CN85101185A - Screw vacuum pump - Google Patents
Screw vacuum pump Download PDFInfo
- Publication number
- CN85101185A CN85101185A CN85101185.3A CN85101185A CN85101185A CN 85101185 A CN85101185 A CN 85101185A CN 85101185 A CN85101185 A CN 85101185A CN 85101185 A CN85101185 A CN 85101185A
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- CN
- China
- Prior art keywords
- rotor
- flange
- working room
- cornerite
- vaccum pump
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- Expired - Lifetime
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/082—Details specially related to intermeshing engagement type pumps
- F04C18/084—Toothed wheels
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
Abstract
Screw vaccum pump comprises several housings and a pair of rotor, has so just constituted several working rooms, the part in these working rooms, and its volume will change when rotor rotation, and another part does not then change basically.Screw vaccum pump can utilize a single-stage pump and obtain 10
-1To 10
-4The pressure of holder promptly reaches rough vacuum or middle vacuum.
Description
The present invention relates to a kind of a closed container be found time to obtain the screw vacuum pump of vacuum therein.
Such as the oil sealing rotary pump, Roots's mechanical booster pump, jet pump and diffusion pump etc. all are that the acquisition pressure that uses at present is higher than 10
-4The middle vacuum of holder or all kinds of vacuum pumps of coarse vacuum.There are following point in the vacuum pump and the vacuum system of prior art:
(1) the operating pressure scope of vacuum pump is narrow, and the single vacuum pump can not be at 760-10
-4Work in the pressure range of holder.It can be the vacuum pump that carries out work under the atmospheric condition in back pressure that the oil sealing rotary pump is actually unique, and the vacuum pump of nearly all other classes can only back pressure be lower than 10 the holder conditions under work.When people want such as the CVD(chemical vapour sedimentation method) to obtain final presure in the semiconductor manufacturing facility such as chamber be 10
-4-10
-4During holder, just need to use the oil sealing rotary pump of twin-stage or use an oil sealing rotary pump and another one pump, such as Roots's mechanical booster pump.Figure 1 shows that an example of prior art vacuum system, wherein oil sealing rotary pump " 2 " is used as the main pump of the vacuum chamber of finding time " 1 ", has also used a mechanical booster pump " 3 " to obtain the pressure of expection with oil sealing rotary pump " 2 ".In this example, when the pressure values in the vacuum chamber " 1 " is high, when finding time, oil sealing rotary pump [2] starting need beat valve " 5 " and throttle down " 6 " and " 7 ", subsequently, when the holder of the pressure drop to 10 in the vacuum chamber " 1 " (mechanical booster pump can carry out work under this pressure) was following, valve " 6 " and " 7 " need be closed and open to valve " 5 ".Like this, can sequentially work one after another by means of oil sealing rotary pump " 2 " and mechanical booster pump evacuation is proceeded down.The vacuum system of this class prior art has following shortcoming: complex structure, cost height, the troublesome poeration of switching valve.
(2) be oil-overflow in the working room of oil sealing rotary pump, so just have a kind of danger, i.e. the backflow of oil molecule can reduce degree of vacuum or contaminated vacuum system.For avoiding taking place such problem, just need an oily trap " 4 " be installed between vacuum chamber " 1 " and oil sealing rotary pump " 2 " and enter in the vacuum chamber " 1 " to prevent oil molecule.This just makes the structure of vacuum system more complicated.Because chemistry is steaming equipment (CVD) and using reactant gas, for example the reasons such as active rule of hydride and gas will cause the decomposition of pumping fluid and go bad, and this just needs change old oil with fresh oil termly, and this maintenance work is required great effort expensive very much.
Target of the present invention is that the screw vacuum pump with a single-stage can use 10
-1-10
-4The pressure of holder.
Another target provides a kind of screw vacuum pump simple in structure, and can to obtain pressure range be 10
-2-10
-4The middle vacuum of holder.
Can realize that above-mentioned target outstanding feature of the present invention is that a male rotor and a female rotor are arranged in housing, their intermeshing screwed flange and helical groove can be fitted to each other and form many working rooms.The formation gas compression district that wherein has, thus promptly its volume will reduce with the rotation of negative and positive rotor and can compress and discharge gas.Wherein have plenty of transmission range, promptly when positive female rotor rotated, the volume of its working room was basically without any changing.A plurality of working rooms in gas compression district and a plurality of working rooms of transmission range have constituted many to the working room, and each has constituted each relevant volume of a plurality of helical grooves of a pair of and negative and positive rotor to the working room.
Figure 1 shows that the vacuum pump system view of a prior art;
Fig. 2 is a screw vacuum pump schematic representation of the present invention, and this figure provides the enlarged view of two rotors;
Fig. 3 is the stereogram of two rotors of screw vacuum pump shown in Figure 2, and shown is two rotors that are in the state of being engaged with each other;
Figure 4 shows that the relation curve of the mean free path of pressure and molecule;
Figure 5 shows that pumping speed and the relation curve that sucks pressure;
Figure 6 shows that a vacuum pump reaches 10 from barometric pressure
-4The strong institute of backing pressure work;
Figure 7 shows that the cross-section profile of a kind of embodiment of screw vacuum pump of the present invention;
Figure 8 shows that the sectional view of being got along Fig. 7 center line VIII-VIII;
Figure 9 shows that the sectional view of being got along Fig. 7 center line IX-IX;
Figure 10 shows that sectional view perpendicular to the rotor shaft of another embodiment of screw vacuum pump of the present invention;
Figure 11 shows that the major component of other embodiment of screw vacuum pump of the present invention
Before the embodiment that narration is chosen, earlier principle of the present invention is illustrated.
Figure 2 shows that the schematic representation of screw vacuum pump of the present invention.Male rotor among the figure " 11 " and female rotor " 12 " are engaged with each other.Pump shown in the figure is that the outer surface along negative and positive rotor " 11 " and " 12 " shows.Among Fig. 2, male rotor " 11 " and female rotor " 12 " differ a flange number each other, and the former has 5 flanges, and the latter has 6 flanges.The present invention is unqualified to the concrete number of negative and positive rotor, can make each rotor have arbitrary number flange by imagination.Figure 3 shows that the male rotor " 11 " and the female rotor " 12 " that are engaged with each other, the former has 4 flanges, and the latter has 6 flanges, and the difference of its number of flanges is 2.
Male rotor " 11 " and female rotor " 12 " are loaded in the housing " 13 ", end along its axial dimension is the intakeport " 14 " of gas, the other end is relief opening " 15 ", except two-port " 14 " and " 15 ", be packaged with rotor " 11 " and " 12 " in the housing " 13 ", gap between them is minimum, in order that constitute the V-arrangement working room between rotor " 11 ", " 12 " and housing " 13 ".
When rotor " 11 " and " 12 " rotation, relief opening " 15 " will be shifted to from intakeport " 14 " in the position that rotor " 11 " and " 12 " are meshed each other.The pressurized gas therein that the volume of working room " 16m " to " 20m " and " 16f " to " 20f " reduces.Working room " 21m ", " 22m ", " 21f " and " 22f " then continue transport gas simultaneously, and this is the constancy of volume owing to them, so gas is not compressed.
Working room " 23m " to " 26m " is connected with intakeport " 14 " with " 23f " to " 26f ".Because their volume will increase when rotor " 11 " and " 12 " rotate, thus can be by means of pumping action inspiration gas.
When using a screw type fluid machine, then do not need transmission range and only utilize air-breathing district and the district of calming the anger gets final product as gas compressor.For example, the oil free screw mechanism of qi has following technical feature: the cornerite φ of male rotor
M, the length L of 250 ° of male rotors is to its diameter D
MRatio, L/DM=1.25.Research to geometrical property clearly illustrates that, when utilizing air-breathing district and calm the anger the district, the cornerite of rotor can be less than 360 °, so, screw compressor is selected for use following numerical value: φ usually
M=200-300 °, L/DM=1.0-1.7.Working room shown in Fig. 2 and Fig. 3 " 16m " and " 16f " can pass through relief opening " 15 " exhaust, and the pressure in this chamber equals drain pressure and is the highest pressure of whole other working rooms.Gap and the end face of rotor " 11 " and " 12 " and gap housing " 13 " between and miss to adjacent working room " 17m " and " 17f " of a part of gas stream among working room " 16m " and " 16f " between the locular wall of the summit of each rotor helical-screw and housing " 13 ", another part gas leakage then arrives the surface of bottom through the engagement position K of rotor " 11 " and " 12 " from surface flow shown in Figure 2, promptly arrive the working room " 21m " of male rotor " 11 " side and the working room " 22f " of female rotor " 12 " side.Just as explained above like that, the cornerite of screw compressor rotor directly links to each other with intakeport " 14 " with " 22f " less than 360 ° thereby working room " 21m ".So the service behaviour of screw compressor will have very big variation according to the sealing effect at rotor " 11 " and " 12 " engagement position.For rotor " 11 " and " 12 " outside gap, the gas leakage of this part of flowing through is relatively few, this is because form many sealings position between intakeport " 14 " and relief opening " 15 ", male rotor as shown in Figure 2 " 11 " has 5 sealing positions, female rotor " 12 " then has 6 sealing positions, and male rotor as shown in Figure 3 " 11 " has 4 sealing position female rotors " 12 " that 6 sealing positions are then arranged again.
Just as explained above like that, a gas compressor has similar aspect with a vacuum pump from essence, but a very big difference is arranged between them.Here it is, and under vacuum condition, at pressure not simultaneously, the character of gas is different.
Figure 4 shows that the pressure of main component nitrogen molecular of air and the relation curve of its mean free path.When pressure reduced, the mean free path of molecule promptly increased, and when pressure drop to 1 was held in the palm, then mean free path was roughly 0.05mm.Each gap, position of screw vacuum pump is approximately 0.1 to 0.05mm, and this situation to screw compressor is similar, like this, and when pressure is reduced to from barometric pressure
During 1 holder, then the mean free path of gas molecule is less than the gap at each position of screw vacuum pump.So, can press viscous flow by the air-flow in these gaps and handle, this situation with screw compressor is identical.When pressure is lower than 1 holder, the mean free path of gas molecule is greater than the gap at each position, consequently air-flow becomes transition flow or Molecular flow, in these zones, the gas leakage molecule passes through each gap, position difficulty, consequently, screw vaccum pump only depends on and pounces on the gas molecule caught in this space and just can realize finding time acting on and transmitting effect.So, if have rotor as the transmission range that indicates A among Fig. 2 when a housing (opening of its two end is used for from suction side gas being drained into exhaust side) rotates, when the back pressure of exhaust side is 1 holder, then can obtain the characteristic curve of the pumping speed curve shown in the break line that is substantially similar among Fig. 5 again.
So the cornerite of the male rotor shown in Fig. 2 " 11 " increases to φ M=525 ° and (is φ shown in Fig. 3
M=650 °).So, in the working room between intakeport " 14 " and relief opening " 15 " 2 rotor engaged positions are arranged.
Can try to achieve the cornerite φ M that satisfies these requirements with following equation.
φ
M=360 ° * (flange number+1 of female rotor)/(the flange number of male rotor)+α
α is an angle of rotation in the formula, promptly female rotor from certain a moment (a certain working room communicates with relief opening) begin to rotate to another constantly (the volume vanishing of this working room) the angle of process.Its value is equal to or less than corresponding to female rotor spiral fluted angle
((360 °)/(the flange number of female rotor))
When the rotor that uses has when meeting above-mentioned equation cornerite and the pressure in working room " 16M " and " 16f " as barometric pressure, then the pressure values among working room " 21M " and " 22f " can be decreased to 1 holder, and locates to obtain 10 at intakeport " 14 "
-4The pressure of holder.So an available single-stage vacuum pump obtains 10
-4The final presure of holder.
When the cornerite φ of male rotor " 11 " M less than 525 °, or φ as shown in Figure 2
M=450 ° (among Fig. 3, φ
M=500 °) time, then the working room " 22f " of female rotor " 12 " will directly communicate with intakeport " 14 ", if but with-air-breathing housing the district that number designation " 27 " is identified is sealed, this working room " 22f " is no longer directly communicated with intakeport.
