CN2916619Y - Ultra high sensitivity continuous sine wave phase difference detector - Google Patents
Ultra high sensitivity continuous sine wave phase difference detector Download PDFInfo
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- CN2916619Y CN2916619Y CN 200620058657 CN200620058657U CN2916619Y CN 2916619 Y CN2916619 Y CN 2916619Y CN 200620058657 CN200620058657 CN 200620058657 CN 200620058657 U CN200620058657 U CN 200620058657U CN 2916619 Y CN2916619 Y CN 2916619Y
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Abstract
The utility model discloses a high-sensitivity continuous wave phase difference sensing device, which comprises: a current-voltage converting circuit, a front-embedded amplification circuit, a low pass filter circuit, a phase displacement circuit, a vibration amplification circuit, a vibration suppressing circuit, a phase difference sensing circuit, a band pass filter circuit, and a high-precision analog to digital conversion circuit. The product senses the phase difference quantity of two weak wave signals in analog ways. Related integrated circuit changes phase difference quantity into the corresponding voltage changing quantity. The utility mode has advantages of low producing cost, continuous sensing and conversion way, high sensitivity, and small vibration change impact of phase signals on the wave to be tested.
Description
Technical field
The utility model relates to a kind of super accurate signal measurement system, refers to a kind of superelevation susceptibility continous way string phase of wave potential difference arrangement for detecting especially, and how it can be widely used in the measurement and the detecting instrument of meter level, visits town's microscope and atomic force microscope as scanning.
Background technology
Previous phase-detection technology such as No. the 580573rd, TaiWan, China patent record, its arrangement for detecting need have two direct numerical digit compositors to produce two string ripple signals, cost is obviously higher, and only to adopt a central control unit to control the required string ripple of a Numerical Control type oscillator generation job different with the utility model.Secondly, the system architecture of No. 580573 patent of Taiwan patent there is no phase shifts device and the clamper that this case is carried, and therefore the mechanism of conversion can't be passed to the sensitive phasing degree of phase place, so the phase transition sensitivity of this case is relatively poor.Moreover, the signal of the described phase detectors output of this patent need pass through counter, again through microprocessor processes, beginning can obtain the phase differential signal, the technology that this and this case are carried only needs the signal behind the phase differential detector not need again through aforesaid counter, promptly be the phase place signal of analogy, tangible difference has been arranged.In addition, patent No. 580573 patent in Taiwan there is no the bandpass filter that this case is put forward, so as to the square wave amplitude of vibration composition in the filtering phase signal.Therefore the phase signal of this utility model still can be influenced by the amplitude of vibration of measured signal.
The utility model content
The purpose of this utility model is to provide a kind of superelevation susceptibility continous way string phase of wave potential difference arrangement for detecting, its can sensing how the physical quantity of meter level change, how to be widely used in the ultraprecise signal measuring equipment of the measurement of meter level; And its can analogy the phase differential change amount of the continuous detecting two faint string ripple signals of mode, the integrated circuit that collocation is relevant converts phase differential change amount to corresponding voltage change amount.
For achieving the above object, technical solution of the present utility model is:
A kind of superelevation susceptibility continous way string phase of wave potential difference arrangement for detecting is changed and the corresponding deformation of generation by external physical quantity as detecting a sense mechanism; It comprises:
One central control unit in order to the frequency of operation of decision sensor, and produces the required corresponding numerical digit controlling signal of this frequency of operation; This central control unit also changes in order to the continuous phase of monitoring sensor;
The actuator of one sensor and sensor are in order to produce the required characteristic frequency string ripple signal of sensor work; Above-mentioned numerical digit controlling signal feed-in Numerical Control type oscillator, the analogy string ripple signal of the characteristic frequency that the work of generation sensor is required is in order to drive sensor; Above-mentioned analogy string ripple signal also measures required reference signal as phase place;
Signal conversion, amplification and the wave filter of one sensing physical signalling carry out the conversion of suitable signal in order to the output string ripple signal with sensor, the signal amplitude of vibration amplifies, with the processing of signal noise filtering;
One phase shifts device carries out suitable phase shifts in order to the measurement string ripple signal with above-mentioned treated mistake;
One string ripple is to the converter of square wave, in order to the above-mentioned measurement string ripple signal of crossing through phase shifts is converted into the measurement square-wave signal; Be with reference to square-wave signal also in addition with above-mentioned reference chord ripple conversion of signals;
One phase differential detector with reference to square-wave signal and the phase differential that measures square-wave signal, and is converted to corresponding analogy output voltage signal with phase differential in order to detecting;
One bandpass amplifier is in order to carry out Filtering Processing to above-mentioned analogy output voltage signal;
One high precision analogy is to digital converter, in order to above-mentioned phase differential analogy output voltage signal is converted to corresponding numerical digit signal, and delivers to CPU (central processing unit) and carries out data analysis and monitoring.
The actuator of described sensor and sensor, comprise: with the required periodic wave signal of Numerical Control formula oscillator generation work of a ultra-high frequency resolution, and with this signal feed-in sensor, sensor is worked near the responsive best resonance frequency, and then sensor is for sensitivity the best of the change of external physical quantity.In addition, above-mentioned cycling signal also measures required reference signal as one.
Signal conversion, amplification and the wave filter of described sensing physical signalling comprise: the signal converter of a sensing physical signalling, amplifier and wave filter; Physical quantity that sensor sensed changed convert voltage signal to as electric current, sensor amplitude of vibration, resistance value, capacitance, magnetic force, electrostatic force, and this voltage signal is amplified observing, filtering circuit is then as the usefulness of electrical equipment, the filtering of environment noise.
Described phase shifts device comprises: a matching test is the phase shifts device cheaply, does suitable phase shifts in order to will measure the measurement signal that required reference signal and sensor sensed, to obtain the gain of best phase differential to voltage transitions.
Described string ripple to the converter of square wave comprises: a string ripple is to the change-over circuit of square wave, and in order to will periodically converting square-wave signal to reference to the measurement signal that measurement signal and sensor sensed, this part adopts diode and operational amplifier to realize.
Described phase differential detector comprises: a phase differential circuit for detecting, adopt the phase differential of multiplication theorem so as to the periodic square wave of detecting two feed-ins, and convert phase differential to voltage signal.
Described bandpass amplifier comprises: the logical amplifying circuit of a band, and in order to flip-flop filtering with the voltage signal of phase differential detector output.
Described high precision analogy to digital converter comprises: a high-precision analogy is to the digital converter circuit, in order to the bandpass filter processed voltage signal is converted to the decipherable numerical digit signal of computer.
After adopting such scheme, because the utility model includes: electric current is to voltage conversion circuit, pre-amplification circuit, low-pass filter circuit, phase shifts circuit, amplitude of vibration amplifying circuit, amplitude of vibration clamp circuit, phase differential circuit for detecting, and band pass filter circuit, high precision analogy are to digital converting etc.Its key property is the phase differential change amount of the continuous detecting two faint string ripple signals of mode that can analogy, and the integrated circuit that collocation is relevant converts phase differential change amount to corresponding voltage change amount.And advantage of the present utility model is that cost of manufacture is low, the detecting of continous way and conversion regime, for the phase change detecting highly sensitive, phase signal is minimum for the amplitude of vibration variable effect of string ripple to be measured.
Description of drawings
Fig. 1 is the utility model superelevation susceptibility continous way string phase of wave potential difference arrangement for detecting sketch;
Fig. 2 is the actuation circuit and the sensor calcspar of the utility model sensor;
Fig. 3 is the conversion of the utility model sensing signal, amplification and filtering circuit calcspar;
Fig. 4 is the utility model phase shifts circuit block diagram;
Fig. 5 is that the utility model string ripple is to the square wave conversion circuit calcspar;
Fig. 6 be the utility model phase differential detecting with the high precision analogy to the digital converting calcspar.
The main element symbol description
1 central control unit, 2 Numerical Control type oscillators
Actuator 4 sensors of 3 sensors
5 four-quadrant optical detectors, 6 electric currents are to electric pressure converter
7 prime amplifiers, 8 low-pass filters
9 first phase-shifters, 10 second phase-shifters
11 first amplifiers, 12 first clampers
13 second amplifiers, 14 second clampers
15 the 3rd amplifiers 16 the 3rd clamper
17 the 4th amplifiers 18 the 4th clamper
19 phase differential detectors, 20 bandpass filter
21 high precision analogies are to digital converter
Embodiment
The utility model by sensing system can with how the physical quantity of meter level change the phase change that is caused and convert corresponding change in voltage to, by analyzing and the variation of observing this voltage signal, can instead push away the surface topography of testing sample, also or the change of the temperature of sensor periphery, humidity and pressure.
As Fig. 1-shown in Figure 6:
Numerical Control type oscillator 2 can directly produce by central control unit 1 control and detect required characteristic frequency string ripple signal, this string ripple signal is on the one hand as the reference signal of a measurement usefulness, and the actuator 3 of also this signal being delivered to sensor on the other hand is so as to activating sensor 4.The more previous technological merit of this mode is that control mode is simpler, only needs a Numerical Control oscillator to finish, and cost is lower.
Sensor 4 external physical quantitys change the change of the measurement string wave phase that causes as the deformation that influence produced of factors such as temperature, pressure, humidity, acting force.This sensing apparatus range of application is wider, and the how meter level that can measure more physical quantity than prior art changes, and how being not limited to, the pattern of meter level detects.
The low-pass filter 8 that the utility model technology is carried, the filtering in addition of the noise that the uncertain factor of sensor, electronic circuit, measurement surrounding enviroment can be introduced.This device there is no in the patent of having delivered to be addressed.
Frame of broken lines signal amplification partly by Fig. 1 can be processed into the consistent square-wave signal of amplitude of vibration with two string ripple signals to be measured in the mode of analogy with clamp device, therefore the amplitude of vibration that measures signal changes the output signal that can't have influence on phase differential detector 19, and in other words the phase differential of signal to be measured is measured in the only synchronous and complete conversion of the signal of phase differential detector 19 output.Technology that this is a part of and idea are the center of gravity of technology that this case is carried, and the patented technology of before having delivered there is no the technology that this signal is handled.
Because the principle of the multiplier that phases difference detector 19 adopts is carried out the conversion of phase place, the first phase shift device 9 that the utility model proposed and second phase-shifter 10 can all carry out reference signal and signal to be measured the phase shifts of correspondence, the quiet phase differential that makes two signals to be measured is 0 degree, 90 degree, 180 degree and 270 degree, then the change of phase differential and corresponding voltage can get maximum converting sensitivity.This a part of technology also is the center of gravity of technology that this case is put forward, and the patented technology of before having delivered there is no the method that this signal is handled.
With above-mentioned reference signal and measured signal feed-in first amplifier 11, first clamper 12, second amplifier 13, second clamper 14, the 3rd amplifier 15, the 3rd clamper 16, the 4th amplifier 17 and the 4th clamper 18 respectively, promptly can produce two and reference signal and the corresponding square-wave signal of measured signal.Above-mentioned two square-wave signals after phase shifts and clamper are handled are delivered to the voltage signal that phase differential detector 19 shown in Figure 1 promptly can convert the phase differential signal of two square waves to analogy.This a part of phase difference detection technology adopts the principle of signal multiplication with the acquisition phase differential, also with the patented technology of having delivered tangible difference is arranged.
