CN87210360U - Cathode conformal structure for high pressure ionization vacuum gauge - Google Patents
Cathode conformal structure for high pressure ionization vacuum gauge Download PDFInfo
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- CN87210360U CN87210360U CN 87210360 CN87210360U CN87210360U CN 87210360 U CN87210360 U CN 87210360U CN 87210360 CN87210360 CN 87210360 CN 87210360 U CN87210360 U CN 87210360U CN 87210360 U CN87210360 U CN 87210360U
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Abstract
The utility model relates to a novel cathode conformal structure for high pressure ionization vacuum gauges, which belongs to the vacuum technology. The utility model is mainly characterized in that a cathode is composed of the tungsten filaments which have appropriate elasticity, thinner filament diameter and more number of turns for straightening a spring; a nickel tube guiding rail for keeping the spring vertical and telescopic upwards and downwards, a current bypass structure which is composed of spiral silver filaments processed by burning hydrogen and annealing. The utility model solves the cathode conformal problem in the DL-8-shaped vacuum gauges, improves the measurement precision and prolongs the service life. The vacuum gauge is a measurement instrument with wide range and high pressure, and is widely used for vacuum equipment, particularly the film-plating equipment.
Description
This utility model belongs to the vacuum technique field.
The characteristics of existing DL-8 type High Voltage ionization vacuum ga(u)ge are to measure 1.33 * 10
2The low vacuum of handkerchief, its anode-cathode distance less (referring to Fig. 1) on electrode structure, and also precision prescribed is higher.Used negative electrode be the iridium wire electrophoresis of 0.15 millimeter of diameter with yittrium oxide, about 1000 ℃ of working temperature.Owing to expand with heat and contract with cold, negative electrode will have elongation and buckle when work, the geometric electrode structure is changed, and the numerical value of sensitivity is measured in influence.For addressing this problem, technology is the spring of end serial connection at negative electrode now, can be under different temperatures that negative electrode is stretching.Used spring is made by the tungsten filament of 0.5 millimeter of diameter, and two kinds of shapes are arranged: a kind of is to have only a circle, and stiff end is by side.Another kind is three left and right sides spiral coils, and stiff end in vertical direction (seeing accompanying drawing 2(a) and (b)).
DL-8 type High Voltage ionization vacuum ga(u)ge is about 3A by the electric current of negative electrode and spring at work, and (made to heat up degas) by other electrodes of cathode emission electron bombard can be raised to about 5A by the electric current of negative electrode and spring when electrode degassed.Owing to use the spring of 0.5 millimeter tungsten filament coiling of diameter in original technology, cause two shortcomings: (1) spring wire is thick, tension force is strong, negative electrode is during by big electric current, and middle part temperature highest point is easily broken, and (2) are though spring wire is slightly thick, but resistance coefficient is bigger, also can generate heat by the 3-5A electric current for a long time, spring wire annealing is followed the string, cause deformation of cathode to lose efficacy to hundreds of degree.According to use experience for many years both at home and abroad, above shortcoming is the main cause that influences DL-8 type High Voltage ionization vacuum ga(u)ge working life.
The purpose of this utility model is: (1) makes the elastic force appropriateness of spring, avoids breaking the possibility of negative electrode, can guarantee enough that again negative electrode is indeformable at work.(2) spring was both linked to each other with negative electrode, it is stretching, and the electric current that spring itself passes through can reduce to insignificant degree again, and the annealing that keeps from heat is followed the string.
Thought of the present utility model is to guarantee that the geometric electrode structure is constant in the DL-8 work, designs the negative electrode conformal structure that can prolong working life.
Concrete scheme is (referring to an accompanying drawing 3)
The spring structure feature: according to actual measurement, the required pulling force of stretching at work negative electrode is 150 grams, and considers that the vacuum system that comprises DL-8 in some practicality need be baked to 200-300 ℃ and select for use tungsten filament to make spring.Through detailed calculated, selected following major parameter:
Peak load P
2=150 grams
Outer diameter D=3 millimeter
Pitch t=1 millimeter
Number of turns n=9
Free travel s=2 millimeter
Material φ=0.3 millimeter tungsten filament
Take place when preventing spring upper end vertical moving crooked, spot welding one nickel pipe " guide rail " on fixed head, 1 millimeter of nickel bore, 6 ± 0.5 millimeters of length (seeing Sl among Fig. 3).
Current bypass architectural feature: flow through big electric current heating annealing at work for avoiding spring wire, weld the good bypass circuit of an electric conductivity in the spring lower end, require this bypass structure not influence the spring knee-action simultaneously.Through overtesting, selected spirality filamentary silver structure shown in sh in the accompanying drawing 3.Its major parameter is as follows:
4 millimeters of external diameters
1 millimeter of pitch
The number of turns 2
0.5 millimeter filamentary silver of material φ (through annealing in hydrogen atmosphere annealing)
According to calculating, the resistance of this filamentary silver bypass circuit has only the some thousandths of of spring (resistance coefficient of silver is very little), so the electric current that flows through on the spring is reduced to the some thousandths of (several milliamperes) of original numerical value, no longer heating annealing.In addition,, very big flexibility and plasticity are arranged, for the flexible not influence of spring through the filamentary silver of annealing in hydrogen atmosphere annealing in process.
This novel comparing with original structure has tangible advantage and good effect, and the tungsten filament diameter of new spring is thinner, and the number of turns is more, and its suitable elasticity is unlikelyly broken negative electrode.