The upper limit of the angle that the end face of suction side female rotor " 12 " can be sealed as described above be one with the angle of the difference correlation of the flange number of female rotor " 12 " and male rotor " 11 "
(360 ° * (the flange number of the flange number-male rotor of female rotor)/(the flange number of female rotor))
Pressure among working room " 17m " and " 17f " is lower than the pressure among working room " 16m " and " 16f ", but far above the pressure among working room " 21m " and " 22f ".So for preventing that the gas leakage of " 23f " directly flows to intakeport " 14 " up to the working room from working room " 17m " and " 17f ", then rotor length can rise to break line place shown in Figure 2.
By the above is such, the cornerite that increases rotor can reduce air leakage and improve the vacuum pump characteristics with the number positional of the engagement that increases.But the size of pump will increase, and cost will improve, and the axial length of rotor increases the vibration problem that will produce axle.The cornerite that reduces rotor can reduce the size of vacuum pump and reduce cost, but pump characteristics will worsen.
Need to consider the vacuum pump characteristics, cost and size are determined the cornerite φ of rotor
φ M, L/DM and flange number.One of characteristics of the present invention are that each working room between intakeport and relief opening all has 2 to 3 sealing positions.
To stress these characteristics below.
(1) the sealing position can comprise first sealing position, and its handle is in the working room of breathing process and each working room of transmission range keeps apart.Also include second sealing position, it can be kept apart the working room of transmission range and each working room of calming the anger the district or be in exhaust process.The two all is made of first and second sealing positions the engagement position of two rotors.
(2) the sealing position includes, and constitutes first second and the 3rd sealing position that seals the position with second and constituted the working room before transition is the gas compression district of working room at transmission range.First sealing position is made of a housing, and it then is that engagement position by two rotors constitutes that second and the 3rd seal the position.Changing a kind of saying is, working room's (pressurized gas therein) in working room in the transmission range (suction gas and transport gas therein) and the compressing area all is positioned on certain arbitrarily selected spiral chute of rotor and constitutes a pair of working room, and each working room all is positioned on the spiral chute of rotor.When rotor rotated, this a pair of working room will moving axially along pump.Like this, the working room of transmission range promptly becomes working room's (when pump turns round, will compress and discharge gas) in gas compression district in this district, and will form new transmission range working room in intakeport one side.This process also is applicable to the working room that other are paired.The working room that constitutes by two rotors and housing, still (promptly and intakeport disconnect) during this period of time that be under the state of transmission range preferably was set between two times, a time is the time that compression and the working room that discharges gas begin to reduce few its volume, the time that another time communicates with relief opening for these working rooms.
When the difference of the flange number of two rotors is 2, then the working room that is positioned at next transmission range of two rotor engaged part, the transmission range working room that forms on each spiral chute of rotor communicates, the working room of like this, adjacent transmission range has promptly constituted the working room of single transmission range.That is to say, do not constitute though the transmission range of a sealing is not each spiral chute by rotor, but still can transmit.The working room in identical therewith is each gas compression district all has an end by housings close, and each working room in each gas compression district just can not communicate each other like this, and they are to form in each spiral chute of rotor by oneself.
Illustrate now a closed chamber that is full of atmosphere is found time to obtain 10
-4The strong required merit of bleeding of backing pressure.According to thermodynamic analysis, the required merit of compression variation is less than the merit of compression variation in not having in being not difficult to find.Having the represented merit of hatched area among Fig. 6, is from 110 with pressure
-4Holder is increased to the required merit of bleeding of 1 holder, and it is compared with the area that the has point of rupture merits of bleeding represented, that pressure is increased to 760 holders from 1 holder is quite little, so that can ignore.So, when with pressure from 10
Be not compress in needing when being increased to 1 holder.Yet if simultaneously pressure is when 1 holder is increased to 760 holders when compression in carrying out, the merit of bleeding can reduce widely.
An optimum implementation of the present invention can be illustrated by Fig. 7,8 and 9.