The bandpass filter 20 that this case proposed can be with the flip-flop of the output signal of input signal that is phase detector that is the part filtering that string ripple amplitude of vibration is caused, in addition can also be with the noise filtering of high frequency.That is through the phase differential of the signal of this bandpass filter 20 output with complete reaction two string ripples to be measured.The notion that this signal is handled was not also addressed in the relevant patent of having delivered.
As shown in Figure 1, with above-mentioned member, when manipulating enforcement:
The controlling signal that is produced numerical digit by central control unit 1 produces the string ripple signal f of characteristic frequency so as to control N Numerical Control oscillator 2
Excite(t); And
With this f
Excite(t) signal is delivered to first phase-shifter 9, carries out suitable phase shifts; And
With this f
Excite(t) signal is delivered to the actuator 3 of sensor so as to driving sensor 4; And
When measuring sensor 4 in running, be subjected to external physical quantity to change the deformation that is produced, this deformation will change in the displacement that four-quadrant optical detector 5 produces correspondence, this displacement changes will produce corresponding electric current change in the output of four-quadrant optical detector 5, this electric current that measures is changed through electric current to electric pressure converter 6, promptly can convert the physical quantity change that sensor measured to corresponding voltage signal; And
This voltage signal feed-in low-pass filter 8 after prime amplifier 7 amplifies can be obtained a measurement signal f
m(t); And
To measure signal f
m(t) feed-in first phase-shifter 9 can get a phase place and f after first amplifier 11, first clamper 12, second amplifier 13 and second clamper 14 are handled
m(t) unanimity and amplitude of vibration is fixed in C
mSquare-wave signal C
m(ω
0T+ θ
2+ Δ θ (t)); And
Reference signal f
Excite(t) feed-in second phase-shifter 10 can get a phase place and f after the 3rd amplifier 15, the 3rd clamper 16, the 4th amplifier 17 and the 4th clamper 18 are treated
Excite(t) unanimity and amplitude of vibration is fixed in f
ExciteSquare-wave signal f
Excite(ω
0T θ
1); And
With square-wave signal C
m(ω
0T+ θ
2+ Δ θ (t)) and f
Excite(ω
0T+ θ
1) send into phase differential detector 19, the two square-wave signal f that will import that promptly can be continuous
m(t) and f
Excite(t) microfacies potential difference converts corresponding voltage signal J (t) to.Can predict, sense the change of physical quantitys such as external stress, temperature, humidity when aforesaid sensor, will be in measuring signal f
m(t) produce corresponding phase change, voltage signal J (t) also with corresponding change; And
Voltage signal J (t) is sent into bandpass filter 20, promptly can carry out suitable signal and handle and the noise inhibition J (t); And
The output signal of bandpass filter 20 is delivered to high precision analogy to digital converter 21 analog signal of phase change can be converted to central control unit 1 decipherable digital signals, and deliver to computer and carry out data analysis.
Claims (8)
1, a kind of superelevation susceptibility continous way string phase of wave potential difference arrangement for detecting is changed and the corresponding deformation of generation by external physical quantity as detecting a sense mechanism; It is characterized in that it comprises:
One central control unit in order to the frequency of operation of decision sensor, and produces the required corresponding numerical digit controlling signal of this frequency of operation; This central control unit also changes in order to the continuous phase of monitoring sensor;
The actuator of one sensor and sensor are in order to produce the required characteristic frequency string ripple signal of sensor work; Above-mentioned numerical digit controlling signal feed-in Numerical Control type oscillator, the analogy string ripple signal of the characteristic frequency that the work of generation sensor is required is in order to drive sensor; Above-mentioned analogy string ripple signal also measures required reference signal as phase place;
Signal conversion, amplification and the wave filter of one sensing physical signalling carry out the conversion of suitable signal in order to the output string ripple signal with sensor, the signal amplitude of vibration amplifies, with the processing of signal noise filtering;
One phase shifts device carries out suitable phase shifts in order to the measurement string ripple signal with above-mentioned treated mistake;
One string ripple is to the converter of square wave, in order to the above-mentioned measurement string ripple signal of crossing through phase shifts is converted into the measurement square-wave signal; Be with reference to square-wave signal also in addition with above-mentioned reference chord ripple conversion of signals;
One phase differential detector with reference to square-wave signal and the phase differential that measures square-wave signal, and is converted to corresponding analogy output voltage signal with phase differential in order to detecting;
One bandpass amplifier is in order to carry out Filtering Processing to above-mentioned analogy output voltage signal;
One high precision analogy is to digital converter, in order to above-mentioned phase differential analogy output voltage signal is converted to corresponding numerical digit signal, and delivers to CPU (central processing unit) and carries out data analysis and monitoring.