The restriction that moves up and down nickel pipe " guide rail " of new construction medi-spring upper end prevents to tilt to cause negative electrode that lateral displacement is arranged.
Increased the filamentary silver bypass circuit in the new construction, made the electric current of the spring of flowing through reduce 1,000 times, avoided followed the string by thermal annealing and causing guarantor's type of negative electrode to lose efficacy.
There is a basic contradiction in existing structure: for the spring appropriateness, need reduce the spring wire diameter and increase the number of coils; But, require the spring wire weak point again and thick (reducing resistance) for avoiding spring because of being subjected to thermal annealing by cathode current.The way of this novel employing by-pass current has solved this contradiction.
Because the certainty of measurement of DL-8 depends mainly on the geometry of its electrode, the good effect of above advantage is the certainty of measurement of the long-term DL-8 of maintenance and prolongs its working life.Obtain expert's favorable comment in this novel development.
The Figure of description explanation:
The core of Fig. 1 DL-8 type electrode structure
The K-negative electrode, 0.15 millimeter iridium wire of φ, electrophoresis one deck yittrium oxide on the surface
0.5 millimeter molybdenum filament of A-anode φ
The S-interpole, 0.5 millimeter molybdenum filament of φ
Two kinds of existing DL-8 cathode constructions of Fig. 2 (a) and (b)
K, A, the same Fig. 1 of S-
S
P0.5 millimeter tungsten filament of-spring φ
T-pole double as cathode current lead, 1 millimeter nickel bar of φ
B-transverse slat pedestal (fixing spring lower end) double as cathode current lead
18 * 4 * 0.5 millimeter
I-is by the electric current of negative electrode and spring
N-nickel weld tabs
This novel DL-8 negative electrode conformal structure of Fig. 3
K, A, S, T, I, the same Fig. 1 of N-, 2
The Sp-spring, 0.3 millimeter tungsten filament of φ
B-transverse slat pedestal (fixing spring lower end), double as cathode current lead
18 * 4 * 0.8 millimeter
Sh-bypass filamentary silver, 0.5 millimeter of φ, the overwhelming majority of cathode current will be by this bypass circuit, and does not pass through spring
Sl-nickel pipe " guide rail " guarantees that spring is vertically flexible up and down
Fig. 4 (a), (b), (c) new and old structure embodiment
(a), (b) existing structure effect
(c) the utility model effect
K, A, the same Fig. 1 of S-
Embodiment
Through using (measure and degas) repeatedly, (1) negative electrode can appear in old structure to interrupt, two kinds of phenomenons of (2) negative electrode flexural deformation, cause measuring lost efficacy, life termination (referring to accompanying drawing 4(a), (b)).Basis is novel then still to keep the negative electrode operate as normal, geometric electrode structure constant (referring to accompanying drawing 4(c)), the working life of DL-8 is prolonged.
Note
Existing DL-8 type High Voltage ionization vacuum ga(u)ge belongs to object of invention, once obtains third-class invention award of State Scientific and Technological Commission's nineteen eighty-three. From nineteen eighty-two to Japan outlet, be named as the WIK type in Japan. (the invention people is Guo Yuanheng) this novel cathode conformal structure will more be better than existing DL-8 type cathode construction.
Claims (4)
1, the negative electrode conformal structure in a kind of DL-8 type ionization vacuum ga(u)ge is characterized in that having the stretching spring of negative electrode of suitable elasticity, keeps spring flexible vertically " guide rail ", the current bypass structure.
2,, it is characterized in that the stretching spring of negative electrode directly is that 0.2-0.4 millimeter, the number of turns are that the tungsten filament that 6-10 encloses is formed by a silk according to the described negative electrode conformal structure of claim 1.
3, according to the described negative electrode conformal structure of claim 1, it is characterized in that keeping spring flexible vertically " guide rail " is that spot welding one nickel pipe is made on fixed head, and its internal diameter is 1 millimeter, and length is 6 ± 0.5 millimeters.
4, according to the described negative electrode conformal structure of claim 1, it is characterized in that the current bypass structure is by making through 0.5 millimeter filamentary silver of the spirality φ of annealing in hydrogen atmosphere annealing in process, its external diameter is the 3-5 millimeter, the number of turns is the 1-3 circle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 87210360 CN87210360U (en) | 1987-07-25 | 1987-07-25 | Cathode conformal structure for high pressure ionization vacuum gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 87210360 CN87210360U (en) | 1987-07-25 | 1987-07-25 | Cathode conformal structure for high pressure ionization vacuum gauge |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN87210360U true CN87210360U (en) | 1988-06-22 |
Family
ID=4825294
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 87210360 Withdrawn CN87210360U (en) | 1987-07-25 | 1987-07-25 | Cathode conformal structure for high pressure ionization vacuum gauge |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN87210360U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109900421A (en) * | 2019-03-13 | 2019-06-18 | 中国人民解放军国防科技大学 | Ionization gauge and system for measuring transient pressure of high-speed neutral air mass |
-
1987
- 1987-07-25 CN CN 87210360 patent/CN87210360U/en not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109900421A (en) * | 2019-03-13 | 2019-06-18 | 中国人民解放军国防科技大学 | Ionization gauge and system for measuring transient pressure of high-speed neutral air mass |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C15 | Extension of patent right duration from 15 to 20 years for appl. with date before 31.12.1992 and still valid on 11.12.2001 (patent law change 1993) | ||
| RN01 | Renewal of patent term | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |