CN2910468Y - Horizontal large capacity plasma metal surface working apparatus - Google Patents
Horizontal large capacity plasma metal surface working apparatus Download PDFInfo
- Publication number
- CN2910468Y CN2910468Y CN 200620060601 CN200620060601U CN2910468Y CN 2910468 Y CN2910468 Y CN 2910468Y CN 200620060601 CN200620060601 CN 200620060601 CN 200620060601 U CN200620060601 U CN 200620060601U CN 2910468 Y CN2910468 Y CN 2910468Y
- Authority
- CN
- China
- Prior art keywords
- housing
- guide rail
- bearing tray
- processing device
- capacity plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Chemical Vapour Deposition (AREA)
- Plasma Technology (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
Abstract
The utility model provides a horizontal large capacity plasma metal surface working apparatus, relating to metal surface working apparatus field. The utility model comprises a laying cylinder housing; one end of the laying cylinder housing is closed and the other end of the laying cylinder housing is arranged with a sealing gate, wherein the lower inside of the housing is arranged with a base plate; the bade plate is arranged with a guide rail extended along the axial direction of the housing, the guide rail is arranged with a load-bearing tray which can move along the guide rail; the housing is provided with a suction-tube connected with a vacuum pump, the top of the housing is connected with a working air inlet tube, and the lower of the housing is connected with a working air outlet tube; the inner of the housing is provided with at least a group of electric heaters, a positive electrode plate is arranged inside the housing which is connected with the high frequency electrical source; the load-bearing tray is arranged with a negative electrode connecting base. The utility model has the advantages of simple structure, wide working range of products, and high efficacy.
Description
Technical field
The utility model relates to a kind of Treatment of Metal Surface device, refers in particular to a kind of horizontal big capacity plasma metallic surface processing device that is used for metal surface enhanced processing.
Background technology
Utilize plasma technique at metal surface deposition one deck BN-SiN ceramic reinforced layer, can improve metallic surface hardness, anti-wear performance, corrosion resistance etc. greatly, Chinese patent CN89103515.X has done sufficient explanation to this.But existing metal surface enhanced equipment all adopts the vertical structure of upper inverted bell formula lifting folding, the base plate of device is fixing disc-shape, because of base plate needs fixedly connected various pipelines, cable and detector, so base plate can not move, and simultaneously again as the placement location of workpiece, therefore, the kind of processing, shape, size are seriously limited.As the metal surface enhanced equipment of present use, its maximum effective diameter is 1000mm, and the profile full-size of single like this workpiece just must be less than square length of side 650mm in the circle.Simultaneously, traditional metal surface enhanced equipment, heater is arranged under the base plate, and heat conducts from lower to upper, and therefore, there is the big temperature difference top surface of workpiece and bottom surface, are unfavorable for the uniform deposition of gas phase in the workpiece process.
Summary of the invention
The utility model is the above-mentioned deficiency at prior art, and the horizontal big capacity plasma metallic surface processing device that a kind of range of work simple in structure, product is wide, effect is high is provided.
The purpose of this utility model is achieved in that a kind of horizontal big capacity plasma metallic surface processing device, comprise horizontally-arranged cylindrical shell, the wherein end sealing of housing, the other end is provided with hermatic door, wherein: the below, inside of described housing is provided with base plate, on base plate, be provided with along the axially extended guide rail of housing, on guide rail, be provided with the bearing tray that can move along guide rail; Housing is provided with the exhaust tube that is connected with vavuum pump, is connected with the working gas air inlet pipe in case top, is connected with the working gas escape pipe in lower housing portion; In housing, be provided with at least one group of electric heater, in housing, be provided with the positive electrode plate that is connected with high frequency electric source, on bearing tray, be provided with the negative electrode Connection Block.
Escape pipe the inner described in the above-mentioned horizontal big capacity plasma metallic surface processing device is connected with at least two air nozzles, can make the ejection of working gas more even.
Electric heater described in the above-mentioned horizontal big capacity plasma metallic surface processing device has three groups, is separately positioned on the bearing tray and two middle side part inwalls of housing, can guarantee being heated evenly of workpiece like this, the strengthening effect unanimity of guarantee fund's metal surface.
Bearing tray upper surface described in the above-mentioned horizontal big capacity plasma metallic surface processing device is good with rectangle.
The utility model compared with prior art has following advantage:
1. owing to adopt rail mounted push-and-pull bearing tray, can be outside stove clamping workpiece, avoided the inconvenience that clamping brings in stove of conventional apparatus workpiece, more help the crudy of workpiece.
2. adopt bearing tray can increase the area that workpiece is placed, under the constant substantially situation of stove inner capacities, the quantity of the small workpiece of processing equal volume can be improved 1.5～2 times, thereby reduce cost.