As shown, the female rotor " 32 " that has the male rotor " 31 " of 4 flanges and have 6 flanges serves as supporting with bearing " 35 ", " 36 ", " 37 " and " 38 " and rotates in main casing " 33 " and the air-breathing housing " 34 ".The cornerite of male rotor " 31 " is 650 °, and the cornerite of female rotor " 32 " approximately is 542 °.Under the condition of stable state running, the suction side pressure in rotor " 31 " and " 32 " is low, promptly 10
-4Holder, and be barometric pressure at the pressure of its exhaust side " 40 ", like this, the radial load that acts on rotor " 31 " and " 32 " suction side " 39 " is much smaller than the radial load that acts on exhaust side " 40 ".So, adopted bearing " 35 " and " 36 " of deep trouth ball bearing as suction side " 39 ", exhaust side " 40 " then adopted roller bearing as bearing " 37 " and " 38 " to bear radial load.Paired timing gear " 41 " and " 42 " respectively are contained on the end of axle of supporting rotor " 31 " or " 32 ", they be used to adjust two rotors " 31 " and " 32 " the gap so that they do not contact each other.Bearing " 35 " and " 36 " lubricated is to be splashed into the lubricant oil " 44 " that is contained in air-breathing lid " 43 " groove by means of timing gear " 41 " and " 42 " to realize.Simultaneously, garden dish " 45 " is housed with lubricating bearings " 37 " and " 38 " on the axle of male rotor " 31 ", like this, the lubricant oil " 44 " that garden dish " 45 " can will be contained in the exhaust cap " 43 ' " is splashed into bearing.In " 37 " and " 38 " to be lubricated.Shaft sealing " 46 ", " 47 ", " 48 " and " 49 " are used for preventing that the lubricant oil from bearing and timing gear from entering into the working room.The working room " 40 " and the exhaust cap " 43 ' " that are positioned at the exhaust side place of rotor " 31 " and " 32 " are under the atmospheric pressure basically, so it is quite little acting on the Sealing " 48 " of exhaust side and the pressure difference on " 49 ".Yet being positioned at the pressure of the working room " 39 " of suction side locating is 10
-4The holder level, so if air-breathing lid " 43 " is exposed in the atmosphere, then Zhou sealing will be difficult, this is that the shaft seal " 46 " of suction side is located in the position and the pressure on " 47 " has increased because act on.So, air-breathing lid " 43 " mutually passes to the pressure that reduces in air-breathing lid " 43 " with " 51 " with the working room " 52 " of low pressure or middle pressure by connecting tube " 50 ", so promptly can reduce the effect that the way that acts on shaft seal " 46 " and " 47 " pressure difference improves seal shaft.Because air-breathing lid " 43 " has been full of lubricant oil " 44 ",, an oil droplet isolation ward " 53 " enters in the working room by connecting tube " 50 " and " 51 " in order to prevent oil so being housed in air-breathing lid " 43 ".Oily trap " 54 " is housed in connecting tube " 50 " and " 51 ", is used to guarantee that unlubricated oil can enter among the working room.The connection mouth 56 that links to each other with main casing 33 is positioned on the such position, at this place, working room " 52 " is obstructed fully with intakeport " 55 ", like this just in case when lubricant oil flows in the working room by connecting tube " 50 " and " 51 ", lubricant oil can not be back in the intakeport " 55 " yet, the working room " 52 " of male rotor " 31 " has two engagement positions " 58 " and " 59 ", rotated to not with after intakeport " 55 " communicates in working room " 52 " at this two positions male rotor " 31 ", before communicating, be meshed simultaneously with female rotor " 32 " with relief opening " 57 ".Equally, a working room " 60 " of female rotor 32 has two engagement positions " 61 " and " 59 ", and herein, it is meshed with male rotor " 31 ".
When the rotation of rotor " 31 " and " 32 ", gas will be drawn in the working room that screwed flange and housing by rotor constitute by intakeport " 55 ", and by relief opening " 57 " discharge.Gas is being transmitted in working room " 52 " and " 60 ", and their volume remains unchanged.Yet, rotor " 31 " and " 32 " be further rotated formed working room " 62 " and " 63 ", back thus the volume that reduces them along with rotor rotation with gas compression, the gas temperature of while at exhaust side will raise.For tackling this situation, with coolant jacket " 64
α"-" 64
e" be installed on the exhaust side of housing " 33 ", cooling water by coolant jacket with cooling housing and the gas that compressed.
Figure 10 shows that another embodiment of the present invention, it is different with the embodiment shown in Fig. 7,8 and 9, and its female rotor " 32A " has 6 screwed flanges, and male rotor has 5 flanges.
