CN2891269Y - Apparatus for insulation between ion source cathode, heating electron gun, and arc chamber - Google Patents
Apparatus for insulation between ion source cathode, heating electron gun, and arc chamber Download PDFInfo
- Publication number
- CN2891269Y CN2891269Y CNU2006200081758U CN200620008175U CN2891269Y CN 2891269 Y CN2891269 Y CN 2891269Y CN U2006200081758 U CNU2006200081758 U CN U2006200081758U CN 200620008175 U CN200620008175 U CN 200620008175U CN 2891269 Y CN2891269 Y CN 2891269Y
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- arc chamber
- ion source
- hole
- negative electrode
- groove
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Abstract
The utility model relates to a long life ion source of an ion implantation apparatus which belongs to a semiconductor device manufacture field, wherein, the apparatus comprises insulation among the ion source cathode, heat electron gun and the arc chamber. The arc chamber locating hole (4) for locate chamber, the arc chamber connecting hole (5) for connect chamber, a heat shield panel locating hole (6) for locate the heat shield panel, a filament bar fixed hole (2) for fix the filament bar are provided on the ceramic insulation block (1), creep-age groove (8) between the cathode and the filament bar is horizontal provided creep-age groove (3) between the two filament bars is equipped under the creep-age groove bilateral symmetry position. Creep-age groove (9) between the filament and the arc chamber which is a U type creep-age groove is vertically symmetry provided in the bottom creep-age groove (8) between the cathode and the filament bar, The device has the advantages of compact conformation, dependability, high temperature corrosion resisting, convenience attended operation structure, well function in insulation and anti-pollution.
Description
Technical field
The utility model relates to a kind of ion source of ion implantor, particularly a kind of at the ion source negative electrode, add seal long-life ion source between thermionic electron guns and the arc chamber, belong to field of manufacturing semiconductor devices.
Background technology
In the existing semiconductor integrated circuit manufacturing technology, it is reliable to require ion implantor to have a complete machine, function and features such as good stability, the high and low grit pollution of production efficiency, and these performances of ion implantor and ion source useful life and reliability and stability are closely related.
In the long-life ion source of having succeeded in developing, main feature is to adopt cathodes heated indirectly by an el to replace traditional hot filament cathode emission electronics.Because the special construction negative electrode can not directly be switched on and be added thermal electron, adopt a kind of new electron gun bombardment method target heating; Therefore this kind cathodes heated indirectly by an el long-life ion source is with respect to hot filament emitting electrons type ion source such as Man Yuan, Bei Nasi source in the fluorine in the past, relative complex structurally, it is withstand voltage upward except being retained in the anode voltage that adds 150V between negative electrode and the arc chamber to power, therefore the bias voltage that also need add 500V between heat filament and negative electrode guarantees that the mutual insulation of negative electrode in the ion source, heat filament and arc chamber seems extremely important; But because ion source is in the adverse circumstances such as high temperature ion sputtering, deep-etching gas attack for a long time, general ion source insulator was easy to be polluted by sputter after work a period of time, cause creepage and problem such as short circuit, be difficult to satisfy ionogenic long life and reliability and stability requirement.
Summary of the invention
The utility model is at withstand voltage high situation between electric relative complex and the parts in the existing long-life technology of ion source, simultaneously insulator is subjected to high temperature ion sputtering and gas attack effect and pollution problems easily, in the long-life ion source, use a kind of negative electrode of new structure, add mutually insulated device between thermionic electron guns and the arc chamber, this seal adopts resistant to elevated temperatures ceramic material, on structural design, take all factors into consideration structural compactness and increase the insulator creepage distance as far as possible, fully carry out simultaneously the location and the spacing design of each parts, solve after each parts work a period of time because the displacement variation issue that elevated temperature heat bulking effect and gas attack effect cause, the insulator service behaviour is steady in a long-term reliable, can satisfy ionogenic high reliability and long life requirement.
The utility model is achieved through the following technical solutions:
A kind of ion source negative electrode, add seal between thermionic electron guns and the arc chamber, one ceramic insulation piece is provided with location hole between the arc chamber that is used for locating between arc chamber, be used for connecting hole between arc chamber fixedly connected between arc chamber, be provided with the heat shield plate location hole that is used for the heat shield plate location, be provided with the stalk fixing hole, being used for left and right sides stalk fixes, be horizontally disposed with creepage groove between a negative electrode and stalk, downward by described creepage groove center symmetric position, creepage groove between one two stalk is set, on the two sides of ceramic insulation piece, be provided with a creepage groove of door font, i.e. creepage groove between filament and arc chamber along relevant position, creepage groove below between vertical symmetry position and described negative electrode and stalk.
The utility model can also be that purity that described ceramic insulation piece is a resistance to high temperature corrosion is the ceramic material more than 95%, and location hole is 2 between described arc chamber, and connecting hole is 2 between described arc chamber, and they are arranged side by side in first ranking and put; Described heat shield plate location hole is 2, and described heat shield plate is connected to 2, and they are arranged side by side the same horizontal level second row; Described stalk fixing hole is 4, and they are arranged on third and fourth ranking and put; Described each hole is a through hole, and the position in described all kinds of holes is all with the vertical centre axial symmetry of ceramic insulation piece.
The utlity model has following remarkable advantage:
1, compact conformation is reliable and stable, has thermal deformation resistant, the good characteristics of resistance to high temperature corrosion performance;
2, the structure attended operation is convenient;
3, insulation and anti-pollution creepage performance are good, the reliability height.
