CN2913392Y - Crystal pulling furnace - Google Patents
Crystal pulling furnace Download PDFInfo
- Publication number
- CN2913392Y CN2913392Y CN 200620091214 CN200620091214U CN2913392Y CN 2913392 Y CN2913392 Y CN 2913392Y CN 200620091214 CN200620091214 CN 200620091214 CN 200620091214 U CN200620091214 U CN 200620091214U CN 2913392 Y CN2913392 Y CN 2913392Y
- Authority
- CN
- China
- Prior art keywords
- crucible
- crystal
- furnace
- crystal pulling
- heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model relates to a crystal pulling furnace. The utility model is to solve the problems that the volume of the crystal produced by the crystal pulling furnace in the prior are is small. The crystal pulling furnace comprises a furnace body, a cooling water nozzle, a vacuum connection tube, a thermal shied, electrodes, a heater, a conducting bar, a large furnace cover, a small furnace cover, a crucible support bar, a crucible tray, a crucible, an upper thermal shied, a pulling motor, a fine adjustment slide track, and matted crystal. The utility model is characterized in that a feeding pipe is fixed on the large furnace cover, the lower end of the feeding pipe trends toward the upper opening of the crucible, the upper end of the feeding pipe is connected with a material container via a feeding corrugated pipe and valve; also a communicating pipe is disposed inside the material container and connected with a venting corrugated pipe disposed on the large furnace cover, and the lower end of the venting corrugated pip is led inside the furnace body. When the crystal fragments are melted in the crucible and the volume is decreased, the feeding can be implemented, so as to achieve the purpose of producing larger crystal with the same size crucible.
Description
[technical field]
The utility model relates to a kind of crystal crystal pulling furnace.
[background technology]
Existing crystal crystal pulling furnace is some crystal chunks to be packed into melt crystal pulling behind the crucible, because the crucible finite volume, institute's crystal chunk of adorning melts after the resulting crystal product volume of crystal pulling is also just smaller, does not often satisfy user's needs.
[summary of the invention]
The purpose of this utility model provides and a kind ofly after the crystal chunk fusing smaller volume, can continue the crystal crystal pulling furnace of filler when remaining space occurring in the crucible in crucible in crucible.
Above-mentioned purpose be achieved in that same as the prior art be that it also comprises body of heater, cooling water nozzle, vacuum adapter, thermoscreen, electrode, well heater, current conducting rod, big bell, little bell, crucible support stick, crucible pallet, crucible, goes up thermoscreen, lifts motor, fine setting slideway, sub-crystalline substance etc., different is that we are fixed on filling tube on the big bell on above-mentioned prior art basis, its lower end is led in crucible suitable for reading, and the upper end of filling tube is connected with material box by reinforced corrugated tube, valve; For keep in the material box with body of heater in the vacuum tightness balance, can be in material box the load siphunculus, communicating pipe is connected with ventilation corrugated tube on being contained in big bell, in the corrugated tube lower end feeding body of heater of ventilating.
The utility model has the advantages that when crystal chunk melts smaller volume in crucible and can feed in raw material on the fusing of margin limit, realize producing bigger crystalline purpose with onesize crucible.
[time figure explanation]
Accompanying drawing is a diagrammatic cross-section of the present utility model.
[embodiment]
With reference to accompanying drawing, it comprises body of heater 5, be welded with cooling water nozzle 12 and vacuum on the body of heater and take over 4, big bell 13 is contained on the body of heater, port lid 14 is contained on the big bell, thermoscreen 1 is housed in the body of heater, well heater 7 and current conducting rod 15 are housed on the electrode 11, current conducting rod is contained in big bell and port covers, crucible support stick 2 stands in the body of heater, its top is a crucible pallet 3, and crucible pallet top is a crucible 6, and the crucible top is to go up thermoscreen 9, lifting motor 21 is contained on the fine setting slideway 16, son brilliant 8 is contained in and lifts below the motor, and the brilliant lower end of son is stretched in the crucible, and the fine setting slideway is contained on the auxiliary facility during use; On above-mentioned prior art basis, we are fixed on filling tube 10 on the big bell, and its lower end is led in crucible suitable for reading, the upper end of filling tube by reinforced corrugated tube 20, valve 17 and the material box 18 above being positioned at big bell be connected; Also can be in material box load siphunculus 19, communicating pipe is connected with ventilation corrugated tube 22 on being contained in big bell, ventilation corrugated tube lower end feeds in the body of heater.