Figure 11 shows that the major component of other another embodiment.Only its rotor is illustrated, because be similar shown in other parts and Fig. 7 and 8 herein.Vacuum pump at its suction side gas specific volume at the specific volume of exhaust side more greatly.So the pumping speed that increases vacuum pump just requires to increase air-breathing and the volume transport gas working room, reduces the volume of pressurized gas working room simultaneously.Among Figure 11, male rotor " 31B " and female rotor " 32B " each have air-breathing and transmission spiral chute " 65 " and " 66 ", compression spiral chute " 67 " and " 68 ".Air-breathing and the transmission spiral chute " 65 " and " 66 ", compare its rotor helical-screw angle φ with " 68 " with helical compression groove " 67 "
MAnd φ
FLess, and L/D is bigger.So, vacuum pump shown in Figure 11 both made with the measure-alike situation of vacuum pump shown in Figure 7 under, also have bigger pumping speed.
Above shown in and illustrated embodiment have 2 or 3 the sealing positions.Yet the present invention does not limit the number at these concrete sealing positions, according to the present invention, can have 3 or 4 sealing positions at whole operation process intermediate pump, and wherein two engagement positions by two rotors are constituted.Vacuum pump with 3 or 4 sealing positions will have the working room of pressurized gas and discharge gas.Air-transmitting first working room is adjacent to pressurized gas and exhaust work chamber by the sealing position, and these sealing positions are that the engagement position by two rotors constitutes.The sealing position that the engagement position of air-transmitting second working room by two rotors constituted is adjacent to the first transmission working room.Each working room is all on any the selected spiral chute between the intakeport and relief opening of vacuum pump, one of in two rotors.
Make each epitrochanterian spiral chute have two transmission working rooms and will reduce gas leak phenomenon, obtain higher degree of vacuum thus.
From the above mentioned as can be known, the oil-free vacuum pump according to certain embodiment formation according to the present invention has greatly improved pumping performance.So the vacuum pump that proposes according to the present invention can obtain from barometric pressure 10 by single step arrangement
-4Holder or from barometric pressure so large-scale expection pressure of vacuum to certain.
Adopt vacuum pump of the present invention, compare with the vacuum system of the prior art of forming with oil sealing rotary pump and mechanical booster pump that it is simple in structure, cost is low.It is simple in structure to adopt vacuum system simple in structure just might adopt, the control system that cost is low, because no longer need to carry out the system of complex operations, and open and close valve etc. for example.
Claims (19)
1, constituting of screw vaccum pump: have the male rotor (31) of many screwed flanges and groove and an axle, it can be around this axle rotation; Have many screwed flanges, the female rotor (32) of a groove and an axle, it can and be meshed with described male rotor around this rotation simultaneously all the time; Housing (33 and 34) constitutes one and is used to that the space of described two rotors is installed and has an intakeport (55) and a relief opening (57) that communicates with described space; In described two rotors each all have one with the position of described intakeport and the relevant cornerite in position of described relief opening, improvement wherein includes: by many working rooms that described rotor and described housing constituted, include many and intakeport and the two seal operation chamber that does not communicate of relief opening in these working rooms, described many seal operation include in the chamber, many working rooms (62 that its volume is reducing when two rotor rotations also keep engagement simultaneously each other, 63) and when rotor rotation and when being engaged with each other, many working rooms (52 that its volume remains basically unchanged, 60), described volume is the engagement position (58 by described two rotors to each other in the working room that remains unchanged basically with described volume that reduces, 59,61) isolated.
2, desired screw vaccum pump in the claim 1, the sealing position that it is characterized in that being positioned at an end of the working room that described volume remains unchanged basically is that an engagement position by two rotors constitutes, and the sealing position that is positioned at its other end is made of the shell body lumen wall in the face of the opposing end surface of two rotors.
3, desired screw vaccum pump in the claim 2 is characterized in that the screwed flange number of described male rotor and few 2 flanges and two grooves of spiral slot-number ratio female rotor.
4, desired screw vaccum pump in the claim 2 is characterized in that the screwed flange of described male rotor and spiral chute number are 4, and the screwed flange of described female rotor and spiral chute number then are 6.
5, desired screw vaccum pump in the claim 3 is characterized in that the screwed flange of described male rotor and spiral chute number are 4, and the screwed flange of described female rotor and spiral chute number then are 6.
