141985A1 true CS141985A1 (en) 1985-08-15
CS244071B1 CS244071B1 (en) 1986-07-17

Family

ID=5348507

Family Applications (1)

Application Number Title Priority Date Filing Date
CS851419A CS244071B1 (en) 1985-02-28 1985-02-28 Microelectronic materials' thin layers single-plate plasma-chemical etching device

Country Status (1)

Country Link
CS (1) CS244071B1 (en)

Also Published As

Publication number Publication date
CS244071B1 (en) 1986-07-17

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