Claims (2)
1, the crystal crystal pulling furnace, comprise body of heater (5), cooling water nozzle (1 2), vacuum is taken over (4), big bell (13), little bell (14), thermoscreen (1), electrode (11), well heater (7), current conducting rod (15), crucible support stick (2), crucible pallet (3), crucible (6), last thermoscreen (9), lift motor (21), fine setting slideway (16), son brilliant (8), it is characterized in that filling tube (10) is fixed on the big bell, its lower end is led in crucible suitable for reading, and the upper end of filling tube is by reinforced corrugated tube (20), valve (17) is connected with the material box (18) that is positioned at big bell top.
2, according to the described crystal crystal pulling furnace of claim 1, it is characterized in that load siphunculus (19) in material box, communicating pipe is connected with ventilation corrugated tube (22) on being contained in big bell, and ventilation corrugated tube lower end feeds in the body of heater.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 200620091214 CN2913392Y (en) | 2006-05-31 | 2006-05-31 | Crystal pulling furnace |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 200620091214 CN2913392Y (en) | 2006-05-31 | 2006-05-31 | Crystal pulling furnace |
Publications (1)
Publication Number | Publication Date |
---|---|
CN2913392Y true CN2913392Y (en) | 2007-06-20 |
Family
ID=38167990
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 200620091214 Expired - Fee Related CN2913392Y (en) | 2006-05-31 | 2006-05-31 | Crystal pulling furnace |
Country Status (1)
Country | Link |
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CN (1) | CN2913392Y (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102443845A (en) * | 2011-12-31 | 2012-05-09 | 北京中晶华业科技有限公司 | Equipment for continuously producing single crystal |
CN102839428A (en) * | 2011-06-20 | 2012-12-26 | 浙江昱辉阳光能源有限公司 | Crystal growth furnace and furnace lid thereof |
CN103180493A (en) * | 2010-10-21 | 2013-06-26 | Sk新技术株式会社 | Process for growing silicon carbide single crystal and device for the same |
CN103374753A (en) * | 2012-04-19 | 2013-10-30 | 吴江亿泰光伏设备有限公司 | Large-size sapphire crystal growing furnace |
CN103774225A (en) * | 2013-03-28 | 2014-05-07 | 山东紫晶光电新材料有限公司 | Gem furnace body |
CN103774240A (en) * | 2013-03-28 | 2014-05-07 | 山东紫晶光电新材料有限公司 | Heating body connecting device for gem furnace |
CN104451892A (en) * | 2014-12-10 | 2015-03-25 | 上海汇淬光学科技有限公司 | Multistage graphite heating system of sapphire crystal growth equipment and using method of multistage graphite heating system |
CN105063747A (en) * | 2015-07-21 | 2015-11-18 | 李剑 | Liquid continuous feeding polysilicon casting equipment and production method thereof |
-
2006
- 2006-05-31 CN CN 200620091214 patent/CN2913392Y/en not_active Expired - Fee Related
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103180493A (en) * | 2010-10-21 | 2013-06-26 | Sk新技术株式会社 | Process for growing silicon carbide single crystal and device for the same |
CN103180493B (en) * | 2010-10-21 | 2016-08-17 | Sk新技术株式会社 | For the method and apparatus growing single-crystal silicon carbide |
CN102839428A (en) * | 2011-06-20 | 2012-12-26 | 浙江昱辉阳光能源有限公司 | Crystal growth furnace and furnace lid thereof |
CN102443845A (en) * | 2011-12-31 | 2012-05-09 | 北京中晶华业科技有限公司 | Equipment for continuously producing single crystal |
CN102443845B (en) * | 2011-12-31 | 2015-06-24 | 北京中晶华业科技有限公司 | Equipment for continuously producing single crystal |
CN103374753A (en) * | 2012-04-19 | 2013-10-30 | 吴江亿泰光伏设备有限公司 | Large-size sapphire crystal growing furnace |
CN103774225A (en) * | 2013-03-28 | 2014-05-07 | 山东紫晶光电新材料有限公司 | Gem furnace body |
CN103774240A (en) * | 2013-03-28 | 2014-05-07 | 山东紫晶光电新材料有限公司 | Heating body connecting device for gem furnace |
CN104451892A (en) * | 2014-12-10 | 2015-03-25 | 上海汇淬光学科技有限公司 | Multistage graphite heating system of sapphire crystal growth equipment and using method of multistage graphite heating system |
CN105063747A (en) * | 2015-07-21 | 2015-11-18 | 李剑 | Liquid continuous feeding polysilicon casting equipment and production method thereof |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
DD01 | Delivery of document by public notice | ||
DD01 | Delivery of document by public notice |
Addressee: Gao Dianbin Document name: Notification of Termination of Patent Right |
|
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070620 Termination date: 20130531 |