6, desired screw vaccum pump in the claim 1 is characterized in that the cornerite of the flange of described male rotor can be represented by following formula:
φ
M=360 ° * (flange number+1 of female rotor)/(the flange number of male rotor)+α
In the formula, α is the angle of swing of rotor, it communicates with relief opening from-working room for rotor a certain moment this working room the volume vanishing another end the angle that is turned over constantly.
7, desired screw vaccum pump in the claim 6, the cornerite that it is characterized in that the male rotor flange is 650 °, the cornerite of female rotor flange then makes female rotor and male rotor intermesh.
8, desired screw vaccum pump in the claim 1, the cornerite φ M that it is characterized in that described male rotor flange are less than 650 °, and the cornerite of female rotor flange then makes female rotor and male rotor intermesh.
9, desired screw vaccum pump in the claim 4 is characterized in that the cornerite φ of described male rotor flange
MLess than 650 °, and the cornerite of female rotor flange can intermesh female rotor and male rotor.
10, desired screw vaccum pump in the claim 9 is characterized in that the cornerite φ of described male rotor flange
MApproximate 600 ° greatly.
11, screw vaccum pump includes: one has many screwed flanges and groove and one male rotor, and it can rotation on described axle; One female rotor with many screwed flanges and groove and, it can rotation on described axle, simultaneously and described male rotor keep engagement; The many protruding numbers of the flange number of the more described male rotor of flange number of described female rotor; Some housings, it has the described rotor space of can packing into, and has an intakeport and a relief opening to communicate with described space, and improvement wherein comprises:
Many working rooms have been constituted by described two rotors and housing, include many seal operation chambers that do not communicate with intakeport and relief opening in the described working room, a described spiral chute of described each rotor has two described seal operation chambers at least and is positioned on each described spiral chute, just there is one to be such working room at least two described seal operation chambers, when two rotor rotations also are meshed simultaneously each other, its volume will change, remaining working room is such working room at least two described seal operation chambers, when described two rotors rotate, its volume is constant basically, when the rotation of described two rotors the described seal operation chamber of its volume-variation and when described two rotors rotate the constant substantially described seal operation chamber of its volume be that engagement position by described two rotors is spaced apart from each other.
12, the desired screw vaccum pump of claim 11, it is characterized in that described many working rooms that the spiral chute by rotor constitutes are paired working rooms, one of them is when rotor rotates, the working room that its volume changes, and another is when rotor rotates, the working room that its volume remains unchanged basically.
13, desired screw vaccum pump in the claim 11, a sealing position that it is characterized in that being positioned at working room's one end that described volume remains unchanged substantially is that one of engagement position by two rotors forms, and is formed by the shell body lumen wall of the opposing end surface of facing two rotors at a sealing position of its opposite end.
14, desired screw vaccum pump in the claim 12, a sealing position that it is characterized in that being positioned at working room's one end that described volume remains unchanged substantially is that one of engagement position by two rotors forms, and is formed by the chamber wall of facing two rotor opposing end surfaces at a sealing position of opposite end.
15, desired screw vaccum pump in the claim 12, it is characterized in that the screwed flange of male rotor and groove number be 5 and female rotor be 6.
16, desired screw vaccum pump in the claim 12 is characterized in that the cornerite φ of described male rotor flange
MCan represent by following formula:
φ M=360 ° * (screwed flange number+1 of female rotor)/(the screwed flange number of male rotor)+α
In the formula, α is the angle of rotation of rotor, and its rotor is from a certain moment, promptly moment of communicating with relief opening of a working room to another constantly, i.e. the angle that the moment turned over of the volume vanishing of this working room.
17, desired screw vaccum pump in the claim 15 is characterized in that the cornerite φ of described male rotor screwed flange
MBe approximately 525 °, and the cornerite of the tooth of female rotor can intermesh female rotor and male rotor.
18, desired screw vaccum pump in the claim 15 is characterized in that the cornerite φ of male rotor screwed flange
MThan 525 ° little angles, the cornerite of this angle female rotor screwed flange in the angular range of the screwed flange of female rotor then makes female rotor and male rotor intermesh, described female rotor, its part at the end face of an air-breathing side is sealed by a described housing.