2, superelevation susceptibility continous way string phase of wave potential difference arrangement for detecting as claimed in claim 1, it is characterized in that: the actuator of described sensor and sensor, comprise: with the required periodic wave signal of Numerical Control formula oscillator generation work of a ultra-high frequency resolution, and with this signal feed-in sensor, sensor is worked near the responsive best resonance frequency, and then sensor is for sensitivity the best of the change of external physical quantity.In addition, above-mentioned cycling signal also measures required reference signal as one.
3, superelevation susceptibility continous way string phase of wave potential difference arrangement for detecting as claimed in claim 1, it is characterized in that: signal conversion, amplification and the wave filter of described sensing physical signalling comprise: the signal converter of a sensing physical signalling, amplifier and wave filter; Physical quantity that sensor sensed changed convert voltage signal to as electric current, sensor amplitude of vibration, resistance value, capacitance, magnetic force, electrostatic force, and this voltage signal is amplified observing, filtering circuit is then as the usefulness of electrical equipment, the filtering of environment noise.
4, superelevation susceptibility continous way string phase of wave potential difference arrangement for detecting as claimed in claim 1, it is characterized in that: described phase shifts device comprises: a matching test is the phase shifts device cheaply, do suitable phase shifts in order to will measure the measurement signal that required reference signal and sensor sensed, to obtain of the gain of best phase differential to voltage transitions.
5, superelevation susceptibility continous way string phase of wave potential difference arrangement for detecting as claimed in claim 1, it is characterized in that: described string ripple to the converter of square wave comprises: a string ripple is to the change-over circuit of square wave, in order to will periodically converting square-wave signal to reference to the measurement signal that measurement signal and sensor sensed, this part adopts diode and operational amplifier to realize.
6, superelevation susceptibility continous way string phase of wave potential difference arrangement for detecting as claimed in claim 1, it is characterized in that: described phase differential detector comprises: a phase differential circuit for detecting, adopt the phase differential of multiplication theorem, and convert phase differential to voltage signal so as to the periodic square wave of detecting two feed-ins.
7, superelevation susceptibility continous way string phase of wave potential difference arrangement for detecting as claimed in claim 1, it is characterized in that: described bandpass amplifier comprises: the logical amplifying circuit of a band, in order to flip-flop filtering with the voltage signal of phase differential detector output.
8, superelevation susceptibility continous way string phase of wave potential difference arrangement for detecting as claimed in claim 1, it is characterized in that: described high precision analogy to digital converter comprises: a high-precision analogy is to the digital converter circuit, in order to the bandpass filter processed voltage signal is converted to the decipherable numerical digit signal of computer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620058657 CN2916619Y (en) | 2006-04-29 | 2006-04-29 | Ultra high sensitivity continuous sine wave phase difference detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620058657 CN2916619Y (en) | 2006-04-29 | 2006-04-29 | Ultra high sensitivity continuous sine wave phase difference detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2916619Y true CN2916619Y (en) | 2007-06-27 |
Family
ID=38187534
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200620058657 Expired - Fee Related CN2916619Y (en) | 2006-04-29 | 2006-04-29 | Ultra high sensitivity continuous sine wave phase difference detector |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2916619Y (en) |
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2006
- 2006-04-29 CN CN 200620058657 patent/CN2916619Y/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070627 |