3. bearing tray is not subjected to the constraint of workpiece appearance and size, can the surface of big workpiece such as injection mold be processed.
4. after further improving, the heating source of device is pressed close to work piece more, and owing to adopted peripheral heating to make the workpiece top and the bottom apart from the thermal source equalization, helps uniform deposition.
5. because bearing tray is no longer born various fixedly connected tasks, put workpiece and can rise arbitrarily or descend, can distinguish processing to the top to the workpiece of some specific (special) requirements, range of application is more extensive.
Description of drawings
Below in conjunction with the embodiment in the accompanying drawing the utility model is described in further detail, but does not constitute any restriction of the present utility model.
Fig. 1 is the structural representation of a kind of specific embodiment of the utility model;
Fig. 2 is a cross section structure schematic diagram of the present utility model.
The specific embodiment
Consult Fig. 1, shown in Figure 2, horizontal big capacity plasma metallic surface processing device of the present utility model comprises horizontally-arranged cylindrical shell 1, the wherein end sealing of housing 1, and the other end is provided with hermatic door 2; Be provided with base plate 3 below the inside of housing 1, be provided with on base plate 3 along housing 1 axially extended guide rail 4, be provided with the bearing tray 5 that can move along guide rail 4 on guide rail 4, bearing tray 5 upper surfaces are rectangle, and work area is the most reasonable like this; Housing 1 is provided with the exhaust tube 6 that is connected with vavuum pump, is connected with working gas air inlet pipe 7 at housing 1 top, is connected with two in air inlet pipe 7 the inners and is spaced air nozzle 12; Be connected with the working gas escape pipe 8 that is connected with air exhauster in housing 1 bottom; Be provided with in housing 1 that 9, three groups of electric heaters 9 of three groups of electric heaters are separately positioned on the bearing tray 5 and two middle side part inwalls of housing 1; In housing 1, be provided with the positive electrode plate 10 that is connected with high frequency electric source, on bearing tray 5, be provided with negative electrode Connection Block 11.
When the utility model specifically uses, metal works to be processed be fixed on the bearing tray 5 and with negative electrode Connection Block 11 be connected, close can vacuumize behind the hermatic door 2, high-frequency discharge, feeding working gas, carry out the metal surface deposition process.
Claims (4)
1. horizontal big capacity plasma metallic surface processing device, comprise horizontally-arranged cylindrical shell (1), the wherein end sealing of housing (1), the other end is provided with hermatic door (2), it is characterized in that: the below, inside of described housing (1) is provided with base plate (3), be provided with on base plate (3) along the axially extended guide rail of housing (1) (4), being provided with on guide rail (4) can be along the mobile bearing tray (5) of guide rail (4); Housing (1) is provided with the exhaust tube (6) that is connected with vavuum pump, is connected with working gas air inlet pipe (7) at housing (1) top, is connected with working gas escape pipe (8) in housing (1) bottom; In housing (1), be provided with at least one group of electric heater (9), in housing (1), be provided with the positive electrode plate (10) that is connected with high frequency electric source, on bearing tray (5), be provided with negative electrode Connection Block (11).
2. horizontal big capacity plasma metallic surface processing device according to claim 1, it is characterized in that: described air inlet pipe (7) the inner is connected with at least two air nozzles (12).
3. horizontal big capacity plasma metallic surface processing device according to claim 1, it is characterized in that: described electric heater (9) has three groups, is separately positioned on the bearing tray (5) and two middle side part inwalls of housing (1).
4. horizontal big capacity plasma metallic surface processing device according to claim 1, it is characterized in that: described bearing tray (5) upper surface is a rectangle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620060601 CN2910468Y (en) | 2006-06-21 | 2006-06-21 | Horizontal large capacity plasma metal surface working apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620060601 CN2910468Y (en) | 2006-06-21 | 2006-06-21 | Horizontal large capacity plasma metal surface working apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2910468Y true CN2910468Y (en) | 2007-06-13 |
Family
ID=38132333
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200620060601 Expired - Fee Related CN2910468Y (en) | 2006-06-21 | 2006-06-21 | Horizontal large capacity plasma metal surface working apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2910468Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109455951A (en) * | 2018-12-24 | 2019-03-12 | 广东华联云谷科技研究院有限公司 | The plasma treatment appts and processing method of touch screen cover board |
-
2006
- 2006-06-21 CN CN 200620060601 patent/CN2910468Y/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109455951A (en) * | 2018-12-24 | 2019-03-12 | 广东华联云谷科技研究院有限公司 | The plasma treatment appts and processing method of touch screen cover board |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070613 Termination date: 20100621 |