19, desired screw vaccum pump in the claim 18 is characterized in that the cornerite φ of male rotor screwed flange
MBe 450 °, and the cornerite of female rotor screwed flange can intermesh female rotor and male rotor.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27286084A JPS61152990A (en) | 1984-12-26 | 1984-12-26 | Screw vacuum pump |
| JP272860/84 | 1984-12-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN85101185A true CN85101185A (en) | 1986-07-23 |
| CN1005641B CN1005641B (en) | 1989-11-01 |
Family
ID=17519779
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN85101185.3A Expired CN1005641B (en) | 1984-12-26 | 1985-04-01 | Screw vacuum pump |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS61152990A (en) |
| CN (1) | CN1005641B (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1295437C (en) * | 2003-05-22 | 2007-01-17 | 于政道 | Loading automatic balancing double-helical-lobe refrigerating compressor |
| CN102575673A (en) * | 2009-07-10 | 2012-07-11 | 罗布斯基股份公司 | Dry screw driver |
| CN105673503A (en) * | 2014-11-25 | 2016-06-15 | 巫修海 | Screw of screw vacuum pump |
| CN107076152A (en) * | 2014-09-10 | 2017-08-18 | 阿特拉斯·科普柯空气动力股份有限公司 | Helical-lobe compressor element |
| CN107208640A (en) * | 2015-01-15 | 2017-09-26 | 阿特拉斯·科普柯空气动力股份有限公司 | Oil spout vacuum pump element |
| CN111345484A (en) * | 2020-03-11 | 2020-06-30 | 四川自立机械有限公司 | Energy-saving pressure-maintaining rotary valve |
| CN114439943A (en) * | 2022-02-09 | 2022-05-06 | 沈阳工业大学 | Spiral sealing structure and compressor |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0518382A (en) * | 1991-07-10 | 1993-01-26 | Ebara Corp | Screw vacuum pump |
| JP2537712B2 (en) * | 1991-07-10 | 1996-09-25 | 株式会社荏原製作所 | Screw type vacuum pump |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5924994B2 (en) * | 1976-01-05 | 1984-06-13 | 久光製薬株式会社 | Novel pyrido[2,3-d]-S-triazolo[4,3-c]pyrimidine derivatives |
| JPS58110889A (en) * | 1981-12-23 | 1983-07-01 | Hitachi Ltd | Screw compressor |
-
1984
- 1984-12-26 JP JP27286084A patent/JPS61152990A/en active Pending
-
1985
- 1985-04-01 CN CN85101185.3A patent/CN1005641B/en not_active Expired
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1295437C (en) * | 2003-05-22 | 2007-01-17 | 于政道 | Loading automatic balancing double-helical-lobe refrigerating compressor |
| CN102575673A (en) * | 2009-07-10 | 2012-07-11 | 罗布斯基股份公司 | Dry screw driver |
| CN102575673B (en) * | 2009-07-10 | 2015-12-16 | 嘉德纳丹佛有限责任公司 | Dry screw driver |
| CN107076152A (en) * | 2014-09-10 | 2017-08-18 | 阿特拉斯·科普柯空气动力股份有限公司 | Helical-lobe compressor element |
| CN107076152B (en) * | 2014-09-10 | 2019-05-03 | 阿特拉斯·科普柯空气动力股份有限公司 | Helical-lobe compressor element |
| CN105673503A (en) * | 2014-11-25 | 2016-06-15 | 巫修海 | Screw of screw vacuum pump |
| CN107208640A (en) * | 2015-01-15 | 2017-09-26 | 阿特拉斯·科普柯空气动力股份有限公司 | Oil spout vacuum pump element |
| CN107208640B (en) * | 2015-01-15 | 2019-03-08 | 阿特拉斯·科普柯空气动力股份有限公司 | Oil spout vacuum pump element |
| CN111345484A (en) * | 2020-03-11 | 2020-06-30 | 四川自立机械有限公司 | Energy-saving pressure-maintaining rotary valve |
| CN114439943A (en) * | 2022-02-09 | 2022-05-06 | 沈阳工业大学 | Spiral sealing structure and compressor |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1005641B (en) | 1989-11-01 |
| JPS61152990A (en) | 1986-07-11 |
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