Description of drawings:
Fig. 1: expression the utility model a kind of ion source negative electrode, add an example structure schematic diagram of seal between thermionic electron guns and the arc chamber.
Fig. 2: the right view of presentation graphs 1.
Embodiment:
Below in conjunction with the drawings and specific embodiments the utility model is described further, but not as to qualification of the present utility model.
As shown in Figure 1, a kind of novel negative electrode, add that seal is a ceramic insulation piece 1 between thermionic electron guns and the arc chamber, it is provided with four left and right sides stalk fixing holes 2, creepage groove 3 between lamp stand, two are used for the location hole 4 of locating between ceramic insulation piece 1 and arc chamber, two are used for fixedlying connected hole 5 between ceramic insulation piece 1 and arc chamber, two location holes 6 that are used for heat shield plate location, two are used for the connecting hole 7 that is connected with heat shield plate, creepage groove 8 between negative electrode and filament, creepage groove 9 between filament and arc chamber, wherein: ceramic insulation piece 1 fixedly mounts left and right sides stalk respectively for the purity of resistance to high temperature corrosion is ceramic material more than 95%, heat shield plate; Two stalk fixing holes 2 install and fix two stalks respectively; Creepage groove 3 between two stalks increases creepage distance between two lamp stands; Location hole 4 is the relative positions between fixed negative pole and arc chamber between two ceramic insulation pieces 1 and arc chamber, does not make it that thermal deformation and change in displacement take place; Fixedly connected hole 5 fixedly connected collets 1 between ceramic insulation piece 1 and arc chamber; Relative position between heat shield plate location hole 6 fixed negative poles and filament does not make it that thermal deformation and change in displacement take place; The connecting hole 7 that is connected with heat shield plate is installed and is connected heat shield plate and negative electrode; Creepage groove 8 increases creepage distance between negative electrode and filament between negative electrode and stalk; As shown in Figure 2, creepage groove 9 increases creepage distance between filament and arc chamber between stalk and arc chamber.
Such ion source negative electrode, add between thermionic electron guns and the arc chamber seal structure and connect reliable and stable, have thermal deformation resistant, the good characteristics of resistance to high temperature corrosion performance, the structure attended operation is convenient simultaneously, insulation and anti-pollution creepage superior performance, good reliability, the reliability of assurance ion source long-term work.
Specific embodiment of the present utility model elaborates content of the present utility model.For persons skilled in the art, do not deviating from any conspicuous change of under the prerequisite of the utility model design it being done, can not exceed the protection range of the utility model application claims.
Claims (4)
1. ion source negative electrode, add seal between thermionic electron guns and the arc chamber, it is characterized in that: a ceramic insulation piece (1) is provided with location hole between the arc chamber that is used for locating between arc chamber (4), be used for connecting hole between arc chamber fixedly connected between arc chamber (5), be provided with the heat shield plate location hole (6) that is used for the heat shield plate location, be provided with stalk fixing hole (2), being used for left and right sides stalk fixes, be horizontally disposed with creepage groove (8) between a negative electrode and stalk, by described creepage groove (8) center symmetric position creepage groove (3) between one two stalk is set downwards, on the two sides of ceramic insulation piece, be provided with a creepage groove of door font along relevant position, creepage groove (8) below between vertical symmetry position and described negative electrode and stalk, i.e. creepage groove (9) between filament and arc chamber.
2, ion source negative electrode according to claim 1, add seal between thermionic electron guns and the arc chamber, it is characterized in that: described ceramic insulation piece (1) is a ceramic material more than 95% for the purity of resistance to high temperature corrosion.
3. ion source negative electrode according to claim 2, add seal between thermionic electron guns and the arc chamber, it is characterized in that: location hole between described arc chamber (4) is 2, and connecting hole between described arc chamber (5) is 2, and they are arranged side by side in first ranking and put; Described heat shield plate location hole (6) is 2, and described heat shield plate connecting hole (7) is 2, and they are arranged side by side the same horizontal level second row; Described stalk fixing hole (2) is 4, and they are arranged on third and fourth ranking and put; Described each hole is a through hole.
4. ion source negative electrode according to claim 3, add seal between thermionic electron guns and the arc chamber, it is characterized in that: the position in described all kinds of holes is all with the vertical centre axial symmetry of ceramic insulation piece (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2006200081758U CN2891269Y (en) | 2006-03-17 | 2006-03-17 | Apparatus for insulation between ion source cathode, heating electron gun, and arc chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2006200081758U CN2891269Y (en) | 2006-03-17 | 2006-03-17 | Apparatus for insulation between ion source cathode, heating electron gun, and arc chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2891269Y true CN2891269Y (en) | 2007-04-18 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2006200081758U Expired - Fee Related CN2891269Y (en) | 2006-03-17 | 2006-03-17 | Apparatus for insulation between ion source cathode, heating electron gun, and arc chamber |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2891269Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102956421A (en) * | 2011-08-22 | 2013-03-06 | 北京中科信电子装备有限公司 | Ion source filament and clamping device therefor |
| CN106935472A (en) * | 2015-12-30 | 2017-07-07 | 核工业西南物理研究院 | The shielding construction of binding nut filament support in a kind of ion source discharge room |
-
2006
- 2006-03-17 CN CNU2006200081758U patent/CN2891269Y/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102956421A (en) * | 2011-08-22 | 2013-03-06 | 北京中科信电子装备有限公司 | Ion source filament and clamping device therefor |
| CN106935472A (en) * | 2015-12-30 | 2017-07-07 | 核工业西南物理研究院 | The shielding construction of binding nut filament support in a kind of ion source discharge room |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |